WO2005045889A3 - Micromirror and post arrangements on substrates - Google Patents

Micromirror and post arrangements on substrates Download PDF

Info

Publication number
WO2005045889A3
WO2005045889A3 PCT/US2004/033773 US2004033773W WO2005045889A3 WO 2005045889 A3 WO2005045889 A3 WO 2005045889A3 US 2004033773 W US2004033773 W US 2004033773W WO 2005045889 A3 WO2005045889 A3 WO 2005045889A3
Authority
WO
WIPO (PCT)
Prior art keywords
micromirror
mirror plate
substrates
diagonal
parallel
Prior art date
Application number
PCT/US2004/033773
Other languages
French (fr)
Other versions
WO2005045889A2 (en
Inventor
Andrew Huibers
Satyadev Patel
Original Assignee
Reflectivity Inc
Andrew Huibers
Satyadev Patel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Reflectivity Inc, Andrew Huibers, Satyadev Patel filed Critical Reflectivity Inc
Publication of WO2005045889A2 publication Critical patent/WO2005045889A2/en
Publication of WO2005045889A3 publication Critical patent/WO2005045889A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Abstract

A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.
PCT/US2004/033773 2003-10-30 2004-10-12 Micromirror and post arrangements on substrates WO2005045889A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/698,563 2003-10-30
US10/698,563 US7042622B2 (en) 2003-10-30 2003-10-30 Micromirror and post arrangements on substrates

Publications (2)

Publication Number Publication Date
WO2005045889A2 WO2005045889A2 (en) 2005-05-19
WO2005045889A3 true WO2005045889A3 (en) 2005-12-29

Family

ID=34550671

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/033773 WO2005045889A2 (en) 2003-10-30 2004-10-12 Micromirror and post arrangements on substrates

Country Status (3)

Country Link
US (5) US7042622B2 (en)
TW (1) TWI375817B (en)
WO (1) WO2005045889A2 (en)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6958123B2 (en) * 2001-06-15 2005-10-25 Reflectivity, Inc Method for removing a sacrificial material with a compressed fluid
US7042622B2 (en) * 2003-10-30 2006-05-09 Reflectivity, Inc Micromirror and post arrangements on substrates
US7417782B2 (en) 2005-02-23 2008-08-26 Pixtronix, Incorporated Methods and apparatus for spatial light modulation
US7205176B2 (en) * 2004-05-24 2007-04-17 Taiwan Semiconductor Manufacturing Company Surface MEMS mirrors with oxide spacers
US7787170B2 (en) * 2004-06-15 2010-08-31 Texas Instruments Incorporated Micromirror array assembly with in-array pillars
US20060037933A1 (en) * 2004-08-23 2006-02-23 Wei-Ya Wang Mirror process using tungsten passivation layer for preventing metal-spiking induced mirror bridging and improving mirror curvature
KR100677551B1 (en) * 2005-01-05 2007-02-02 삼성전자주식회사 LED package, illumination system and projection system employing the LED package
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US7755582B2 (en) 2005-02-23 2010-07-13 Pixtronix, Incorporated Display methods and apparatus
US20080158635A1 (en) * 2005-02-23 2008-07-03 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US8482496B2 (en) 2006-01-06 2013-07-09 Pixtronix, Inc. Circuits for controlling MEMS display apparatus on a transparent substrate
US7742016B2 (en) 2005-02-23 2010-06-22 Pixtronix, Incorporated Display methods and apparatus
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US7271945B2 (en) * 2005-02-23 2007-09-18 Pixtronix, Inc. Methods and apparatus for actuating displays
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US7675665B2 (en) 2005-02-23 2010-03-09 Pixtronix, Incorporated Methods and apparatus for actuating displays
US8159428B2 (en) 2005-02-23 2012-04-17 Pixtronix, Inc. Display methods and apparatus
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US7746529B2 (en) 2005-02-23 2010-06-29 Pixtronix, Inc. MEMS display apparatus
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
US7502157B1 (en) * 2006-03-28 2009-03-10 Silicon Light Machines Corporation Multi-layer spatial light modulator for amplitude and phase control
US7430072B2 (en) * 2006-04-12 2008-09-30 Texas Instruments Incorporated System and method for increasing image quality in a display system
US7876489B2 (en) 2006-06-05 2011-01-25 Pixtronix, Inc. Display apparatus with optical cavities
EP2080045A1 (en) 2006-10-20 2009-07-22 Pixtronix Inc. Light guides and backlight systems incorporating light redirectors at varying densities
US7852546B2 (en) 2007-10-19 2010-12-14 Pixtronix, Inc. Spacers for maintaining display apparatus alignment
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
US8248560B2 (en) 2008-04-18 2012-08-21 Pixtronix, Inc. Light guides and backlight systems incorporating prismatic structures and light redirectors
US7920317B2 (en) 2008-08-04 2011-04-05 Pixtronix, Inc. Display with controlled formation of bubbles
US8169679B2 (en) * 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
CA2690579C (en) * 2009-01-21 2015-06-02 Alchemy Group Of Companies Inc. Cold casting method and apparatus
WO2010092189A1 (en) * 2009-02-16 2010-08-19 Micronic Laser Systems Ab Reconfigurable micro-mechanical light modulator and method
JP4766156B2 (en) * 2009-06-11 2011-09-07 日新イオン機器株式会社 Ion implanter
CN102834763B (en) 2010-02-02 2015-07-22 皮克斯特罗尼克斯公司 Methods for manufacturing cold seal fluid-filled display apparatus
CN104916258B (en) 2010-02-02 2018-02-16 追踪有限公司 For controlling the circuit of display device
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
US20150168672A1 (en) * 2013-12-12 2015-06-18 Frank Sanns, Jr. Mirror array
EP3522217B1 (en) * 2016-09-29 2021-07-14 Yantai Raytron Technology Co., Ltd. Method to prepare pixel for uncooled infrared focal plane detector

