WO2005065437A3 - Probe arrays and method for making - Google Patents

Probe arrays and method for making Download PDF

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Publication number
WO2005065437A3
WO2005065437A3 PCT/US2005/000087 US2005000087W WO2005065437A3 WO 2005065437 A3 WO2005065437 A3 WO 2005065437A3 US 2005000087 W US2005000087 W US 2005000087W WO 2005065437 A3 WO2005065437 A3 WO 2005065437A3
Authority
WO
WIPO (PCT)
Prior art keywords
probe arrays
making
arrays
microprobes
transferring
Prior art date
Application number
PCT/US2005/000087
Other languages
French (fr)
Other versions
WO2005065437A2 (en
Inventor
Ananda H Kumar
Ezekiel J J Kruglick
Adam L Cohen
Kieun Kim
Gang Zang
Original Assignee
Microfabrica Inc
Ananda H Kumar
Ezekiel J J Kruglick
Adam L Cohen
Kieun Kim
Gang Zang
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/772,943 external-priority patent/US20050104609A1/en
Priority claimed from US10/949,738 external-priority patent/US20060006888A1/en
Application filed by Microfabrica Inc, Ananda H Kumar, Ezekiel J J Kruglick, Adam L Cohen, Kieun Kim, Gang Zang filed Critical Microfabrica Inc
Publication of WO2005065437A2 publication Critical patent/WO2005065437A2/en
Publication of WO2005065437A3 publication Critical patent/WO2005065437A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips

Abstract

Embodiments of invention are directed to the formation of microprobes (i.e., compliant electrical or electronic contact elements, 404) on a temporary substrate (422), dicing individual probe arrays (404a, 404b, 404c), and then transferring the arrays (404a, 404b, 404c) to space transformers or other permanent substrates (406).
PCT/US2005/000087 2003-12-31 2005-01-03 Probe arrays and method for making WO2005065437A2 (en)

Applications Claiming Priority (12)

Application Number Priority Date Filing Date Title
US53393303P 2003-12-31 2003-12-31
US53394703P 2003-12-31 2003-12-31
US60/533,947 2003-12-31
US60/533,933 2003-12-31
US53686504P 2004-01-15 2004-01-15
US60/536,865 2004-01-15
US54051104P 2004-01-29 2004-01-29
US60/540,511 2004-01-29
US10/772,943 US20050104609A1 (en) 2003-02-04 2004-02-04 Microprobe tips and methods for making
US10/772,943 2004-02-04
US10/949,738 2004-09-24
US10/949,738 US20060006888A1 (en) 2003-02-04 2004-09-24 Electrochemically fabricated microprobes

Publications (2)

Publication Number Publication Date
WO2005065437A2 WO2005065437A2 (en) 2005-07-21
WO2005065437A3 true WO2005065437A3 (en) 2005-11-10

Family

ID=34754038

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/000087 WO2005065437A2 (en) 2003-12-31 2005-01-03 Probe arrays and method for making

Country Status (2)

Country Link
TW (1) TW200534519A (en)
WO (1) WO2005065437A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200921109A (en) * 2007-11-09 2009-05-16 Univ Nat Chiao Tung Assembly structure of 3D probe array
TWI383151B (en) * 2009-04-02 2013-01-21 Cantilever probe card for image sensing wafer testing
TWI454709B (en) * 2012-09-07 2014-10-01 Mpi Corp The method of leveling the probe card structure
KR102457527B1 (en) * 2018-01-25 2022-10-21 한화정밀기계 주식회사 Method for coating state check of flux
KR102068699B1 (en) * 2018-08-24 2020-01-21 주식회사 에스디에이 Manufacturing method of MEMS probe for inspecting semiconductor by using laser

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5989994A (en) * 1998-12-29 1999-11-23 Advantest Corp. Method for producing contact structures
US6359454B1 (en) * 1999-08-03 2002-03-19 Advantest Corp. Pick and place mechanism for contactor
US6586955B2 (en) * 2000-03-13 2003-07-01 Tessera, Inc. Methods and structures for electronic probing arrays

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5989994A (en) * 1998-12-29 1999-11-23 Advantest Corp. Method for producing contact structures
US6359454B1 (en) * 1999-08-03 2002-03-19 Advantest Corp. Pick and place mechanism for contactor
US6586955B2 (en) * 2000-03-13 2003-07-01 Tessera, Inc. Methods and structures for electronic probing arrays

Also Published As

Publication number Publication date
WO2005065437A2 (en) 2005-07-21
TW200534519A (en) 2005-10-16

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