WO2005086633A3 - Buried-contact solar cells with self-doping contacts - Google Patents

Buried-contact solar cells with self-doping contacts Download PDF

Info

Publication number
WO2005086633A3
WO2005086633A3 PCT/US2005/003738 US2005003738W WO2005086633A3 WO 2005086633 A3 WO2005086633 A3 WO 2005086633A3 US 2005003738 W US2005003738 W US 2005003738W WO 2005086633 A3 WO2005086633 A3 WO 2005086633A3
Authority
WO
WIPO (PCT)
Prior art keywords
buried
self
contact solar
solar cells
contact
Prior art date
Application number
PCT/US2005/003738
Other languages
French (fr)
Other versions
WO2005086633A2 (en
Inventor
James Gee
Peter Hacke
Original Assignee
Advent Solar Inc
James Gee
Peter Hacke
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advent Solar Inc, James Gee, Peter Hacke filed Critical Advent Solar Inc
Priority to CN2005800041566A priority Critical patent/CN1981376B/en
Priority to CA002596961A priority patent/CA2596961A1/en
Priority to EP05752100A priority patent/EP1733426A4/en
Priority to JP2006552305A priority patent/JP2007521669A/en
Priority to AU2005220701A priority patent/AU2005220701A1/en
Publication of WO2005086633A2 publication Critical patent/WO2005086633A2/en
Publication of WO2005086633A3 publication Critical patent/WO2005086633A3/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
    • H01L31/068Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

A buried-contact solar cell, in-process buried-contact solar cell components and methods for making buried contact solar cells wherein a self-doping contact material is placed in a plurality of buried-contact surface grooves. By combining groove doping and metallization steps, the resulting solar cell is simpler and more economical to manufacture.
PCT/US2005/003738 2004-02-05 2005-02-04 Buried-contact solar cells with self-doping contacts WO2005086633A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN2005800041566A CN1981376B (en) 2004-02-05 2005-02-04 Buried-contact solar cells with self-doping contacts
CA002596961A CA2596961A1 (en) 2004-02-05 2005-02-04 Buried-contact solar cells with self-doping contacts
EP05752100A EP1733426A4 (en) 2004-02-05 2005-02-04 Buried-contact solar cells with self-doping contacts
JP2006552305A JP2007521669A (en) 2004-02-05 2005-02-04 Buried contact solar cell with self-doping contact
AU2005220701A AU2005220701A1 (en) 2004-02-05 2005-02-04 Buried-contact solar cells with self-doping contacts

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US54245404P 2004-02-05 2004-02-05
US54239004P 2004-02-05 2004-02-05
US60/542,454 2004-02-05
US60/542,390 2004-02-05
US11/050,182 US7335555B2 (en) 2004-02-05 2005-02-03 Buried-contact solar cells with self-doping contacts
US11/050,182 2005-02-03

Publications (2)

Publication Number Publication Date
WO2005086633A2 WO2005086633A2 (en) 2005-09-22
WO2005086633A3 true WO2005086633A3 (en) 2006-10-19

Family

ID=34831069

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/003738 WO2005086633A2 (en) 2004-02-05 2005-02-04 Buried-contact solar cells with self-doping contacts

Country Status (8)

Country Link
US (1) US7335555B2 (en)
EP (1) EP1733426A4 (en)
JP (1) JP2007521669A (en)
KR (1) KR20060125887A (en)
CN (1) CN1981376B (en)
AU (1) AU2005220701A1 (en)
CA (1) CA2596961A1 (en)
WO (1) WO2005086633A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8309949B2 (en) 2005-01-20 2012-11-13 Nanosolar, Inc. Optoelectronic architecture having compound conducting substrate

