WO2006025064A3 - Embedded channels, embedded waveguides and methods of manufacturing and using the same - Google Patents

Embedded channels, embedded waveguides and methods of manufacturing and using the same Download PDF

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Publication number
WO2006025064A3
WO2006025064A3 PCT/IL2005/000938 IL2005000938W WO2006025064A3 WO 2006025064 A3 WO2006025064 A3 WO 2006025064A3 IL 2005000938 W IL2005000938 W IL 2005000938W WO 2006025064 A3 WO2006025064 A3 WO 2006025064A3
Authority
WO
WIPO (PCT)
Prior art keywords
waveguides
embedded
methods
channel
manufacturing
Prior art date
Application number
PCT/IL2005/000938
Other languages
French (fr)
Other versions
WO2006025064A2 (en
Inventor
Stanislav Stepanov
Shlomo Ruschin
Original Assignee
Univ Ramot
Stanislav Stepanov
Shlomo Ruschin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Ramot, Stanislav Stepanov, Shlomo Ruschin filed Critical Univ Ramot
Priority to US11/574,509 priority Critical patent/US7653281B2/en
Publication of WO2006025064A2 publication Critical patent/WO2006025064A2/en
Publication of WO2006025064A3 publication Critical patent/WO2006025064A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/121—Channel; buried or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/1219—Polymerisation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12195—Tapering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device

Abstract

Waveguide(s) (130) including at least partially buried channels) (120) within substrate(s) (100) having at least one substantially planar surface (110) are disclosed. According to some embodiments at least part of the channel (120) is located beneath at least a portion of the substrate (100). According to some embodiments the waveguide channel (120) includes a substantially transparent core (140) and optional cladding (160) extending through the channel (120). Alternately, an inner surface of the channel (120) is highly reflective. Furthermore, structures for use as waveguides (130) and/or as microchannels for fluid flow are disclosed herein. Also disclosed are production methods for such waveguides and said structures (130) and said structures, and methods of using such waveguides (130).
PCT/IL2005/000938 2004-09-02 2005-09-04 Embedded channels, embedded waveguides and methods of manufacturing and using the same WO2006025064A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US11/574,509 US7653281B2 (en) 2004-09-02 2005-09-04 Embedded channels, embedded waveguides and methods of manufacturing and using the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US60646704P 2004-09-02 2004-09-02
US60/606,467 2004-09-02

Publications (2)

Publication Number Publication Date
WO2006025064A2 WO2006025064A2 (en) 2006-03-09
WO2006025064A3 true WO2006025064A3 (en) 2006-08-10

Family

ID=36000440

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2005/000938 WO2006025064A2 (en) 2004-09-02 2005-09-04 Embedded channels, embedded waveguides and methods of manufacturing and using the same

Country Status (2)

Country Link
US (1) US7653281B2 (en)
WO (1) WO2006025064A2 (en)

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US7989322B2 (en) 2007-02-07 2011-08-02 Micron Technology, Inc. Methods of forming transistors
US8855316B2 (en) 2008-01-25 2014-10-07 Qinetiq Limited Quantum cryptography apparatus
GB0801395D0 (en) * 2008-01-25 2008-03-05 Qinetiq Ltd Network having quantum key distribution
GB0801408D0 (en) * 2008-01-25 2008-03-05 Qinetiq Ltd Multi-community network with quantum key distribution
GB0801492D0 (en) * 2008-01-28 2008-03-05 Qinetiq Ltd Optical transmitters and receivers for quantum key distribution
GB0809045D0 (en) 2008-05-19 2008-06-25 Qinetiq Ltd Quantum key distribution involving moveable key device
GB0809038D0 (en) 2008-05-19 2008-06-25 Qinetiq Ltd Quantum key device
GB0809044D0 (en) 2008-05-19 2008-06-25 Qinetiq Ltd Multiplexed QKD
GB0819665D0 (en) 2008-10-27 2008-12-03 Qinetiq Ltd Quantum key dsitribution
GB0822254D0 (en) * 2008-12-05 2009-01-14 Qinetiq Ltd Method of performing authentication between network nodes
GB0822253D0 (en) * 2008-12-05 2009-01-14 Qinetiq Ltd Method of establishing a quantum key for use between network nodes
GB0822356D0 (en) 2008-12-08 2009-01-14 Qinetiq Ltd Non-linear optical device
GB0917060D0 (en) 2009-09-29 2009-11-11 Qinetiq Ltd Methods and apparatus for use in quantum key distribution
DE102009048384A1 (en) * 2009-10-06 2011-04-07 Hochschule Regensburg Miniaturized online trace analysis
GB201020424D0 (en) 2010-12-02 2011-01-19 Qinetiq Ltd Quantum key distribution
JP5783741B2 (en) * 2011-02-09 2015-09-24 キヤノン株式会社 Solid-state imaging device and method for manufacturing solid-state imaging device
FR2980577B1 (en) * 2011-09-26 2013-09-20 Biomerieux Sa IN VITRO FLUORIMETRIC DETECTION AND / OR QUANTIFICATION SYSTEM
US8995800B2 (en) * 2012-07-06 2015-03-31 Teledyne Scientific & Imaging, Llc Method of fabricating silicon waveguides with embedded active circuitry
US9206526B2 (en) * 2013-05-23 2015-12-08 Stmicroelectronics, Inc. Method for the formation of nano-scale on-chip optical waveguide structures
US20150017774A1 (en) * 2013-07-10 2015-01-15 Globalfoundries Inc. Method of forming fins with recess shapes
US9653477B2 (en) * 2014-01-03 2017-05-16 International Business Machines Corporation Single-chip field effect transistor (FET) switch with silicon germanium (SiGe) power amplifier and methods of forming
US9059252B1 (en) * 2014-02-10 2015-06-16 International Business Machines Corporation Silicon waveguide on bulk silicon substrate and methods of forming
US9329647B2 (en) * 2014-05-19 2016-05-03 Microsoft Technology Licensing, Llc Computing device having a spectrally selective radiation emission device
US9385022B2 (en) * 2014-05-21 2016-07-05 Globalfoundries Inc. Silicon waveguide on bulk silicon substrate and methods of forming
US9678273B2 (en) * 2015-06-01 2017-06-13 International Business Machines Corporation Device for propagating light and method for fabricating a device
US9658400B2 (en) 2015-06-01 2017-05-23 International Business Machines Corporation Method for fabricating a device for propagating light
US10466514B1 (en) * 2018-11-06 2019-11-05 Globalfoundries Inc. Electro-optic modulator with vertically-arranged optical paths

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US5748358A (en) * 1996-06-14 1998-05-05 Sumitomo Osaka Cement Co., Ltd. Optical modulator with optical waveguide and traveling-wave type electrodes
US6226423B1 (en) * 1998-09-11 2001-05-01 Ngk Insulators, Ltd. Optical waveguide element
JP2001133743A (en) * 1999-08-20 2001-05-18 Sumitomo Osaka Cement Co Ltd Electrooptical element and its manufacturing method
US20040033001A1 (en) * 2000-09-18 2004-02-19 Hirotoshi Nagata Optical waveguide type optical modulator and production method therefor
WO2003065088A2 (en) * 2002-01-29 2003-08-07 Qinetiq Limited Multi-mode interfrence optical waveguide device
US20040061918A1 (en) * 2002-09-26 2004-04-01 Valerio Pruneri Electro-optic devices, including modulators and switches

Also Published As

Publication number Publication date
US20080317423A1 (en) 2008-12-25
WO2006025064A2 (en) 2006-03-09
US7653281B2 (en) 2010-01-26

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