WO2004109772A3 - Method and system for etching a high-k dielectric material - Google Patents
Method and system for etching a high-k dielectric material Download PDFInfo
- Publication number
- WO2004109772A3 WO2004109772A3 PCT/US2004/014610 US2004014610W WO2004109772A3 WO 2004109772 A3 WO2004109772 A3 WO 2004109772A3 US 2004014610 W US2004014610 W US 2004014610W WO 2004109772 A3 WO2004109772 A3 WO 2004109772A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- etching
- substrate
- process gas
- plasma
- gas
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
- H01L21/31122—Etching inorganic layers by chemical means by dry-etching of layers not containing Si, e.g. PZT, Al2O3
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04751808A EP1629529A2 (en) | 2003-05-30 | 2004-05-11 | Method and system for etching a high-k dielectric material |
JP2006532925A JP4723503B2 (en) | 2003-05-30 | 2004-05-11 | Method and system for etching high-k dielectric materials |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US47422503P | 2003-05-30 | 2003-05-30 | |
US47422403P | 2003-05-30 | 2003-05-30 | |
US60/474,224 | 2003-05-30 | ||
US60/474,225 | 2003-05-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2004109772A2 WO2004109772A2 (en) | 2004-12-16 |
WO2004109772A3 true WO2004109772A3 (en) | 2005-04-14 |
Family
ID=33514014
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2004/014757 WO2004109773A2 (en) | 2003-05-30 | 2004-05-11 | Method and system for heating a substrate using a plasma |
PCT/US2004/014610 WO2004109772A2 (en) | 2003-05-30 | 2004-05-11 | Method and system for etching a high-k dielectric material |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2004/014757 WO2004109773A2 (en) | 2003-05-30 | 2004-05-11 | Method and system for heating a substrate using a plasma |
Country Status (5)
Country | Link |
---|---|
US (2) | US20050118353A1 (en) |
EP (1) | EP1629529A2 (en) |
JP (2) | JP2007502547A (en) |
KR (1) | KR101037308B1 (en) |
WO (2) | WO2004109773A2 (en) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7217665B2 (en) | 2002-11-20 | 2007-05-15 | Applied Materials, Inc. | Method of plasma etching high-K dielectric materials with high selectivity to underlying layers |
AU2003272656A1 (en) * | 2002-09-27 | 2004-04-19 | Tokyo Electron Limited | A method and system for etching high-k dielectric materials |
US20050136681A1 (en) * | 2003-12-23 | 2005-06-23 | Tokyo Electron Limited | Method and apparatus for removing photoresist from a substrate |
US20060019451A1 (en) * | 2004-07-22 | 2006-01-26 | Jeng-Huey Hwang | Method for patterning hfo2-containing dielectric |
JP4515956B2 (en) * | 2005-05-02 | 2010-08-04 | 株式会社日立ハイテクノロジーズ | Sample etching method |
JP4725232B2 (en) * | 2005-08-02 | 2011-07-13 | セイコーエプソン株式会社 | Manufacturing method of liquid crystal panel |
US7964512B2 (en) | 2005-08-22 | 2011-06-21 | Applied Materials, Inc. | Method for etching high dielectric constant materials |
US20070056925A1 (en) * | 2005-09-09 | 2007-03-15 | Lam Research Corporation | Selective etch of films with high dielectric constant with H2 addition |
US7780862B2 (en) * | 2006-03-21 | 2010-08-24 | Applied Materials, Inc. | Device and method for etching flash memory gate stacks comprising high-k dielectric |
US8722547B2 (en) | 2006-04-20 | 2014-05-13 | Applied Materials, Inc. | Etching high K dielectrics with high selectivity to oxide containing layers at elevated temperatures with BC13 based etch chemistries |
JP2009021584A (en) * | 2007-06-27 | 2009-01-29 | Applied Materials Inc | High temperature etching method of high k material gate structure |
US7967995B2 (en) * | 2008-03-31 | 2011-06-28 | Tokyo Electron Limited | Multi-layer/multi-input/multi-output (MLMIMO) models and method for using |