Families Citing this family (116)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8138413B2 (en) 2006-04-13 2012-03-20 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US7507903B2 (en) 1999-03-30 2009-03-24 Daniel Luch Substrate and collector grid structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays
US8664030B2 (en) 1999-03-30 2014-03-04 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US20090111206A1 (en) 1999-03-30 2009-04-30 Daniel Luch Collector grid, electrode structures and interrconnect structures for photovoltaic arrays and methods of manufacture
US8222513B2 (en) 2006-04-13 2012-07-17 Daniel Luch Collector grid, electrode structures and interconnect structures for photovoltaic arrays and methods of manufacture
US8198696B2 (en) 2000-02-04 2012-06-12 Daniel Luch Substrate structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays
US7276724B2 (en) * 2005-01-20 2007-10-02 Nanosolar, Inc. Series interconnected optoelectronic device module assembly
US7732229B2 (en) * 2004-09-18 2010-06-08 Nanosolar, Inc. Formation of solar cells with conductive barrier layers and foil substrates
US8399331B2 (en) 2007-10-06 2013-03-19 Solexel Laser processing for high-efficiency thin crystalline silicon solar cell fabrication
US8420435B2 (en) 2009-05-05 2013-04-16 Solexel, Inc. Ion implantation fabrication process for thin-film crystalline silicon solar cells
US9508886B2 (en) 2007-10-06 2016-11-29 Solexel, Inc. Method for making a crystalline silicon solar cell substrate utilizing flat top laser beam
US7790574B2 (en) 2004-12-20 2010-09-07 Georgia Tech Research Corporation Boron diffusion in silicon devices
US8927315B1 (en) 2005-01-20 2015-01-06 Aeris Capital Sustainable Ip Ltd. High-throughput assembly of series interconnected solar cells
DE102005045704A1 (en) * 2005-09-19 2007-03-22 Gebr. Schmid Gmbh & Co. Method and device for processing substrates, in particular solar cells
WO2007059577A1 (en) * 2005-11-24 2007-05-31 Newsouth Innovations Pty Limited Metallisation method for thin-film semiconductor structures
WO2007059551A1 (en) * 2005-11-24 2007-05-31 Newsouth Innovations Pty Limited Low area screen printed metal contact structure and method
US9865758B2 (en) 2006-04-13 2018-01-09 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US9236512B2 (en) 2006-04-13 2016-01-12 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US8822810B2 (en) 2006-04-13 2014-09-02 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US9006563B2 (en) 2006-04-13 2015-04-14 Solannex, Inc. Collector grid and interconnect structures for photovoltaic arrays and modules
US8884155B2 (en) 2006-04-13 2014-11-11 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US8729385B2 (en) 2006-04-13 2014-05-20 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
CN100576578C (en) * 2006-04-20 2009-12-30 无锡尚德太阳能电力有限公司 The method and the electrochemical depositer thereof that prepare solar cel electrode
US8035028B2 (en) * 2006-10-09 2011-10-11 Solexel, Inc. Pyramidal three-dimensional thin-film solar cells
US8293558B2 (en) * 2006-10-09 2012-10-23 Solexel, Inc. Method for releasing a thin-film substrate
US8084684B2 (en) 2006-10-09 2011-12-27 Solexel, Inc. Three-dimensional thin-film solar cells
US20080264477A1 (en) * 2006-10-09 2008-10-30 Soltaix, Inc. Methods for manufacturing three-dimensional thin-film solar cells
US8193076B2 (en) 2006-10-09 2012-06-05 Solexel, Inc. Method for releasing a thin semiconductor substrate from a reusable template
US20100304521A1 (en) * 2006-10-09 2010-12-02 Solexel, Inc. Shadow Mask Methods For Manufacturing Three-Dimensional Thin-Film Solar Cells
US7999174B2 (en) * 2006-10-09 2011-08-16 Solexel, Inc. Solar module structures and assembly methods for three-dimensional thin-film solar cells
US8512581B2 (en) * 2006-10-09 2013-08-20 Solexel, Inc. Methods for liquid transfer coating of three-dimensional substrates
EP2095404A1 (en) * 2006-12-01 2009-09-02 Advent Solar, Inc. Phosphorus-stabilized transition metal oxide diffusion barrier
KR100771378B1 (en) * 2006-12-22 2007-10-30 동부일렉트로닉스 주식회사 Semiconductor device and method for fabricating the same
WO2008080160A1 (en) * 2006-12-22 2008-07-03 Advent Solar, Inc. Interconnect technologies for back contact solar cells and modules
US20100047954A1 (en) * 2007-08-31 2010-02-25 Su Tzay-Fa Jeff Photovoltaic production line
WO2009029901A1 (en) * 2007-08-31 2009-03-05 Applied Materials, Inc. Production line module for forming multiple sized photovoltaic devices
DE102007051725B4 (en) * 2007-10-27 2014-10-30 Centrotherm Photovoltaics Ag Method for contacting solar cells
WO2009064870A2 (en) * 2007-11-13 2009-05-22 Advent Solar, Inc. Selective emitter and texture processes for back contact solar cells
US7517709B1 (en) * 2007-11-16 2009-04-14 Applied Materials, Inc. Method of forming backside point contact structures for silicon solar cells
US20090188603A1 (en) * 2008-01-25 2009-07-30 Applied Materials, Inc. Method and apparatus for controlling laminator temperature on a solar cell
