WO2004105091A3 - Sensor usable in ultra pure and highly corrosive environments - Google Patents

Sensor usable in ultra pure and highly corrosive environments Download PDF

Info

Publication number
WO2004105091A3
WO2004105091A3 PCT/US2004/015098 US2004015098W WO2004105091A3 WO 2004105091 A3 WO2004105091 A3 WO 2004105091A3 US 2004015098 W US2004015098 W US 2004015098W WO 2004105091 A3 WO2004105091 A3 WO 2004105091A3
Authority
WO
WIPO (PCT)
Prior art keywords
highly corrosive
ultra pure
corrosive environments
sensor usable
diaphragm
Prior art date
Application number
PCT/US2004/015098
Other languages
French (fr)
Other versions
WO2004105091A2 (en
Inventor
Tom Peterson
Diaz Jorge Andres Diaz
Gerald R Cucci
Original Assignee
Entegris Inc
Tom Peterson
Diaz Jorge Andres Diaz
Gerald R Cucci
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc, Tom Peterson, Diaz Jorge Andres Diaz, Gerald R Cucci filed Critical Entegris Inc
Priority to KR1020057021825A priority Critical patent/KR101107464B1/en
Priority to JP2006533058A priority patent/JP5033421B2/en
Publication of WO2004105091A2 publication Critical patent/WO2004105091A2/en
Publication of WO2004105091A3 publication Critical patent/WO2004105091A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0681—Protection against excessive heat
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/069—Protection against electromagnetic or electrostatic interferences
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Abstract

The electrical pin lead structure and brazing technique of the present invention provide a brazed lead in a sensor that adheres well to a semiconductor substrate while facilitating lateral flexibility without joint fatigue or breakage. An advantage to this approach is the ability to both braze the pin lead to the diaphragm (14) and seal the diaphragm to the ceramic backing plate with a high temperature glass in a single process step.
PCT/US2004/015098 2003-05-16 2004-05-14 Sensor usable in ultra pure and highly corrosive environments WO2004105091A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020057021825A KR101107464B1 (en) 2003-05-16 2004-05-14 Sensor having a non-porous outer surface and method of bonding an electrical lead to a semiconductor device
JP2006533058A JP5033421B2 (en) 2003-05-16 2004-05-14 Sensor usable in ultrapure environment and highly corrosive environment, and its manufacturing method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/440,433 US7152478B2 (en) 2000-07-20 2003-05-16 Sensor usable in ultra pure and highly corrosive environments
US10/440,433 2003-05-16

Publications (2)

Publication Number Publication Date
WO2004105091A2 WO2004105091A2 (en) 2004-12-02
WO2004105091A3 true WO2004105091A3 (en) 2005-05-12

Family

ID=33476595

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/015098 WO2004105091A2 (en) 2003-05-16 2004-05-14 Sensor usable in ultra pure and highly corrosive environments

Country Status (6)

Country Link
US (1) US7152478B2 (en)
JP (1) JP5033421B2 (en)
KR (1) KR101107464B1 (en)
CN (1) CN100587435C (en)
TW (1) TWI341920B (en)
WO (1) WO2004105091A2 (en)

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US9975765B1 (en) 2015-12-18 2018-05-22 The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration Fabricating ultra-thin silicon carbide diaphragms
KR101661443B1 (en) 2016-06-02 2016-09-29 강성중 Flexible lead manufacturing methods
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Also Published As

Publication number Publication date
CN100587435C (en) 2010-02-03
JP2006529027A (en) 2006-12-28
US20040040382A1 (en) 2004-03-04
US7152478B2 (en) 2006-12-26
KR101107464B1 (en) 2012-01-19
TW200517642A (en) 2005-06-01
JP5033421B2 (en) 2012-09-26
TWI341920B (en) 2011-05-11
WO2004105091A2 (en) 2004-12-02
CN1809736A (en) 2006-07-26
KR20060012296A (en) 2006-02-07

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