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6781742B2 (en) * 2000-07-11 2004-08-24 Semiconductor Energy Laboratory Co., Ltd. Digital micromirror device and method of driving digital micromirror device
US6795605B1 (en) * 2000-08-01 2004-09-21 Cheetah Omni, Llc Micromechanical optical switch

Family Cites Families (142)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3886310A (en) 1973-08-22 1975-05-27 Westinghouse Electric Corp Electrostatically deflectable light valve with improved diffraction properties
US3896338A (en) 1973-11-01 1975-07-22 Westinghouse Electric Corp Color video display system comprising electrostatically deflectable light valves
US4592628A (en) 1981-07-01 1986-06-03 International Business Machines Mirror array light valve
US4492435A (en) 1982-07-02 1985-01-08 Xerox Corporation Multiple array full width electro mechanical modulator
US4573764A (en) 1983-12-30 1986-03-04 North American Philips Consumer Electronics Corp. Rear projection screen
US4566935A (en) 1984-07-31 1986-01-28 Texas Instruments Incorporated Spatial light modulator and method
US4710732A (en) 1984-07-31 1987-12-01 Texas Instruments Incorporated Spatial light modulator and method
US4596992A (en) 1984-08-31 1986-06-24 Texas Instruments Incorporated Linear spatial light modulator and printer
US5061049A (en) 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US5096279A (en) 1984-08-31 1992-03-17 Texas Instruments Incorporated Spatial light modulator and method
US4662746A (en) 1985-10-30 1987-05-05 Texas Instruments Incorporated Spatial light modulator and method
US4615595A (en) 1984-10-10 1986-10-07 Texas Instruments Incorporated Frame addressed spatial light modulator
US4679900A (en) 1986-06-05 1987-07-14 North American Philips Corporation Bulk diffuser for a projection television screen
US5084807A (en) 1986-08-22 1992-01-28 U.S. Philips Corporation Illumination system for LCD projection television
US4701020A (en) 1986-09-18 1987-10-20 North American Philips Consumer Electronics Corp. Rear projection screen with improved luminance uniformity
NL8700135A (en) 1987-01-21 1988-08-16 Philips Nv TRANSPARENT PROJECTION SCREEN AND TRANSPARENT PROJECTION SYSTEM EQUIPPED WITH SUCH A SCREEN.
US4878122A (en) 1987-09-04 1989-10-31 New York Institute Of Technology Light modulator video display apparatus
US4879602A (en) 1987-09-04 1989-11-07 New York Institute Of Technology Electrode patterns for solid state light modulator
US4956619A (en) 1988-02-19 1990-09-11 Texas Instruments Incorporated Spatial light modulator
US5028939A (en) 1988-08-23 1991-07-02 Texas Instruments Incorporated Spatial light modulator system
US5103302A (en) 1989-01-20 1992-04-07 Hitachi, Ltd. Optical system for projection type image display device
US5162897A (en) 1989-08-02 1992-11-10 Hitachi, Ltd. Projection type stereoscopic image display system
US6348907B1 (en) * 1989-08-22 2002-02-19 Lawson A. Wood Display apparatus with digital micromirror device
US5041851A (en) 1989-12-21 1991-08-20 Texas Instruments Incorporated Spatial light modulator printer and method of operation
EP0467048B1 (en) 1990-06-29 1995-09-20 Texas Instruments Incorporated Field-updated deformable mirror device
JP2963526B2 (en) 1990-10-30 1999-10-18 株式会社日立製作所 Transmissive projection screen, method of manufacturing the same, overhead projector and projection television set
US5548347A (en) 1990-12-27 1996-08-20 Philips Electronics North America Corporation Single panel color projection video display having improved scanning