DE102008017647A1 (en) * 2008-04-04 2009-10-29 Centrotherm Photovoltaics Technology Gmbh Process for producing a solar cell with a two-stage doping
WO2009145857A1 (en) * 2008-04-18 2009-12-03 1366 Technologies Inc. Methods to pattern diffusion layers in solar cells and solar cells made by such methods
US8207012B2 (en) * 2008-04-28 2012-06-26 Solopower, Inc. Method and apparatus for achieving low resistance contact to a metal based thin film solar cell
US20090266398A1 (en) * 2008-04-28 2009-10-29 Burak Metin Method and Apparatus to Form Back Contacts to Flexible CIGS Solar Cells
US20090266399A1 (en) * 2008-04-28 2009-10-29 Basol Bulent M Metallic foil substrate and packaging technique for thin film solar cells and modules
US20100012172A1 (en) * 2008-04-29 2010-01-21 Advent Solar, Inc. Photovoltaic Modules Manufactured Using Monolithic Module Assembly Techniques
DE102009020821A1 (en) 2008-05-13 2009-12-03 Samsung Electronics Co., Ltd., Suwon Semiconductor solar cells with front electrodes and method of making the same
US7964499B2 (en) * 2008-05-13 2011-06-21 Samsung Electronics Co., Ltd. Methods of forming semiconductor solar cells having front surface electrodes
KR20090121629A (en) * 2008-05-22 2009-11-26 삼성전자주식회사 Solar cell and solar cell module using the same
US20100144080A1 (en) * 2008-06-02 2010-06-10 Solexel, Inc. Method and apparatus to transfer coat uneven surface
CN102131950B (en) * 2008-06-19 2014-05-28 实用光有限公司 Light induced patterning
CN101656273B (en) * 2008-08-18 2011-07-13 中芯国际集成电路制造(上海)有限公司 Selective emitter solar battery unit and manufacturing method thereof
US8053867B2 (en) 2008-08-20 2011-11-08 Honeywell International Inc. Phosphorous-comprising dopants and methods for forming phosphorous-doped regions in semiconductor substrates using phosphorous-comprising dopants
JP2012501550A (en) * 2008-08-27 2012-01-19 アプライド マテリアルズ インコーポレイテッド Back-contact solar cells using printed dielectric barriers
EP2329530A4 (en) * 2008-08-27 2013-03-20 Applied Materials Inc Back contact solar cell modules
US7951696B2 (en) * 2008-09-30 2011-05-31 Honeywell International Inc. Methods for simultaneously forming N-type and P-type doped regions using non-contact printing processes
US8652872B2 (en) * 2008-10-12 2014-02-18 Utilight Ltd. Solar cells and method of manufacturing thereof
WO2010057060A2 (en) 2008-11-13 2010-05-20 Solexel, Inc. Methods and systems for manufacturing thin-film solar cells
US8288195B2 (en) * 2008-11-13 2012-10-16 Solexel, Inc. Method for fabricating a three-dimensional thin-film semiconductor substrate from a template
EP2371006A4 (en) * 2008-11-26 2013-05-01 Solexel Inc Truncated pyramid structures for see-through solar cells
DE102008063558A1 (en) * 2008-12-08 2010-06-10 Gebr. Schmid Gmbh & Co. Method for processing the surface of a wafer for producing a solar cell and wafer
US8518170B2 (en) 2008-12-29 2013-08-27 Honeywell International Inc. Boron-comprising inks for forming boron-doped regions in semiconductor substrates using non-contact printing processes and methods for fabricating such boron-comprising inks
US8906218B2 (en) 2010-05-05 2014-12-09 Solexel, Inc. Apparatus and methods for uniformly forming porous semiconductor on a substrate
US8926803B2 (en) * 2009-01-15 2015-01-06 Solexel, Inc. Porous silicon electro-etching system and method
US9076642B2 (en) 2009-01-15 2015-07-07 Solexel, Inc. High-Throughput batch porous silicon manufacturing equipment design and processing methods
WO2010081198A1 (en) * 2009-01-16 2010-07-22 Newsouth Innovations Pty Limited Solar cell methods and structures
MY162405A (en) * 2009-02-06 2017-06-15 Solexel Inc Trench Formation Method For Releasing A Thin-Film Substrate From A Reusable Semiconductor Template
US8828517B2 (en) 2009-03-23 2014-09-09 Solexel, Inc. Structure and method for improving solar cell efficiency and mechanical strength
EP2419306B1 (en) * 2009-04-14 2016-03-30 Solexel, Inc. High efficiency epitaxial chemical vapor deposition (cvd) reactor
US9099584B2 (en) * 2009-04-24 2015-08-04 Solexel, Inc. Integrated three-dimensional and planar metallization structure for thin film solar cells
US9318644B2 (en) 2009-05-05 2016-04-19 Solexel, Inc. Ion implantation and annealing for thin film crystalline solar cells
MY165969A (en) 2009-05-05 2018-05-18 Solexel Inc High-productivity porous semiconductor manufacturing equipment
US8247243B2 (en) 2009-05-22 2012-08-21 Nanosolar, Inc. Solar cell interconnection
US8445314B2 (en) * 2009-05-22 2013-05-21 Solexel, Inc. Method of creating reusable template for detachable thin film substrate
WO2010138976A1 (en) * 2009-05-29 2010-12-02 Solexel, Inc. Three-dimensional thin-film semiconductor substrate with through-holes and methods of manufacturing
US8324089B2 (en) 2009-07-23 2012-12-04 Honeywell International Inc. Compositions for forming doped regions in semiconductor substrates, methods for fabricating such compositions, and methods for forming doped regions using such compositions
DE102009038141A1 (en) * 2009-08-13 2011-02-17 Gebr. Schmid Gmbh & Co. Process for producing an emitter electrode on a crystalline silicon solar cell and corresponding silicon solar cell
