WO2005013379A3 - Verfahren zur herstellung einer vielzahl von optoelektronischen halbleiterchips und optoelektronischer halbleiterchip - Google Patents
Verfahren zur herstellung einer vielzahl von optoelektronischen halbleiterchips und optoelektronischer halbleiterchip Download PDFInfo
- Publication number
- WO2005013379A3 WO2005013379A3 PCT/DE2004/001593 DE2004001593W WO2005013379A3 WO 2005013379 A3 WO2005013379 A3 WO 2005013379A3 DE 2004001593 W DE2004001593 W DE 2004001593W WO 2005013379 A3 WO2005013379 A3 WO 2005013379A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- opto
- electronic semiconductor
- semiconductor
- epitaxial surface
- windows
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02636—Selective deposition, e.g. simultaneous growth of mono- and non-monocrystalline semiconductor materials
- H01L21/02639—Preparation of substrate for selective deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02636—Selective deposition, e.g. simultaneous growth of mono- and non-monocrystalline semiconductor materials
- H01L21/02639—Preparation of substrate for selective deposition
- H01L21/02642—Mask materials other than SiO2 or SiN
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020067001846A KR101148632B1 (ko) | 2003-07-31 | 2004-07-22 | 다수의 광전자 반도체 칩을 제조하는 방법 및 광전자반도체 칩 |
JP2006521387A JP2007500934A (ja) | 2003-07-31 | 2004-07-22 | 複数のオプトエレクトロニクス半導体チップの製造方法およびオプトエレクトロニクス半導体チップ |
EP20040762443 EP1649497B1 (de) | 2003-07-31 | 2004-07-22 | Verfahren zur herstellung einer vielzahl von optoelektronischen halbleiterchips und optoelektronischer halbleiterchip |
US10/566,955 US8017416B2 (en) | 2003-07-31 | 2004-07-22 | Method for the production of a plurality of opto-electronic semiconductor chips and opto-electronic semiconductor chip |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10335080A DE10335080A1 (de) | 2003-07-31 | 2003-07-31 | Verfahren zur Herstellung einer Vielzahl von optoelektronischen Halbleiterchips und optoelektronischer Halbleiterchip |
DE10335080.2 | 2003-07-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005013379A2 WO2005013379A2 (de) | 2005-02-10 |
WO2005013379A3 true WO2005013379A3 (de) | 2005-03-31 |
Family
ID=34111795
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2004/001593 WO2005013379A2 (de) | 2003-07-31 | 2004-07-22 | Verfahren zur herstellung einer vielzahl von optoelektronischen halbleiterchips und optoelektronischer halbleiterchip |
Country Status (8)
Country | Link |
---|---|
US (1) | US8017416B2 (de) |
EP (1) | EP1649497B1 (de) |
JP (1) | JP2007500934A (de) |
KR (1) | KR101148632B1 (de) |
CN (1) | CN100444322C (de) |
DE (1) | DE10335080A1 (de) |
TW (1) | TWI250667B (de) |
WO (1) | WO2005013379A2 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10335080A1 (de) | 2003-07-31 | 2005-03-03 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung einer Vielzahl von optoelektronischen Halbleiterchips und optoelektronischer Halbleiterchip |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0388733A1 (de) * | 1989-03-09 | 1990-09-26 | Fujitsu Limited | Verfahren zur Herstellung von Halbleiterbauelementen |
