WO2005076794A3 - Die encapsulation using a porous carrier - Google Patents

Die encapsulation using a porous carrier Download PDF

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Publication number
WO2005076794A3
WO2005076794A3 PCT/US2005/001529 US2005001529W WO2005076794A3 WO 2005076794 A3 WO2005076794 A3 WO 2005076794A3 US 2005001529 W US2005001529 W US 2005001529W WO 2005076794 A3 WO2005076794 A3 WO 2005076794A3
Authority
WO
WIPO (PCT)
Prior art keywords
porous carrier
carrier
die encapsulation
integrated circuit
circuit die
Prior art date
Application number
PCT/US2005/001529
Other languages
French (fr)
Other versions
WO2005076794A2 (en
Inventor
Owen R Fay
Craig S Amrine
Kevin R Lish
Original Assignee
Freescale Semiconductor Inc
Owen R Fay
Craig S Amrine
Kevin R Lish
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Freescale Semiconductor Inc, Owen R Fay, Craig S Amrine, Kevin R Lish filed Critical Freescale Semiconductor Inc
Priority to JP2006553132A priority Critical patent/JP4555835B2/en
Priority to EP05705847A priority patent/EP1721332A2/en
Priority to CN2005800043966A priority patent/CN1918702B/en
Publication of WO2005076794A2 publication Critical patent/WO2005076794A2/en
Publication of WO2005076794A3 publication Critical patent/WO2005076794A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/568—Temporary substrate used as encapsulation process aid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/93—Batch processes
    • H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L2224/96—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being encapsulated in a common layer, e.g. neo-wafer or pseudo-wafer, said common layer being separable into individual assemblies after connecting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A process for encapsulating an integrated circuit die (403) using a porous carrier (101). In one example, an adhesive structure (e.g. tape) is applied to a porous carrier. Integrated circuit die is then placed on the adhesive structure. The integrated circuit die is then encapsulated to form an encapsulated structure (505). The carrier is then subjected to a solvent that passes through the carrier to reduce the adhesive strength of the adhesive structure for removal of the carrier from the encapsulated structure.
PCT/US2005/001529 2004-02-09 2005-01-12 Die encapsulation using a porous carrier WO2005076794A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2006553132A JP4555835B2 (en) 2004-02-09 2005-01-12 Die encapsulation using porous carrier
EP05705847A EP1721332A2 (en) 2004-02-09 2005-01-12 Die encapsulation using a porous carrier
CN2005800043966A CN1918702B (en) 2004-02-09 2005-01-12 Die encapsulation using a porous carrier

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/774,977 2004-02-09
US10/774,977 US7015075B2 (en) 2004-02-09 2004-02-09 Die encapsulation using a porous carrier

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US10/837,153 Continuation-In-Part US20050244365A1 (en) 2004-05-03 2004-05-03 Methods, compositions, formulations, and uses of cellulose and acrylic-based polymers

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US11/592,479 Continuation-In-Part US20070148124A1 (en) 2004-05-03 2006-11-03 Cellulose and acrylic based polymers and the use thereof for the treatment of infectious diseases

Publications (2)

Publication Number Publication Date
WO2005076794A2 WO2005076794A2 (en) 2005-08-25
WO2005076794A3 true WO2005076794A3 (en) 2006-01-19

Family

ID=34827103

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/001529 WO2005076794A2 (en) 2004-02-09 2005-01-12 Die encapsulation using a porous carrier

Country Status (6)

Country Link
US (1) US7015075B2 (en)
EP (1) EP1721332A2 (en)
JP (1) JP4555835B2 (en)
CN (1) CN1918702B (en)
TW (1) TWI389221B (en)
WO (1) WO2005076794A2 (en)

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Also Published As

Publication number Publication date
TWI389221B (en) 2013-03-11
US7015075B2 (en) 2006-03-21
US20050176180A1 (en) 2005-08-11
JP4555835B2 (en) 2010-10-06
EP1721332A2 (en) 2006-11-15
WO2005076794A2 (en) 2005-08-25
JP2007522675A (en) 2007-08-09
CN1918702B (en) 2010-05-26
CN1918702A (en) 2007-02-21
TW200531189A (en) 2005-09-16

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