US20110048505A1 (en) * 2009-08-27 2011-03-03 Gabriela Bunea Module Level Solution to Solar Cell Polarization Using an Encapsulant with Opened UV Transmission Curve
CN102576764A (en) * 2009-10-15 2012-07-11 Lg伊诺特有限公司 Solar photovoltaic device and a production method for the same
US8614115B2 (en) * 2009-10-30 2013-12-24 International Business Machines Corporation Photovoltaic solar cell device manufacture
US20130233378A1 (en) 2009-12-09 2013-09-12 Solexel, Inc. High-efficiency photovoltaic back-contact solar cell structures and manufacturing methods using semiconductor wafers
US8227292B2 (en) * 2009-12-15 2012-07-24 E I Du Pont De Nemours And Company Process for the production of a MWT silicon solar cell
US8241945B2 (en) * 2010-02-08 2012-08-14 Suniva, Inc. Solar cells and methods of fabrication thereof
WO2011100647A2 (en) 2010-02-12 2011-08-18 Solexel, Inc. Double-sided reusable template for fabrication of semiconductor substrates for photovoltaic cell and microelectronics device manufacturing
US20110272024A1 (en) * 2010-04-13 2011-11-10 Applied Materials, Inc. MULTI-LAYER SiN FOR FUNCTIONAL AND OPTICAL GRADED ARC LAYERS ON CRYSTALLINE SOLAR CELLS
WO2011156657A2 (en) 2010-06-09 2011-12-15 Solexel, Inc. High productivity thin film deposition method and system
KR101203623B1 (en) * 2010-06-18 2012-11-21 엘지전자 주식회사 Solar cell and method for manufacturing the same
US8377738B2 (en) 2010-07-01 2013-02-19 Sunpower Corporation Fabrication of solar cells with counter doping prevention
KR101676750B1 (en) * 2010-07-28 2016-11-17 주성엔지니어링(주) Wafer type solar cell and method for manufacturing the same
MY158500A (en) 2010-08-05 2016-10-14 Solexel Inc Backplane reinforcement and interconnects for solar cells
DE102010037088A1 (en) 2010-08-20 2012-02-23 Roth & Rau Ag Method for producing an improved contact between a silver-containing interconnect and silicon
KR101141578B1 (en) * 2010-09-14 2012-05-17 (주)세미머티리얼즈 Method for manufacturing a Solar Cell
KR20140009984A (en) * 2010-11-17 2014-01-23 히타치가세이가부시끼가이샤 Method for producing solar cell
CN103155166B (en) * 2010-11-17 2017-05-03 日立化成株式会社 Method for producing solar cell
WO2012067118A1 (en) * 2010-11-17 2012-05-24 日立化成工業株式会社 Method for producing solar cell
US8858843B2 (en) * 2010-12-14 2014-10-14 Innovalight, Inc. High fidelity doping paste and methods thereof
CN102157626B (en) * 2011-03-22 2013-02-13 上海采日光伏技术有限公司 Method for reducing contact resistance between emitter and buried gate of solar battery
US9748414B2 (en) 2011-05-20 2017-08-29 Arthur R. Zingher Self-activated front surface bias for a solar cell
US8629294B2 (en) 2011-08-25 2014-01-14 Honeywell International Inc. Borate esters, boron-comprising dopants, and methods of fabricating boron-comprising dopants
US8975170B2 (en) 2011-10-24 2015-03-10 Honeywell International Inc. Dopant ink compositions for forming doped regions in semiconductor substrates, and methods for fabricating dopant ink compositions
TWI470816B (en) * 2011-12-28 2015-01-21 Au Optronics Corp Solar cell
US20130247975A1 (en) * 2012-03-22 2013-09-26 Samsung Electronics Co., Ltd. Solar cell
US9812590B2 (en) 2012-10-25 2017-11-07 Sunpower Corporation Bifacial solar cell module with backside reflector
US9379258B2 (en) 2012-11-05 2016-06-28 Solexel, Inc. Fabrication methods for monolithically isled back contact back junction solar cells
CN102969399B (en) * 2012-11-20 2015-11-11 上饶光电高科技有限公司 MWT solar cell and preparation method thereof
US9035172B2 (en) 2012-11-26 2015-05-19 Sunpower Corporation Crack resistant solar cell modules
US8796061B2 (en) 2012-12-21 2014-08-05 Sunpower Corporation Module assembly for thin solar cells
US20140264998A1 (en) * 2013-03-14 2014-09-18 Q1 Nanosystems Corporation Methods for manufacturing three-dimensional metamaterial devices with photovoltaic bristles
CN103346205A (en) * 2013-06-08 2013-10-09 中山大学 Method for preparing crystalline silicon solar cell with cross vertical emitting electrode structure
DE102013106272B4 (en) * 2013-06-17 2018-09-20 Hanwha Q Cells Gmbh Wafer solar cell and solar cell manufacturing process
DE102013108422A1 (en) * 2013-08-05 2015-02-05 Universität Konstanz Method for producing doped or metallized regions in a solar cell substrate and corresponding solar cell
US9685571B2 (en) 2013-08-14 2017-06-20 Sunpower Corporation Solar cell module with high electric susceptibility layer
CN106256025A (en) * 2014-02-26 2016-12-21 索莱克赛尔公司 The self-aligned contacts part of back contact solar cell
TWI619260B (en) * 2016-06-22 2018-03-21 英穩達科技股份有限公司 N-type rear emitter bifacial solar cell
KR101975970B1 (en) * 2016-12-23 2019-05-08 이화여자대학교 산학협력단 Hollow composite, method of preparing the same, and electrocatalyst including the same
CN112739031B (en) * 2021-03-30 2021-06-08 四川英创力电子科技股份有限公司 Printed circuit board with side-face metalized groove and processing technology thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5258077A (en) * 1991-09-13 1993-11-02 Solec International, Inc. High efficiency silicon solar cells and method of fabrication

Family Cites Families (93)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7310279A (en) * 1972-07-31 1974-02-04
US3936319A (en) 1973-10-30 1976-02-03 General Electric Company Solar cell
US3903427A (en) 1973-12-28 1975-09-02 Hughes Aircraft Co Solar cell connections
US3903428A (en) 1973-12-28 1975-09-02 Hughes Aircraft Co Solar cell contact design
US4032960A (en) 1975-01-30 1977-06-28 General Electric Company Anisotropic resistor for electrical feed throughs
US3990097A (en) 1975-09-18 1976-11-02 Solarex Corporation Silicon solar energy cell having improved back contact and method forming same
US4165558A (en) 1977-11-21 1979-08-28 Armitage William F Jr Fabrication of photovoltaic devices by solid phase epitaxy
US4152824A (en) 1977-12-30 1979-05-08 Mobil Tyco Solar Energy Corporation Manufacture of solar cells
US4173496A (en) 1978-05-30 1979-11-06 Texas Instruments Incorporated Integrated solar cell array
US4234352A (en) 1978-07-26 1980-11-18 Electric Power Research Institute, Inc. Thermophotovoltaic converter and cell for use therein
US4190852A (en) 1978-09-14 1980-02-26 Warner Raymond M Jr Photovoltaic semiconductor device and method of making same
US4184897A (en) 1978-09-21 1980-01-22 General Electric Company Droplet migration doping using carrier droplets
US4297391A (en) 1979-01-16 1981-10-27 Solarex Corporation Method of applying electrical contacts to a photovoltaic cell
US4227942A (en) 1979-04-23 1980-10-14 General Electric Company Photovoltaic semiconductor devices and methods of making same
US4427839A (en) 1981-11-09 1984-01-24 General Electric Company Faceted low absorptance solar cell
JPS59100197A (en) * 1982-12-01 1984-06-09 Japan Atom Energy Res Inst Radiation-resistant oil
US4478879A (en) 1983-02-10 1984-10-23 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Screen printed interdigitated back contact solar cell
US4626613A (en) 1983-12-23 1986-12-02 Unisearch Limited Laser grooved solar cell
US4536607A (en) 1984-03-01 1985-08-20 Wiesmann Harold J Photovoltaic tandem cell
AU570309B2 (en) 1984-03-26 1988-03-10 Unisearch Limited Buried contact solar cell
US4595790A (en) 1984-12-28 1986-06-17 Sohio Commercial Development Co. Method of making current collector grid and materials therefor
US4667060A (en) 1985-05-28 1987-05-19 Spire Corporation Back junction photovoltaic solar cell
US4667058A (en) 1985-07-01 1987-05-19 Solarex Corporation Method of fabricating electrically isolated photovoltaic modules arrayed on a substrate and product obtained thereby
US4663829A (en) 1985-10-11 1987-05-12 Energy Conversion Devices, Inc. Process and apparatus for continuous production of lightweight arrays of photovoltaic cells
US4663828A (en) 1985-10-11 1987-05-12 Energy Conversion Devices, Inc. Process and apparatus for continuous production of lightweight arrays of photovoltaic cells
US4751191A (en) 1987-07-08 1988-06-14 Mobil Solar Energy Corporation Method of fabricating solar cells with silicon nitride coating
US4838952A (en) * 1988-04-29 1989-06-13 Spectrolab, Inc. Controlled reflectance solar cell
US4927770A (en) 1988-11-14 1990-05-22 Electric Power Research Inst. Corp. Of District Of Columbia Method of fabricating back surface point contact solar cells
DE3901042A1 (en) 1989-01-14 1990-07-26 Nukem Gmbh METHOD AND DEVICE FOR PRODUCING A SEMICONDUCTOR LAYER SYSTEM
US5103268A (en) 1989-03-30 1992-04-07 Siemens Solar Industries, L.P. Semiconductor device with interfacial electrode layer
US5011782A (en) 1989-03-31 1991-04-30 Electric Power Research Institute Method of making passivated antireflective coating for photovoltaic cell
US5053083A (en) 1989-05-08 1991-10-01 The Board Of Trustees Of The Leland Stanford Junior University Bilevel contact solar cells