US5416514A (en) 1990-12-27 1995-05-16 North American Philips Corporation Single panel color projection video display having control circuitry for synchronizing the color illumination system with reading/writing of the light valve
US5410370A (en) 1990-12-27 1995-04-25 North American Philips Corporation Single panel color projection video display improved scanning
DE69125125T2 (en) 1990-12-27 1997-08-21 Philips Electronics Nv Color image display device and circuit for controlling the light valve of such a device
US5076661A (en) 1991-01-23 1991-12-31 North American Philips Corp. Rear projection screen
US5064277A (en) 1991-01-28 1991-11-12 Eastman Kodak Company Operation of a light modulator of the planar electrode type
US5563398A (en) * 1991-10-31 1996-10-08 Texas Instruments Incorporated Spatial light modulator scanning system
KR960007892B1 (en) 1992-02-29 1996-06-15 강진구 Projection lens for rear projection tv
US6219015B1 (en) 1992-04-28 2001-04-17 The Board Of Directors Of The Leland Stanford, Junior University Method and apparatus for using an array of grating light valves to produce multicolor optical images
JP3388780B2 (en) 1992-06-19 2003-03-24 株式会社日立製作所 Rear projection type image display device
US5659374A (en) 1992-10-23 1997-08-19 Texas Instruments Incorporated Method of repairing defective pixels
US5289287A (en) 1992-10-29 1994-02-22 North American Philips Corporation Dockable LCD TV projector convertable between front and rear projection
US5420655A (en) 1992-12-16 1995-05-30 North American Philips Corporation Color projection system employing reflective display devices and prism illuminators
JP3547160B2 (en) 1993-01-11 2004-07-28 テキサス インスツルメンツ インコーポレイテツド Spatial light modulator
US5293511A (en) 1993-03-16 1994-03-08 Texas Instruments Incorporated Package for a semiconductor device
JPH06301066A (en) 1993-03-23 1994-10-28 Daewoo Electron Co Ltd Mirror array and its manufacture
US5860225A (en) * 1993-04-16 1999-01-19 Breeze Technology Self-ventilating footwear
US5708521A (en) 1993-05-04 1998-01-13 Daewoo Electronics Co., Ltd. Actuated mirror array for use in optical projection system
US5537159A (en) 1993-05-27 1996-07-16 Sony Corporation Interpolation method and apparatus for improving registration adjustment in a projection television
US5489952A (en) 1993-07-14 1996-02-06 Texas Instruments Incorporated Method and device for multi-format television
US5510824A (en) 1993-07-26 1996-04-23 Texas Instruments, Inc. Spatial light modulator array
US5526172A (en) 1993-07-27 1996-06-11 Texas Instruments Incorporated Microminiature, monolithic, variable electrical signal processor and apparatus including same
US5453778A (en) * 1993-07-30 1995-09-26 Texas Instruments Incorporated Method and apparatus for spatial modulation in the cross-process direction
US5386250A (en) 1993-08-09 1995-01-31 Philips Electronics North America Corp. Two-source illumination system
US5581272A (en) 1993-08-25 1996-12-03 Texas Instruments Incorporated Signal generator for controlling a spatial light modulator
US5459492A (en) * 1993-08-30 1995-10-17 Texas Instruments Incorporated Method and apparatus for printing stroke and contone data together
US5457493A (en) 1993-09-15 1995-10-10 Texas Instruments Incorporated Digital micro-mirror based image simulation system
KR970003465B1 (en) * 1993-09-28 1997-03-18 대우전자 주식회사 Manufacturing method of optical path regulating method
