WO2006036383A3 - System and method of testing humidity in a sealed mems device - Google Patents
System and method of testing humidity in a sealed mems device Download PDFInfo
- Publication number
- WO2006036383A3 WO2006036383A3 PCT/US2005/029819 US2005029819W WO2006036383A3 WO 2006036383 A3 WO2006036383 A3 WO 2006036383A3 US 2005029819 W US2005029819 W US 2005029819W WO 2006036383 A3 WO2006036383 A3 WO 2006036383A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- property
- mems device
- determining
- relative humidity
- testing humidity
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0035—Testing
- B81C99/0045—End test of the packaged device
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/002—Investigating fluid-tightness of structures by using thermal means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
- G01M3/18—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/186—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
- G01M3/229—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators removably mounted in a test cell
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
- G01N31/22—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using chemical indicators
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007533474A JP2008518793A (en) | 2004-09-27 | 2005-08-22 | System and method for inspecting humidity in a sealed MEMS device |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US61356704P | 2004-09-27 | 2004-09-27 | |
US60/613,567 | 2004-09-27 | ||
US11/173,822 | 2005-07-01 | ||
US11/173,822 US7343080B2 (en) | 2004-09-27 | 2005-07-01 | System and method of testing humidity in a sealed MEMS device |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006036383A2 WO2006036383A2 (en) | 2006-04-06 |
WO2006036383A3 true WO2006036383A3 (en) | 2006-08-10 |
Family
ID=35583526
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/029819 WO2006036383A2 (en) | 2004-09-27 | 2005-08-22 | System and method of testing humidity in a sealed mems device |
Country Status (5)
Country | Link |
---|---|
US (4) | US7343080B2 (en) |
JP (2) | JP2008518793A (en) |
KR (2) | KR20070062585A (en) |
TW (1) | TW200627110A (en) |
WO (1) | WO2006036383A2 (en) |
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US7936497B2 (en) | 2004-09-27 | 2011-05-03 | Qualcomm Mems Technologies, Inc. | MEMS device having deformable membrane characterized by mechanical persistence |
US20070171083A1 (en) * | 2005-02-18 | 2007-07-26 | Kou Yuen-Foo M | Monitoring moisture inside a container |
FR2888832B1 (en) * | 2005-07-22 | 2007-08-24 | Commissariat Energie Atomique | PACKAGING AN ELECTRONIC COMPONENT |
WO2008082362A1 (en) * | 2006-12-28 | 2008-07-10 | Agency For Science, Technology And Research | Encapsulated device with integrated gas permeation sensor |
US20080191716A1 (en) * | 2007-02-08 | 2008-08-14 | International Business Machines Corporation | On-Chip Real-Time Moisture Sensor For and Method of Detecting Moisture Ingress in an Integrated Circuit Chip |
US7571637B2 (en) * | 2007-10-29 | 2009-08-11 | International Business Machines Corporation | Design structure for an on-chip real-time moisture sensor for and method of detecting moisture ingress in an integrated circuit chip |
US7852491B2 (en) * | 2008-03-31 | 2010-12-14 | Qualcomm Mems Technologies, Inc. | Human-readable, bi-state environmental sensors based on micro-mechanical membranes |
US7787130B2 (en) * | 2008-03-31 | 2010-08-31 | Qualcomm Mems Technologies, Inc. | Human-readable, bi-state environmental sensors based on micro-mechanical membranes |
US8077326B1 (en) | 2008-03-31 | 2011-12-13 | Qualcomm Mems Technologies, Inc. | Human-readable, bi-state environmental sensors based on micro-mechanical membranes |
US7787171B2 (en) * | 2008-03-31 | 2010-08-31 | Qualcomm Mems Technologies, Inc. | Human-readable, bi-state environmental sensors based on micro-mechanical membranes |
US8297125B2 (en) * | 2008-05-23 | 2012-10-30 | Honeywell International Inc. | Media isolated differential pressure sensor with cap |
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US8322225B2 (en) * | 2009-07-10 | 2012-12-04 | Honeywell International Inc. | Sensor package assembly having an unconstrained sense die |
US8711361B2 (en) * | 2009-11-05 | 2014-04-29 | Qualcomm, Incorporated | Methods and devices for detecting and measuring environmental conditions in high performance device packages |
CA2796515C (en) | 2010-04-16 | 2020-05-12 | Flex Lighting Ii, Llc | Front illumination device comprising a film-based lightguide |
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US20120053872A1 (en) * | 2010-08-26 | 2012-03-01 | Qualcomm Mems Technologies, Inc. | System and method for determining humidity based on determination of an offset voltage shift |
US9181086B1 (en) | 2012-10-01 | 2015-11-10 | The Research Foundation For The State University Of New York | Hinged MEMS diaphragm and method of manufacture therof |
JP2015049822A (en) * | 2013-09-04 | 2015-03-16 | ソニー株式会社 | Display control apparatus, display control method, display control signal generating apparatus, display control signal generating method, program, and display control system |
CN103712754B (en) * | 2013-12-31 | 2015-12-30 | 苏州宝骅机械技术有限公司 | The quantitative slip detection method of pressure system |
JP6291330B2 (en) * | 2014-04-11 | 2018-03-14 | アズビル株式会社 | Air pressure conversion device |
US9491558B2 (en) * | 2014-12-23 | 2016-11-08 | Robert Bosch Gmbh | Method for testing signal-to-noise ratio using a film frame |
FR3045821B1 (en) * | 2015-12-17 | 2018-11-23 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | DEVICE FOR DETECTING A LEAK IN A HERMETIC ENCLOSURE |
DE102016011046A1 (en) * | 2016-09-13 | 2018-03-15 | Albert-Ludwigs-Universität Freiburg | Device with integrated desiccant monitoring |
JP6553587B2 (en) * | 2016-12-20 | 2019-07-31 | Nissha株式会社 | Gas sensor module and method of manufacturing the same |
JP6846982B2 (en) * | 2017-05-08 | 2021-03-24 | 三菱電機株式会社 | Abnormality judgment method and abnormality judgment device |
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US11529583B2 (en) | 2019-11-13 | 2022-12-20 | Raytheon Company | Desiccant saturation level monitoring |
CN112067489A (en) * | 2020-09-04 | 2020-12-11 | 信利光电股份有限公司 | Test method and test device for display packaging protection adhesive |
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- 2005-08-22 KR KR1020077009656A patent/KR20070062585A/en not_active Application Discontinuation
- 2005-08-22 WO PCT/US2005/029819 patent/WO2006036383A2/en active Application Filing
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Also Published As
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US20080115569A1 (en) | 2008-05-22 |
KR20070062585A (en) | 2007-06-15 |
KR20070061562A (en) | 2007-06-13 |
US7623752B2 (en) | 2009-11-24 |
TW200627110A (en) | 2006-08-01 |
US7343080B2 (en) | 2008-03-11 |
WO2006036383A2 (en) | 2006-04-06 |
US20080115596A1 (en) | 2008-05-22 |
JP2008026876A (en) | 2008-02-07 |
US20060067645A1 (en) | 2006-03-30 |
US7570865B2 (en) | 2009-08-04 |
US8244092B2 (en) | 2012-08-14 |
JP2008518793A (en) | 2008-06-05 |
US20100024523A1 (en) | 2010-02-04 |
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