WO2004111661A3 - System and method for low coherence broadband quadrature interferometry - Google Patents

System and method for low coherence broadband quadrature interferometry Download PDF

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Publication number
WO2004111661A3
WO2004111661A3 PCT/US2004/016744 US2004016744W WO2004111661A3 WO 2004111661 A3 WO2004111661 A3 WO 2004111661A3 US 2004016744 W US2004016744 W US 2004016744W WO 2004111661 A3 WO2004111661 A3 WO 2004111661A3
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WO
WIPO (PCT)
Prior art keywords
interferometric
components
low coherence
interferometer
detector signals
Prior art date
Application number
PCT/US2004/016744
Other languages
French (fr)
Other versions
WO2004111661A2 (en
Inventor
Michael A Choma
Changheui Yang
Joseph A Izatt
Original Assignee
Univ Duke
Michael A Choma
Changheui Yang
Joseph A Izatt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Duke, Michael A Choma, Changheui Yang, Joseph A Izatt filed Critical Univ Duke
Priority to EP04753560A priority Critical patent/EP1644697A4/en
Publication of WO2004111661A2 publication Critical patent/WO2004111661A2/en
Publication of WO2004111661A3 publication Critical patent/WO2004111661A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4795—Scattering, i.e. diffuse reflection spatially resolved investigating of object in scattering medium
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Abstract

A quadrature broadband interferometry system and method obtains a complete complex interferometric signal instantaneously in both homodyne and heterodyne systems in a simple, compact, and inexpensive setup. This is accomplished by separating interferometric components from non-interferometric components in each of at least two detector signals of an interferometer having a number of NxN couplers, scaling the interferometric components, and generating real and imaginary parts of a complex interferometric signal from the scaled interferometric components. The detector signals preferably derive from a broadband light source coupled to the interferometer, and the number of NxN couplers may be one or more, with N ≥ 3.
PCT/US2004/016744 2003-05-30 2004-05-27 System and method for low coherence broadband quadrature interferometry WO2004111661A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP04753560A EP1644697A4 (en) 2003-05-30 2004-05-27 System and method for low coherence broadband quadrature interferometry

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US47422203P 2003-05-30 2003-05-30
US60/474,222 2003-05-30

Publications (2)

Publication Number Publication Date
WO2004111661A2 WO2004111661A2 (en) 2004-12-23
WO2004111661A3 true WO2004111661A3 (en) 2005-05-26

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/016744 WO2004111661A2 (en) 2003-05-30 2004-05-27 System and method for low coherence broadband quadrature interferometry

Country Status (3)

Country Link
US (1) US7019838B2 (en)
EP (1) EP1644697A4 (en)
WO (1) WO2004111661A2 (en)

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