KR101566029B1 (en) * | 2008-04-10 | 2015-11-05 | 램 리써치 코포레이션 | Selective etch of high-k dielectric material |
US8313661B2 (en) * | 2009-11-09 | 2012-11-20 | Tokyo Electron Limited | Deep trench liner removal process |
JP5434970B2 (en) | 2010-07-12 | 2014-03-05 | セントラル硝子株式会社 | Dry etchant |
US8808562B2 (en) | 2011-09-12 | 2014-08-19 | Tokyo Electron Limited | Dry metal etching method |
JP6096762B2 (en) * | 2012-04-26 | 2017-03-15 | 東京エレクトロン株式会社 | Plasma processing method and plasma processing apparatus |
GB201305674D0 (en) * | 2013-03-28 | 2013-05-15 | Spts Technologies Ltd | Method and apparatus for processing a semiconductor workpiece |
JP6211947B2 (en) * | 2013-07-31 | 2017-10-11 | 東京エレクトロン株式会社 | Manufacturing method of semiconductor device |
JP6130313B2 (en) * | 2014-02-26 | 2017-05-17 | Sppテクノロジーズ株式会社 | Plasma etching method |
JP6604738B2 (en) * | 2015-04-10 | 2019-11-13 | 東京エレクトロン株式会社 | Plasma etching method, pattern forming method, and cleaning method |
JP6567487B2 (en) * | 2016-11-28 | 2019-08-28 | Sppテクノロジーズ株式会社 | Plasma etching method |
US11189464B2 (en) * | 2019-07-17 | 2021-11-30 | Beijing E-town Semiconductor Technology Co., Ltd. | Variable mode plasma chamber utilizing tunable plasma potential |
Citations (7)
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US5225036A (en) * | 1988-03-28 | 1993-07-06 | Kabushiki Kaisha Toshiba | Method of manufacturing semiconductor device |
US5776356A (en) * | 1994-07-27 | 1998-07-07 | Sharp Kabushiki Kaisha | Method for etching ferroelectric film |
US6511918B2 (en) * | 1998-12-04 | 2003-01-28 | Infineon Technologies Ag | Method of structuring a metal-containing layer |
US6528328B1 (en) * | 2001-12-21 | 2003-03-04 | Texas Instruments Incorporated | Methods of preventing reduction of irox during PZT formation by metalorganic chemical vapor deposition or other processing |
US20030170986A1 (en) * | 2002-03-06 | 2003-09-11 | Applied Materials, Inc. | Method of plasma etching of high-K dielectric materials with high selectivity to underlying layers |
EP1422751A2 (en) * | 2002-11-20 | 2004-05-26 | Applied Materials, Inc. | Method of plasma etching high-K dielectric materials with high selectivity to underlying layers |
EP1469510A2 (en) * | 2003-04-17 | 2004-10-20 | Applied Materials, Inc. | Method for fabricating a gate structure of a field effect transistor |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5374576A (en) * | 1988-12-21 | 1994-12-20 | Hitachi, Ltd. | Method of fabricating stacked capacitor cell memory devices |
JPH08236503A (en) * | 1995-02-27 | 1996-09-13 | Toshiba Corp | Selective etching method for aluminum oxide thin film |
US5827437A (en) * | 1996-05-17 | 1998-10-27 | Lam Research Corporation | Multi-step metallization etch |
US6030666A (en) * | 1997-03-31 | 2000-02-29 | Lam Research Corporation | Method for microwave plasma substrate heating |
US5937323A (en) * | 1997-06-03 | 1999-08-10 | Applied Materials, Inc. | Sequencing of the recipe steps for the optimal low-k HDP-CVD processing |
US6322714B1 (en) | 1997-11-12 | 2001-11-27 | Applied Materials Inc. | Process for etching silicon-containing material on substrates |
JP2001077059A (en) * | 1999-09-07 | 2001-03-23 | Sanyo Electric Co Ltd | Processing of metallic oxide film |
US6849305B2 (en) * | 2000-04-28 | 2005-02-01 | Ekc Technology, Inc. | Photolytic conversion process to form patterned amorphous film |
US6878402B2 (en) * | 2000-12-06 | 2005-04-12 | Novellus Systems, Inc. | Method and apparatus for improved temperature control in atomic layer deposition |
US6709609B2 (en) * | 2000-12-22 | 2004-03-23 | Applied Materials Inc. | Plasma heating of a substrate with subsequent high temperature etching |
US6740601B2 (en) * | 2001-05-11 | 2004-05-25 | Applied Materials Inc. | HDP-CVD deposition process for filling high aspect ratio gaps |