US5449062A (en) 1993-10-15 1995-09-12 Valiant Machine & Tool, Inc. Lift and carry conveyor
CN1053312C (en) * 1993-10-21 2000-06-07 皇家菲利浦电子有限公司 Image projection device and lamp control system for use therein
DE69423418T2 (en) * 1993-11-02 2000-09-21 Texas Instruments Inc Device and method for graphic data for television receivers
CA2137059C (en) * 1993-12-03 2004-11-23 Texas Instruments Incorporated Dmd architecture to improve horizontal resolution
US5448314A (en) 1994-01-07 1995-09-05 Texas Instruments Method and apparatus for sequential color imaging
JPH07209594A (en) 1994-01-25 1995-08-11 Fujitsu Ltd Spatial optical modulation device for stereoscopic display
US5442414A (en) 1994-05-10 1995-08-15 U. S. Philips Corporation High contrast illumination system for video projector
US5428408A (en) 1994-05-26 1995-06-27 Philips Electronics North America Corporation Color correction system for projection video system utilizing multiple light sources
CN1052077C (en) 1994-06-01 2000-05-03 皇家菲利浦电子有限公司 High effect, illumination apparatus and image projecting arrangement having it
US5499062A (en) 1994-06-23 1996-03-12 Texas Instruments Incorporated Multiplexed memory timing with block reset and secondary memory
US5504504A (en) * 1994-07-13 1996-04-02 Texas Instruments Incorporated Method of reducing the visual impact of defects present in a spatial light modulator display
US5611611A (en) 1994-10-05 1997-03-18 Hitachi, Ltd. Rear projection type display system
US5650881A (en) 1994-11-02 1997-07-22 Texas Instruments Incorporated Support post architecture for micromechanical devices
US5703728A (en) 1994-11-02 1997-12-30 Texas Instruments Incorporated Support post architecture for micromechanical devices
US5680156A (en) 1994-11-02 1997-10-21 Texas Instruments Incorporated Memory architecture for reformatting and storing display data in standard TV and HDTV systems
KR100213281B1 (en) 1994-10-31 1999-08-02 전주범 The lightpath modulation device
US5796442A (en) 1994-11-02 1998-08-18 Texas Instruments Incorporated Multi-format television reciever
US5825400A (en) 1994-11-02 1998-10-20 Texas Instruments, Inc. Method and apparatus for ameliorating the effects of misalignment between two or more imaging elements
KR0147939B1 (en) * 1994-11-11 1998-09-15 배순훈 Pixel correction apparatus of projector
KR0149215B1 (en) 1994-11-11 1998-10-15 배순훈 Pixel driving circuit
US5552924A (en) 1994-11-14 1996-09-03 Texas Instruments Incorporated Micromechanical device having an improved beam
US5592188A (en) 1995-01-04 1997-01-07 Texas Instruments Incorporated Method and system for accentuating intense white display areas in sequential DMD video systems
US5717513A (en) 1995-01-10 1998-02-10 Texas Instruments Incorporated Unsticking mirror elements of digital micromirror device
US5638085A (en) * 1995-01-13 1997-06-10 Micron Display Technology, Inc. Timing control for a matrixed scanned array
US5905545A (en) * 1995-01-27 1999-05-18 Texas Instruments Incorporated Full-color projection display system using two light modulators
US5579151A (en) 1995-02-17 1996-11-26 Texas Instruments Incorporated Spatial light modulator
US5696619A (en) 1995-02-27 1997-12-09 Texas Instruments Incorporated Micromechanical device having an improved beam
US5610438A (en) 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
US5530482A (en) * 1995-03-21 1996-06-25 Texas Instruments Incorporated Pixel data processing for spatial light modulator having staggered pixels
