WO2006020330A2 - Methods and apparatuses for imprinting substrates - Google Patents

Methods and apparatuses for imprinting substrates Download PDF

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Publication number
WO2006020330A2
WO2006020330A2 PCT/US2005/025806 US2005025806W WO2006020330A2 WO 2006020330 A2 WO2006020330 A2 WO 2006020330A2 US 2005025806 W US2005025806 W US 2005025806W WO 2006020330 A2 WO2006020330 A2 WO 2006020330A2
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WO
WIPO (PCT)
Prior art keywords
plate
sidewall
microtool
substrate
plates
Prior art date
Application number
PCT/US2005/025806
Other languages
French (fr)
Other versions
WO2006020330A3 (en
Inventor
Todd Biggs
Jeff Wienrich
Original Assignee
Intel Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corporation filed Critical Intel Corporation
Priority to DE112005001894T priority Critical patent/DE112005001894T5/en
Priority to JP2007524831A priority patent/JP2008509555A/en
Publication of WO2006020330A2 publication Critical patent/WO2006020330A2/en
Publication of WO2006020330A3 publication Critical patent/WO2006020330A3/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/02—Containers; Seals
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0014—Shaping of the substrate, e.g. by moulding
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0044—Mechanical working of the substrate, e.g. drilling or punching
    • H05K3/005—Punching of holes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73201—Location after the connecting process on the same surface
    • H01L2224/73203—Bump and layer connectors
    • H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/741—Apparatus for manufacturing means for bonding, e.g. connectors
    • H01L2224/743—Apparatus for manufacturing layer connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
    • H01L2224/92—Specific sequence of method steps
    • H01L2224/921—Connecting a surface with connectors of different types
    • H01L2224/9212—Sequential connecting processes
    • H01L2224/92122—Sequential connecting processes the first connecting process involving a bump connector
    • H01L2224/92125—Sequential connecting processes the first connecting process involving a bump connector the second connecting process involving a layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/153—Connection portion
    • H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09009—Substrate related
    • H05K2201/09036—Recesses or grooves in insulating substrate
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01—Tools for processing; Objects used during processing
    • H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
    • H05K2203/0108—Male die used for patterning, punching or transferring
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1189—Pressing leads, bumps or a die through an insulating layer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/15—Position of the PCB during processing
    • H05K2203/1572—Processing both sides of a PCB by the same process; Providing a similar arrangement of components on both sides; Making interlayer connections from two sides
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/107—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by filling grooves in the support with conductive material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/465—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits by applying an insulating layer having channels for the next circuit layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/22—Miscellaneous

