WO2005050706A3 - Die design with integrated assembly aid - Google Patents

Die design with integrated assembly aid Download PDF

Info

Publication number
WO2005050706A3
WO2005050706A3 PCT/US2004/037953 US2004037953W WO2005050706A3 WO 2005050706 A3 WO2005050706 A3 WO 2005050706A3 US 2004037953 W US2004037953 W US 2004037953W WO 2005050706 A3 WO2005050706 A3 WO 2005050706A3
Authority
WO
WIPO (PCT)
Prior art keywords
micro
array
holes
assembly aid
probe
Prior art date
Application number
PCT/US2004/037953
Other languages
French (fr)
Other versions
WO2005050706A2 (en
Inventor
Alexander Brandorff
Original Assignee
Wentworth Lab Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wentworth Lab Inc filed Critical Wentworth Lab Inc
Priority to CN200480033430A priority Critical patent/CN100595598C/en
Priority to JP2006539943A priority patent/JP4732360B2/en
Priority to EP04810930.0A priority patent/EP1692529A4/en
Priority to KR1020067011744A priority patent/KR101147032B1/en
Publication of WO2005050706A2 publication Critical patent/WO2005050706A2/en
Publication of WO2005050706A3 publication Critical patent/WO2005050706A3/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

Abstract

An upper die portion (36) of a die head for a aligning probe pins (14) in first array of first micro-holes (18) formed in lower die portion (12) of the die head, which generally includes a spacer portion (38), a support frame (40), and first and second assembly aid films (42) and (44), respectively. Spacer portion (38) is adapted to contact lower die portion (12). First assembly aid film (42) is typically positioned between second surface (48) and support frame (40) and includes a second array of second micro-holes (50) adapted to receive probe pins (14). Second assembly aid film (44) generally is in contact or close proximity to first assembly aid film (42) and has a third array of third micro-holes (52) adapted to receive prove pins (14). Second array of second micro-holes (50) and third array of third micro-holes (52) are patterned to align with one another but are both offset with first array of first micro-holes (18) by approximately the lateral distance between probe tip (20) and probe head (28).
PCT/US2004/037953 2003-11-14 2004-11-12 Die design with integrated assembly aid WO2005050706A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN200480033430A CN100595598C (en) 2003-11-14 2004-11-12 Die design with integrated assembly aid
JP2006539943A JP4732360B2 (en) 2003-11-14 2004-11-12 Die design with assembly aids
EP04810930.0A EP1692529A4 (en) 2003-11-14 2004-11-12 Die design with integrated assembly aid
KR1020067011744A KR101147032B1 (en) 2003-11-14 2004-11-12 Die design with integrated assembly aid

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US51996603P 2003-11-14 2003-11-14
US60/519,966 2003-11-14

Publications (2)

Publication Number Publication Date
WO2005050706A2 WO2005050706A2 (en) 2005-06-02
WO2005050706A3 true WO2005050706A3 (en) 2005-12-29

Family

ID=34619404

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/037953 WO2005050706A2 (en) 2003-11-14 2004-11-12 Die design with integrated assembly aid

Country Status (9)

Country Link
US (2) US7282936B2 (en)
EP (1) EP1692529A4 (en)
JP (1) JP4732360B2 (en)
KR (1) KR101147032B1 (en)
CN (1) CN100595598C (en)
CR (1) CR8438A (en)
MY (1) MY137372A (en)
TW (1) TWI375798B (en)
WO (1) WO2005050706A2 (en)

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US7649372B2 (en) * 2003-11-14 2010-01-19 Wentworth Laboratories, Inc. Die design with integrated assembly aid
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US7554348B2 (en) * 2007-06-29 2009-06-30 Wentworth Laboratories, Inc. Multi-offset die head
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US9267968B2 (en) * 2010-12-09 2016-02-23 Wentworth Laboratories, Inc. Probe card assemblies and probe pins including carbon nanotubes
CN103245807B (en) * 2012-02-06 2015-11-25 景美科技股份有限公司 Probe unit structure and preparation method thereof
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JP6112890B2 (en) * 2013-02-07 2017-04-12 日置電機株式会社 Probe unit, board inspection apparatus, and probe unit assembling method
ITMI20130561A1 (en) * 2013-04-09 2014-10-10 Technoprobe Spa HEAD OF MEASUREMENT OF ELECTRONIC DEVICES
KR101437774B1 (en) 2013-04-17 2014-09-11 송지은 Advanced Probe Head
KR101476683B1 (en) * 2013-05-08 2014-12-26 (주) 루켄테크놀러지스 Vertical film type probe card
TWI521212B (en) * 2014-03-10 2016-02-11 A method and a method of assembling a vertical probe device, and a vertical probe device
WO2016087369A2 (en) * 2014-12-04 2016-06-09 Technoprobe S.P.A. Testing head comprising vertical probes
US9535091B2 (en) * 2015-03-16 2017-01-03 Taiwan Semiconductor Manufacturing Co., Ltd. Probe head, probe card assembly using the same, and manufacturing method thereof
JP2018179721A (en) * 2017-04-12 2018-11-15 株式会社日本マイクロニクス Electrical connection device
TWI640783B (en) * 2017-09-15 2018-11-11 中華精測科技股份有限公司 Probe card device and round probe
IT202000028838A1 (en) * 2020-11-27 2022-05-27 Technoprobe Spa LARGE MEASUREMENT CARD FOR TESTING ELECTRONIC DEVICES AND RELATED MANUFACTURING METHOD
WO2023188243A1 (en) * 2022-03-31 2023-10-05 日本電子材料株式会社 Probe passing method and probe

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Also Published As

Publication number Publication date
TWI375798B (en) 2012-11-01
US7282936B2 (en) 2007-10-16
EP1692529A4 (en) 2014-03-26
US20050110510A1 (en) 2005-05-26
US20080084227A1 (en) 2008-04-10
US7388392B2 (en) 2008-06-17
JP4732360B2 (en) 2011-07-27
EP1692529A2 (en) 2006-08-23
CN100595598C (en) 2010-03-24
CR8438A (en) 2006-09-22
KR20060135665A (en) 2006-12-29
MY137372A (en) 2009-01-30
KR101147032B1 (en) 2012-05-22
WO2005050706A2 (en) 2005-06-02
TW200530591A (en) 2005-09-16
JP2007512516A (en) 2007-05-17
CN1879025A (en) 2006-12-13

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