US5706061A (en) 1995-03-31 1998-01-06 Texas Instruments Incorporated Spatial light image display system with synchronized and modulated light source
US5719695A (en) 1995-03-31 1998-02-17 Texas Instruments Incorporated Spatial light modulator with superstructure light shield
US5535047A (en) 1995-04-18 1996-07-09 Texas Instruments Incorporated Active yoke hidden hinge digital micromirror device
US5754217A (en) * 1995-04-19 1998-05-19 Texas Instruments Incorporated Printing system and method using a staggered array spatial light modulator having masked mirror elements
TW305943B (en) 1995-04-21 1997-05-21 Daewoo Electronics Co Ltd
US5777589A (en) * 1995-04-26 1998-07-07 Texas Instruments Incorporated Color display system with spatial light modulator(s) having color-to-color variations in data sequencing
US5657036A (en) 1995-04-26 1997-08-12 Texas Instruments Incorporated Color display system with spatial light modulator(s) having color-to color variations for split reset
US5680180A (en) 1995-05-08 1997-10-21 Texas Instruments Incorporated Color balance compensation for digital display system with color wheel
US5668572A (en) 1995-05-26 1997-09-16 Texas Instruments Incorporated Color temperature compensation for digital display system with color wheel
US5629794A (en) 1995-05-31 1997-05-13 Texas Instruments Incorporated Spatial light modulator having an analog beam for steering light
US5798743A (en) 1995-06-07 1998-08-25 Silicon Light Machines Clear-behind matrix addressing for display systems
US5629801A (en) 1995-06-07 1997-05-13 Silicon Light Machines Diffraction grating light doubling collection system
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US5835256A (en) * 1995-06-19 1998-11-10 Reflectivity, Inc. Reflective spatial light modulator with encapsulated micro-mechanical elements
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
JP3381181B2 (en) * 1995-09-29 2003-02-24 ソニー株式会社 LCD rear projection TV
US5661591A (en) 1995-09-29 1997-08-26 Texas Instruments Incorporated Optical switch having an analog beam for steering light
JP3659271B2 (en) * 1995-10-03 2005-06-15 ソニー株式会社 Rear projection video device
KR0164180B1 (en) 1995-10-27 1999-01-15 배순훈 Optical system for projector
US5999306A (en) * 1995-12-01 1999-12-07 Seiko Epson Corporation Method of manufacturing spatial light modulator and electronic device employing it
US5654775A (en) 1995-12-27 1997-08-05 Philips Electronics North America Corporation Three lamp, three light valve projection system
DE29614692U1 (en) * 1996-04-30 1996-10-24 Balzers Prozess Systeme Vertri Color wheel and imaging device with a color wheel
US5774196A (en) 1996-06-13 1998-06-30 Texas Instruments Incorporated Method and apparatus of aligning color modulation data to color wheel filter segments
US5795049A (en) 1996-08-27 1998-08-18 In Focus Systems, Inc. Image projection system
US5838385A (en) * 1996-08-30 1998-11-17 Texas Instruments Incorporated Sampling analog video signal for secondary images
US5815220A (en) 1996-08-30 1998-09-29 Texas Instruments Incorporated Color demodulation for digital television
US5771116A (en) 1996-10-21 1998-06-23 Texas Instruments Incorporated Multiple bias level reset waveform for enhanced DMD control
US6064404A (en) * 1996-11-05 2000-05-16 Silicon Light Machines Bandwidth and frame buffer size reduction in a digital pulse-width-modulated display system
US5810225A (en) 1996-11-26 1998-09-22 Andrew; Richard J. Tool support apparatus
