WO2005101497A3 - Method and apparats for lubricating microelectromechanical devices in packages - Google Patents

Method and apparats for lubricating microelectromechanical devices in packages Download PDF

Info

Publication number
WO2005101497A3
WO2005101497A3 PCT/US2005/008929 US2005008929W WO2005101497A3 WO 2005101497 A3 WO2005101497 A3 WO 2005101497A3 US 2005008929 W US2005008929 W US 2005008929W WO 2005101497 A3 WO2005101497 A3 WO 2005101497A3
Authority
WO
WIPO (PCT)
Prior art keywords
lubricating
apparats
packages
microelectromechanical devices
lubricant
Prior art date
Application number
PCT/US2005/008929
Other languages
French (fr)
Other versions
WO2005101497A2 (en
Inventor
James Dunphy
Dmitri Simonian
John Porter
Original Assignee
Reflectivity Inc
James Dunphy
Dmitri Simonian
John Porter
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Reflectivity Inc, James Dunphy, Dmitri Simonian, John Porter filed Critical Reflectivity Inc
Publication of WO2005101497A2 publication Critical patent/WO2005101497A2/en
Publication of WO2005101497A3 publication Critical patent/WO2005101497A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0005—Anti-stiction coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00912—Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
    • B81C1/0096—For avoiding stiction when the device is in use, i.e. after manufacture has been completed

Abstract

The present invention provides a lubricant container inside a microelectromechanical device package. The lubricant container contains selected lubricant that evaporates from the container and contact to a surface of the microelectromechanical device for lubricating the surface.
PCT/US2005/008929 2004-03-26 2005-03-16 Method and apparats for lubricating microelectromechanical devices in packages WO2005101497A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/811,449 2004-03-26
US10/811,449 US6979893B2 (en) 2004-03-26 2004-03-26 Packaged microelectromechanical device with lubricant

Publications (2)

Publication Number Publication Date
WO2005101497A2 WO2005101497A2 (en) 2005-10-27
WO2005101497A3 true WO2005101497A3 (en) 2006-03-16

Family

ID=34990508

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/008929 WO2005101497A2 (en) 2004-03-26 2005-03-16 Method and apparats for lubricating microelectromechanical devices in packages

Country Status (3)

Country Link
US (2) US6979893B2 (en)
TW (1) TWI349647B (en)
WO (1) WO2005101497A2 (en)

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* Cited by examiner, † Cited by third party
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WO2005104717A2 (en) * 2004-04-23 2005-11-10 Research Triangle Institute Flexible electrostatic actuator
US20070048887A1 (en) * 2005-08-26 2007-03-01 Innovative Micro Technology Wafer level hermetic bond using metal alloy
US7463404B2 (en) * 2005-11-23 2008-12-09 Miradia, Inc. Method of using a preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
US7616370B2 (en) * 2005-11-23 2009-11-10 Miradia, Inc. Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
US7723812B2 (en) * 2005-11-23 2010-05-25 Miradia, Inc. Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
EP1837303A1 (en) * 2006-03-24 2007-09-26 Infineon Technologies SensoNor AS Integrated pedestal mount for mems structure
US8067258B2 (en) 2006-06-05 2011-11-29 Applied Microstructures, Inc. Protective thin films for use during fabrication of semiconductors, MEMS, and microstructures
US7763489B2 (en) * 2006-09-27 2010-07-27 Miradia, Inc. Method of forming a micromechanical system containing a microfluidic lubricant channel
US20080248613A1 (en) * 2006-09-27 2008-10-09 Dongmin Chen Method of Forming a Micromechanical Device with Microfluidic Lubricant Channel
US7932569B2 (en) * 2006-09-27 2011-04-26 Miradia, Inc. Micromechanical device with microfluidic lubricant channel
US7430359B2 (en) * 2006-10-02 2008-09-30 Miradia, Inc. Micromechanical system containing a microfluidic lubricant channel
WO2008057960A2 (en) * 2006-11-02 2008-05-15 Miradia, Inc. Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
US20180108554A1 (en) * 2016-10-14 2018-04-19 Research Foundation Of The City University Of New York Method for self-aligning a thin-film device on a host substrate

