WO2005120728A1

WO2005120728A1 - Fluid vibrating apparatus and method of driving the same

Info

Publication number: WO2005120728A1
Application number: PCT/JP2005/004968
Authority: WO
Inventors: Minoru Nakayama; Tetsuji Zama; Susumu Hara; Shingo Sewa
Original assignee: Eamex Corporation
Priority date: 2004-03-22
Filing date: 2005-03-18
Publication date: 2005-12-22
Also published as: JP2005269842A; JP4507242B2

Abstract

A fluid vibrating apparatus and a method of driving the apparatus. The apparatus (1) having two or more fluid chambers comprises diaphragms (3) and (4) forming at least a part of the fluid chambers (7) and (8). The diaphragms (3) and (4) contain conductive high molecular membranes, and an electrolyte is filled in a closed space (9) facing the two or more diaphragms (3) and (4). The diaphragms (3) and (4) comprise the fluid chambers on the opposite sides of the closed space (9) through the diaphragms (3) and (4), and contain the conductive high molecular membrane so as to come into contact with the electrolyte.

Description

Specification

Fluid vibration device and driving method thereof

Technical field

The present invention relates to a fluid vibration device that can be used for, for example, a cleaning device, a dissolution device, a chemical reaction device, a heat pipe, or a hobby.

Background art

[0002] Vibration of a fluid such as water for use in various applications is performed, for example, as in the case of an ultrasonic cleaning machine sold on the market. ,.

[0003] Furthermore, various studies have been made on a fluid vibration device for applying vibration to a fluid by a mechanical actuation for use in a specific application (for example, Patent Document 1).

Patent document 1: Japanese Patent Application Laid-Open No. 9-166228

Disclosure of the invention

Problems to be solved by the invention

[0005] However, the above-described fluid vibration device has a complicated device configuration, is difficult to miniaturize, and uses a large amount of metal parts, so that it is difficult to reduce the weight. Fluid vibration devices using motors are loud and not suitable for indoor or medical use.

[0006] For example, it is also possible to use a fluid vibration device that drives a piezoelectric element made of a ceramic material as a driving element. However, although ceramic piezoelectric elements can be miniaturized, they require a voltage converter to use a low-voltage power supply because they are driven at a high voltage of 100 V, which complicates the device configuration. The use of a fluid vibration device driven by a high voltage is limited in terms of the configuration or application of the device in which the fluid vibration device is incorporated, and is inferior in industrial applicability.

[0007] An object of the present invention is to provide a fluid vibration device that can be reduced in size and can be lightweight. Another object of the present invention is to provide a fluid vibration device that can be driven at a low voltage of about several volts or less and can be driven with no force.

Means for solving the problem

[0008] The inventors of the present invention have made intensive studies and as a result, the following problems can be solved by the following invention. I found that.

[0009] The present invention is a fluid vibration device provided with two or more fluid chambers, comprising a diaphragm constituting at least a part of each fluid chamber, wherein the diaphragm includes a conductive polymer film, and the two or more diaphragms are provided. Are filled with an electrolyte solution, each diaphragm is provided with a fluid chamber on the opposite side of the closed space across the diaphragm, and each diaphragm is brought into contact with the conductive polymer film with the electrolyte solution. The fluid vibration device includes:

The invention's effect

[0010] The fluid vibration device of the present invention has the structure as described above, and the conductive polymer is driven by a chemical mechanism, so that the fluid vibration device can be driven at a low voltage. In addition, the fluid vibration device is silent, and the device configuration is simple and the size can be easily reduced. Moreover, since the fluid vibration device hardly uses metal parts, the weight can be easily reduced.

Brief Description of Drawings

FIG. 1 is a cross-sectional view of a first embodiment of a fluid vibration device of the present invention.

FIG. 2 is a sectional view of a second embodiment of the fluid vibration device of the present invention.

FIG. 3 is a front view of an embodiment of the diaphragm unit.

FIG. 4 is a sectional view taken along line AA of the diaphragm unit in FIG. 3.

FIG. 5 is a partially enlarged view of the diaphragm unit shown in FIG. 4, taken along the line AA.

FIG. 6 is a perspective view of one embodiment of a fluid vibration device using a diaphragm unit.

FIG. 7 is a sectional view taken along line BB of the fluid vibration device of FIG. 6.

FIG. 8 is a partially enlarged cross-sectional view near the suction port in the cross-sectional view of FIG. 7.

FIG. 9 is a partially enlarged cross-sectional view near the suction port in the cross-sectional view of FIG. 7.

