WO2006043000A3 - Procede de transfert d'au moins un objet de taille micrometrique ou millimetrique au moyen d'une poignee en polymere - Google Patents

Procede de transfert d'au moins un objet de taille micrometrique ou millimetrique au moyen d'une poignee en polymere Download PDF

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Publication number
WO2006043000A3
WO2006043000A3 PCT/FR2005/050863 FR2005050863W WO2006043000A3 WO 2006043000 A3 WO2006043000 A3 WO 2006043000A3 FR 2005050863 W FR2005050863 W FR 2005050863W WO 2006043000 A3 WO2006043000 A3 WO 2006043000A3
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WIPO (PCT)
Prior art keywords
handle
micrometer
transferring
millimetre
face
Prior art date
Application number
PCT/FR2005/050863
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English (en)
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WO2006043000A2 (fr
Inventor
Marek Kostrzewa
Cioccio Lea Di
Marc Zussy
Original Assignee
Commissariat Energie Atomique
Marek Kostrzewa
Cioccio Lea Di
Marc Zussy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique, Marek Kostrzewa, Cioccio Lea Di, Marc Zussy filed Critical Commissariat Energie Atomique
Priority to EP05815527A priority Critical patent/EP1803152A2/fr
Priority to JP2007537349A priority patent/JP2008517474A/ja
Priority to US11/576,136 priority patent/US20080020547A1/en
Publication of WO2006043000A2 publication Critical patent/WO2006043000A2/fr
Publication of WO2006043000A3 publication Critical patent/WO2006043000A3/fr

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    • H01L24/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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Abstract

L'invention concerne un procédé de transfert d'au moins un objet (2) de taille micrométrique ou millimétrique vers un substrat de réception (4) au moyen d'une poignée (3) . Le procédé comprend les étapes suivantes : - fixation d'une poignée en polymère (3) sur ledit objet (2) afin de pouvoir obtenir une structure, constituée de la poignée (3) et de l'objet (2) superposés, déformable, - préparation de surface de la face de l'objet (2) opposée à la poignée (3) en vue de son adhésion sur une face du substrat de réception (4) , - mise en contact et adhésion de ladite face de l'objet (2) sur ladite face du substrat de réception (4) après déformation d'au moins la poignée (3) , - retrait de la poignée en polymère (3) .
PCT/FR2005/050863 2004-10-21 2005-10-18 Procede de transfert d'au moins un objet de taille micrometrique ou millimetrique au moyen d'une poignee en polymere WO2006043000A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP05815527A EP1803152A2 (fr) 2004-10-21 2005-10-18 Procede de transfert d'au moins un objet de taille micrometrique ou millimetrique au moyen d'une poignee en polymere
JP2007537349A JP2008517474A (ja) 2004-10-21 2005-10-18 ポリマーハンドルを用いてマイクロメートル級またはミリメートル級のサイズの少なくとも1つの対象物を運搬するための方法
US11/576,136 US20080020547A1 (en) 2004-10-21 2005-10-18 Method Of Transferring At Least One Object Of Micrometric Or Millimetric Size By Means Of A Polymer Handle

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0452393 2004-10-21
FR0452393A FR2877142B1 (fr) 2004-10-21 2004-10-21 Procede de transfert d'au moins un objet de taille micrometrique ou millimetrique au moyen d'une poignee en polymere.

Publications (2)

Publication Number Publication Date
WO2006043000A2 WO2006043000A2 (fr) 2006-04-27
WO2006043000A3 true WO2006043000A3 (fr) 2006-12-21

Family

ID=34949788

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Application Number Title Priority Date Filing Date
PCT/FR2005/050863 WO2006043000A2 (fr) 2004-10-21 2005-10-18 Procede de transfert d'au moins un objet de taille micrometrique ou millimetrique au moyen d'une poignee en polymere

Country Status (5)

Country Link
US (1) US20080020547A1 (fr)
EP (1) EP1803152A2 (fr)
JP (1) JP2008517474A (fr)
FR (1) FR2877142B1 (fr)
WO (1) WO2006043000A2 (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2773261B1 (fr) 1997-12-30 2000-01-28 Commissariat Energie Atomique Procede pour le transfert d'un film mince comportant une etape de creation d'inclusions
EP1891479B1 (fr) * 2005-05-10 2014-04-09 Dow Corning Corporation Lithographie par transfert de décalcomanies submicroniques
US8030132B2 (en) * 2005-05-31 2011-10-04 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of semiconductor device including peeling step
FR2925221B1 (fr) * 2007-12-17 2010-02-19 Commissariat Energie Atomique Procede de transfert d'une couche mince
FR2947098A1 (fr) * 2009-06-18 2010-12-24 Commissariat Energie Atomique Procede de transfert d'une couche mince sur un substrat cible ayant un coefficient de dilatation thermique different de celui de la couche mince
FR2975985B1 (fr) * 2011-05-30 2016-02-12 Univ Paris Sud 11 Procede pour la realisation de supports fonctionnels souples.
FR2993096B1 (fr) 2012-07-03 2015-03-27 Commissariat Energie Atomique Dispositif et procede de support individuel de composants
DE102014014422A1 (de) 2014-09-29 2016-03-31 Siltectra Gmbh Kombiniertes Waferherstellungsverfahren mit einer Löcher aufweisenden Aufnahmeschicht
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US20080020547A1 (en) 2008-01-24
EP1803152A2 (fr) 2007-07-04
WO2006043000A2 (fr) 2006-04-27
FR2877142B1 (fr) 2007-05-11
FR2877142A1 (fr) 2006-04-28

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