Definitions

  • Embodiments of the invention relate generally to the field of microelectronic device fabrication and more specifically to methods and apparatuses for imprinting substrates to fabricate such devices.
  • a substrate core which may be a metal or an organic compound, has a layer of dielectric material disposed on one or both sides.
  • the dielectric material may be comprised of a thermal setting epoxy.
  • the dielectric layer may be applied as a flat sheet of thermal setting epoxy that is then imprinted to form traces.
  • the traces are then plated with a conductive material (e.g., copper) to form electrically conductive traces for the microelectronic device circuits. Subsequent layers and associated electronic circuitry are formed to complete the device.
  • FIG. IA illustrates a microtool in accordance with the prior art.
  • the microtool plates 105 are typically a thin metal (e.g., a 30 mil nickel plate) with raised and recessed portions 106 and 107, respectively.
  • the raised and recessed portions of the microtool are known as features and are typically about 50 - 70 microns from top to bottom.
  • Each plate of the microtool is held in place by a vacuum (not shown) and pressed into the thermal setting epoxy layers 110 disposed on the substrate core 115.
  • the epoxy layers are typically about 40 microns.
  • the recessed portions are filled with epoxy and the raised portions displace epoxy.
  • One disadvantage of such a scheme is that the epoxy material is not contained; that is, there is nothing to prevent or restrict the flow of the epoxy in an undesired manner.
  • the epoxy material is allowed to flow out. A slight tilt in the apparatus could cause the epoxy to flow in undesired amounts and locations.
  • the wetting properties of the epoxy material cause excess material to accumulate along the edge of the microtool plate, that is, the overflowing epoxy may build up around the edge of the plate causing a malformation of the desired features.
  • the microtool is comprised of thin plates
  • the plates when under pressure the plates flex particularly along the outer edges where there is less epoxy material to provide resistance. This inward flexing along the edges causes non-uniformity in the thickness of the epoxy layer. This causes the epoxy layer to be thinner than desired near the edges.
  • Figure IB illustrates an epoxy layer formed using a microtool in accordance with the prior art.
  • features 111 near the edge of epoxy layer 110 are malformed due to the flexing of the microtool plate.
  • the flexing may be so pervasive as to create a "dimple" 112 in substrate core 115.
  • the raised portions 106 act as a standoff for the microtool and can therefore dimple substrate core 115.
  • the excess forms along the edge of the substrate, thus causing a subsequent planarization process to take longer. Additionally, the excess material is not uniform and therefore makes it difficult to hold a vacuum during subsequent processes. Moreover, the excess material causes the substrate to stick to the microtool plate. Removing the substrate (e.g., prying it from the plate) can damage the plate.
  • Figure 1C illustrates the deformation of a microtool plate in accordance with the prior art.
  • plate 105 is deformed at edges 120. This deformation is due to repeated flexing of the plate, while imprinting an epoxy layer in which the epoxy has flowed in undesired amounts or locations.
  • Figure IA illustrates a microtool in accordance with the prior art
  • Figure IB illustrates an epoxy layer formed using a microtool in accordance with the prior art
  • Figure 1C illustrates the deformation of a microtool plate in accordance with the prior art
  • Figure 2 illustrates a microtool in accordance with one embodiment of the invention
  • Figure 2A illustrates a microtool in which one of two plates has a sidewall in accordance with one embodiment of the invention
  • Figure 3 illustrates a microtool having plates with sidewalls formed to contact the substrate core in accordance with one embodiment of the invention
  • Figure 4 illustrates a microtool having one or more vent holes formed therein to increase the flow of the dielectric material throughout the reservoir formed by the sidewalls in accordance with one embodiment of the invention
  • Figure 4A is a top-down view of a microtool plate having vent channels formed therein in accordance with one embodiment of the invention.
  • Figure 5 illustrates a process in which a microtool is formed in accordance with one embodiment of the invention.
  • FIG. 2 illustrates a microtool in accordance with one embodiment of the invention.
  • Microtool 200 shown in Figure 2, includes sidewalls 225a and 225b on plates 205a and 205b, respectively.
  • the sidewalls are integrally formed with the plates and made of the same material as the plates, which may be nickel or a nickel alloy. The sidewalls form a reservoir around the imprint pattern (i.e., the features) of the microtool plates.
  • sidewalls 225a and 225b are set to accommodate the thickness of substrate core 215 such that upon pressure being applied to the plates, the imprint pattern extends a desired amount into dielectric layers 210.
  • the dielectric layers 210 may be comprised of thermal setting epoxy, thermoplastic or other suitable material.
  • each of the sidewalls 225a and 225b extend beyond the imprint pattern; a distance equal to approximately one half of the thickness of the substrate core 215.