FIG. 10 is a conceptual diagram of one embodiment of an application device using the fluid vibration device of the present invention. Explanation of symbols

[0012] 1, 1 'fluid vibration device

2, 2 'housing

3, 3 'diaphragm

4, 4, diaphragm 5, 5 'wall

6 Connection members

7, 7 '1st fluid chamber

8, 8 'second fluid chamber

9, 9 'space

10, 10, lead

11, 11 'inlet

31 Diaphragm unit

32, 32 'metal frame

33 holes

332, 332 Conductive polymer film

34 Porous body

61 Fluid vibration device

62 Lid

63 bottom

64, 64 'port

o5, D5 Po ~~

66, 66 terminals

67, 68, 69 diaphragm unit

70, 71 channel

72, 73 channels

74, 75

76, 77

81 channels

82 channels

83 Excited body

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, description will be made with reference to the drawings, but the present invention is not limited to these embodiments. Absent.

FIG. 1 is a sectional view of a first embodiment of the fluid vibration device of the present invention. The fluid vibration device 1 which is the fluid vibration device of the present invention is a fluid vibration device including diaphragms 3 and 4 made of conductive polymer inside a coin-shaped casing 2 having an internal space. The diaphragm 3 and the diaphragm 4 are disc-shaped conductive polymer films, the circumference of which is fixed to the wall surface 5, and connected to each other via the connection member 6 at the center. The two diaphragms 3 and 4 are installed in a state where tension is applied in the direction of the membrane surface, respectively, and have a substantially conical shape. The diaphragm 3 forms the housing 2 and the first fluid chamber 7, and the diaphragm 4 forms the housing 2 and the second fluid chamber 8. The space 9 inside the fluid vibration device 1 is formed by being partitioned by the diaphragm 3 and the diaphragm 4 formed of a film-shaped conductive polymer film and the housing 2. By filling the space 9 with the electrolyte, the diaphragms 3 and 4 come into contact with the electrolyte. The conductive polymer film of the diaphragm 3 and the conductive polymer film of the diaphragm 4 are connected to a power source via leads 10 and 10 ', respectively. For example, the support salt of the electrolytic solution contains ferron, a negative voltage is applied to the conductive polymer film of the diaphragm 4, and a positive voltage is applied to the conductive polymer film of the diaphragm 3. Diaphragm 4 contracts, diaphragm 3 expands, fluid chamber 9 widens, and fluid chamber 8 narrows. Conversely, when a positive voltage is applied to the conductive polymer film of the diaphragm 4 and a negative voltage is applied to the conductive polymer film of the diaphragm 3, the diaphragm 3 contracts, the diaphragm 4 expands, and the fluid chamber 7 becomes narrower and fluid chamber 8 becomes wider. In other words, the two conductive polymer films, which are diaphragms, perform an expansion and contraction movement with one of the conductive polymer films serving as a working electrode and the other serving as a counter electrode. Due to such a movement of the diaphragm, one diaphragm contracts and discharges the fluid in the fluid chamber formed by the one diaphragm. The volume of the fluid chamber formed by the fluid vibration device is expanded, and the fluid vibration device 1 functions as a twin fluid vibration device.

The fluid vibration device 1 shown in FIG. The fluid vibration device 1 has a port 11 '. In FIG. 1, each fluid chamber has one port, but a plurality of ports may be provided. When a plurality of ports are provided in each fluid chamber, suction and discharge of the ports provided in the same pump chamber have the same cycle. In FIG. 1, when the diaphragm 4 contracts, the fluid in the fluid chamber 8 is discharged to the outside through the port 11. At the same time as the fluid in the fluid chamber 8 is discharged, the diaphragm 3 is expanded by the contraction of the diaphragm 4, and the fluid is sucked into the fluid chamber 7 through the port 11. In addition, a member for mounting a suction pipe, a discharge pipe, or the like may be appropriately mounted near the port.

FIG. 2 is a cross-sectional view of the fluid vibration device of the second embodiment of the present invention when no connecting member is used for the fluid vibration device of FIG. The fluid vibration device 1 ′ includes diaphragms 3 ′ and 4 ′ that constitute at least a part of a fluid chamber, and the diaphragm is a closed space formed of a conductive polymer film and faces the diaphragms 3 ′ and 4 ′. The space 9 'is filled with the electrolyte. Each diaphragm has fluid chambers 7 'and 8' on opposite sides of the closed space with respect to the diaphragm. Each diaphragm is in contact with the electrolytic solution in the space 9 ′ because it is a conductive polymer film. Each of the above-mentioned diaphragms is made of a conductive polymer film. As in the case of the fluid vibration device of FIG. 1, if the diaphragm is driven by the electrolytic expansion and contraction of the conductive polymer, the conductive polymer film is made of a diaphragm. It may be a laminate in which a conductive polymer film that may be included as a part of the layer is one layer. As the conductive polymer film, a film-shaped conductive polymer molded product can be used.