US6962679B2 (en) * | 2001-07-11 | 2005-11-08 | Battelle Memorial Institute | Processes and apparatuses for treating halogen-containing gases |
JP3990881B2 (en) | 2001-07-23 | 2007-10-17 | 株式会社日立製作所 | Semiconductor manufacturing apparatus and cleaning method thereof |
JP2003059906A (en) | 2001-07-31 | 2003-02-28 | Applied Materials Inc | Etching method, and method of forming capacitor |
US6451647B1 (en) | 2002-03-18 | 2002-09-17 | Advanced Micro Devices, Inc. | Integrated plasma etch of gate and gate dielectric and low power plasma post gate etch removal of high-K residual |
US20040011380A1 (en) * | 2002-07-18 | 2004-01-22 | Bing Ji | Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials |
US7357138B2 (en) * | 2002-07-18 | 2008-04-15 | Air Products And Chemicals, Inc. | Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials |
US6833325B2 (en) * | 2002-10-11 | 2004-12-21 | Lam Research Corporation | Method for plasma etching performance enhancement |
US20050176191A1 (en) * | 2003-02-04 | 2005-08-11 | Applied Materials, Inc. | Method for fabricating a notched gate structure of a field effect transistor |
US6746925B1 (en) * | 2003-03-25 | 2004-06-08 | Lsi Logic Corporation | High-k dielectric bird's beak optimizations using in-situ O2 plasma oxidation |
-
2004
- 2004-05-11 KR KR1020057022970A patent/KR101037308B1/en not_active IP Right Cessation
- 2004-05-11 JP JP2006532962A patent/JP2007502547A/en not_active Withdrawn
- 2004-05-11 WO PCT/US2004/014757 patent/WO2004109773A2/en active Application Filing
- 2004-05-11 WO PCT/US2004/014610 patent/WO2004109772A2/en active Application Filing
- 2004-05-11 JP JP2006532925A patent/JP4723503B2/en not_active Expired - Fee Related
- 2004-05-11 EP EP04751808A patent/EP1629529A2/en not_active Withdrawn
- 2004-05-25 US US10/853,026 patent/US20050118353A1/en not_active Abandoned
- 2004-05-25 US US10/852,685 patent/US7709397B2/en not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5225036A (en) * | 1988-03-28 | 1993-07-06 | Kabushiki Kaisha Toshiba | Method of manufacturing semiconductor device |
US5776356A (en) * | 1994-07-27 | 1998-07-07 | Sharp Kabushiki Kaisha | Method for etching ferroelectric film |
US6511918B2 (en) * | 1998-12-04 | 2003-01-28 | Infineon Technologies Ag | Method of structuring a metal-containing layer |
US6528328B1 (en) * | 2001-12-21 | 2003-03-04 | Texas Instruments Incorporated | Methods of preventing reduction of irox during PZT formation by metalorganic chemical vapor deposition or other processing |
US20030170986A1 (en) * | 2002-03-06 | 2003-09-11 | Applied Materials, Inc. | Method of plasma etching of high-K dielectric materials with high selectivity to underlying layers |
EP1422751A2 (en) * | 2002-11-20 | 2004-05-26 | Applied Materials, Inc. | Method of plasma etching high-K dielectric materials with high selectivity to underlying layers |
EP1469510A2 (en) * | 2003-04-17 | 2004-10-20 | Applied Materials, Inc. | Method for fabricating a gate structure of a field effect transistor |
Non-Patent Citations (1)
Title |
---|
NORASETTHEKUL S ET AL: "Etch characteristics of HfO2 films on Si substrates", APPLIED SURFACE SCIENCE, ELSEVIER, AMSTERDAM, NL, vol. 187, no. 1-2, 14 February 2002 (2002-02-14), pages 75 - 81, XP002221366, ISSN: 0169-4332 * |
Also Published As
Publication number | Publication date |
---|---|
JP4723503B2 (en) | 2011-07-13 |
JP2007501533A (en) | 2007-01-25 |
WO2004109772A2 (en) | 2004-12-16 |
EP1629529A2 (en) | 2006-03-01 |
KR20060028636A (en) | 2006-03-30 |
JP2007502547A (en) | 2007-02-08 |
US7709397B2 (en) | 2010-05-04 |
US20050164511A1 (en) | 2005-07-28 |
WO2004109773A2 (en) | 2004-12-16 |
KR101037308B1 (en) | 2011-05-27 |
US20050118353A1 (en) | 2005-06-02 |
WO2004109773A3 (en) | 2005-07-14 |
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