WO2004074881A3 - Method and apparatus for dark field interferometric confocal microscopy - Google Patents

Method and apparatus for dark field interferometric confocal microscopy Download PDF

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Publication number
WO2004074881A3
WO2004074881A3 PCT/US2004/004946 US2004004946W WO2004074881A3 WO 2004074881 A3 WO2004074881 A3 WO 2004074881A3 US 2004004946 W US2004004946 W US 2004004946W WO 2004074881 A3 WO2004074881 A3 WO 2004074881A3
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WO
WIPO (PCT)
Prior art keywords
array
spots
detector
plane
onto
Prior art date
Application number
PCT/US2004/004946
Other languages
French (fr)
Other versions
WO2004074881A2 (en
Inventor
Henry Allen Hill
Original Assignee
Zetetic Inst
Henry Allen Hill
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zetetic Inst, Henry Allen Hill filed Critical Zetetic Inst
Priority to EP04712864A priority Critical patent/EP1595107A4/en
Priority to JP2006503719A priority patent/JP2006518488A/en
Publication of WO2004074881A2 publication Critical patent/WO2004074881A2/en
Publication of WO2004074881A3 publication Critical patent/WO2004074881A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0056—Optical details of the image generation based on optical coherence, e.g. phase-contrast arrangements, interference arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/108—Beam splitting or combining systems for sampling a portion of a beam or combining a small beam in a larger one, e.g. wherein the area ratio or power ratio of the divided beams significantly differs from unity, without spectral selectivity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/143—Beam splitting or combining systems operating by reflection only using macroscopically faceted or segmented reflective surfaces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/144—Beam splitting or combining systems operating by reflection only using partially transparent surfaces without spectral selectivity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/145—Beam splitting or combining systems operating by reflection only having sequential partially reflecting surfaces

Abstract

A differential interferometric confocal microscope including: a source-side pinhole array; a detector-side pinhole array; and an interferometer that images the array of pinholes of the source-side pinhole array onto a first array of spots located in front of an object plane located near where the object is positioned (164) and onto a second array of spots behind the object plane (166), wherein the first and second arrays of spots are displaced relative to each other in a direction that is normal to the object plane, the interferometer also (1) imaging the first arrays of spots onto a first image plane that is behind the detector-side pinhole array (184), (2) imaging the first array of spots onto a plane defined by the detector-side pinhole array, (3) imaging the second array of spots onto a second image plane that is in front of the detector-side pinhole array (186), and (4) imaging the second array of spots onto the plane defined by the detector-side pinhole array, wherein each spot of the imaged first array of spots in the first image plane is aligned with a corresponding different spot of the imaged second array of spots in the second image plane and a corresponding different pinhole of the detector-side pinhole array, and wherein each spot of the image first array of spots in the plane defined by the detector-side array coincides with a corresponding different spot of the imaged second array of spots in the plane defined by the detector-side array and coincides with a corresponding different pinhole of the detector-side pinhole array.
PCT/US2004/004946 2003-02-19 2004-02-19 Method and apparatus for dark field interferometric confocal microscopy WO2004074881A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP04712864A EP1595107A4 (en) 2003-02-19 2004-02-19 Method and apparatus for dark field interferometric confocal microscopy
JP2006503719A JP2006518488A (en) 2003-02-19 2004-02-19 Method and apparatus for using dark field interference confocal microscope

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US44825003P 2003-02-19 2003-02-19
US44836003P 2003-02-19 2003-02-19
US60/448,360 2003-02-19
US60/448,250 2003-02-19

Publications (2)

Publication Number Publication Date
WO2004074881A2 WO2004074881A2 (en) 2004-09-02
WO2004074881A3 true WO2004074881A3 (en) 2005-05-12

Family

ID=32912290

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/004946 WO2004074881A2 (en) 2003-02-19 2004-02-19 Method and apparatus for dark field interferometric confocal microscopy

Country Status (5)

Country Link
US (1) US7023560B2 (en)
EP (1) EP1595107A4 (en)
JP (1) JP2006518488A (en)
KR (1) KR20050098940A (en)
WO (1) WO2004074881A2 (en)

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US7428058B2 (en) * 2005-05-18 2008-09-23 Zetetic Institute Apparatus and method for in situ and ex situ measurements of optical system flare
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Also Published As

Publication number Publication date
WO2004074881A2 (en) 2004-09-02
US20040201855A1 (en) 2004-10-14
EP1595107A4 (en) 2007-01-24
KR20050098940A (en) 2005-10-12
JP2006518488A (en) 2006-08-10
EP1595107A2 (en) 2005-11-16
US7023560B2 (en) 2006-04-04

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