In FIG. 2, the fluid vibration device 1 ′ includes two fluid chambers and applies a voltage to the diaphragms 3 ′ and 4 ′ made of a conductive polymer film! Then, it is in a state of being driven as a fluid vibration device. By applying a voltage to one diaphragm 3 'and a reverse voltage to the other diaphragm 4', the diaphragm 4 'contracts and the diaphragm 3' To stretch. The volume of the fluid chamber 8 'is reduced by the contraction of the diaphragm 4', and the fluid in the fluid chamber is discharged. Further, the volume of the fluid chamber 7 'is increased by the expansion of the diaphragm 3', and the fluid is sucked into the fluid chamber. When one conductive polymer film is used as a working electrode and the other conductive polymer film is used as a counter electrode, the driving of one diaphragm and the driving of the other diaphragm have opposite phases in one suction-discharge cycle. It becomes. By applying the polarity of the voltage applied to each conductive polymer film alternately to positive and negative, the expansion and contraction of the diaphragm are performed alternately, and suction and discharge are performed alternately in each fluid chamber. Continuously driving the fluid vibration device 1 ′ The same applies to the device 1, except that the polarity of the applied voltage to each conductive polymer film is alternately applied by applying the polarity of the applied voltage to each conductive polymer film alternately. Can be done.

[0019] The fluid vibration device 1 'of Fig. 2 is different from the fluid vibration device 1 of Fig. 1 in that it does not include a connecting member for connecting the two diaphragms, and the two diaphragms are not connected. When a voltage is applied to the diaphragm 4 ', which is a conductive polymer film, the diaphragm 4' contracts. Due to the contraction movement, the volume of the fluid chamber 8 'is reduced. Further, since the space 9 ′ provided on the opposite side of the fluid chamber 8 ′ with the diaphragm 4 ′ therebetween is a closed space, the contraction movement is performed via the electrolyte filled in the space 9 ′. The volume of the fluid chamber 7 'can be increased by pulling the expanding diaphragm 3'.

The fluid vibration device in FIG. 2 has two fluid chambers. Force The fluid vibration device of the present invention may include two or more fluid chambers. Each of the diaphragms forming a part of the fluid chamber has a conductive polymer film, and when a voltage is applied to each conductive polymer film, each conductive polymer film acts as an electrode, and Causes expansion and contraction. The conductive polymer film included in the diaphragm constituting one fluid chamber is used as a counter electrode to the conductive polymer film included in the other fluid chamber via the electrolyte in the closed space when a voltage is applied. If possible, the positional relationship between the diaphragms is not particularly limited. For example, the closed space is formed so that a large number of diaphragms form a polyhedron, and the closed space is filled with an electrolytic solution, and the conductive polymer film contained in one or more diaphragms becomes conductive in other diaphragms. It can also be used as a counter electrode of the conductive polymer film. In particular, the fluid vibration device is arranged so that the positional relationship between one diaphragm and the other diaphragm is arranged so that the diaphragms face each other via the electrolytic solution. Is also preferable because the driving is smooth. By continuously driving one diaphragm of the pair and the other diaphragm so that they have opposite phases in one suction-discharge cycle, it becomes easy for the contracting diaphragm to pull the same pair of expanding diaphragms. .

In the embodiment of FIG. 2, the pair of diaphragms are not connected. If there is a connection between the diaphragms, as shown in Fig. 1, The cross section has a substantially triangular pyramid shape, and the cross section of the diaphragm at the time of discharge has an arc shape. Therefore, when the connection is made between the diaphragms, the shape of the diaphragm changes greatly at the moment when the suction and the discharge are switched, and a time lag occurs at the time of the switching. In order to prevent this time lag, it is preferable that a connection be made between the diaphragms. The lack of connection between the diaphragms makes the shape of the diaphragm in suction similar to that in discharge as shown in FIG. 2, and prevents time lag when switching between suction and discharge. Further, since the fluid vibration device having no connection between the diaphragms has no connecting member, it is easy to manufacture a small fluid vibration device such as a fluid vibration device having a circular shape with a diaphragm outer diameter of 10φ, and the U, which is preferable because the conductive polymer film functioning as an element for expansion also expands and contracts.

In the fluid vibration device of the present invention, the frequency of the vibration is not particularly limited as long as the fluid vibrates when the fluid is sucked and discharged in each fluid chamber. The vibration frequency of the fluid by the fluid vibrating device is, for example, a force that can be from 1000 Hz to 0.1 Hz, preferably from 100 Hz to 0.01 Hz, and more preferably from 10 Hz to 0.1 Hz.