  • the sidewalls 225a and 225b contact each other. Because the sidewalls provide resistance one against the other, the amount of pressure applied is not as critical as in prior art schemes. For typically employed pressures, the edge of each plate will not flex due to the resistance created between sidewalls 225a and 225b. Additionally, in a closed or imprinting position, microtool 200 envelopes the entire substrate, thus the dielectric material cannot accumulate on the edge of the microtool plates nor can excess dielectric material form along the edge of the substrate. Moreover, tilting will not cause defective parts, as the dielectric material cannot flow as readily to undesired locations.
  • the sidewalls of the microtool are positioned such that upon imprinting, the entire substrate is encapsulated within the dielectric material. Such an embodiment will result in reduction or elimination of the substrate sticking to the microtool.
  • Various alternative embodiments of the invention reduce or eliminate flexing of the microtool plates along the edges, flow of the dielectric material to undesired locations due to tilt, and accumulation of excess dielectric material along the edges of the substrate, thus providing an imprinted substrate having a total thickness variation (TTV) of approximately 7 microns.
  • TTV total thickness variation
  • FIG. 2A illustrates a microtool in which one of two plates has a sidewall in accordance with one embodiment of the invention.
  • Microtool 200A shown in Figure 2A includes a sidewall 225 formed on the lower plate 205b.
  • Plate 205a does not include a sidewall.
  • the height of sidewall 225 is based upon the substrate core 215 such that upon pressure being applied to the plates, the imprint pattern extends a desired amount into the dielectric layers 210.
  • the microtool in accordance with one embodiment of the invention has sidewalls that contact each other during the imprinting process.
  • the height of the sidewalls is determined within strict tolerances to ensure that the sidewalls do not prevent the imprint pattern from properly contacting the dielectric layer.
  • FIG. 3 illustrates a microtool having plates with sidewalls formed to contact the substrate core in accordance with one embodiment of the invention.
  • Microtool 300 shown in Figure 3, includes sidewalls 325a and 325b on plates 305a and 305b, respectively. As shown in Figure 3, upon applying pressure to the plates, the sidewalls contact a substrate core 315. Each of the sidewalls 325a and 325b form a separate reservoir around the imprint pattern of each of the respective of the microtool plates, 305a and 305b.
  • the height of the sidewalls is approximately equal to the feature dimensions.
  • Such an embodiment allows for ease of manufacturing. However, because the sidewalls will contact the substrate core, stricter tolerances on the applied pressure are observed to avoid dimpling the substrate core or damaging circuits with the substrate core.
  • FIG. 4 illustrates a microtool having one or more vent channels formed therein to increase the flow of the dielectric material throughout the reservoir formed by the sidewalls in accordance with one embodiment of the invention.
  • microtool 400 has vent channels 430 formed in upper plate 405a.
  • the vent channels may be formed at any location on the plate and may be formed additionally or alternatively on lower plate 405b.
  • the dielectric material is less likely to flow into certain areas of the reservoir formed by the microtool plates. For example, the dielectric material is less likely to flow into the upper corners of the reservoir (i.e., the corners formed by the upper plate sidewalls).
  • the vent channels help the dielectric material from the dielectric layer 410 to flow into such areas within the reservoir.
  • the vent channels allow excess dielectric material to escape from the reservoir without accumulating on the substrate or the microtool plates.
  • Figure 4A is a top-down view of microtool plate 405a having vent channels 430 formed therein in accordance with one embodiment of the invention.
  • Figure 5 illustrates a process in which a microtool is formed in accordance with one embodiment of the invention.
  • Process 500 shown in Figure 5, begins with operation 505 in which the dimensions of a substrate are determined. The dimensions may include the substrate core thickness as well as the dielectric layer thickness and the dimensions of the features to be imprinted on the substrate.
  • the height of a sidewall for a microtool plate is determined based upon the substrate dimensions. For example, for a microtool as described above in reference to Figure 2, in which each sidewall will contact the sidewall of the opposing plate, the substrate core thickness as well as the feature dimensions are used to determine the sidewall height. For such an embodiment, the sidewall height for each plate is approximately equal to the feature height plus one half of the substrate core thickness. For a microtool as described in reference to Figure 3, the sidewall height for each plate is approximately equal to the feature height.
  • a microtool is formed having a sidewall of the determined height on at least one plate surrounding the imprint pattern. Additionally, one or both plates of the microtool may have vent channels formed therein to aid the flow of the dielectric material as discussed above in reference to Figures 4 and 4A.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Micromachines (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

