WO2004094106A1 - Diamond conditioning of soft chemical mechanical planarization/polishing (cmp) polishing pads - Google Patents
Diamond conditioning of soft chemical mechanical planarization/polishing (cmp) polishing pads Download PDFInfo
- Publication number
- WO2004094106A1 WO2004094106A1 PCT/US2003/039969 US0339969W WO2004094106A1 WO 2004094106 A1 WO2004094106 A1 WO 2004094106A1 US 0339969 W US0339969 W US 0339969W WO 2004094106 A1 WO2004094106 A1 WO 2004094106A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- polishing pad
- soft polishing
- soft
- cmp
- diamond
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/007—Cleaning of grinding wheels
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03816708A EP1641596A1 (en) | 2003-03-28 | 2003-12-15 | Diamond conditioning of soft chemical mechanical planarization/polishing (cmp) polishing pads |
AU2003297156A AU2003297156A1 (en) | 2003-03-28 | 2003-12-15 | Diamond conditioning of soft chemical mechanical planarization/polishing (cmp) polishing pads |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/402,578 | 2003-03-28 | ||
US10/402,578 US20040192178A1 (en) | 2003-03-28 | 2003-03-28 | Diamond conditioning of soft chemical mechanical planarization/polishing (CMP) polishing pads |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2004094106A1 true WO2004094106A1 (en) | 2004-11-04 |
Family
ID=32989732
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2003/039969 WO2004094106A1 (en) | 2003-03-28 | 2003-12-15 | Diamond conditioning of soft chemical mechanical planarization/polishing (cmp) polishing pads |
Country Status (7)
Country | Link |
---|---|
US (2) | US20040192178A1 (en) |
EP (1) | EP1641596A1 (en) |
KR (1) | KR100818591B1 (en) |
CN (1) | CN1694783A (en) |
AU (1) | AU2003297156A1 (en) |
TW (2) | TWI303406B (en) |
WO (1) | WO2004094106A1 (en) |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7651386B2 (en) | 2005-09-09 | 2010-01-26 | Chien-Min Sung | Methods of bonding superabrasive particles in an organic matrix |
US7658666B2 (en) | 2004-08-24 | 2010-02-09 | Chien-Min Sung | Superhard cutters and associated methods |
US7762872B2 (en) | 2004-08-24 | 2010-07-27 | Chien-Min Sung | Superhard cutters and associated methods |
US8393934B2 (en) | 2006-11-16 | 2013-03-12 | Chien-Min Sung | CMP pad dressers with hybridized abrasive surface and related methods |
US8398466B2 (en) | 2006-11-16 | 2013-03-19 | Chien-Min Sung | CMP pad conditioners with mosaic abrasive segments and associated methods |
US8777699B2 (en) | 2010-09-21 | 2014-07-15 | Ritedia Corporation | Superabrasive tools having substantially leveled particle tips and associated methods |
US8974270B2 (en) | 2011-05-23 | 2015-03-10 | Chien-Min Sung | CMP pad dresser having leveled tips and associated methods |
US9011563B2 (en) | 2007-12-06 | 2015-04-21 | Chien-Min Sung | Methods for orienting superabrasive particles on a surface and associated tools |
US9138862B2 (en) | 2011-05-23 | 2015-09-22 | Chien-Min Sung | CMP pad dresser having leveled tips and associated methods |
US9199357B2 (en) | 1997-04-04 | 2015-12-01 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9221154B2 (en) | 1997-04-04 | 2015-12-29 | Chien-Min Sung | Diamond tools and methods for making the same |
US9238207B2 (en) | 1997-04-04 | 2016-01-19 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9409280B2 (en) | 1997-04-04 | 2016-08-09 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9463552B2 (en) | 1997-04-04 | 2016-10-11 | Chien-Min Sung | Superbrasvie tools containing uniformly leveled superabrasive particles and associated methods |
US9475169B2 (en) | 2009-09-29 | 2016-10-25 | Chien-Min Sung | System for evaluating and/or improving performance of a CMP pad dresser |
US9724802B2 (en) | 2005-05-16 | 2017-08-08 | Chien-Min Sung | CMP pad dressers having leveled tips and associated methods |
US9868100B2 (en) | 1997-04-04 | 2018-01-16 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005144298A (en) * | 2003-11-13 | 2005-06-09 | Seiko Epson Corp | Surface washing and modification method and surface washing and modification apparatus |
US20090061743A1 (en) * | 2007-08-29 | 2009-03-05 | Stephen Jew | Method of soft pad preparation to reduce removal rate ramp-up effect and to stabilize defect rate |