In the fluid vibration device of the present invention, the force applied to the fluid from each fluid chamber is not particularly limited, but the discharge pressure of the fluid in each fluid chamber is preferably 200 kPa or less. When the vibrating device is used for small applications, the discharge pressure is 5-100 kPa, and more preferably 10-40 kPa. The discharge amount of the fluid in each fluid chamber is more preferably 50 to 100 mm ³ , which is preferably 2000 mL, preferably in one cycle, that is, in one discharge.

[0024] The fluid vibration device of the present invention can use a liquid or a gas for which the fluid used is not particularly limited. The liquid may be water or a good organic liquid, or may be a mixed solvent such as a mixture of water and alcohol. The gas may be air or an inert gas. The fluid is preferable because it has a low explosive property, such as rapid volume expansion caused by vibration, and can easily secure safety.

[0025] The fluid vibration device in Fig. 1 uses a diaphragm in which only a conductive polymer film has a force. Is shown. However, the fluid vibration device of the present invention may have a laminated structure that is not limited to a diaphragm in which only a conductive polymer film has a force. For example, the diaphragm may have a structure including a nonwoven fabric that can function as a protective layer on a conductive polymer film. In addition, the diaphragm has a high conductivity which is good even if a conductive polymer film through which the electrolyte can pass is provided by forming a hole on the conductive polymer film through which the electrolyte does not pass. It is also possible to provide a layer having elasticity such as a nonwoven fabric and a solid electrolyte layer having elasticity, such as a nonwoven fabric, between molecular membranes.

[0026] The conductive polymer film is not particularly limited in the composition of the conductive polymer, and a known conductive polymer can be used. The conductive polymer film can be formed according to the performance of the diaphragm such as the discharge pressure and the discharge amount. Thus, the composition of the conductive polymer can be appropriately selected. More specifically, polypyrrole can be used as the conductive high molecular monomer, and a known ion can be used as the dopant. Further, as a supporting electrolyte in an electrolyte for driving the fluid vibration device, a known supporting electrolyte can be used.

Regarding the above-mentioned conductive polymer film, for example, by applying a voltage of IV or 200 mA to the conductive polymer film, a force of 5 Mpa can be generated in the film surface direction of the conductive polymer film. A fluid vibrating device using a viscous polypropylene film for a diaphragm can generate a discharge pressure of 20 kPa for one fluid chamber. Further, in the fluid vibration device according to the embodiment shown in FIG. 1, a circular conductive polymer film having a diameter of 40 mm and a thickness of 40 m is used as each diaphragm, and expands and contracts by 0.9% per 0.5 second in the film surface direction. By doing so, a discharge rate of 72 ml Zs per second can be generated. Further, a desired discharge pressure can be obtained by laminating the conductive polymer films.

[0028] In particular, as the conductive polymer film, a conductive polymer film having an elongation percentage due to electrolytic expansion and contraction per 0.5 second of 0.5% or more when a voltage of IV is applied is 0% in the film surface direction. It is preferable because expansion and contraction of 0.9% or more can be performed per 5 seconds, and a large discharge amount can be easily obtained. Conductive polymer membranes with an elongation of 0.5% or more due to electrolytic expansion / contraction per 0.5 second are manufactured by electropolymerization of conductive polymers that have elasticity due to electrochemical oxidation / reduction. The method for producing a molecule, wherein the electrolytic polymerization method comprises the steps of: ether bond, ester bond, carbonate bond, hydroxyl group, nitro group, sulfone group and -tolyl group. At least one organic compound containing at least one bond or a functional group and an electrolyte containing Z or halogenated hydrocarbon as a solvent are used, and the trifluoromethanesulfonate ion and Z or a central atom are contained in the electrolyte. It can be easily obtained by a method for producing a conductive polymer containing an ion containing a plurality of fluorine atoms. Further, the method for producing a conductive polymer using an electrolytic polymerization method as the conductive polymer film, wherein the electrolytic polymerization method uses the above trifluoromethanesulfonate ion and Z or Instead of an ion containing a plurality of fluorine atoms with respect to the central atom, the chemical formula (1)

(C F SO) (C F SO) N— (1)

n (2n + l) 2 m (2m + l) 2

(Here, n and m are arbitrary integers.)

