WO2005026810A3 - Catoptric and catadioptric imaging systems with adaptive catoptric surfaces - Google Patents

Catoptric and catadioptric imaging systems with adaptive catoptric surfaces Download PDF

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Publication number
WO2005026810A3
WO2005026810A3 PCT/US2004/029788 US2004029788W WO2005026810A3 WO 2005026810 A3 WO2005026810 A3 WO 2005026810A3 US 2004029788 W US2004029788 W US 2004029788W WO 2005026810 A3 WO2005026810 A3 WO 2005026810A3
Authority
WO
WIPO (PCT)
Prior art keywords
catoptric
rays
imaging systems
adaptive
beam splitter
Prior art date
Application number
PCT/US2004/029788
Other languages
French (fr)
Other versions
WO2005026810A2 (en
Inventor
Henry Allen Hill
Original Assignee
Zetetic Inst
Henry Allen Hill
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zetetic Inst, Henry Allen Hill filed Critical Zetetic Inst
Publication of WO2005026810A2 publication Critical patent/WO2005026810A2/en
Publication of WO2005026810A3 publication Critical patent/WO2005026810A3/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08Catadioptric systems
    • G02B17/0856Catadioptric systems comprising a refractive element with a reflective surface, the reflection taking place inside the element, e.g. Mangin mirrors
    • G02B17/086Catadioptric systems comprising a refractive element with a reflective surface, the reflection taking place inside the element, e.g. Mangin mirrors wherein the system is made of a single block of optical material, e.g. solid catadioptric systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/58Photometry, e.g. photographic exposure meter using luminescence generated by light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00Systems with reflecting surfaces, with or without refracting elements
    • G02B17/008Systems specially adapted to form image relays or chained systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10Beam splitting or combining systems
    • G02B27/14Beam splitting or combining systems operating by reflection only
    • G02B27/144Beam splitting or combining systems operating by reflection only using partially transparent surfaces without spectral selectivity
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10Beam splitting or combining systems
    • G02B27/14Beam splitting or combining systems operating by reflection only
    • G02B27/145Beam splitting or combining systems operating by reflection only having sequential partially reflecting surfaces

Abstract

An imaging system (110)for imaging an object point to an image point, the system including : a beam splitter (48) positioned to receive light rays from the object point and separate each of a plurality of rays into a transmitted portion and a reflected portion, the transmitted portions defining a first set of rays and the reflected portions defining a second set of rays; and an array of independently positionable reflecting elements (42A-1,42A-2,42A-3,42C-1,42C-2,42C-3,46A-1,46A-2,46C-1,46C-2)forming a reflecting surface positioned to receive one of the sets of rays from the beam splitter (48)and focus that set of rays towards the image point via the beam splitter (48).
PCT/US2004/029788 2003-09-10 2004-09-10 Catoptric and catadioptric imaging systems with adaptive catoptric surfaces WO2005026810A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US50166603P 2003-09-10 2003-09-10
US60/501,666 2003-09-10

Publications (2)

Publication Number Publication Date
WO2005026810A2 WO2005026810A2 (en) 2005-03-24
WO2005026810A3 true WO2005026810A3 (en) 2005-07-21

Family

ID=34312289

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/029788 WO2005026810A2 (en) 2003-09-10 2004-09-10 Catoptric and catadioptric imaging systems with adaptive catoptric surfaces

Country Status (3)

Country Link
US (1) US7355722B2 (en)
TW (1) TW200523578A (en)
WO (1) WO2005026810A2 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005026810A2 (en) * 2003-09-10 2005-03-24 Zetetic Institute Catoptric and catadioptric imaging systems with adaptive catoptric surfaces
US20050111007A1 (en) * 2003-09-26 2005-05-26 Zetetic Institute Catoptric and catadioptric imaging system with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces
EP1869399A2 (en) * 2005-04-11 2007-12-26 Zetetic Institute Apparatus and method for in situ and ex situ measurement of spatial impulse response of an optical system using phase-shifting point-diffraction interferometry
EP1883783A2 (en) * 2005-05-18 2008-02-06 Zetetic Institute Apparatus and method for in situ and ex situ measurements of optical system flare
WO2007019548A2 (en) * 2005-08-08 2007-02-15 Zetetic Institute Apparatus and methods for reduction and compensation of effects of vibrations and of environmental effects in wavefront interferometry
WO2007025147A2 (en) * 2005-08-26 2007-03-01 Zetetic Institute Apparatus and method for measurement and compensation of atmospheric turbulence effects in wavefront interferometry
US20070121115A1 (en) * 2005-11-15 2007-05-31 Zetetic Institute Apparatus and method for reducing effects of coherent artifacts and compensation of effects of vibrations and environmental changes in interferometry
US8665536B2 (en) 2007-06-19 2014-03-04 Kla-Tencor Corporation External beam delivery system for laser dark-field illumination in a catadioptric optical system
US8649089B2 (en) * 2008-10-09 2014-02-11 Ge Healthcare Bio-Sciences Corp. System and method for adjusting a beam expander in an imaging system
US8731272B2 (en) * 2011-01-24 2014-05-20 The Board Of Trustees Of The University Of Illinois Computational adaptive optics for interferometric synthetic aperture microscopy and other interferometric imaging
US9584817B2 (en) 2014-03-31 2017-02-28 Sony Corporation Video transmission system with color prediction and method of operation thereof
CN111133361B (en) 2017-09-22 2022-06-03 伊雷克托科学工业股份有限公司 Acousto-optic system with phase-shifting reflector