TW200929348A (en) * | 2007-11-21 | 2009-07-01 | Jian-Min Sung | Examination method for trimming chemical mechanical polishing pad and related system thereof |
US8758091B2 (en) | 2010-04-06 | 2014-06-24 | Massachusetts Institute Of Technology | Chemical-mechanical polishing pad conditioning system |
US9233451B2 (en) | 2013-05-31 | 2016-01-12 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Soft and conditionable chemical mechanical polishing pad stack |
US9238295B2 (en) | 2013-05-31 | 2016-01-19 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Soft and conditionable chemical mechanical window polishing pad |
US9238296B2 (en) | 2013-05-31 | 2016-01-19 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Multilayer chemical mechanical polishing pad stack with soft and conditionable polishing layer |
CN113183031A (en) * | 2021-05-20 | 2021-07-30 | 杭州众硅电子科技有限公司 | Dressing head rotating part, polishing pad dressing head and dresser |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20010029155A1 (en) * | 2000-01-31 | 2001-10-11 | Applied Materials, Inc. | Multi-step conditioning process |
US20020137436A1 (en) * | 2000-01-28 | 2002-09-26 | Lam Research Corporation | System and method for controlled polishing and planarization of semiconductor wafers |
Family Cites Families (22)
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US3863395A (en) * | 1974-02-19 | 1975-02-04 | Shugart Associates Inc | Apparatus for polishing a spherical surface on a magnetic recording transducer |
US4739759A (en) * | 1985-02-26 | 1988-04-26 | Concept, Inc. | Microprocessor controlled electrosurgical generator |
US4927432A (en) * | 1986-03-25 | 1990-05-22 | Rodel, Inc. | Pad material for grinding, lapping and polishing |
US5585147A (en) * | 1994-06-28 | 1996-12-17 | Matsushita Electric Works, Ltd. | Process for a surface treatment of a glass fabric |
US5611943A (en) * | 1995-09-29 | 1997-03-18 | Intel Corporation | Method and apparatus for conditioning of chemical-mechanical polishing pads |
EP0779655A3 (en) * | 1995-12-14 | 1997-07-16 | International Business Machines Corporation | A method of chemically-mechanically polishing an electronic component |
US5990010A (en) * | 1997-04-08 | 1999-11-23 | Lsi Logic Corporation | Pre-conditioning polishing pads for chemical-mechanical polishing |
JP3676030B2 (en) * | 1997-04-10 | 2005-07-27 | 株式会社東芝 | Polishing pad dressing method and semiconductor device manufacturing method |
JP3231659B2 (en) * | 1997-04-28 | 2001-11-26 | 日本電気株式会社 | Automatic polishing equipment |
US5885147A (en) * | 1997-05-12 | 1999-03-23 | Integrated Process Equipment Corp. | Apparatus for conditioning polishing pads |
US6045435A (en) * | 1997-08-04 | 2000-04-04 | Motorola, Inc. | Low selectivity chemical mechanical polishing (CMP) process for use on integrated circuit metal interconnects |
KR19990074921A (en) * | 1998-03-16 | 1999-10-05 | 윤종용 | Polishing Pad Conditioner in Wafer Polishing Equipment |
JP2002535843A (en) * | 1999-01-21 | 2002-10-22 | ロデール ホールディングス インコーポレイテッド | Improved polishing pad and associated method |
US6273797B1 (en) * | 1999-11-19 | 2001-08-14 | International Business Machines Corporation | In-situ automated CMP wedge conditioner |
US6419553B2 (en) * | 2000-01-04 | 2002-07-16 | Rodel Holdings, Inc. | Methods for break-in and conditioning a fixed abrasive polishing pad |
US6800020B1 (en) * | 2000-10-02 | 2004-10-05 | Lam Research Corporation | Web-style pad conditioning system and methods for implementing the same |
US6514127B2 (en) * | 2000-11-30 | 2003-02-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Conditioner set for chemical-mechanical polishing station |
US20020100743A1 (en) * | 2000-12-05 | 2002-08-01 | Bonner Benjamin A. | Multi-step polish process to control uniformity when using a selective slurry on patterned wafers |
US6409580B1 (en) * | 2001-03-26 | 2002-06-25 | Speedfam-Ipec Corporation | Rigid polishing pad conditioner for chemical mechanical polishing tool |
TW492065B (en) * | 2001-07-20 | 2002-06-21 | United Microelectronics Corp | Structure of polishing pad conditioner and method of use |
US7037184B2 (en) * | 2003-01-22 | 2006-05-02 | Raytech Innovation Solutions, Llc | Polishing pad for use in chemical-mechanical planarization of semiconductor wafers and method of making same |
US6852020B2 (en) * | 2003-01-22 | 2005-02-08 | Raytech Innovative Solutions, Inc. | Polishing pad for use in chemical—mechanical planarization of semiconductor wafers and method of making same |