Can be easily obtained by a method for producing a conductive polymer using an electrolytic solution containing a perfluoroalkylsulfonylimide ion represented by

Examples of the organic compound contained as a solvent in the electrolytic polymerization method include 1,2-dimethoxetane, 1,2-dietoxetane, tetrahydrofuran, 2-methyltetrahydrofuran, 1,4-dioxane (the above, an organic compound containing an ether bond), γ Petit-mouth ratatone, ethyl acetate, η-butyl acetate, 1-butyl acetate, 1,2-diacetoxetane, 3-methyl-2-oxazolidinone, methyl benzoate, ethyl benzoate, butyl benzoate, phthalic acid Diethyl (above, an organic compound containing an ester bond), propylene carbonate, ethylene carbonate, dimethinolecarbonate, ethynolecarbonate, methinoolethionolecarbonate (above, an organic compound containing a carbonate bond), ethylene glycol, Butanol, 1-hexanol, cyclohexano 1-year-old ketanol, 1-decanol, 1-dodecanol, 1-year-old kutadecanol (above, organic compound containing hydroxyl group), nitromethane, nitrobenzene (above, organic compound containing nitro group), sulfolane, dimethyl sulfone ( As described above, organic compounds containing a sulfone group), and acetonitrile, butymouth-tolyl, and benzo-tolyl (these are organic compounds containing a nitrile group) can be exemplified. The organic compound containing a hydroxyl group is not particularly limited, but is preferably a polyhydric alcohol or a monohydric alcohol having 4 or more carbon atoms because of its good elasticity. In addition, in addition to the above examples, the organic compound may include two or more of an ether bond, an ester bond, a carbonate bond, a hydroxyl group, a nitro group, a sulfone group, and a -tolyl group. The above bond! /, May be an organic compound containing a functional group in any combination.

When the organic compound is used as a solvent for an electrolytic solution by mixing two or more of the organic compounds, an organic compound having an ether bond, an organic compound having an ester bond, an organic compound having a carbonate bond, Among the organic compounds containing a hydroxyl group, the organic compounds containing a nitro group, the organic compounds containing a sulfone group, and the organic compounds containing a nitrile group, a combination of an organic compound having excellent extension and an organic compound having excellent contraction. Therefore, it is intended to improve the expansion / contraction ratio of the conductive polymer obtained by the electrolytic polymerization per 1 cycle of oxidation reduction.

[0031] In the method for producing a conductive polymer, the halogenated hydrocarbon contained as a solvent in the electrolytic solution is a hydrocarbon in which at least one hydrogen in the hydrocarbon is substituted with a halogen atom. There is no particular limitation as long as it can stably exist as a liquid under polymerization conditions.

[0032] Examples of the halogenated hydrocarbon include dichloromethane and dichloroethane. As the halogenated hydrocarbon, only one kind can be used as a solvent in the electrolytic solution, but two or more kinds can be used in combination. The halogenated hydrocarbon may be used as a mixture with the above organic compound, and a mixed solvent with the organic solvent may be used as a solvent in the electrolytic solution.

[0033] In the above-described method for producing a conductive polymer, the electrolytic solution used in the electrolytic polymerization method includes an organic compound to be electrolytically polymerized (for example, pyrrole) and trifluoromethanesulfonic acid ion and Z or a central atom. And a plurality of fluorine atoms. By conducting electrolytic polymerization using this electrolytic solution, it is possible to obtain a conductive polymer having an excellent expansion / contraction rate per one oxidation reduction cycle and excellent Z or displacement rate per specific time in electrolytic expansion and contraction. By the above-mentioned electrolytic polymerization, trifluoromethanesulfonic acid ions and aions containing a plurality of fluorine atoms with respect to Z or a central atom are incorporated into the conductive polymer.

[0034] The content of the trifluoromethanesulfonate ion and the arnone containing a plurality of fluorine atoms with respect to Z or the central atom in the electrolytic solution is not particularly limited, but the content of 0.1 to 0.5% in the electrolytic solution is not limited. 1-30% by weight is preferred 1-15% by weight is more preferred Yes.

[0035] Trifluoromethanesulfonic acid ion is a compound represented by the chemical formula CFSO-.

3 3

In addition, an ion containing a plurality of fluorine atoms with respect to the central atom has a structure in which a plurality of fluorine atoms are bonded to a central atom such as boron, phosphorus, antimony, and arsenic. Contains a plurality of fluorine atoms bonded to the central atom. Examples of the aone containing a plurality of fluorine atoms with respect to the central atom are not particularly limited, and include tetrafluorophosphate ion (BF-), hexafluorophosphate ion (PF-), and hexafluoroantimony.

4 6

Acid ions (SbF-) and hexafluorofluoric acid ions (AsF-) can be exemplified.

6 6

Among them, CF SO-, BF- and PF- are preferable in consideration of safety to human body.

3 3 4 6

, CF SO— and BF— are more preferred. Including multiple fluorine atoms with respect to the central atom

3 3 4

Mu-on is good even if one kind of a-one is used, and several kinds of a-one can be used in the electrolyte at the same time. An ion containing a plurality of fluorine atoms with respect to the central atom may be simultaneously used in the electrolytic solution.