KR19980069199A (en) * 1997-02-27 1998-10-26 배순훈 Thin film type optical path adjusting device and its manufacturing method which can improve the light efficiency
EP0877272B1 (en) * 1997-05-08 2002-07-31 Texas Instruments Incorporated Improvements in or relating to spatial light modulators
US5774254A (en) 1997-06-26 1998-06-30 Xerox Corporation Fault tolerant light modulator display system
US5914803A (en) * 1997-07-01 1999-06-22 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
US5930050A (en) * 1997-10-21 1999-07-27 Texas Instruments Incorporated Anamorphic lens for providing wide-screen images generated by a spatial light modulator
US6088102A (en) * 1997-10-31 2000-07-11 Silicon Light Machines Display apparatus including grating light-valve array and interferometric optical system
US6028690A (en) * 1997-11-26 2000-02-22 Texas Instruments Incorporated Reduced micromirror mirror gaps for improved contrast ratio
US5892623A (en) * 1997-12-29 1999-04-06 Philips Electronics North America Mutli-color-band light source
KR100313851B1 (en) * 1998-04-10 2001-12-12 윤종용 Micromirror device for image display apparatus
US6084626A (en) * 1998-04-29 2000-07-04 Eastman Kodak Company Grating modulator array
US6962419B2 (en) * 1998-09-24 2005-11-08 Reflectivity, Inc Micromirror elements, package for the micromirror elements, and projection system therefor
US6523961B2 (en) * 2000-08-30 2003-02-25 Reflectivity, Inc. Projection system and mirror elements for improved contrast ratio in spatial light modulators
US6529310B1 (en) * 1998-09-24 2003-03-04 Reflectivity, Inc. Deflectable spatial light modulator having superimposed hinge and deflectable element
US6014257A (en) * 1998-10-14 2000-01-11 Eastman Kodak Company Light modulator
US6061166A (en) * 1998-10-15 2000-05-09 Eastman Kodak Company Diffractive light modulator
US6031652A (en) * 1998-11-30 2000-02-29 Eastman Kodak Company Bistable light modulator
US6067183A (en) * 1998-12-09 2000-05-23 Eastman Kodak Company Light modulator with specific electrode configurations
US6038057A (en) * 1998-12-18 2000-03-14 Eastman Kodak Company Method and system for actuating electro-mechanical ribbon elements in accordance to a data stream
JP3714003B2 (en) * 1999-03-02 2005-11-09 セイコーエプソン株式会社 Projection type display device and prism used therefor
US6359669B1 (en) * 1999-09-17 2002-03-19 Rockwell Collins, Inc. Flat panel displays having an edge texture
US6950223B2 (en) * 2003-01-15 2005-09-27 Reflectivity, Inc Multiple hinge MEMS device
KR100311032B1 (en) * 1999-10-29 2001-11-02 윤종용 Micro-mirror device for displaying image
US6469821B2 (en) * 1999-12-28 2002-10-22 Texas Instruments Incorporated Micromirror structures for orthogonal illumination
US7099065B2 (en) * 2000-08-03 2006-08-29 Reflectivity, Inc. Micromirrors with OFF-angle electrodes and stops
US6867897B2 (en) * 2003-01-29 2005-03-15 Reflectivity, Inc Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays
US6873450B2 (en) * 2000-08-11 2005-03-29 Reflectivity, Inc Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields
US7019376B2 (en) * 2000-08-11 2006-03-28 Reflectivity, Inc Micromirror array device with a small pitch size
KR101073175B1 (en) * 2002-01-29 2011-10-12 파나소닉 주식회사 Shape-variable mirror and light control device having the shape-variable mirror
US6885494B2 (en) * 2003-02-12 2005-04-26 Reflectivity, Inc. High angle micro-mirrors and processes
US7042622B2 (en) * 2003-10-30 2006-05-09 Reflectivity, Inc Micromirror and post arrangements on substrates