-
2003
- 2003-03-28 US US10/402,578 patent/US20040192178A1/en not_active Abandoned
- 2003-12-15 WO PCT/US2003/039969 patent/WO2004094106A1/en not_active Application Discontinuation
- 2003-12-15 AU AU2003297156A patent/AU2003297156A1/en not_active Abandoned
- 2003-12-15 EP EP03816708A patent/EP1641596A1/en not_active Withdrawn
- 2003-12-15 KR KR1020057018192A patent/KR100818591B1/en not_active IP Right Cessation
- 2003-12-15 CN CNA2003801007898A patent/CN1694783A/en active Pending
- 2003-12-18 TW TW095113436A patent/TWI303406B/en active
- 2003-12-18 TW TW092136019A patent/TWI286502B/en not_active IP Right Cessation
-
2006
- 2006-04-12 US US11/402,449 patent/US20060183410A1/en not_active Abandoned
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020137436A1 (en) * | 2000-01-28 | 2002-09-26 | Lam Research Corporation | System and method for controlled polishing and planarization of semiconductor wafers |
US20010029155A1 (en) * | 2000-01-31 | 2001-10-11 | Applied Materials, Inc. | Multi-step conditioning process |
Cited By (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9868100B2 (en) | 1997-04-04 | 2018-01-16 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9221154B2 (en) | 1997-04-04 | 2015-12-29 | Chien-Min Sung | Diamond tools and methods for making the same |
US9199357B2 (en) | 1997-04-04 | 2015-12-01 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9409280B2 (en) | 1997-04-04 | 2016-08-09 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9463552B2 (en) | 1997-04-04 | 2016-10-11 | Chien-Min Sung | Superbrasvie tools containing uniformly leveled superabrasive particles and associated methods |
US9238207B2 (en) | 1997-04-04 | 2016-01-19 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US7658666B2 (en) | 2004-08-24 | 2010-02-09 | Chien-Min Sung | Superhard cutters and associated methods |
US7762872B2 (en) | 2004-08-24 | 2010-07-27 | Chien-Min Sung | Superhard cutters and associated methods |
US9724802B2 (en) | 2005-05-16 | 2017-08-08 | Chien-Min Sung | CMP pad dressers having leveled tips and associated methods |
US9067301B2 (en) | 2005-05-16 | 2015-06-30 | Chien-Min Sung | CMP pad dressers with hybridized abrasive surface and related methods |
US8414362B2 (en) | 2005-09-09 | 2013-04-09 | Chien-Min Sung | Methods of bonding superabrasive particles in an organic matrix |
US9902040B2 (en) | 2005-09-09 | 2018-02-27 | Chien-Min Sung | Methods of bonding superabrasive particles in an organic matrix |
US7651386B2 (en) | 2005-09-09 | 2010-01-26 | Chien-Min Sung | Methods of bonding superabrasive particles in an organic matrix |
US7901272B2 (en) | 2005-09-09 | 2011-03-08 | Chien-Min Sung | Methods of bonding superabrasive particles in an organic matrix |
US7690971B2 (en) | 2005-09-09 | 2010-04-06 | Chien-Min Sung | Methods of bonding superabrasive particles in an organic matrix |
US8393934B2 (en) | 2006-11-16 | 2013-03-12 | Chien-Min Sung | CMP pad dressers with hybridized abrasive surface and related methods |
US8398466B2 (en) | 2006-11-16 | 2013-03-19 | Chien-Min Sung | CMP pad conditioners with mosaic abrasive segments and associated methods |
US9011563B2 (en) | 2007-12-06 | 2015-04-21 | Chien-Min Sung | Methods for orienting superabrasive particles on a surface and associated tools |
US9475169B2 (en) | 2009-09-29 | 2016-10-25 | Chien-Min Sung | System for evaluating and/or improving performance of a CMP pad dresser |
US8777699B2 (en) | 2010-09-21 | 2014-07-15 | Ritedia Corporation | Superabrasive tools having substantially leveled particle tips and associated methods |
US9138862B2 (en) | 2011-05-23 | 2015-09-22 | Chien-Min Sung | CMP pad dresser having leveled tips and associated methods |
US8974270B2 (en) | 2011-05-23 | 2015-03-10 | Chien-Min Sung | CMP pad dresser having leveled tips and associated methods |
Also Published As
Publication number | Publication date |
---|---|
AU2003297156A1 (en) | 2004-11-19 |
TWI286502B (en) | 2007-09-11 |
TW200418612A (en) | 2004-10-01 |
TWI303406B (en) | 2008-11-21 |
KR100818591B1 (en) | 2008-04-02 |
CN1694783A (en) | 2005-11-09 |
TW200705376A (en) | 2007-02-01 |
US20040192178A1 (en) | 2004-09-30 |
US20060183410A1 (en) | 2006-08-17 |
KR20050112113A (en) | 2005-11-29 |
EP1641596A1 (en) | 2006-04-05 |
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