WO2004090582A3 - Method for constructing a catadioptric lens system - Google Patents

Method for constructing a catadioptric lens system Download PDF

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Publication number
WO2004090582A3
WO2004090582A3 PCT/US2004/009968 US2004009968W WO2004090582A3 WO 2004090582 A3 WO2004090582 A3 WO 2004090582A3 US 2004009968 W US2004009968 W US 2004009968W WO 2004090582 A3 WO2004090582 A3 WO 2004090582A3
Authority
WO
WIPO (PCT)
Prior art keywords
catadioptric lens
pie
lens system
constructing
shaped segments
Prior art date
Application number
PCT/US2004/009968
Other languages
French (fr)
Other versions
WO2004090582A2 (en
WO2004090582A9 (en
Inventor
Henry Allen Hill
Original Assignee
Zetetic Inst
Henry Allen Hill
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zetetic Inst, Henry Allen Hill filed Critical Zetetic Inst
Priority to JP2006509556A priority Critical patent/JP2006522371A/en
Priority to EP04758689A priority patent/EP1609019A2/en
Publication of WO2004090582A2 publication Critical patent/WO2004090582A2/en
Publication of WO2004090582A9 publication Critical patent/WO2004090582A9/en
Publication of WO2004090582A3 publication Critical patent/WO2004090582A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0056—Optical details of the image generation based on optical coherence, e.g. phase-contrast arrangements, interference arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/02—Simple or compound lenses with non-spherical faces
    • G02B3/08—Simple or compound lenses with non-spherical faces with discontinuous faces, e.g. Fresnel lens

Abstract

A method of fabricating a catadioptric lens system (600), the method involving: fabricating a single catadioptric lens element having a bottom surface and an upper surface, the upper surface having a convex portion and a concave portion, both the convex and concave portions sharing a common axis of symmetry; cutting apart the catadioptric lens element to form 2n pie-shaped segments (630, 632, 640, 642), wherein n is an integer; and reassembling the 2n pie-shaped segments to form the catadioptric lens system with n of the 2n pie-shaped segments being located above a common plane and the rest of the 2n pie-shaped elements being below the common plane.
PCT/US2004/009968 2003-04-01 2004-04-01 Method for constructing a catadioptric lens system WO2004090582A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006509556A JP2006522371A (en) 2003-04-01 2004-04-01 Method for constructing a catadioptric optical lens system
EP04758689A EP1609019A2 (en) 2003-04-01 2004-04-01 Method for constructing a catadioptric lens system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US45949303P 2003-04-01 2003-04-01
US60/459,493 2003-04-01

Publications (3)

Publication Number Publication Date
WO2004090582A2 WO2004090582A2 (en) 2004-10-21
WO2004090582A9 WO2004090582A9 (en) 2005-03-31
WO2004090582A3 true WO2004090582A3 (en) 2005-06-16

Family

ID=33159659

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/009968 WO2004090582A2 (en) 2003-04-01 2004-04-01 Method for constructing a catadioptric lens system

Country Status (5)

Country Link
US (1) US7054077B2 (en)
EP (1) EP1609019A2 (en)
JP (1) JP2006522371A (en)
KR (1) KR20050108422A (en)
WO (1) WO2004090582A2 (en)

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US7263259B2 (en) * 2003-02-07 2007-08-28 Zetetic Institute Multiple-source arrays fed by guided-wave structures and resonant guided-wave structure cavities
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US7133139B2 (en) * 2003-02-19 2006-11-07 Zetetic Institute Longitudinal differential interferometric confocal microscopy
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EP1609019A2 (en) 2003-04-01 2005-12-28 Zetetic Institute Method for constructing a catadioptric lens system
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US7298496B2 (en) * 2004-05-21 2007-11-20 Zetetic Institute Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry
US7161680B2 (en) * 2004-08-16 2007-01-09 Zetetic Institute Apparatus and method for joint and time delayed measurements of components of conjugated quadratures of fields of reflected/scattered and transmitted/scattered beams by an object in interferometry
WO2006023612A2 (en) * 2004-08-19 2006-03-02 Zetetic Institute Sub-nanometer overlay, critical dimension, and lithography tool projection optic metrology systems based on measurement of exposure induced changes in photoresist on wafers
US7145663B2 (en) * 2004-09-20 2006-12-05 Zetetic Institute Catoptric imaging systems comprising pellicle and/or aperture-array beam-splitters and non-adaptive and/or adaptive catoptric surfaces
US20110143287A1 (en) * 2009-09-14 2011-06-16 Nikon Corporation Catadioptric system, aberration measuring apparatus, method of adjusting optical system, exposure apparatus, and device manufacturing method
US9507129B2 (en) * 2013-10-31 2016-11-29 Duke University Apparatus comprising a compact catadioptric telescope
EP2869056B1 (en) * 2013-11-05 2020-05-20 Malvern Panalytical Limited Improvements relating to particle characterisation
EP2869055A1 (en) * 2013-11-05 2015-05-06 Malvern Instruments Limited Improvements relating to particle characterisation
EP2869054A1 (en) * 2013-11-05 2015-05-06 Malvern Instruments Limited Improvements relating to particle characterisation
CN105445824B (en) * 2014-08-20 2017-02-22 清华大学 LED optical communication receiving lens and LED optical communication system
DE102017101829A1 (en) * 2017-01-31 2018-08-02 Carl Zeiss Microscopy Gmbh Arrangement for increasing the resolution of a laser scanning microscope

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EP1609019A2 (en) 2003-04-01 2005-12-28 Zetetic Institute Method for constructing a catadioptric lens system
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Also Published As

Publication number Publication date
WO2004090582A2 (en) 2004-10-21
EP1609019A2 (en) 2005-12-28
JP2006522371A (en) 2006-09-28
WO2004090582A9 (en) 2005-03-31
US20040228008A1 (en) 2004-11-18
KR20050108422A (en) 2005-11-16
US7054077B2 (en) 2006-05-30

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