A method and apparatus for imprinting substrates. One embodiment of the invention provides a microtool having a sidewall on one or both plates. The sidewalls help prevent excess dielectric material from forming on the microtool plates or the substrate. For one embodiment of the invention, each microtool plate has a sidewall formed thereon. Upon application of pressure, the sidewalls contact each other, thus reducing or eliminating flexing of the microtool plates.

Description

METHODS AND APPARATUSES FOR IMPRINTING SUBSTRATES
FIELD
[0001] Embodiments of the invention relate generally to the field of microelectronic device fabrication and more specifically to methods and apparatuses for imprinting substrates to fabricate such devices.
BACKGROUND
[0002] One of the processes of fabricating a microelectronic device is imprinting a substrate. Typically, a substrate core, which may be a metal or an organic compound, has a layer of dielectric material disposed on one or both sides. The dielectric material may be comprised of a thermal setting epoxy. The dielectric layer may be applied as a flat sheet of thermal setting epoxy that is then imprinted to form traces. The traces are then plated with a conductive material (e.g., copper) to form electrically conductive traces for the microelectronic device circuits. Subsequent layers and associated electronic circuitry are formed to complete the device.
[0003] Typically, the thermal setting epoxy layer is imprinted with an imprinting microtool. The conventional design of such microtools has many distinct disadvantages illustrated by Figures IA - 1C. [0004] Figure IA illustrates a microtool in accordance with the prior art. The microtool plates 105 are typically a thin metal (e.g., a 30 mil nickel plate) with raised and recessed portions 106 and 107, respectively. The raised and recessed portions of the microtool are known as features and are typically about 50 - 70 microns from top to bottom. Each plate of the microtool is held in place by a vacuum (not shown) and pressed into the thermal setting epoxy layers 110 disposed on the substrate core 115. The epoxy layers are typically about 40 microns. Upon application of pressure, the recessed portions are filled with epoxy and the raised portions displace epoxy. One disadvantage of such a scheme is that the epoxy material is not contained; that is, there is nothing to prevent or restrict the flow of the epoxy in an undesired manner. When pressure is applied to the microtool plates, the epoxy material is allowed to flow out. A slight tilt in the apparatus could cause the epoxy to flow in undesired amounts and locations. The wetting properties of the epoxy material cause excess material to accumulate along the edge of the microtool plate, that is, the overflowing epoxy may build up around the edge of the plate causing a malformation of the desired features.
[0005] Also, because the microtool is comprised of thin plates, when under pressure the plates flex particularly along the outer edges where there is less epoxy material to provide resistance. This inward flexing along the edges causes non-uniformity in the thickness of the epoxy layer. This causes the epoxy layer to be thinner than desired near the edges.
[0006] Figure IB illustrates an epoxy layer formed using a microtool in accordance with the prior art. As shown in Figure IB, features 111 near the edge of epoxy layer 110 are malformed due to the flexing of the microtool plate. The flexing may be so pervasive as to create a "dimple" 112 in substrate core 115. Additionally, the raised portions 106 act as a standoff for the microtool and can therefore dimple substrate core 115. [0007] This problem has been addressed with limited success by trying to gauge the amount of material so as to limit overflow. This has not proven very effective; when an insufficient amount of epoxy is used, the result is a defective part as described above. When an excessive amount of epoxy is used, the excess forms along the edge of the substrate, thus causing a subsequent planarization process to take longer. Additionally, the excess material is not uniform and therefore makes it difficult to hold a vacuum during subsequent processes. Moreover, the excess material causes the substrate to stick to the microtool plate. Removing the substrate (e.g., prying it from the plate) can damage the plate.
[0008] Over time, the repeated flexing of the microtool plates along the edges can cause the edges to become permanently deformed. Such deformation leads to defective substrate features and makes it difficult to maintain a vacuum on the plate.
[0009] Figure 1C illustrates the deformation of a microtool plate in accordance with the prior art. As shown in Figure 1C, plate 105 is deformed at edges 120. This deformation is due to repeated flexing of the plate, while imprinting an epoxy layer in which the epoxy has flowed in undesired amounts or locations. BRIEF DESCRIPTION OF THE DRAWINGS
