WO2005045885A3 - Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems - Google Patents
Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems Download PDFInfo
- Publication number
- WO2005045885A3 WO2005045885A3 PCT/US2004/018892 US2004018892W WO2005045885A3 WO 2005045885 A3 WO2005045885 A3 WO 2005045885A3 US 2004018892 W US2004018892 W US 2004018892W WO 2005045885 A3 WO2005045885 A3 WO 2005045885A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- stiction
- gas
- mems
- thin film
- mechanical
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00912—Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
- B81C1/0096—For avoiding stiction when the device is in use, i.e. after manufacture has been completed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
- B81B3/0005—Anti-stiction coatings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04755206A EP1683199A4 (en) | 2003-10-31 | 2004-06-15 | Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems |
KR1020067000711A KR101055029B1 (en) | 2003-10-31 | 2004-06-15 | Anti-stick technology for thin film and wafer-bonded encapsulated microelectromechanical systems |
JP2006537961A JP5143426B2 (en) | 2003-10-31 | 2004-06-15 | Anti-stiction technology for encapsulated micro-electromechanical systems combining thin films and wafers |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/698,258 US6930367B2 (en) | 2003-10-31 | 2003-10-31 | Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems |
US10/698,258 | 2003-10-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005045885A2 WO2005045885A2 (en) | 2005-05-19 |
WO2005045885A3 true WO2005045885A3 (en) | 2007-05-31 |
Family
ID=34550588
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2004/018892 WO2005045885A2 (en) | 2003-10-31 | 2004-06-15 | Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems |
Country Status (5)
Country | Link |
---|---|
US (3) | US6930367B2 (en) |
EP (1) | EP1683199A4 (en) |
JP (1) | JP5143426B2 (en) |
KR (1) | KR101055029B1 (en) |
WO (1) | WO2005045885A2 (en) |
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JP3967199B2 (en) * | 2002-06-04 | 2007-08-29 | シャープ株式会社 | Semiconductor device and manufacturing method thereof |
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-
2003
- 2003-10-31 US US10/698,258 patent/US6930367B2/en not_active Expired - Lifetime
-
2004
- 2004-06-15 WO PCT/US2004/018892 patent/WO2005045885A2/en active Application Filing
- 2004-06-15 EP EP04755206A patent/EP1683199A4/en not_active Ceased
- 2004-06-15 KR KR1020067000711A patent/KR101055029B1/en active IP Right Grant
- 2004-06-15 JP JP2006537961A patent/JP5143426B2/en active Active
-
2005
- 2005-06-30 US US11/172,119 patent/US7074637B2/en not_active Expired - Lifetime
- 2005-06-30 US US11/172,118 patent/US7221033B2/en not_active Expired - Lifetime
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US5867302A (en) * | 1997-08-07 | 1999-02-02 | Sandia Corporation | Bistable microelectromechanical actuator |
US6815361B1 (en) * | 2001-05-30 | 2004-11-09 | Samsung Electronics Co., Ltd. | Method of fabricating anti-stiction micromachined structures |
Also Published As
Publication number | Publication date |
---|---|
US20050260783A1 (en) | 2005-11-24 |
EP1683199A2 (en) | 2006-07-26 |
EP1683199A4 (en) | 2012-04-04 |
KR101055029B1 (en) | 2011-08-05 |
US20050255645A1 (en) | 2005-11-17 |
US20050095833A1 (en) | 2005-05-05 |
US6930367B2 (en) | 2005-08-16 |
US7074637B2 (en) | 2006-07-11 |
JP2007523758A (en) | 2007-08-23 |
JP5143426B2 (en) | 2013-02-13 |
WO2005045885A2 (en) | 2005-05-19 |
KR20060113630A (en) | 2006-11-02 |
US7221033B2 (en) | 2007-05-22 |
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