WO2004055503A1 - A raman scattering near-field enhanced method and sample cell - Google Patents

A raman scattering near-field enhanced method and sample cell Download PDF

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Publication number
WO2004055503A1
WO2004055503A1 PCT/CN2003/001072 CN0301072W WO2004055503A1 WO 2004055503 A1 WO2004055503 A1 WO 2004055503A1 CN 0301072 W CN0301072 W CN 0301072W WO 2004055503 A1 WO2004055503 A1 WO 2004055503A1
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light
sample
raman scattering
sample cell
raman
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PCT/CN2003/001072
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French (fr)
Chinese (zh)
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Shifa Wu
Guanying Wu
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Shifa Wu
Guanying Wu
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Priority to AU2003289654A priority Critical patent/AU2003289654A1/en
Publication of WO2004055503A1 publication Critical patent/WO2004055503A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65Raman scattering
    • G01N21/658Raman scattering enhancement Raman, e.g. surface plasmons
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • G01N2021/0346Capillary cells; Microcells
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65Raman scattering
    • G01N2021/651Cuvettes therefore

Definitions

  • the present invention relates to the field of spectrum analysis and testing instruments, and in particular, to a super-sensitive Raman scattering near-field enhancement (RSNE) method and a sample cell for which excitation and reception are both performed using evanescent light.
  • RSNE super-sensitive Raman scattering near-field enhancement
  • molecular Raman scattering has a very limited application because its scattering cross section is too small (approximately 10 '29 cm 2 ); while the fluorescence analysis cross section is relatively large (approximately 1 (T 10 cm 2 ), there are already Large application areas, such as gene chip can be labeled with fluorescent molecular probes, and time-resolved immunofluorescent labeling for virus diagnosis.
  • These methods have mature methods and instruments, but there are still shortcomings and disadvantages: (1) The analysis process is complex and requires The time is too long, and it is usually calculated in days. (2) The sample size is too large, such as blood samples, which are usually measured in milliliter. Can one finger refer to the amount of blood (such as only one microliter) and the time in minutes to complete some The diagnosis of important diseases such as various cancers, AIDS or other important infectious diseases is an issue that needs to be addressed. '
  • the ultra-sensitive Raman scattering near-field enhanced analysis technology will likely achieve this ideal.
  • the advantages of this method are as follows: (1) The Raman characteristic spectrum is very narrow, so its measurement dynamic range is more than a thousand times the fluorescence with a broader characteristic spectrum. Therefore, the fluorescence detection has to be remedied by the chip method of many detection cells. A fluorescent label sample needs to be used. One chip unit, so the blood sample needs to be large enough. Raman detection can detect multiple signatures with only one drop of blood, without using a chip method; (2) As long as the Raman signatures of the diagnostic target molecule (related to the virus, etc.) can be detected, it can be compared through a database in the computer.
  • the diagnostic results can be output immediately, and the general impurity components are less likely to interfere with the diagnosis of target molecules under the conditions of known peak positions of the characteristic spectrum; (3)
  • the Raman characteristic spectrum is determined by the dynamic characteristics of molecular earthquakes, without any labeling, fluorescence or immune labeling There is also the question of whether they can be marked superior.
  • Reflective micro Raman spectrometers are excited by and transmittable light (far-field light). They are a type of far-field light with low excitation and reception efficiency.
  • Field light receiving Raman spectrometer put liquid sample on silver or gold rough surface, or put silver or gold glue
  • SERS surface-enhanced Raman scattering
  • RSNE Raman Scattering Near Field Enhancement
  • the purpose of the present invention is to use the near-field optics and Raman near-field enhancement new concepts and new developments to invent an ultra-highly sensitive excitation and reception Raman scattering near-field enhanced sample cell with hidden light, which overcomes the above problems.
  • an ultra-high-sensitivity excitation and reception method is used to enhance the sample cell with evanescent light Raman scattering near field, and the excitation and reception are used to enhance the sample cell with evanescent light Raman scattering near field. It is characterized by comprising two transparent substrates with parallel surfaces and a refractive index greater than the refractive index of the sample, the inner surface of the substrate is plated with a few nanometers of thick silver or gold film, and nanoscale silver or gold colloids are distributed between the silver or gold films. Particles or nanostructures.
