WO2004071938A3 - Improved megasonic cleaning efficiency using auto- tuning of an rf generator at constant maximum efficiency - Google Patents
Improved megasonic cleaning efficiency using auto- tuning of an rf generator at constant maximum efficiency Download PDFInfo
- Publication number
- WO2004071938A3 WO2004071938A3 PCT/US2003/041226 US0341226W WO2004071938A3 WO 2004071938 A3 WO2004071938 A3 WO 2004071938A3 US 0341226 W US0341226 W US 0341226W WO 2004071938 A3 WO2004071938 A3 WO 2004071938A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- generator
- transducer
- substrate
- voltage
- tuning
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0207—Driving circuits
- B06B1/0223—Driving circuits for generating signals continuous in time
- B06B1/0238—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave
- B06B1/0246—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave with a feedback signal
- B06B1/0253—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave with a feedback signal taken directly from the generator circuit
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/70—Specific application
- B06B2201/71—Cleaning in a tank
Abstract
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03800161A EP1590828A2 (en) | 2003-02-06 | 2003-12-23 | Improved megasonic cleaning efficiency using auto- tuning of an rf generator at constant maximum efficiency |
CNB200380110213XA CN100401479C (en) | 2003-02-06 | 2003-12-23 | Improved megasonic cleaning efficiency using auto- tuning of an RF generator at constant maximum efficiency |
KR1020057014555A KR101108901B1 (en) | 2003-02-06 | 2003-12-23 | Improved megasonic cleaning efficiency using auto-tuning of an rf generator at constant maximum efficiency |
JP2004568342A JP4602773B2 (en) | 2003-02-06 | 2003-12-23 | Improved megasonic cleaning efficiency using automatic adjustment of RF generator with constant maximum efficiency |
AU2003299889A AU2003299889A1 (en) | 2003-02-06 | 2003-12-23 | Improved megasonic cleaning efficiency using auto- tuning of an rf generator at constant maximum efficiency |
Applications Claiming Priority (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/360,322 US6995067B2 (en) | 2003-02-06 | 2003-02-06 | Megasonic cleaning efficiency using auto-tuning of an RF generator at constant maximum efficiency |
US10/360,316 US6998349B2 (en) | 2003-02-06 | 2003-02-06 | System, method and apparatus for automatic control of an RF generator for maximum efficiency |
US10/360,320 US7033845B2 (en) | 2003-02-06 | 2003-02-06 | Phase control of megasonic RF generator for optimum operation |
US10/360,322 | 2003-02-06 | ||
US10/359,765 US7053000B2 (en) | 2003-02-06 | 2003-02-06 | System, method and apparatus for constant voltage control of RF generator for optimum operation |
US10/360,316 | 2003-02-06 | ||
US10/360,320 | 2003-02-06 | ||
US10/359,765 | 2003-02-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2004071938A2 WO2004071938A2 (en) | 2004-08-26 |
WO2004071938A3 true WO2004071938A3 (en) | 2004-12-29 |
Family
ID=32872957
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2003/041226 WO2004071938A2 (en) | 2003-02-06 | 2003-12-23 | Improved megasonic cleaning efficiency using auto- tuning of an rf generator at constant maximum efficiency |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP1590828A2 (en) |
JP (1) | JP4602773B2 (en) |
KR (1) | KR101108901B1 (en) |
CN (1) | CN100401479C (en) |
AU (1) | AU2003299889A1 (en) |
TW (1) | TWI292985B (en) |
WO (1) | WO2004071938A2 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2270838B1 (en) | 2009-07-02 | 2019-06-12 | IMEC vzw | Method and apparatus for controlling optimal operation of acoustic cleaning |
TWI490931B (en) * | 2009-10-05 | 2015-07-01 | Tokyo Electron Ltd | Ultrasonic cleaning device, ultrasonic cleaning method, and recording medium that records computer program for executing the ultrasonic cleaning method |
TWI716699B (en) * | 2018-06-29 | 2021-01-21 | 施俊名 | Ultrasonic frequency adjusting device for ultrasonic processing apparatus |
CN110801160B (en) * | 2018-08-06 | 2021-06-18 | 佛山市顺德区美的电热电器制造有限公司 | Control method and system of cooking device and cooking device |
CN113578859A (en) * | 2021-08-02 | 2021-11-02 | 史荃 | Staggered phase difference frequency type ultrasonic online sterilization, crushing, stirring and cleaning method and equipment |
CN113787050B (en) * | 2021-09-27 | 2023-08-18 | 韶关市洁盟超声科技有限公司 | Ultrasonic cleaner with controllable ultrasonic output waveform |