[0010] The invention may be best understood by referring to the following description and accompanying drawings that are used to illustrate embodiments of the invention. In the drawings:
[0011] Figure IA illustrates a microtool in accordance with the prior art; [0012] Figure IB illustrates an epoxy layer formed using a microtool in accordance with the prior art;
[0013] Figure 1C illustrates the deformation of a microtool plate in accordance with the prior art;
[0014] Figure 2 illustrates a microtool in accordance with one embodiment of the invention;
[0015] Figure 2A illustrates a microtool in which one of two plates has a sidewall in accordance with one embodiment of the invention;
[0016] Figure 3 illustrates a microtool having plates with sidewalls formed to contact the substrate core in accordance with one embodiment of the invention; [0017] Figure 4 illustrates a microtool having one or more vent holes formed therein to increase the flow of the dielectric material throughout the reservoir formed by the sidewalls in accordance with one embodiment of the invention;
[0018] Figure 4A is a top-down view of a microtool plate having vent channels formed therein in accordance with one embodiment of the invention; and
[0019] Figure 5 illustrates a process in which a microtool is formed in accordance with one embodiment of the invention.
DETAILED DESCRIPTION [0020] In the following description, numerous specific details are set forth. However, it is understood that embodiments of the invention may be practiced without these specific details. In other instances, well-known circuits, structures and techniques have not been shown in detail in order not to obscure the understanding of this description. [0021] Reference throughout the specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the present invention. Thus, the appearance of the phrases "in one embodiment" or "in an embodiment" in various places throughout the specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. [0022] Moreover, inventive aspects lie in less than all features of a single disclosed embodiment. Thus, the claims following the Detailed Description are hereby expressly incorporated into this Detailed Description, with each claim standing on its own as a separate embodiment of this invention. [0023] Figure 2 illustrates a microtool in accordance with one embodiment of the invention. Microtool 200, shown in Figure 2, includes sidewalls 225a and 225b on plates 205a and 205b, respectively. For one embodiment of the invention, the sidewalls are integrally formed with the plates and made of the same material as the plates, which may be nickel or a nickel alloy. The sidewalls form a reservoir around the imprint pattern (i.e., the features) of the microtool plates. The dimensions of sidewalls 225a and 225b are set to accommodate the thickness of substrate core 215 such that upon pressure being applied to the plates, the imprint pattern extends a desired amount into dielectric layers 210. The dielectric layers 210 may be comprised of thermal setting epoxy, thermoplastic or other suitable material. For one embodiment of the invention, each of the sidewalls 225a and 225b extend beyond the imprint pattern; a distance equal to approximately one half of the thickness of the substrate core 215.
[0024] Upon pressure being applied to the plates 205a and 205b, the sidewalls 225a and 225b contact each other. Because the sidewalls provide resistance one against the other, the amount of pressure applied is not as critical as in prior art schemes. For typically employed pressures, the edge of each plate will not flex due to the resistance created between sidewalls 225a and 225b. Additionally, in a closed or imprinting position, microtool 200 envelopes the entire substrate, thus the dielectric material cannot accumulate on the edge of the microtool plates nor can excess dielectric material form along the edge of the substrate. Moreover, tilting will not cause defective parts, as the dielectric material cannot flow as readily to undesired locations. [0025] For one embodiment of the invention, the sidewalls of the microtool are positioned such that upon imprinting, the entire substrate is encapsulated within the dielectric material. Such an embodiment will result in reduction or elimination of the substrate sticking to the microtool. [0026] Various alternative embodiments of the invention reduce or eliminate flexing of the microtool plates along the edges, flow of the dielectric material to undesired locations due to tilt, and accumulation of excess dielectric material along the edges of the substrate, thus providing an imprinted substrate having a total thickness variation (TTV) of approximately 7 microns.