CA2024662A1 (en) 1989-09-08 1991-03-09 Robert Oswald Monolithic series and parallel connected photovoltaic module
US5011565A (en) 1989-12-06 1991-04-30 Mobil Solar Energy Corporation Dotted contact solar cell and method of making same
US5067985A (en) 1990-06-08 1991-11-26 The United States Of America As Represented By The Secretary Of The Air Force Back-contact vertical-junction solar cell and method
US5118362A (en) 1990-09-24 1992-06-02 Mobil Solar Energy Corporation Electrical contacts and methods of manufacturing same
US5178685A (en) 1991-06-11 1993-01-12 Mobil Solar Energy Corporation Method for forming solar cell contacts and interconnecting solar cells
US5425816A (en) 1991-08-19 1995-06-20 Spectrolab, Inc. Electrical feedthrough structure and fabrication method
US5646397A (en) 1991-10-08 1997-07-08 Unisearch Limited Optical design for photo-cell
JPH05145094A (en) 1991-11-22 1993-06-11 Mitsubishi Electric Corp Semiconductor device and manufacture thereof
AU663350B2 (en) 1991-12-09 1995-10-05 Csg Solar Ag Buried contact, interconnected thin film and bulk photovoltaic cells
DE4310206C2 (en) 1993-03-29 1995-03-09 Siemens Ag Method for producing a solar cell from a substrate wafer
US5468652A (en) 1993-07-14 1995-11-21 Sandia Corporation Method of making a back contacted solar cell
AUPM483494A0 (en) 1994-03-31 1994-04-28 Pacific Solar Pty Limited Multiple layer thin film solar cells
AUPM982294A0 (en) 1994-12-02 1995-01-05 Pacific Solar Pty Limited Method of manufacturing a multilayer solar cell
AUPM996094A0 (en) 1994-12-08 1995-01-05 Pacific Solar Pty Limited Multilayer solar cells with bypass diode protection
DE19508712C2 (en) 1995-03-10 1997-08-07 Siemens Solar Gmbh Solar cell with back surface field and manufacturing process
US5547516A (en) 1995-05-15 1996-08-20 Luch; Daniel Substrate structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays
CA2232857C (en) 1995-10-05 2003-05-13 Jalal Salami Structure and fabrication process for self-aligned locally deep-diffused emitter (salde) solar cell
DE69513203T2 (en) 1995-10-31 2000-07-20 Ecole Polytech BATTERY ARRANGEMENT OF PHOTOVOLTAIC CELLS AND PRODUCTION METHOD
US5641362A (en) 1995-11-22 1997-06-24 Ebara Solar, Inc. Structure and fabrication process for an aluminum alloy junction self-aligned back contact silicon solar cell
DE19549228A1 (en) 1995-12-21 1997-06-26 Heidenhain Gmbh Dr Johannes Optoelectronic sensor component
AU735142B2 (en) 1996-09-26 2001-07-05 Akzo Nobel N.V. Method of manufacturing a photovoltaic foil
US6162658A (en) 1996-10-14 2000-12-19 Unisearch Limited Metallization of buried contact solar cells
JP3249408B2 (en) 1996-10-25 2002-01-21 昭和シェル石油株式会社 Method and apparatus for manufacturing thin film light absorbing layer of thin film solar cell
JP3249407B2 (en) 1996-10-25 2002-01-21 昭和シェル石油株式会社 Thin-film solar cells composed of chalcopyrite-based multi-compound semiconductor thin-film light-absorbing layers
US6091021A (en) 1996-11-01 2000-07-18 Sandia Corporation Silicon cells made by self-aligned selective-emitter plasma-etchback process
US5871591A (en) 1996-11-01 1999-02-16 Sandia Corporation Silicon solar cells made by a self-aligned, selective-emitter, plasma-etchback process
DE19650111B4 (en) 1996-12-03 2004-07-01 Siemens Solar Gmbh Low shading solar cell and manufacturing method
AUPO638997A0 (en) 1997-04-23 1997-05-22 Unisearch Limited Metal contact scheme using selective silicon growth
US6180869B1 (en) * 1997-05-06 2001-01-30 Ebara Solar, Inc. Method and apparatus for self-doping negative and positive electrodes for silicon solar cells and other devices
US6339013B1 (en) 1997-05-13 2002-01-15 The Board Of Trustees Of The University Of Arkansas Method of doping silicon, metal doped silicon, method of making solar cells, and solar cells