[0036] Further, the perfluoroalkylsulfonylimide ion contained as an a-one has a sulfon group bonded to a nitrogen atom which is the center of the a-one, and further has two perfluoro groups as substituents. It has a low alkyl group. This perfluoroalkyl sulfol is represented by C F SO, and other perfluoroalkyl sulfol groups are represented by C F SO.

2n + l) 2 m (2m + l) 2 The aforementioned n and m are arbitrary integers of 1 or more, respectively, and n and m may be the same integer, or n and m may be different integers. For example, trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, pendecafluoropentyl group, tridecafluoro hexyl group, pentadecafluoro heptyl group, heptadecaful And octyl group. Examples of the perfluoroalkylsulfonimide salt include bistrifluoromethylsulfonamide salt, bis (pentafluoroethylsulfolyl) imide salt, and bis (heptadecafluorooctylsulfoimide) salt. -R) imide salts can be used.

[0037] The perfluoroalkylsulfonylimide ion of the above chemical formula (1) can form a salt with a cation, and is added as a perfluoroalkylsulfonylimide salt to the electrolytic solution in the electrolytic polymerization method. Being, even good. Perfluoroalkylsulfonimide and salt The cation to be formed may be composed of one element such as U + or may be composed of a plurality of elements. The cation is not particularly limited as long as it can form a perfluoroalkylsulfonylimide ion as a monovalent cation and can be dissociated in an electrolytic solution.

In addition, when the diaphragm has a multilayer structure, the fluid in the fluid chamber which does not need to have the laminated structure of the conductive polymer film layer and the other layers on the entire surface of the diaphragm A conductive polymer film having a space near the center of the shape may be used as long as it has a layer that does not transmit light.

[0039] In the fluid vibration device of the present invention, a plurality of diaphragms may be provided in parallel on the same surface. Further, in the fluid vibration device, the diaphragm may be provided in a stacked state in the fluid vibration device. When a plurality of diaphragms are provided in the fluid vibration device as described above, a diaphragm unit having a plurality of diaphragms in parallel on the same surface may be formed. Further, in the fluid vibration device of the present invention, a plurality of the diaphragm units may be provided in parallel, or a plurality of the diaphragm units may be provided in a stack.

FIG. 3 is a front view of an embodiment of the diaphragm unit. The diaphragm unit 31 includes a metal frame 32 having a large number of conductive polymer films 33 formed in the openings of the circular holes. The same shape 32 ′ is also provided on the back side of the metal frame 32. The metal frame 32 has a tab 34 for voltage application. The tab portion is similarly formed on the metal frame 32 '. In the hole 33, a conductive polymer film is formed so as to cover the opening of the hole 33. FIG. 4 is a sectional view of the diaphragm unit taken along line AA of FIG. FIG. 5 is a partially enlarged view of the sectional view of FIG.

In FIG. 5, the conductive polymer film 332 formed in the opening of the circular hole of the metal frame 32 is the conductive polymer film 332 formed in the opening of the circular hole of the metal frame 32 ′. And the insulator 35 facing each other so that the convex portions face each other. It can be driven to expand and contract like the diaphragm of FIG. 1 or FIG. 2 described above. Further, by arranging the porous body 36 between the metal frame 32 and the metal frame 32 ', it is possible to form an interval between the metal frames, and the conductive polymer films 332, 332 'Can be maintained in an arc-shaped cross section. Further, by applying a voltage to the metal frames 32 and 32 ', a voltage is applied to each diaphragm in each metal frame. , It is possible to easily control the driving of the plurality of diaphragms. Note that an electrolytic solution is preferably sealed between the conductive polymer film 332 and the conductive polymer film 332 ′. The presence of the electrolyte between the conductive polymer films causes the conductive polymer films 332, 332 'to be in a relationship between the working electrode and the counter electrode, facilitating expansion and contraction driving as shown in FIG. 1 or FIG. Can be The insulator is disposed in each hole to prevent the conductive polymer film 332 and the conductive polymer film 332 ′ from directly contacting each other. If it does not contact the conductive polymer film 332 ', it may not be disposed.

[0042] The method of forming the conductive polymer film formed on the metal frames 32 and 32 'is not particularly limited. For example, by using a metal frame as a working electrode, applying a back plate to the metal frame, and performing electrolytic polymerization in a state in which the holes of the metal frame are closed with the back plate, the holes of the metal frame are formed. The conductive polymer film covering the surface can be easily formed. The conductive polymer film formed by such an electrolytic polymerization method is a film covering the entire surface of the metal frame, but in the hole, the conductive polymer film as a diaphragm is circular. Since a large number of small diaphragms can be formed in the same space, a large discharge pressure can be obtained by the expansion and contraction of the conductive polymer film formed in each hole, and the force required by multiple fluid vibration devices can be increased. Since the diaphragms are formed in parallel, the diaphragm using the diaphragm unit can discharge a large flow rate.

