WO2005008223A3 - Methods for defect detection and process monitoring based on sem images - Google Patents

Methods for defect detection and process monitoring based on sem images Download PDF

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Publication number
WO2005008223A3
WO2005008223A3 PCT/US2004/023024 US2004023024W WO2005008223A3 WO 2005008223 A3 WO2005008223 A3 WO 2005008223A3 US 2004023024 W US2004023024 W US 2004023024W WO 2005008223 A3 WO2005008223 A3 WO 2005008223A3
Authority
WO
WIPO (PCT)
Prior art keywords
image
objects
methods
idealized
defect detection
Prior art date
Application number
PCT/US2004/023024
Other languages
French (fr)
Other versions
WO2005008223A2 (en
Inventor
Laurent Karsenti
Original Assignee
Applied Materials Israel Ltd
Applied Materials Inc
Laurent Karsenti
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Israel Ltd, Applied Materials Inc, Laurent Karsenti filed Critical Applied Materials Israel Ltd
Priority to US10/564,846 priority Critical patent/US7764824B2/en
Publication of WO2005008223A2 publication Critical patent/WO2005008223A2/en
Publication of WO2005008223A3 publication Critical patent/WO2005008223A3/en

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/20—Image enhancement or restoration by the use of local operators
    • G06T5/30—Erosion or dilatation, e.g. thinning
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/10—Segmentation; Edge detection
    • G06T7/11—Region-based segmentation
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/10—Segmentation; Edge detection
    • G06T7/155—Segmentation; Edge detection involving morphological operators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10056—Microscopic image
    • G06T2207/10061—Microscopic image from scanning electron microscope
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20092—Interactive image processing based on input by user
    • G06T2207/20101—Interactive definition of point of interest, landmark or seed
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/22—Treatment of data
    • H01J2237/221—Image processing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24592—Inspection and quality control of devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2809—Scanning microscopes characterised by the imaging problems involved
    • H01J2237/281—Bottom of trenches or holes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2813—Scanning microscopes characterised by the application
    • H01J2237/2814—Measurement of surface topography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2813—Scanning microscopes characterised by the application
    • H01J2237/2817—Pattern inspection

Abstract

A morphological operation is applied to an SEM image to obtain a idealized image, and the idealized image is used to detect a defect in a subject of the SEM image. The defect is detected by subtraction of the idealized image from the original image. Morphological operations are used also to entrance the visibility of defects or to check for irregularities in patterns. Other described methods comprise: growing a flow from seed points in the image, in order to define maps in which particles can be identified; checking for separation of objects in the image by growing flows from seed points located on the objects; segmenting the image into supposed identical objects and applying statistical methods to identify the defective ones.
PCT/US2004/023024 2003-07-18 2004-07-15 Methods for defect detection and process monitoring based on sem images WO2005008223A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US10/564,846 US7764824B2 (en) 2003-07-18 2004-07-15 Method for defect detection and process monitoring based on SEM images

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US48856103P 2003-07-18 2003-07-18
US60/488,561 2003-07-18

Publications (2)

Publication Number Publication Date
WO2005008223A2 WO2005008223A2 (en) 2005-01-27
WO2005008223A3 true WO2005008223A3 (en) 2005-07-14

Family

ID=34079436

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/023024 WO2005008223A2 (en) 2003-07-18 2004-07-15 Methods for defect detection and process monitoring based on sem images

Country Status (2)

Country Link
US (1) US7764824B2 (en)
WO (1) WO2005008223A2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2449239B (en) * 2007-05-14 2009-11-04 Spectrum Inspection Systems Ltd X-ray imaging
US8788219B2 (en) * 2010-05-11 2014-07-22 Röntgen Technische Dienst B.V. Method of determining an edge of an anomaly, method of determining interaction, method of aligning, computer program product, and data carrier
GB2487572A (en) * 2011-01-28 2012-08-01 Ge Inspection Technologies Ltd A non-destructive test method for automatic fastener inspection
US10102619B1 (en) 2011-03-28 2018-10-16 Hermes Microvision, Inc. Inspection method and system
CN102353697B (en) * 2011-08-31 2015-04-29 上海华虹宏力半导体制造有限公司 Defect on-line assessment method
KR102085522B1 (en) 2013-11-14 2020-03-06 삼성전자 주식회사 Method for detecting the defect of the pattern
CN109297882B (en) * 2018-10-31 2021-01-29 中国石油天然气股份有限公司 Rock erosion test method and device
CN110021012B (en) * 2019-03-27 2023-09-26 安徽皓视光电科技有限公司 Mobile phone lens window glass defect detection method based on machine vision technology
US11321835B2 (en) * 2020-03-17 2022-05-03 Applied Materials Israel Ltd. Determining three dimensional information
CN114113179A (en) * 2021-10-14 2022-03-01 国网甘肃省电力公司电力科学研究院 Method for rapidly judging original defects of galvanized steel component