EP0881694A1 (en) 1997-05-30 1998-12-02 Interuniversitair Micro-Elektronica Centrum Vzw Solar cell and process of manufacturing the same
US5951786A (en) 1997-12-19 1999-09-14 Sandia Corporation Laminated photovoltaic modules using back-contact solar cells
US5972732A (en) 1997-12-19 1999-10-26 Sandia Corporation Method of monolithic module assembly
WO1999048136A2 (en) 1998-03-13 1999-09-23 Steffen Keller Solar cell arrangement
JP3672436B2 (en) 1998-05-19 2005-07-20 シャープ株式会社 Method for manufacturing solar battery cell
US6081017A (en) 1998-05-28 2000-06-27 Samsung Electronics Co., Ltd. Self-biased solar cell and module adopting the same
AUPP437598A0 (en) 1998-06-29 1998-07-23 Unisearch Limited A self aligning method for forming a selective emitter and metallization in a solar cell
AUPP699798A0 (en) 1998-11-06 1998-12-03 Pacific Solar Pty Limited Thin films with light trapping
DE19854269B4 (en) 1998-11-25 2004-07-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Thin-film solar cell arrangement and method for producing the same
US6262359B1 (en) 1999-03-17 2001-07-17 Ebara Solar, Inc. Aluminum alloy back junction solar cell and a process for fabrication thereof
US6184047B1 (en) * 1999-05-27 2001-02-06 St Assembly Test Services Pte Ltd Contactor sleeve assembly for a pick and place semiconductor device handler
JP2001077382A (en) 1999-09-08 2001-03-23 Sanyo Electric Co Ltd Photovoltaic device
AU7644600A (en) 1999-10-13 2001-04-23 Centrotherm Elektrische Anlagen Gmbh And Co. Method and device for producing solar cells
US6632730B1 (en) 1999-11-23 2003-10-14 Ebara Solar, Inc. Method for self-doping contacts to a semiconductor
DE10020541A1 (en) 2000-04-27 2001-11-08 Univ Konstanz Method of manufacturing a solar cell and solar cell
DE10021440A1 (en) 2000-05-03 2001-11-15 Univ Konstanz Process for producing a solar cell and solar cell produced by this process
JP2003533053A (en) 2000-05-05 2003-11-05 ユニサーチ リミテツド Low area metal contacts for photovoltaic devices
US20040219801A1 (en) 2002-04-25 2004-11-04 Oswald Robert S Partially transparent photovoltaic modules
WO2002005352A2 (en) 2000-07-06 2002-01-17 Bp Corporation North America Inc. Partially transparent photovoltaic modules
DE10047556A1 (en) * 2000-09-22 2002-04-11 Univ Konstanz Process for producing a solar cell and solar cell produced by this process
US20020117199A1 (en) 2001-02-06 2002-08-29 Oswald Robert S. Process for producing photovoltaic devices
US20030044539A1 (en) 2001-02-06 2003-03-06 Oswald Robert S. Process for producing photovoltaic devices
KR100786855B1 (en) 2001-08-24 2007-12-20 삼성에스디아이 주식회사 Solar cell using ferroelectric material
DE10142481A1 (en) 2001-08-31 2003-03-27 Rudolf Hezel Solar cell and method for producing such
US6559497B2 (en) 2001-09-06 2003-05-06 Taiwan Semiconductor Manufacturing Co., Ltd. Microelectronic capacitor with barrier layer
US20030116185A1 (en) 2001-11-05 2003-06-26 Oswald Robert S. Sealed thin film photovoltaic modules
US7259321B2 (en) 2002-01-07 2007-08-21 Bp Corporation North America Inc. Method of manufacturing thin film photovoltaic modules
US6777729B1 (en) 2002-09-25 2004-08-17 International Radiation Detectors, Inc. Semiconductor photodiode with back contacts
US7388147B2 (en) 2003-04-10 2008-06-17 Sunpower Corporation Metal contact structure for solar cell and method of manufacture
US7170001B2 (en) 2003-06-26 2007-01-30 Advent Solar, Inc. Fabrication of back-contacted silicon solar cells using thermomigration to create conductive vias
US7649141B2 (en) 2003-06-30 2010-01-19 Advent Solar, Inc. Emitter wrap-through back contact solar cells on thin silicon wafers