FIG. 6 is a perspective view of a fluid vibration device using the diaphragm unit according to an embodiment. FIG. 7 is a BB cross-sectional view of the fluid vibration device of FIG. FIG. 8 is a partially enlarged cross-sectional view near the port 64 in the cross-sectional view of FIG. FIG. 9 is a partially enlarged cross-sectional view near the port 65 in the cross-sectional view of FIG.

In FIG. 6, the fluid vibration device 61 has a housing formed by a lid 62 and a bottom 63. The diaphragm unit is housed inside the housing. The lid is provided with two ports 64 and two ports 65 respectively. In addition, terminals 66, 66 for voltage application are also provided in the fluid vibration device 61 so that they can be connected to an external power supply. In the fluid vibration device 61, the fluid vibration device 61 is configured so that the fluid force sucked into the fluid vibration device from the port 64 is discharged from the port 64. In the fluid vibration device 61, The fluid vibration device 61 is configured so that the fluid sucked into the fluid vibration device from the port 65 is discharged from the port 65.

As shown in the BB cross-sectional view of FIG. 7, the fluid vibration device 61 is provided with three diaphragm units. As shown in FIG. 8, the three diaphragm units 67, 68, 69 are provided with an interval, and flow paths 70, 71, 72, 73 are formed. The channel 70 and the channel 72 are provided with seals 74 and 75 at the end on the port 64 side so that the fluid in the channel 70 and the channel 72 does not flow through the port 64. Further, as shown in FIG. 9, the flow passage 71 and the flow passage 73 are provided with seals 76 and 77 at the ends on the port 65 side, and the fluid in the flow passage 71 and the flow passage 73 flows from the port 65 through the port 65. It is not allowed to flow. The flow path 71 and the flow path 73 communicate with two ports 64. Similarly, the flow path 70 and the flow path 72 communicate with two ports 65.

In FIGS. 8 and 9, the lower diaphragm of the diaphragm units 67 and 69 and the upper diaphragm of the diaphragm unit 68 expand, and the fluid is also sucked into the port 64 and partially flows. Through the passage 71, it can flow into the space between the diaphragm unit 67 and the diaphragm cut 68, and the rest can flow through the flow passage 73 into the space between the bottom body 63 and the diaphragm unit 69. Simultaneously with this inflow, the upper diaphragm of the diaphragm units 67 and 69 and the lower diaphragm of the diaphragm unit 68 contract, so that the space between the lid 62 and the diaphragm unit 67, Fluid existing in the space between the diaphragm units 68 and 69 passes through 70 and 72 and can be discharged from the two ports 65. Similarly, the upper diaphragm of the diaphragm units 67 and 69 and the lower diaphragm of the diaphragm unit 68 extend, and the fluid is sucked in from the two ports 65 and partially passes through the flow passage 70. Thus, the air can flow into the space between the lid 62 and the diaphragm unit 67, and the rest can flow into the space between the diaphragm units 68 and 69 through 72. Simultaneously with the suction from the port 65, the fluid existing in the space between the diaphragm unit 67 and the diaphragm unit 68 and in the space between the bottom body 63 and the diaphragm unit 69 passes through 71 and 73, and the two It can be discharged from port 64.

That is, in the embodiment of the fluid vibration device illustrated in FIGS. 7-9, in the diaphragm unit 67 and the diaphragm unit 68, the conductive polymer membranes facing each other are in an extended state. It is driven so that the contraction and the contraction are in opposite phases. Similarly, in the diaphragm unit 68 and the diaphragm unit 69. The conductive polymer films facing each other are driven such that the expansion and contraction are in opposite phases. By driving such a conductive polymer film, the ports 64 and 65 make suction and discharge one cycle, respectively, and the suction and discharge are repeated periodically, and the fluid vibration device 61 pumps the fluid. Can be excited. The expansion and contraction of the conductive polymer film of each diaphragm unit can be caused as described above by applying a voltage to the metal frame of each diaphragm unit. Further, in the above embodiment, the force provided with two ports 64 and two ports 65 respectively is provided. The fluid vibration device of the present invention may be provided one by one, and may be provided by two or more. ,.

As described above, in the fluid vibration device of the present invention, the conductive polymer film included in the diaphragm forming a part of the fluid chamber is adjusted by applying a voltage to the conductive polymer film in each fluid chamber. Periodic force can be applied to the fluid by periodically expanding and contracting the membrane. Thereby, the fluid vibration device of the present invention can vibrate the vibration. Note that the vibration in the present application is a periodic vibration, and includes not only a small vibration but also a large vibration.