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6781742B2 (en) * 2000-07-11 2004-08-24 Semiconductor Energy Laboratory Co., Ltd. Digital micromirror device and method of driving digital micromirror device
US6795605B1 (en) * 2000-08-01 2004-09-21 Cheetah Omni, Llc Micromechanical optical switch

Also Published As

Publication number Publication date
US20060007522A1 (en) 2006-01-12
US7042622B2 (en) 2006-05-09
TWI375817B (en) 2012-11-01
US7075702B2 (en) 2006-07-11
US20060018003A1 (en) 2006-01-26
WO2005045889A2 (en) 2005-05-19
US20080049290A1 (en) 2008-02-28
US7362493B2 (en) 2008-04-22
TW200515007A (en) 2005-05-01
US20050094240A1 (en) 2005-05-05
US7697193B2 (en) 2010-04-13
US7268934B2 (en) 2007-09-11
US20060171014A1 (en) 2006-08-03

Similar Documents

Publication Publication Date Title
WO2005045889A3 (en) Micromirror and post arrangements on substrates
CN101889225B (en) Light illumination of displays with front light guide and coupling elements
US7585121B2 (en) Camera module and electronic device incorporating the same
WO2004001487A8 (en) Reflective spatial light modulator
WO2007109614A3 (en) Ambient light absorbing screen
WO2007131170A3 (en) Reflective spatial light modulator with high stiffness torsion spring hinge
AU2003231551A1 (en) High refraction film, its coating composition, and an anti-reflection film, a polarizing plate and an image display device including said film
TW548467B (en) Liquid crystal display device with improved viewing angle property and portable electronic apparatus using the same
WO2000008519A3 (en) A reflective display device and a light source for a display device
TW374856B (en) Reflector, method for fabricating the same and reflective liquid crystal display device incorporating the same
WO2004036300A8 (en) Display device and display device mounting device
WO2005119349A3 (en) Polarized uv exposure system
JP2004533654A5 (en)
TW200632383A (en) Optical film having a structured surface with rectangular based prisms
WO2007053527A3 (en) Projection display system including a high fill ratio silicon spatial light modulator
TW200622354A (en) Liquid crystal display and backlight module
KR20070101230A (en) Ornamental display device
CN102449513A (en) Illumination devices and methods of fabrication thereof
WO2004077518A3 (en) Multi-tilt micromirror systems with concealed hinge structures
WO2006015090A3 (en) Housing for mounting a beamsplitter and a spatial light modulator with an output optical path
AU2002354321A1 (en) Liquid crystal display and thin film transistor array panel
EP1559745A4 (en) Liquid crystal compound composition and retardation film using same
EP0926533A3 (en) Optical compensating sheet and liquid crystal display comprising the sheet
CN110221363A (en) Preparation method, optical diaphragm and the display panel of optical diaphragm
JP2006184673A5 (en)

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase