WO2005106386A3 - Vibration resistant interferometry - Google Patents

Vibration resistant interferometry Download PDF

Info

Publication number
WO2005106386A3
WO2005106386A3 PCT/US2005/013741 US2005013741W WO2005106386A3 WO 2005106386 A3 WO2005106386 A3 WO 2005106386A3 US 2005013741 W US2005013741 W US 2005013741W WO 2005106386 A3 WO2005106386 A3 WO 2005106386A3
Authority
WO
WIPO (PCT)
Prior art keywords
scan
values
test object
data
typically
Prior art date
Application number
PCT/US2005/013741
Other languages
French (fr)
Other versions
WO2005106386A2 (en
Inventor
Leslie L Deck
Original Assignee
Zygo Corp
Leslie L Deck
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from TW94112683A external-priority patent/TW200538702A/en
Application filed by Zygo Corp, Leslie L Deck filed Critical Zygo Corp
Priority to JP2007509660A priority Critical patent/JP2007534942A/en
Publication of WO2005106386A2 publication Critical patent/WO2005106386A2/en
Publication of WO2005106386A3 publication Critical patent/WO2005106386A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02084—Processing in the Fourier or frequency domain when not imaged in the frequency domain
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Abstract

Scanning interferometry method and related systems (50) are descirbed in which scanning interferometry data for a test object (53) is provided. The data typically include intensity values for each of multiple scan positions for each of different spatial locations of the test object. The intensity values for each spatial location typically define an interference signal for the spatial location. The intensity values for a common scan position typically define a data set for that scan position. Scan values are provided for each position. In general, scan value increments between various scan positions are non-uniform (e.g., different). Information is determined about the test object based on the scanning interferometry data and scan values. Typically, the determination includes transforming (67) at least some of the interference signals into a frequency domain with respect to the scan values.
PCT/US2005/013741 2004-04-22 2005-04-22 Vibration resistant interferometry WO2005106386A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007509660A JP2007534942A (en) 2004-04-22 2005-04-22 Vibration-resistant interferometry

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US56447704P 2004-04-22 2004-04-22
US60/564,477 2004-04-22
TW94112683 2005-04-21
TW94112683A TW200538702A (en) 2004-04-22 2005-04-21 Vibration resistant interferometry

Publications (2)

Publication Number Publication Date
WO2005106386A2 WO2005106386A2 (en) 2005-11-10
WO2005106386A3 true WO2005106386A3 (en) 2006-11-23

Family

ID=35242290

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/013741 WO2005106386A2 (en) 2004-04-22 2005-04-22 Vibration resistant interferometry

Country Status (2)

Country Link
JP (1) JP2007534942A (en)
WO (1) WO2005106386A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009079334A2 (en) * 2007-12-14 2009-06-25 Zygo Corporation Analyzing surface structure using scanning interferometry
JP2010112865A (en) * 2008-11-07 2010-05-20 Ryoka Systems Inc White interference measuring device and method
JP5477183B2 (en) * 2010-06-14 2014-04-23 オムロン株式会社 Measuring device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5323012A (en) * 1991-08-16 1994-06-21 The Regents Of The University Of California Apparatus for positioning a stage
US5589938A (en) * 1995-07-10 1996-12-31 Zygo Corporation Method and apparatus for optical interferometric measurements with reduced sensitivity to vibration
US6624894B2 (en) * 2001-06-25 2003-09-23 Veeco Instruments Inc. Scanning interferometry with reference signal

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5323012A (en) * 1991-08-16 1994-06-21 The Regents Of The University Of California Apparatus for positioning a stage
US5589938A (en) * 1995-07-10 1996-12-31 Zygo Corporation Method and apparatus for optical interferometric measurements with reduced sensitivity to vibration
US5777741A (en) * 1995-07-10 1998-07-07 Zygo Corporation Method and apparatus for optical interferometric measurements with reduced sensitivity to vibration
US6624894B2 (en) * 2001-06-25 2003-09-23 Veeco Instruments Inc. Scanning interferometry with reference signal

Also Published As

Publication number Publication date
JP2007534942A (en) 2007-11-29
WO2005106386A2 (en) 2005-11-10

Similar Documents

Publication Publication Date Title
WO2008055060A3 (en) Vibration resistant interferometry
WO2006130802A3 (en) Apparatus, method and system for performing phase-resolved optical frequency domain imaging
WO2005114096A3 (en) Methods and systems for determining optical properties using low-coherence interference signals
WO2004079294A3 (en) Characterizing and profiling complex surface structures using scanning interferometry
WO2005029193A3 (en) Interferometric analysis of surfaces.
WO2007092911A3 (en) Methods, arrangements and systems for obtaining information associated with an anatomical sample using optical microscopy
WO2007059088A3 (en) Interferometer and method for measuring characteristics of optically unresolved surface features
DE50000729D1 (en) PROCESS AND DEVICE FOR OBJECT IMAGE
WO2002065444A3 (en) Electronic color display instrument and method
WO2002052542A3 (en) Method and arrangement for processing a noise signal from a noise source
WO2006017837A3 (en) Process, system and software arrangement for determining at least one location in a sample using an optical coherence tomography
WO2005050896A3 (en) Method and system for antenna interference cancellation
WO2004003464A3 (en) Frequency-scanning interferometer with non-specular reference surface
WO2006068875A3 (en) Compensating for time varying phase changes in interferometric measurements
WO2005089299A3 (en) Interferometer having an auxiliary reference surface
WO2006125131A3 (en) Analyzing low-coherence interferometry signals for thin film structures
ATE306676T1 (en) ARRANGEMENT AND METHOD FOR DISTANCE MEASUREMENT BY USING INPHASE AND SQUARE SIGNALS IN A RADIO SYSTEM
WO2003023383A3 (en) Imaging apparatus and method
DE59914782D1 (en) Method for noise removal of a microphone signal
WO2004079295A3 (en) Profiling complex surface structures using scanning interferometry
EP1286306A3 (en) Data processing apparatus and method of processing data
WO2005106386A3 (en) Vibration resistant interferometry
AU2001277593A1 (en) Method and device for classifying vehicles
TW200723980A (en) Differential comparison inspection method and apparatus thereof
ATE265783T1 (en) METHOD AND DEVICE FOR ECHOUGH REDUCTION

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KM KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SM SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2007509660

Country of ref document: JP

NENP Non-entry into the national phase

Ref country code: DE

WWW Wipo information: withdrawn in national office

Country of ref document: DE

122 Ep: pct application non-entry in european phase