CN116581067B (en) * | 2023-07-12 | 2023-09-22 | 北京东方金荣超声电器有限公司 | Control method of megasonic system based on wet processing of device |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5601655A (en) * | 1995-02-14 | 1997-02-11 | Bok; Hendrik F. | Method of cleaning substrates |
US5931173A (en) * | 1997-06-09 | 1999-08-03 | Cypress Semiconductor Corporation | Monitoring cleaning effectiveness of a cleaning system |
US6311702B1 (en) * | 1998-11-11 | 2001-11-06 | Applied Materials, Inc. | Megasonic cleaner |
US6333268B1 (en) * | 1999-09-17 | 2001-12-25 | Novellus Systems, Inc. | Method and apparatus for removing post-etch residues and other adherent matrices |
US6370005B1 (en) * | 1998-10-14 | 2002-04-09 | Delsys Pharmaceutical Corporation | Electrostatic sensing chuck using area matched electrodes |
US6503454B1 (en) * | 2000-11-22 | 2003-01-07 | Xerox Corporation | Multi-ejector system for ejecting biofluids |
US6623700B1 (en) * | 2000-11-22 | 2003-09-23 | Xerox Corporation | Level sense and control system for biofluid drop ejection devices |
US6681781B2 (en) * | 1999-05-13 | 2004-01-27 | Fsi International, Inc. | Methods for cleaning microelectronic substrates using ultradilute cleaning liquids |
US6706337B2 (en) * | 2001-03-12 | 2004-03-16 | Agfa Corporation | Ultrasonic method for applying a coating material onto a substrate and for cleaning the coating material from the substrate |
US6713022B1 (en) * | 2000-11-22 | 2004-03-30 | Xerox Corporation | Devices for biofluid drop ejection |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6418229A (en) * | 1987-07-14 | 1989-01-23 | Oki Electric Ind Co Ltd | Super-ultrasonic cleaning device |
JP3112542B2 (en) * | 1992-01-24 | 2000-11-27 | オリンパス光学工業株式会社 | Ultrasonic polishing equipment |
US5339844A (en) * | 1992-08-10 | 1994-08-23 | Hughes Aircraft Company | Low cost equipment for cleaning using liquefiable gases |
JP2001346805A (en) | 2000-06-09 | 2001-12-18 | Olympus Optical Co Ltd | Ultrasonic surgical instrument |
US20020049551A1 (en) * | 2000-10-20 | 2002-04-25 | Ethicon Endo-Surgery, Inc. | Method for differentiating between burdened and cracked ultrasonically tuned blades |
-
2003
- 2003-12-23 JP JP2004568342A patent/JP4602773B2/en not_active Expired - Fee Related
- 2003-12-23 EP EP03800161A patent/EP1590828A2/en not_active Withdrawn
- 2003-12-23 CN CNB200380110213XA patent/CN100401479C/en not_active Expired - Fee Related
- 2003-12-23 KR KR1020057014555A patent/KR101108901B1/en not_active IP Right Cessation
- 2003-12-23 WO PCT/US2003/041226 patent/WO2004071938A2/en active Application Filing
- 2003-12-23 AU AU2003299889A patent/AU2003299889A1/en not_active Abandoned
- 2003-12-31 TW TW092137672A patent/TWI292985B/en not_active IP Right Cessation
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5601655A (en) * | 1995-02-14 | 1997-02-11 | Bok; Hendrik F. | Method of cleaning substrates |
US5931173A (en) * | 1997-06-09 | 1999-08-03 | Cypress Semiconductor Corporation | Monitoring cleaning effectiveness of a cleaning system |
US6370005B1 (en) * | 1998-10-14 | 2002-04-09 | Delsys Pharmaceutical Corporation | Electrostatic sensing chuck using area matched electrodes |
US6311702B1 (en) * | 1998-11-11 | 2001-11-06 | Applied Materials, Inc. | Megasonic cleaner |
US6681781B2 (en) * | 1999-05-13 | 2004-01-27 | Fsi International, Inc. | Methods for cleaning microelectronic substrates using ultradilute cleaning liquids |
US6333268B1 (en) * | 1999-09-17 | 2001-12-25 | Novellus Systems, Inc. | Method and apparatus for removing post-etch residues and other adherent matrices |
US6503454B1 (en) * | 2000-11-22 | 2003-01-07 | Xerox Corporation | Multi-ejector system for ejecting biofluids |
US6623700B1 (en) * | 2000-11-22 | 2003-09-23 | Xerox Corporation | Level sense and control system for biofluid drop ejection devices |
US6713022B1 (en) * | 2000-11-22 | 2004-03-30 | Xerox Corporation | Devices for biofluid drop ejection |
US6706337B2 (en) * | 2001-03-12 | 2004-03-16 | Agfa Corporation | Ultrasonic method for applying a coating material onto a substrate and for cleaning the coating material from the substrate |
Also Published As
Publication number | Publication date |
---|---|
WO2004071938A2 (en) | 2004-08-26 |
AU2003299889A1 (en) | 2004-09-06 |
JP2006513844A (en) | 2006-04-27 |
EP1590828A2 (en) | 2005-11-02 |
TWI292985B (en) | 2008-01-21 |
CN100401479C (en) | 2008-07-09 |
CN1759471A (en) | 2006-04-12 |
TW200421713A (en) | 2004-10-16 |
AU2003299889A8 (en) | 2004-09-06 |
KR20050097992A (en) | 2005-10-10 |
KR101108901B1 (en) | 2012-02-20 |
JP4602773B2 (en) | 2010-12-22 |
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