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3628027A (en) * 1969-12-17 1971-12-14 Sulzer Ag Beam deflecting and focusing means for photoelectric monitoring, counting or control apparatus
US5241423A (en) * 1990-07-11 1993-08-31 International Business Machines Corporation High resolution reduction catadioptric relay lens
US5757493A (en) * 1996-10-16 1998-05-26 Tropel Corporation Interferometer with catadioptric imaging system having expanded range of numerical aperture
US6011654A (en) * 1996-09-04 2000-01-04 Carl-Zeiss-Stiftung Optical arrangement for several individual beams with a segmented mirror field
US20020131179A1 (en) * 2000-12-21 2002-09-19 Hill Henry A. Catoptric and catadioptric imaging systems

Family Cites Families (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3748015A (en) 1971-06-21 1973-07-24 Perkin Elmer Corp Unit power imaging catoptric anastigmat
US4011011A (en) 1973-03-09 1977-03-08 The Perkin-Elmer Corporation Optical projection apparatus
US4272684A (en) 1978-10-06 1981-06-09 Xerox Corporation Optical beam-splitting arrangements on object side of a lens
US4226501A (en) 1978-10-12 1980-10-07 The Perkin-Elmer Corporation Four mirror unobscurred anastigmatic telescope with all spherical surfaces
US4685803A (en) 1986-01-23 1987-08-11 Zygo Corporation Method and apparatus for the measurement of the refractive index of a gas
US4733967A (en) 1987-03-19 1988-03-29 Zygo Corporation Apparatus for the measurement of the refractive index of a gas
US5220403A (en) 1991-03-11 1993-06-15 International Business Machines Corporation Apparatus and a method for high numerical aperture microscopic examination of materials
DE69121201D1 (en) 1991-08-27 1996-09-05 Ibm Method and device for generating high-resolution optical images
IT1265106B1 (en) 1993-07-23 1996-10-30 Solari Udine Spa OPTICAL SYSTEM FOR LIGHT-EMITTING DIODES
US5659420A (en) 1993-09-30 1997-08-19 Kabushiki Kaisha Komatsu Seisakusho Confocal optical apparatus
US5614763A (en) 1995-03-13 1997-03-25 Zetetic Institute Methods for improving performance and temperature robustness of optical coupling between solid state light sensors and optical systems
US5699201A (en) 1995-03-27 1997-12-16 Hewlett-Packard Co. Low-profile, high-gain, wide-field-of-view, non-imaging optics
US5633972A (en) 1995-11-29 1997-05-27 Trustees Of Tufts College Superresolution imaging fiber for subwavelength light energy generation and near-field optical microscopy
US5602643A (en) 1996-02-07 1997-02-11 Wyko Corporation Method and apparatus for correcting surface profiles determined by phase-shifting interferometry according to optical parameters of test surface
US5894195A (en) 1996-05-03 1999-04-13 Mcdermott; Kevin Elliptical axial lighting device
US5915048A (en) 1996-06-05 1999-06-22 Zetetic Institute Method and apparatus for discriminating in-focus images from out-of-focus light signals from background and foreground light sources
US5760901A (en) 1997-01-28 1998-06-02 Zetetic Institute Method and apparatus for confocal interference microscopy with background amplitude reduction and compensation
US6480285B1 (en) 1997-01-28 2002-11-12 Zetetic Institute Multiple layer confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation
US5828455A (en) 1997-03-07 1998-10-27 Litel Instruments Apparatus, method of measurement, and method of data analysis for correction of optical system
US6124931A (en) 1997-10-02 2000-09-26 Zygo Corporation Apparatus and methods for measuring intrinsic optical properties of a gas
US6330065B1 (en) 1997-10-02 2001-12-11 Zygo Corporation Gas insensitive interferometric apparatus and methods
US5919048A (en) * 1997-11-17 1999-07-06 Slattery; Billy B. Engine block heater connector device
US6052231A (en) 1998-01-21 2000-04-18 International Business Machines Corporation Beam dividing elements permitting projection of an image with high contrast
JP3697919B2 (en) * 1998-12-18 2005-09-21 コニカミノルタホールディングス株式会社 Video display device using reflective display element
US6271923B1 (en) 1999-05-05 2001-08-07 Zygo Corporation Interferometry system having a dynamic beam steering assembly for measuring angle and distance
US6606159B1 (en) 1999-08-02 2003-08-12 Zetetic Institute Optical storage system based on scanning interferometric near-field confocal microscopy
US6917726B2 (en) 2001-09-27 2005-07-12 Cornell Research Foundation, Inc. Zero-mode clad waveguides for performing spectroscopy with confined effective observation volumes