EP0472221A2 (de) * | 1990-08-24 | 1992-02-26 | Nec Corporation | Verfahren zur Herstellung einer optischen Halbleitervorrichtung |
JPH05226781A (ja) * | 1992-02-12 | 1993-09-03 | Fujitsu Ltd | 半導体発光素子の製造方法 |
EP1005067A2 (de) * | 1998-11-26 | 2000-05-31 | Sony Corporation | Verfahren zum Wachsen eines III-V Nitrid-Verbindungshalbleiters, Herstellungsverfahren eines Halbleiterbauelements und Halbleiterbauelement |
US6110277A (en) * | 1997-04-15 | 2000-08-29 | Temic Telefunken Microelectronic Gmbh | Process for the fabrication of epitaxial layers of a compound semiconductor on monocrystal silicon and light-emitting diode fabricated therefrom |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0262090A (ja) * | 1988-08-29 | 1990-03-01 | Matsushita Electric Ind Co Ltd | 光半導体装置の製造方法 |
ATE159302T1 (de) * | 1990-11-07 | 1997-11-15 | Canon Kk | Iii-v verbindungs-halbleiter-vorrichtung, drucker- und anzeigevorrichtung unter verwendung derselben, und verfahren zur herstellung dieser vorrichtung |
GB2295269A (en) | 1994-11-14 | 1996-05-22 | Sharp Kk | Resonant cavity laser having oxide spacer region |
US5693962A (en) * | 1995-03-22 | 1997-12-02 | Motorola | Full color organic light emitting diode array |
AU6946196A (en) * | 1995-09-18 | 1997-04-09 | Hitachi Limited | Semiconductor material, method of producing the semiconductor material, and semiconductor device |
DE19535777A1 (de) * | 1995-09-26 | 1997-03-27 | Siemens Ag | Optoelektronisches Halbleiter-Bauelement und Verfahren zur Herstellung |
TW393785B (en) * | 1997-09-19 | 2000-06-11 | Siemens Ag | Method to produce many semiconductor-bodies |
JPH11330548A (ja) * | 1998-05-15 | 1999-11-30 | Showa Denko Kk | Iii−v族窒化物半導体発光素子及びその製造方法 |
US6255198B1 (en) * | 1998-11-24 | 2001-07-03 | North Carolina State University | Methods of fabricating gallium nitride microelectronic layers on silicon layers and gallium nitride microelectronic structures formed thereby |
DE19911717A1 (de) | 1999-03-16 | 2000-09-28 | Osram Opto Semiconductors Gmbh | Monolithisches elektrolumineszierendes Bauelement und Verfahren zu dessen Herstellung |
JP2001284641A (ja) * | 2000-03-31 | 2001-10-12 | Sony Corp | 画像表示素子 |
JP3882539B2 (ja) * | 2000-07-18 | 2007-02-21 | ソニー株式会社 | 半導体発光素子およびその製造方法、並びに画像表示装置 |
JP3940673B2 (ja) | 2000-08-18 | 2007-07-04 | 昭和電工株式会社 | Iii族窒化物半導体結晶の製造方法、および窒化ガリウム系化合物半導体の製造方法 |
JP4724924B2 (ja) * | 2001-02-08 | 2011-07-13 | ソニー株式会社 | 表示装置の製造方法 |
JP2002249400A (ja) * | 2001-02-22 | 2002-09-06 | Mitsubishi Chemicals Corp | 化合物半導体単結晶の製造方法およびその利用 |
JP3690340B2 (ja) * | 2001-03-06 | 2005-08-31 | ソニー株式会社 | 半導体発光素子及びその製造方法 |
JP3697406B2 (ja) * | 2001-09-26 | 2005-09-21 | 株式会社東芝 | 半導体発光装置及びその製造方法 |
AU2002334906A1 (en) * | 2001-10-09 | 2003-04-22 | Infinera Corporation | Transmitter photonic integrated circuits (txpic) and optical transport networks employing txpics |
JP2003158296A (ja) * | 2001-11-22 | 2003-05-30 | Sharp Corp | 窒化物半導体発光デバイスチップとその製造方法 |
DE10206751A1 (de) * | 2001-12-21 | 2003-07-03 | Aixtron Ag | Verfahren zum Abscheiden von III-V-Halbleiterschichten auf einem Nicht -III-V-Substrat |
TW561526B (en) * | 2001-12-21 | 2003-11-11 | Aixtron Ag | Method for depositing III-V semiconductor layers on a non-III-V substrate |