[0049] The fluid vibration device of the present invention excites the fluid by causing the fluid to reciprocate at a high or low speed by applying a voltage to the conductive polymer film in each fluid chamber. The intended effect of the device to which the fluid vibration device is attached can be exhibited by the body. For example, FIG. 10 is a conceptual diagram of an embodiment of an application device using the fluid vibration device of FIG. In FIG. 10, the fluid in the flow path 81 is vibrated by the suction and discharge of the fluid in the fluid chamber 7 ′, and the fluid in the flow path 82 is excited by the suction and discharge of the fluid in the fluid chamber 8 ′. The fluid inside is vibrated, and the vibrated body 83 is vibrated by the vibrated fluid.

Industrial applicability

[0050] The fluid vibration device of the present invention can be used, for example, in the manner described above. Effect can be given. The fluid vibration device of the present invention includes, for example, a fluid vibration device used for a cleaning device, a fluid vibration device used for a dissolution device, and a chemical reaction device. It can be used as a fluid vibration device for applying vibration or thermal energy to generate a reaction in a device, a fluid vibration device used for supplying heat pipe fluid, or a fluid vibration device used for hobby applications.

Claims

The scope of the claims

[1] A fluid vibration device having two or more fluid chambers,

A diaphragm that constitutes at least a part of each fluid chamber,

The diaphragm includes a conductive polymer film,

An electrolyte is filled in a closed space where two or more diaphragms face,

A fluid vibration device in which each diaphragm has a fluid chamber on the opposite side of the closed space across the diaphragm, and each diaphragm includes a conductive polymer film so as to be in contact with the electrolyte.

[2] The fluid vibration device according to claim 1, further comprising at least one pair of diaphragms arranged to face each other, wherein the pair of diaphragms are connected to each other.

3. The fluid vibration device according to claim 1, wherein the conductive polymer film contains a conductive polymer having an elongation rate of 0.5% or more per 0.5 seconds when an IV voltage is applied.

[4] The conductive polymer film contains a conductive polymer obtained by a method for producing a conductive polymer by an electrolytic polymerization method, and the electrolytic polymerization method comprises an ether bond, an ester bond, a carbonate bond, Using an organic solution containing at least one bond or a functional group of at least one of a group, a nitro group, a sulfone group and a -tolyl group and a solvent containing Z or a halogenated hydrocarbon as a solvent; 2. The conductive polymer according to claim 1, wherein the conductive polymer is obtained by a method for producing a conductive polymer containing methanesulfonic acid ion and an ion containing a plurality of fluorine atoms with respect to Z or a central atom. Fluid vibration device.

[5] The conductive polymer film is a method for producing a conductive polymer using an electrolytic polymerization method, wherein the electrolytic polymerization method comprises, as an ion, the above trifluoromethanesulfonic acid ion and

Instead of an anion containing a plurality of fluorine atoms with respect to Z or a central atom, a chemical formula (1)

(C F SO) (C F SO) N— (1)

n (2n + l) 2 m (2m + l) 2

(Here, n and m are arbitrary integers.)

The fluid vibration device according to claim 1, comprising the conductive polymer obtained by a method for producing a conductive polymer using an electrolytic solution containing a perfluoroalkylsulfonylimide ion represented by:

6. The fluid vibration device according to claim 1, wherein each fluid chamber is provided with a port for sucking and discharging a fluid.

[7] A method of driving a fluid vibration device, comprising:

The fluid vibration device,

Two or more fluid chambers are provided,

At least a part of each fluid chamber is constituted by a diaphragm,

The diaphragm includes a conductive polymer film,

An electrolyte is filled in a closed space where two or more diaphragms face,

Each diaphragm has a fluid chamber on the opposite side of the closed space across the diaphragm,

A fluid vibration device in which each diaphragm includes a conductive polymer film so as to be in contact with the electrolytic solution,

The reverse voltage of the voltage applied to one conductive polymer film is applied to the other conductive polymer film so that the driving of one diaphragm and the driving of the other diaphragm are in opposite phases in one suction-discharge cycle. Apply a voltage to be applied,

A method for driving a fluid vibration device in which the polarity of each applied voltage is applied alternately to drive the fluid continuously.

[8] By applying a voltage, the conductive polymer film contracts to reduce the volume of one of the fluid chambers, and the contracting motion expands by applying a voltage having a polarity opposite to the voltage. 8. The method for driving a fluid vibration device according to claim 7, wherein the volume of the other fluid chamber is increased by pulling the conductive polymer film through the electrolytic solution.

[9] The diaphragm has at least one pair of pairs arranged so as to face each other with the electrolyte interposed therebetween, and one of the pair of the diaphragms and the other of the pair are continuously arranged so as to have opposite phases in one suction-discharge cycle. 8. The driving method of a fluid vibration device according to claim 7, wherein the driving is performed in the following manner.