WO2002010832A2 (en) 2000-07-27 2002-02-07 Zetetic Institute Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensation
EP1373959A2 (en) 2000-07-27 2004-01-02 Zetetic Institute Multiple-source arrays with optical transmission enhanced by resonant cavities
AU2001288228A1 (en) 2000-07-27 2002-02-13 Zetetic Institute Multiple-source arrays for confocal and near-field microscopy
WO2002010831A2 (en) 2000-07-27 2002-02-07 Zetetic Institute Differential interferometric scanning near-field confocal microscopy
AU2001279047A1 (en) 2000-07-27 2002-02-13 Zetetic Institute Control of position and orientation of sub-wavelength aperture array in near-field microscopy
US6597721B1 (en) 2000-09-21 2003-07-22 Ut-Battelle, Llc Micro-laser
KR100649555B1 (en) 2001-03-27 2006-11-24 삼성에스디아이 주식회사 Projection screen and projection system using it
US6847452B2 (en) 2001-08-02 2005-01-25 Zygo Corporation Passive zero shear interferometers
US7084983B2 (en) * 2003-01-27 2006-08-01 Zetetic Institute Interferometric confocal microscopy incorporating a pinhole array beam-splitter
JP2006516763A (en) 2003-01-27 2006-07-06 ゼテテック インスティテュート Apparatus and method for simultaneous measurement of reflected / scattered and transmitted beams by interferometric objects in a quadrangular field of view.
US7164480B2 (en) * 2003-02-04 2007-01-16 Zetetic Institute Compensation for effects of mismatch in indices of refraction at a substrate-medium interface in non-confocal, confocal, and interferometric confocal microscopy
WO2004072688A2 (en) 2003-02-07 2004-08-26 Zetetic Institute Multiple-source arrays fed by guided-wave structures and resonant guided-wave structure cavities
US7046372B2 (en) * 2003-02-13 2006-05-16 Zetetic Institute Transverse differential interferometric confocal microscopy
US6717736B1 (en) * 2003-02-13 2004-04-06 Zetetic Institute Catoptric and catadioptric imaging systems
WO2004074881A2 (en) * 2003-02-19 2004-09-02 Zetetic Institute Method and apparatus for dark field interferometric confocal microscopy
EP1595108A4 (en) * 2003-02-19 2007-01-24 Zetetic Inst Longitudinal differential interferometric confocal microscopy
JP2006522339A (en) 2003-04-01 2006-09-28 ゼテテック インスティテュート Apparatus and method for simultaneous measurement of orthogonally polarized beam fields scattered / reflected or transmitted by interferometric objects
WO2004090582A2 (en) * 2003-04-01 2004-10-21 Zetetic Institute Method for constructing a catadioptric lens system
JP2006522338A (en) 2003-04-03 2006-09-28 ゼテテック インスティテュート Apparatus and method for field measurement of backscattered and forward scattered / reflected beams by interferometric objects
US7084984B2 (en) 2003-07-07 2006-08-01 Zetetic Institute Apparatus and method for high speed scan for detection and measurement of properties of sub-wavelength defects and artifacts in semiconductor and mask metrology
WO2005026810A2 (en) * 2003-09-10 2005-03-24 Zetetic Institute Catoptric and catadioptric imaging systems with adaptive catoptric surfaces
US20050111007A1 (en) * 2003-09-26 2005-05-26 Zetetic Institute Catoptric and catadioptric imaging system with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces
WO2006023406A2 (en) * 2004-08-16 2006-03-02 Zetetic Institute Apparatus and method for joint and time delayed measurements of components of conjugated quadratures of fields of reflected/scattered and transmitted/scattered beams by an object in interferometry

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3628027A (en) * 1969-12-17 1971-12-14 Sulzer Ag Beam deflecting and focusing means for photoelectric monitoring, counting or control apparatus
US5241423A (en) * 1990-07-11 1993-08-31 International Business Machines Corporation High resolution reduction catadioptric relay lens
US6011654A (en) * 1996-09-04 2000-01-04 Carl-Zeiss-Stiftung Optical arrangement for several individual beams with a segmented mirror field
US5757493A (en) * 1996-10-16 1998-05-26 Tropel Corporation Interferometer with catadioptric imaging system having expanded range of numerical aperture
US20020131179A1 (en) * 2000-12-21 2002-09-19 Hill Henry A. Catoptric and catadioptric imaging systems

Also Published As

Publication number Publication date
US7355722B2 (en) 2008-04-08
WO2005026810A2 (en) 2005-03-24
US20050195500A1 (en) 2005-09-08
TW200523578A (en) 2005-07-16

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