WO2004059474A3 - Micromachined intergrated fluid delivery system - Google Patents

Micromachined intergrated fluid delivery system Download PDF

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Publication number
WO2004059474A3
WO2004059474A3 PCT/US2003/040616 US0340616W WO2004059474A3 WO 2004059474 A3 WO2004059474 A3 WO 2004059474A3 US 0340616 W US0340616 W US 0340616W WO 2004059474 A3 WO2004059474 A3 WO 2004059474A3
Authority
WO
WIPO (PCT)
Prior art keywords
integrated
delivery system
fluid delivery
intergrated
micromachined
Prior art date
Application number
PCT/US2003/040616
Other languages
French (fr)
Other versions
WO2004059474A2 (en
Inventor
Mark Crockett
John W Lane
Michael J Dechellis
Chris Melcer
Erica R Porras
Aneesh Khullar
Balarabe N Mohammed
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/328,135 external-priority patent/US6736370B1/en
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to JP2005510019A priority Critical patent/JP4650832B2/en
Priority to KR1020087004551A priority patent/KR100908949B1/en
Priority to CN200380106755.XA priority patent/CN1729369B/en
Priority to AU2003303439A priority patent/AU2003303439A1/en
Publication of WO2004059474A2 publication Critical patent/WO2004059474A2/en
Publication of WO2004059474A3 publication Critical patent/WO2004059474A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C19/00—Alloys based on nickel or cobalt
    • C22C19/03—Alloys based on nickel or cobalt based on nickel
    • C22C19/05—Alloys based on nickel or cobalt based on nickel with chromium
    • C22C19/051—Alloys based on nickel or cobalt based on nickel with chromium and Mo or W
    • C22C19/055—Alloys based on nickel or cobalt based on nickel with chromium and Mo or W with the maximum Cr content being at least 20% but less than 30%
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C19/00—Alloys based on nickel or cobalt
    • C22C19/07—Alloys based on nickel or cobalt based on cobalt
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/001—Ferrous alloys, e.g. steel alloys containing N
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/02—Ferrous alloys, e.g. steel alloys containing silicon
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/04—Ferrous alloys, e.g. steel alloys containing manganese
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/18—Ferrous alloys, e.g. steel alloys containing chromium
    • C22C38/40—Ferrous alloys, e.g. steel alloys containing chromium with nickel
    • C22C38/44—Ferrous alloys, e.g. steel alloys containing chromium with nickel with molybdenum or tungsten
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/18—Ferrous alloys, e.g. steel alloys containing chromium
    • C22C38/40—Ferrous alloys, e.g. steel alloys containing chromium with nickel
    • C22C38/58—Ferrous alloys, e.g. steel alloys containing chromium with nickel with more than 1.5% by weight of manganese
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
    • Y10T29/49144—Assembling to base an electrical component, e.g., capacitor, etc. by metal fusion
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49405—Valve or choke making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49405—Valve or choke making
    • Y10T29/49412—Valve or choke making with assembly, disassembly or composite article making
    • Y10T29/49425—Valve or choke making with assembly, disassembly or composite article making including metallurgical bonding
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining
    • Y10T29/49906—Metal deforming with nonmetallic bonding

Abstract

The disclosure pertains to a space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The present invention also pertains to an integrated fluid flow network architecture, which may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. The layered substrate is diffusion bonded, and the various fluid handling and monitoring components may be partially integrated or fully integrated into the substrate, depending on design and material requirements.
PCT/US2003/040616 2002-12-20 2003-12-19 Micromachined intergrated fluid delivery system WO2004059474A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005510019A JP4650832B2 (en) 2002-12-20 2003-12-19 Method of manufacturing a diffusion bonded gas distribution assembly for use in a semiconductor processing apparatus
KR1020087004551A KR100908949B1 (en) 2002-12-20 2003-12-19 Micromachined intergrated fluid delivery system
CN200380106755.XA CN1729369B (en) 2002-12-20 2003-12-19 Micromachined integrated fluid delivery system with dynamic metal seat valve and other components
AU2003303439A AU2003303439A1 (en) 2002-12-20 2003-12-19 Micromachined intergrated fluid delivery system

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US10/328,135 2002-12-20
US10/328,135 US6736370B1 (en) 2002-12-20 2002-12-20 Diaphragm valve with dynamic metal seat and coned disk springs
US10/617,950 US20040119038A1 (en) 2002-12-20 2003-07-12 Micromachined integrated fluid delivery system with dynamic metal seat valve and other components
US10/617,950 2003-07-12

Publications (2)

Publication Number Publication Date
WO2004059474A2 WO2004059474A2 (en) 2004-07-15
WO2004059474A3 true WO2004059474A3 (en) 2004-11-25

Family

ID=32684698

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/040616 WO2004059474A2 (en) 2002-12-20 2003-12-19 Micromachined intergrated fluid delivery system

Country Status (5)

Country Link
US (6) US7448276B2 (en)
JP (1) JP4650832B2 (en)
KR (2) KR100908949B1 (en)
AU (1) AU2003303439A1 (en)
WO (1) WO2004059474A2 (en)

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US7984891B2 (en) 2011-07-26
US7559527B2 (en) 2009-07-14
AU2003303439A1 (en) 2004-07-22
JP2006511347A (en) 2006-04-06
KR20080028508A (en) 2008-03-31
KR100908949B1 (en) 2009-07-22
US7448276B2 (en) 2008-11-11
US20070062021A1 (en) 2007-03-22
JP4650832B2 (en) 2011-03-16
US8020750B2 (en) 2011-09-20
WO2004059474A2 (en) 2004-07-15
US7850786B2 (en) 2010-12-14
US20070051080A1 (en) 2007-03-08
KR20050090409A (en) 2005-09-13
US20070200082A1 (en) 2007-08-30
AU2003303439A8 (en) 2004-07-22
US20070113663A1 (en) 2007-05-24
US20070226973A1 (en) 2007-10-04
US7459003B2 (en) 2008-12-02
US20070062909A1 (en) 2007-03-22

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