WO2005036314A3 - Method and system of diagnosing a processing system using adaptive multivariate analysis - Google Patents
Method and system of diagnosing a processing system using adaptive multivariate analysis Download PDFInfo
- Publication number
- WO2005036314A3 WO2005036314A3 PCT/US2004/025599 US2004025599W WO2005036314A3 WO 2005036314 A3 WO2005036314 A3 WO 2005036314A3 US 2004025599 W US2004025599 W US 2004025599W WO 2005036314 A3 WO2005036314 A3 WO 2005036314A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- data
- processing system
- diagnosing
- additional
- pca
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B23/00—Testing or monitoring of control systems or parts thereof
- G05B23/02—Electric testing or monitoring
- G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
- G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
- G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
- G05B23/024—Quantitative history assessment, e.g. mathematical relationships between available data; Functions therefor; Principal component analysis [PCA]; Partial least square [PLS]; Statistical classifiers, e.g. Bayesian networks, linear regression or correlation analysis; Neural networks
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
- G06F17/10—Complex mathematical operations
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006526083A JP4699367B2 (en) | 2003-09-12 | 2004-08-27 | Method and apparatus for diagnosing processing equipment using adaptive multivariable analysis |
EP04809545A EP1665076A4 (en) | 2003-09-12 | 2004-08-27 | Method and system of diagnosing a processing system using adaptive multivariate analysis |
KR1020067005122A KR101047971B1 (en) | 2003-09-12 | 2004-08-27 | Diagnostic Method and Apparatus for Processing Systems Using Adaptive Multivariate Analysis |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/660,697 | 2003-09-12 | ||
US10/660,697 US7328126B2 (en) | 2003-09-12 | 2003-09-12 | Method and system of diagnosing a processing system using adaptive multivariate analysis |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005036314A2 WO2005036314A2 (en) | 2005-04-21 |
WO2005036314A3 true WO2005036314A3 (en) | 2005-11-10 |
Family
ID=34273706
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2004/025599 WO2005036314A2 (en) | 2003-09-12 | 2004-08-27 | Method and system of diagnosing a processing system using adaptive multivariate analysis |
Country Status (7)
Country | Link |
---|---|
US (1) | US7328126B2 (en) |
EP (1) | EP1665076A4 (en) |
JP (1) | JP4699367B2 (en) |
KR (1) | KR101047971B1 (en) |
CN (1) | CN100476798C (en) |
TW (1) | TWI261738B (en) |
WO (1) | WO2005036314A2 (en) |
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-
2004
- 2004-08-27 CN CNB2004800264199A patent/CN100476798C/en active Active
- 2004-08-27 EP EP04809545A patent/EP1665076A4/en not_active Withdrawn
- 2004-08-27 WO PCT/US2004/025599 patent/WO2005036314A2/en active Application Filing
- 2004-08-27 KR KR1020067005122A patent/KR101047971B1/en active IP Right Grant
- 2004-08-27 JP JP2006526083A patent/JP4699367B2/en not_active Expired - Fee Related
- 2004-09-09 TW TW093127260A patent/TWI261738B/en active
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Also Published As
Publication number | Publication date |
---|---|
WO2005036314A2 (en) | 2005-04-21 |
US7328126B2 (en) | 2008-02-05 |
TW200515112A (en) | 2005-05-01 |
CN1849599A (en) | 2006-10-18 |
CN100476798C (en) | 2009-04-08 |
KR20060123098A (en) | 2006-12-01 |
EP1665076A4 (en) | 2007-06-20 |
KR101047971B1 (en) | 2011-07-13 |
TWI261738B (en) | 2006-09-11 |
EP1665076A2 (en) | 2006-06-07 |
JP4699367B2 (en) | 2011-06-08 |
US20050060103A1 (en) | 2005-03-17 |
JP2007505494A (en) | 2007-03-08 |
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