WO2005085932A3 - Altering temporal response of micro electromechanical elements - Google Patents

Altering temporal response of micro electromechanical elements Download PDF

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Publication number
WO2005085932A3
WO2005085932A3 PCT/US2005/005919 US2005005919W WO2005085932A3 WO 2005085932 A3 WO2005085932 A3 WO 2005085932A3 US 2005005919 W US2005005919 W US 2005005919W WO 2005085932 A3 WO2005085932 A3 WO 2005085932A3
Authority
WO
WIPO (PCT)
Prior art keywords
micro electromechanical
temporal response
electromechanical elements
elements
altering
Prior art date
Application number
PCT/US2005/005919
Other languages
French (fr)
Other versions
WO2005085932A9 (en
WO2005085932A2 (en
Inventor
Manish Kothari
William J Cummings
Original Assignee
Idc Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idc Llc filed Critical Idc Llc
Priority to EP05732329A priority Critical patent/EP1740996A2/en
Priority to AU2005218462A priority patent/AU2005218462A1/en
Priority to BRPI0508380-0A priority patent/BRPI0508380A/en
Publication of WO2005085932A2 publication Critical patent/WO2005085932A2/en
Publication of WO2005085932A3 publication Critical patent/WO2005085932A3/en
Priority to IL177530A priority patent/IL177530A0/en
Publication of WO2005085932A9 publication Critical patent/WO2005085932A9/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

Abstract

An array of movable elements is arranged on a substrate. Each element has a cavity and a movable member to move through the cavity. The pressure resistance of the elements varies, allowing actuation signals to be manipulated to activate elements with different pressure resistance at different levels of the actuation signal.
PCT/US2005/005919 2004-03-03 2005-02-25 Altering temporal response of micro electromechanical elements WO2005085932A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP05732329A EP1740996A2 (en) 2004-03-03 2005-02-25 Altering temporal response of micro electromechanical elements
AU2005218462A AU2005218462A1 (en) 2004-03-03 2005-02-25 Altering temporal response of micro electromechanical elements
BRPI0508380-0A BRPI0508380A (en) 2004-03-03 2005-02-25 alteration of temporal response of microelectromechanical elements
IL177530A IL177530A0 (en) 2004-03-03 2006-08-16 Altering temporal response of micro electromechanical elements

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/794,737 US7119945B2 (en) 2004-03-03 2004-03-03 Altering temporal response of microelectromechanical elements
US10/794,737 2004-03-03

Publications (3)

Publication Number Publication Date
WO2005085932A2 WO2005085932A2 (en) 2005-09-15
WO2005085932A3 true WO2005085932A3 (en) 2005-10-13
WO2005085932A9 WO2005085932A9 (en) 2006-11-02

Family

ID=34912338

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/005919 WO2005085932A2 (en) 2004-03-03 2005-02-25 Altering temporal response of micro electromechanical elements

Country Status (8)

Country Link
US (1) US7119945B2 (en)
EP (1) EP1740996A2 (en)
CN (1) CN100485444C (en)
AU (1) AU2005218462A1 (en)
BR (1) BRPI0508380A (en)
IL (1) IL177530A0 (en)
TW (2) TWI314133B (en)
WO (1) WO2005085932A2 (en)

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