Citations (2)

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Publication number Priority date Publication date Assignee Title
US6300294B1 (en) * 1998-11-16 2001-10-09 Texas Instruments Incorporated Lubricant delivery for micromechanical devices
US6664779B2 (en) * 2000-11-16 2003-12-16 Texas Instruments Incorporated Package with environmental control material carrier

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US5287096A (en) * 1989-02-27 1994-02-15 Texas Instruments Incorporated Variable luminosity display system
US5331454A (en) * 1990-11-13 1994-07-19 Texas Instruments Incorporated Low reset voltage process for DMD
US5447600A (en) * 1994-03-21 1995-09-05 Texas Instruments Polymeric coatings for micromechanical devices
US5512374A (en) * 1994-05-09 1996-04-30 Texas Instruments Incorporated PFPE coatings for micro-mechanical devices
US5610438A (en) * 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
US5835256A (en) * 1995-06-19 1998-11-10 Reflectivity, Inc. Reflective spatial light modulator with encapsulated micro-mechanical elements
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US6952301B2 (en) * 1995-06-19 2005-10-04 Reflectivity, Inc Spatial light modulators with light blocking and absorbing areas
US5694740A (en) * 1996-03-15 1997-12-09 Analog Devices, Inc. Micromachined device packaged to reduce stiction
US5936758A (en) * 1996-04-12 1999-08-10 Texas Instruments Incorporated Method of passivating a micromechanical device within a hermetic package
US5939785A (en) * 1996-04-12 1999-08-17 Texas Instruments Incorporated Micromechanical device including time-release passivant
US6086726A (en) * 1998-05-19 2000-07-11 Sandia Corporation Method of modifying a surface
US6204085B1 (en) * 1998-09-15 2001-03-20 Texas Instruments Incorporated Reduced deformation of micromechanical devices through thermal stabilization
US6962419B2 (en) * 1998-09-24 2005-11-08 Reflectivity, Inc Micromirror elements, package for the micromirror elements, and projection system therefor
US6259551B1 (en) * 1998-09-30 2001-07-10 Texas Instruments Incorporated Passivation for micromechanical devices
US6867897B2 (en) * 2003-01-29 2005-03-15 Reflectivity, Inc Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays
US6992375B2 (en) * 2000-11-30 2006-01-31 Texas Instruments Incorporated Anchor for device package
US6906847B2 (en) * 2000-12-07 2005-06-14 Reflectivity, Inc Spatial light modulators with light blocking/absorbing areas
US6475570B2 (en) * 2000-12-29 2002-11-05 Texas Instruments Incorporated Diluent assisted lubrication of micromechanical devices
US7291363B2 (en) * 2001-06-30 2007-11-06 Texas Instruments Incorporated Lubricating micro-machined devices using fluorosurfactants
US20030064149A1 (en) * 2001-09-28 2003-04-03 Miller Seth A. Methods of applying coatings to micro electromechanical devices using a carbon dioxide carrier solvent
US6958846B2 (en) * 2002-11-26 2005-10-25 Reflectivity, Inc Spatial light modulators with light absorbing areas
US6844959B2 (en) * 2002-11-26 2005-01-18 Reflectivity, Inc Spatial light modulators with light absorbing areas
US6885494B2 (en) * 2003-02-12 2005-04-26 Reflectivity, Inc. High angle micro-mirrors and processes
US7109580B2 (en) * 2004-03-03 2006-09-19 Hymite A/S Hermetically sealed package for optical, electronic, opto-electronic and other devices

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6300294B1 (en) * 1998-11-16 2001-10-09 Texas Instruments Incorporated Lubricant delivery for micromechanical devices
US6664779B2 (en) * 2000-11-16 2003-12-16 Texas Instruments Incorporated Package with environmental control material carrier

Also Published As

Publication number Publication date
US7335535B2 (en) 2008-02-26
US6979893B2 (en) 2005-12-27
US20050214970A1 (en) 2005-09-29
US20060038269A1 (en) 2006-02-23
TWI349647B (en) 2011-10-01
WO2005101497A2 (en) 2005-10-27
TW200531921A (en) 2005-10-01

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