JP3912117B2 (ja) * | 2002-01-17 | 2007-05-09 | ソニー株式会社 | 結晶成長方法、半導体発光素子及びその製造方法 |
JP3782357B2 (ja) * | 2002-01-18 | 2006-06-07 | 株式会社東芝 | 半導体発光素子の製造方法 |
DE10335080A1 (de) | 2003-07-31 | 2005-03-03 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung einer Vielzahl von optoelektronischen Halbleiterchips und optoelektronischer Halbleiterchip |
JP5194334B2 (ja) * | 2004-05-18 | 2013-05-08 | 住友電気工業株式会社 | Iii族窒化物半導体デバイスの製造方法 |
-
2003
- 2003-07-31 DE DE10335080A patent/DE10335080A1/de not_active Withdrawn
-
2004
- 2004-07-22 WO PCT/DE2004/001593 patent/WO2005013379A2/de active Application Filing
- 2004-07-22 KR KR1020067001846A patent/KR101148632B1/ko not_active IP Right Cessation
- 2004-07-22 EP EP20040762443 patent/EP1649497B1/de not_active Expired - Fee Related
- 2004-07-22 CN CNB2004800221598A patent/CN100444322C/zh not_active Expired - Fee Related
- 2004-07-22 JP JP2006521387A patent/JP2007500934A/ja active Pending
- 2004-07-22 US US10/566,955 patent/US8017416B2/en not_active Expired - Fee Related
- 2004-07-28 TW TW093122483A patent/TWI250667B/zh not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0388733A1 (de) * | 1989-03-09 | 1990-09-26 | Fujitsu Limited | Verfahren zur Herstellung von Halbleiterbauelementen |
EP0472221A2 (de) * | 1990-08-24 | 1992-02-26 | Nec Corporation | Verfahren zur Herstellung einer optischen Halbleitervorrichtung |
JPH05226781A (ja) * | 1992-02-12 | 1993-09-03 | Fujitsu Ltd | 半導体発光素子の製造方法 |
US6110277A (en) * | 1997-04-15 | 2000-08-29 | Temic Telefunken Microelectronic Gmbh | Process for the fabrication of epitaxial layers of a compound semiconductor on monocrystal silicon and light-emitting diode fabricated therefrom |
EP1005067A2 (de) * | 1998-11-26 | 2000-05-31 | Sony Corporation | Verfahren zum Wachsen eines III-V Nitrid-Verbindungshalbleiters, Herstellungsverfahren eines Halbleiterbauelements und Halbleiterbauelement |
Non-Patent Citations (3)
Title |
---|
MIYATA NORIYUKI ET AL: "Selective growth of nanocrystalline Si dots using an ultrathin-Si-oxide/oxynitride mask", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 77, no. 11, 11 September 2000 (2000-09-11), pages 1620 - 1622, XP012026105, ISSN: 0003-6951 * |
PATENT ABSTRACTS OF JAPAN vol. 017, no. 676 (E - 1475) 13 December 1993 (1993-12-13) * |
YANG J W ET AL: "Selective area deposited blue GaN–InGaN multiple-quantum well light emitting diodes over silicon substrates", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 76, no. 3, 17 January 2000 (2000-01-17), pages 273 - 275, XP012025677, ISSN: 0003-6951 * |
Also Published As
Publication number | Publication date |
---|---|
US8017416B2 (en) | 2011-09-13 |
TW200507304A (en) | 2005-02-16 |
KR20060056350A (ko) | 2006-05-24 |
EP1649497A2 (de) | 2006-04-26 |
EP1649497B1 (de) | 2015-04-29 |
US20070034880A1 (en) | 2007-02-15 |
DE10335080A1 (de) | 2005-03-03 |
KR101148632B1 (ko) | 2012-05-23 |
CN1830066A (zh) | 2006-09-06 |
TWI250667B (en) | 2006-03-01 |
JP2007500934A (ja) | 2007-01-18 |
CN100444322C (zh) | 2008-12-17 |
WO2005013379A2 (de) | 2005-02-10 |
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