Citations (7)

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Publication number Priority date Publication date Assignee Title
US4484081A (en) * 1980-09-19 1984-11-20 Trw Inc. Defect analysis system
US5513275A (en) * 1993-01-12 1996-04-30 Board Of Trustees Of The Leland Stanford Junior University Automated direct patterned wafer inspection
US6122397A (en) * 1997-07-03 2000-09-19 Tri Path Imaging, Inc. Method and apparatus for maskless semiconductor and liquid crystal display inspection
EP1146481A2 (en) * 2000-03-21 2001-10-17 Nanogeometry Research Pattern inspection apparatus, pattern inspection method, and recording medium
US20010036306A1 (en) * 2000-03-08 2001-11-01 Joachim Wienecke Method for evaluating pattern defects on a wafer surface
US6330354B1 (en) * 1997-05-01 2001-12-11 International Business Machines Corporation Method of analyzing visual inspection image data to find defects on a device
US20030076989A1 (en) * 2001-10-24 2003-04-24 Maayah Kais Jameel Automated repetitive array microstructure defect inspection

Family Cites Families (1)

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Publication number Priority date Publication date Assignee Title
JP2004003632A (en) * 2002-04-24 2004-01-08 Fujitsu Ten Ltd Fastener, cord fixing construction, on-vehicle equipment, vehicle, and method of manufacturing fastener

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4484081A (en) * 1980-09-19 1984-11-20 Trw Inc. Defect analysis system
US5513275A (en) * 1993-01-12 1996-04-30 Board Of Trustees Of The Leland Stanford Junior University Automated direct patterned wafer inspection
US6330354B1 (en) * 1997-05-01 2001-12-11 International Business Machines Corporation Method of analyzing visual inspection image data to find defects on a device
US6122397A (en) * 1997-07-03 2000-09-19 Tri Path Imaging, Inc. Method and apparatus for maskless semiconductor and liquid crystal display inspection
US20010036306A1 (en) * 2000-03-08 2001-11-01 Joachim Wienecke Method for evaluating pattern defects on a wafer surface
EP1146481A2 (en) * 2000-03-21 2001-10-17 Nanogeometry Research Pattern inspection apparatus, pattern inspection method, and recording medium
US20030076989A1 (en) * 2001-10-24 2003-04-24 Maayah Kais Jameel Automated repetitive array microstructure defect inspection

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
GONGYUAN QU ET AL: "Wafer defect detection using directional morphological gradient techniques", EURASIP JOURNAL ON APPLIED SIGNAL PROCESSING HINDAWI USA, vol. 2002, no. 7, 1 July 2002 (2002-07-01), pages 686 - 703, XP001202668, ISSN: 1110-8657 *
XIANGHONG ZHAO ET AL: "Automated image analysis for applications in reservoir characterization", KNOWLEDGE-BASED INTELLIGENT ENGINEERING SYSTEMS AND ALLIED TECHNOLOGIES, 2000. PROCEEDINGS. FOURTH INTERNATIONAL CONFERENCE ON BRIGHTON, UK 30 AUG.-1 SEPT. 2000, PISCATAWAY, NJ, USA,IEEE, US, vol. 2, 30 August 2000 (2000-08-30), pages 620 - 623, XP010523677, ISBN: 0-7803-6400-7 *

Also Published As

Publication number Publication date
US7764824B2 (en) 2010-07-27
WO2005008223A2 (en) 2005-01-27
US20060251340A1 (en) 2006-11-09

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