WO2004105084A3 - Method of room temperature covalent bonding - Google Patents

Method of room temperature covalent bonding Download PDF

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Publication number
WO2004105084A3
WO2004105084A3 PCT/US2004/013306 US2004013306W WO2004105084A3 WO 2004105084 A3 WO2004105084 A3 WO 2004105084A3 US 2004013306 W US2004013306 W US 2004013306W WO 2004105084 A3 WO2004105084 A3 WO 2004105084A3
Authority
WO
WIPO (PCT)
Prior art keywords
bonding
fluorine
layers
room temperature
bonding layer
Prior art date
Application number
PCT/US2004/013306
Other languages
French (fr)
Other versions
WO2004105084A2 (en
Inventor
Qin-Yi Tong
Original Assignee
Ziptronix Inc
Qin-Yi Tong
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=33449761&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO2004105084(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Ziptronix Inc, Qin-Yi Tong filed Critical Ziptronix Inc
Priority to JP2006532508A priority Critical patent/JP5570680B2/en
Priority to CA 2526481 priority patent/CA2526481A1/en
Priority to EP04750940A priority patent/EP1631981A4/en
Priority to KR1020057022105A priority patent/KR101154227B1/en
Publication of WO2004105084A2 publication Critical patent/WO2004105084A2/en
Priority to IL171996A priority patent/IL171996A0/en
Publication of WO2004105084A3 publication Critical patent/WO2004105084A3/en
Priority to IL205212A priority patent/IL205212A0/en

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Abstract

A method of bonding includes using a bonding layer having a fluorinated oxide. Fluorine may be introduced into the bonding layer by exposure to a fluorine-containing solution, vapor or gas or by implantation. The bonding layer may also be formed using a method where fluorine is introduced into the layer during its formation. The surface of the bonding layer is terminated with a desired species, preferably an NH2 species. This may be accomplished by exposing the bonding layer to an NH4OH solution. High bonding strength is obtained at room temperature. The method may also include bonding two bonding layers together and creating a fluorine distribution having a peak in the vicinity of the interface between the bonding layers. One of the bonding layers may include two oxide layers formed on each other. The fluorine concentration may also have a second peak at the interface between the two oxide layers.
PCT/US2004/013306 2003-05-19 2004-05-19 Method of room temperature covalent bonding WO2004105084A2 (en)

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CA 2526481 CA2526481A1 (en) 2003-05-19 2004-05-19 Method of room temperature covalent bonding
EP04750940A EP1631981A4 (en) 2003-05-19 2004-05-19 Method of room temperature covalent bonding
KR1020057022105A KR101154227B1 (en) 2003-05-19 2004-05-19 Method of room temperature covalent bonding
IL171996A IL171996A0 (en) 2003-05-19 2005-11-16 Method of room temperature covalent bonding
IL205212A IL205212A0 (en) 2003-05-19 2010-04-21 Method of room temperature covalent bonding

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