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5258077A (en) * 1991-09-13 1993-11-02 Solec International, Inc. High efficiency silicon solar cells and method of fabrication

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1733426A4 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8309949B2 (en) 2005-01-20 2012-11-13 Nanosolar, Inc. Optoelectronic architecture having compound conducting substrate

Also Published As

Publication number Publication date
US20050172998A1 (en) 2005-08-11
US7335555B2 (en) 2008-02-26
CN1981376B (en) 2010-11-10
EP1733426A4 (en) 2010-03-17
JP2007521669A (en) 2007-08-02
CA2596961A1 (en) 2005-09-22
WO2005086633A2 (en) 2005-09-22
AU2005220701A1 (en) 2005-09-22
KR20060125887A (en) 2006-12-06
EP1733426A2 (en) 2006-12-20
CN1981376A (en) 2007-06-13

Similar Documents

Publication Publication Date Title
WO2005086633A3 (en) Buried-contact solar cells with self-doping contacts
WO2006029250A3 (en) Process and fabrication methods for emitter wrap through back contact solar cells
WO2008093114A3 (en) Method of preparing a primary electrode array for photovoltaic electrochemical cell arrays
WO2010129163A3 (en) Photovoltaic cells and methods to enhance light trapping in semiconductor layer stacks
WO2010056800A3 (en) A method of forming front contacts to a silicon solar cell without patterning
MY155779A (en) Solar cell contact formation using laser ablation
WO2008115814A3 (en) Solar cells
TW200623431A (en) Process and fabrication methods for emitter wrap through back contact solar cells
WO2007126441A3 (en) Back-contact photovoltaic cells
WO2010126572A3 (en) Bifacial solar cells with back surface reflector
WO2009052511A3 (en) Mono-silicon solar cells
WO2006053032A8 (en) Thermal process for creation of an in-situ junction layer in cigs
WO2010019532A3 (en) Compositions and processes for forming photovoltaic devices
TW200733408A (en) Solar cell with physically separated distributed electrical contacts
WO2010071341A3 (en) Solar cell and method of manufacturing the same
WO2008070266A3 (en) Methods for manufacturing three-dimensional thin-film solar cells
WO2009114832A3 (en) Translucent solar cells
TW200703672A (en) Thermal process for creation of an in-situ junction layer in CIGS
WO2008078755A1 (en) Cell, electrode, and collector used in them
WO2006135443A3 (en) Back-contact photovoltaic cells
WO2010135153A3 (en) Back contact solar cells with effective and efficient designs and corresponding patterning processes
WO2009150654A3 (en) Solar cell with funnel-like groove structure
WO2009045293A3 (en) Photovoltaic devices including an interfacial layer
WO2008127449A3 (en) Doping techniques for group ibiiiavia compound layers
WO2010044847A3 (en) Nano-patterned active layers formed by nano-imprint lithography

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SM SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

WWE Wipo information: entry into national phase

Ref document number: 2006552305

Country of ref document: JP

WWE Wipo information: entry into national phase

Ref document number: 2005752100

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 200580004156.6

Country of ref document: CN

NENP Non-entry into the national phase

Ref country code: DE

WWW Wipo information: withdrawn in national office

Ref document number: DE

WWE Wipo information: entry into national phase

Ref document number: 2005220701

Country of ref document: AU

WWE Wipo information: entry into national phase

Ref document number: 1020067017882

Country of ref document: KR

WWE Wipo information: entry into national phase

Ref document number: 3201/CHENP/2006

Country of ref document: IN

ENP Entry into the national phase

Ref document number: 2005220701

Country of ref document: AU

Date of ref document: 20050204

Kind code of ref document: A

WWP Wipo information: published in national office

Ref document number: 2005220701

Country of ref document: AU

WWP Wipo information: published in national office

Ref document number: 1020067017882

Country of ref document: KR

WWP Wipo information: published in national office

Ref document number: 2005752100

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 2596961

Country of ref document: CA