[0027] In an alternative embodiment, only one of the microtool plates may include a sidewall. Figure 2A illustrates a microtool in which one of two plates has a sidewall in accordance with one embodiment of the invention. Microtool 200A shown in Figure 2A, includes a sidewall 225 formed on the lower plate 205b. Plate 205a does not include a sidewall. For such an embodiment, the height of sidewall 225 is based upon the substrate core 215 such that upon pressure being applied to the plates, the imprint pattern extends a desired amount into the dielectric layers 210.
[0028] As described above in reference to Figure 2, the microtool in accordance with one embodiment of the invention has sidewalls that contact each other during the imprinting process. For such an embodiment, the height of the sidewalls is determined within strict tolerances to ensure that the sidewalls do not prevent the imprint pattern from properly contacting the dielectric layer.
[0029] Figure 3 illustrates a microtool having plates with sidewalls formed to contact the substrate core in accordance with one embodiment of the invention. Microtool 300, shown in Figure 3, includes sidewalls 325a and 325b on plates 305a and 305b, respectively. As shown in Figure 3, upon applying pressure to the plates, the sidewalls contact a substrate core 315. Each of the sidewalls 325a and 325b form a separate reservoir around the imprint pattern of each of the respective of the microtool plates, 305a and 305b.
[0030] For such an embodiment, it is no longer necessary to determine the height of the sidewalls based upon the thickness of the substrate core. Instead, the height of the sidewalls is approximately equal to the feature dimensions. Such an embodiment allows for ease of manufacturing. However, because the sidewalls will contact the substrate core, stricter tolerances on the applied pressure are observed to avoid dimpling the substrate core or damaging circuits with the substrate core.
[0031] Figure 4 illustrates a microtool having one or more vent channels formed therein to increase the flow of the dielectric material throughout the reservoir formed by the sidewalls in accordance with one embodiment of the invention. As shown in Figure 4, microtool 400 has vent channels 430 formed in upper plate 405a. The vent channels may be formed at any location on the plate and may be formed additionally or alternatively on lower plate 405b. The dielectric material is less likely to flow into certain areas of the reservoir formed by the microtool plates. For example, the dielectric material is less likely to flow into the upper corners of the reservoir (i.e., the corners formed by the upper plate sidewalls). The vent channels help the dielectric material from the dielectric layer 410 to flow into such areas within the reservoir. Moreover, the vent channels allow excess dielectric material to escape from the reservoir without accumulating on the substrate or the microtool plates.
[0032] Figure 4A is a top-down view of microtool plate 405a having vent channels 430 formed therein in accordance with one embodiment of the invention. [0033] Figure 5 illustrates a process in which a microtool is formed in accordance with one embodiment of the invention. Process 500, shown in Figure 5, begins with operation 505 in which the dimensions of a substrate are determined. The dimensions may include the substrate core thickness as well as the dielectric layer thickness and the dimensions of the features to be imprinted on the substrate.
[0034] At operation 510, the height of a sidewall for a microtool plate is determined based upon the substrate dimensions. For example, for a microtool as described above in reference to Figure 2, in which each sidewall will contact the sidewall of the opposing plate, the substrate core thickness as well as the feature dimensions are used to determine the sidewall height. For such an embodiment, the sidewall height for each plate is approximately equal to the feature height plus one half of the substrate core thickness. For a microtool as described in reference to Figure 3, the sidewall height for each plate is approximately equal to the feature height.
[0035] At operation 515, a microtool is formed having a sidewall of the determined height on at least one plate surrounding the imprint pattern. Additionally, one or both plates of the microtool may have vent channels formed therein to aid the flow of the dielectric material as discussed above in reference to Figures 4 and 4A. [0036] While the invention has been described in terms of several embodiments, those skilled in the art will recognize that the invention is not limited to the embodiments described, but can be practiced with modification and alteration within the spirit and scope of the appended claims. The description is thus to be regarded as illustrative instead of limiting.

Claims

CLAIMSWhat is claimed is:
1. An apparatus comprising: one or more plates, each plate having a corresponding imprint pattern formed thereon; and one or more sidewalls, each sidewall surrounding the corresponding imprint pattern of a respective plate.
2. The apparatus of claim 1 wherein each sidewall is integrally formed with the respective plate.
3. The apparatus of claim 1 wherein each plate is a metal plate approximately 30 mils thick, the metal selected from the group consisting essentially of nickel and nickel alloy.
4. The apparatus of claim 1 wherein at least one of the plates has one or more vent channels formed therein.
5. A microtool comprising: an upper plate having a first imprint pattern formed thereon, the upper plate having a first sidewall surrounding the first imprint pattern; and a lower plate having a second imprint pattern formed thereon, the lower plate having a second sidewall surrounding the second imprint pattern.
6. The microtool of claim 5 wherein upon application of pressure the first sidewall contacts the second sidewall such that the first sidewall helps reduce a flexing of the lower plate and the second sidewall helps reduce a flexing of the upper plate.
7. The microtool of claim 6 wherein the first sidewall in contact with the second sidewall forms a reservoir for a dielectric material of a substrate such that an accumulation of an excess of the dielectric material on the substrate, the upper plate, and the lower plate is reduced.
8. The microtool of claim 6 wherein the height of the first sidewall and the second sidewall is determined based upon the thickness of a substrate core of a substrate to be imprinted.
9. The microtool of claim 5 wherein each of the upper plate and the lower plate is a metal plate approximately 30 mils thick, the metal selected from the group consisting essentially of nickel and nickel alloy.
10. The microtool of claim 5 wherein upon application of pressure the first sidewall contacts an upper surface of a substrate core and the second sidewall contacts a lower surface of the substrate core such that the substrate core helps reduce a flexing of the lower plate and a flexing of the upper plate.
11. The microtool of claim 10 wherein the first sidewall in contact with the upper surface of the substrate core forms a reservoir for a dielectric material of the substrate such that an accumulation of an excess of the dielectric material on the substrate and the upper plate is reduced, and the second sidewall in contact with the lower surface of the substrate core forms a reservoir for the dielectric material of the substrate such that an accumulation of an excess of the dielectric material on the substrate and the lower plate is reduced.
12. The microtool of claim 5 wherein at least one of the upper plate and the lower plate has one or more vent channels formed therein.
13. A microtool comprising: a plate having a corresponding imprint pattern formed thereon, the imprint pattern surrounded by a sidewall formed on the plate; and an opposing plate having a corresponding imprint pattern formed thereon.
14. The microtool of claim 13 wherein upon application of pressure the sidewall contacts a surface of the opposing plate such that the sidewall in contact with the surface of the opposing plate helps reduce a flexing of the plate and the opposing plate.
15. The microtool of claim 13 wherein the sidewall in contact with the surface of the opposing plate forms a reservoir for a dielectric material of a substrate such that an accumulation of an excess of the dielectric material on the substrate, the upper plate, and the lower plate is reduced.
16. The microtool of claim 15 wherein the plate has one or more vent channels formed therein.
17. A method comprising: determining one or more dimensions of a substrate; determining a height of a sidewall for a microtool plate based upon a dimension of the substrate; and forming a microtool having one or more plates, each plate having a corresponding imprint pattern formed thereon, at least one of the plates having a sidewall, each sidewall surrounding the corresponding imprint pattern of a respective plate.
18. The method of claim 17 further comprising: forming vent channels within one or more of the plates of the microtool.
19. The method of claim 17 wherein each sidewall is integrally formed with the respective plate.
20. The method of claim 17 wherein each plate is a metal plate approximately 30 mils thick, the metal selected from the group consisting essentially of nickel and nickel alloy.
21. The method of claim 17 further comprising: forming a sidewall on each of two opposing plates of the microtool wherein upon application of pressure each sidewall contacts the sidewall of the opposing plate such that the sidewall of each plate helps to prevent flexing of the opposing plate.
22. The method of claim 21 wherein the sidewalls in contact with each other form a reservoir for a dielectric material of the substrate such that an accumulation of an excess of the dielectric material on the substrate and each of the two plates is reduced.
23. The method of claim 17 further comprising: forming a sidewall on each of one or more corresponding plates of the microtool wherein upon application of pressure each sidewall contacts a core of the substrate such that the sidewall in contact with the substrate core helps to prevent flexing of the corresponding plate.
24. The method of claim 17 further comprising: imprinting the substrate using the microtool.
PCT/US2005/025806 2004-08-05 2005-07-20 Methods and apparatuses for imprinting substrates WO2006020330A2 (en)

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DE112005001894T DE112005001894T5 (en) 2004-08-05 2005-07-20 Methods and devices for embossing substances
JP2007524831A JP2008509555A (en) 2004-08-05 2005-07-20 Method and apparatus for imprinting a substrate

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US10/913,903 US20060027036A1 (en) 2004-08-05 2004-08-05 Methods and apparatuses for imprinting substrates
US10/913,903 2004-08-05

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DE112005001894T5 (en) 2007-06-21
US20070138135A1 (en) 2007-06-21
JP2008509555A (en) 2008-03-27
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CN1994032A (en) 2007-07-04
US20060027036A1 (en) 2006-02-09

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