  • the two interfaces of the sample cell can clamp the sample to a distance of tens to hundreds of nanometers in order to allow the excitation laser beam with an incident angle exceeding the critical angle to generate evanescent light. Exciting the sample and emitting the main form of evanescent light. Raman scattered light, this sample cell is suitable for liquid samples, nano powder samples and thin film samples.
  • the sample cell also includes a light-collecting element connected to the substrate, and the evanescent light emitted by the sample Raman scattering toward the two substrates is collected in the light-collecting element in a transmittable forbidden light form.
  • At least one of the above-mentioned light-collecting elements is an over-focus truncated ellipsoidal reflector or a large-aperture oil-immersed objective lens, so as to focus the forbidden light that is converted by the sample's Raman scattering and evanescent light into the interior and collect and couple it into the light.
  • Man spectrometer is an over-focus truncated ellipsoidal reflector or a large-aperture oil-immersed objective lens, so as to focus the forbidden light that is converted by the sample's Raman scattering and evanescent light into the interior and collect and couple it into the light.
  • At least one of the above-mentioned light collecting elements is an over-focus truncated parabolic reflector (replaces the above-over-focus truncated ellipsoidal mirror) or a large-aperture oil immersion objective with infinite back focal length (replaces the conventional back-focus large-aperture oil immersion objective) Objective lens) is used to make the forbidden light converted into the interior of the sample by the Raman scattering and evanescent light coupled into the Raman spectrometer in a parallel beam.
  • One of the above-mentioned light collecting elements is an over-focus truncated hemispherical reflector or a hemispherical reflector or a reflector thickened and modified by the silver or gold film of the substrate, and is used to collect toward one of the substrates of the sample cell.
  • the emitted Raman scattered light is reflected by the sample cell and connected by another substrate Connected to the light collecting element.
  • One of the above-mentioned light-collecting elements is provided with a small hole in the side reflection layer for introducing a fine laser beam with an incident angle exceeding a critical angle, or a large numerical aperture oil immersion objective lens is used to introduce a laser beam with an incident angle exceeding the critical angle.
  • a Raman scattering near-field enhancement method in which both Raman scattering excitation and reception use evanescent light, including the following steps.
  • Two transparent substrates with parallel surfaces and a refractive index greater than the refractive index of the sample are provided to form a sample cell.
  • the inner surface of the substrate is plated with a few nanometers of silver or gold thin film, and nanoscale silver or gold colloid particles are distributed between the silver or gold films. Or structure
  • a liquid sample or a nano powder sample or a thin film sample is placed between the two interfaces of the sample cell, and the sample is clamped to a distance of tens to hundreds of nanometers.
  • each substrate is provided with a light collecting element connected to the substrate, the outer wall of the light collecting element is plated with a metal reflective layer and a small hole is introduced in the side reflective layer of one of the light collecting elements to introduce a thin laser beam or A laser beam is introduced into the aperture oil immersion objective lens, and the incident angle of the introduced laser beam exceeds a critical angle in order to generate a hidden light excitation sample in the sample cell.
  • one of the above-mentioned light collecting elements is an over-focus truncated hemispherical reflector or a hemispherical reflector or a reflector thickened and changed by the silver or gold film of the substrate, and the direction of one of the substrates of the sample cell is Raman scattered light is collected by a light collecting element that is reflected to the other substrate direction of the sample cell.
  • At least one of the two light collecting elements of the sample cell is an over-focus truncated ellipsoidal mirror or an over-focus truncated parabolic object mirror or a large-aperture oil immersion objective, and is used to The Raman scattered light of the sample in the 4 IT solid angle is collected in all directions from the substrate and coupled into the Raman spectrometer.
  • the effective volume of the excitation sample of the present invention when collecting light with a very large numerical aperture oil immersion objective lens, it is a micrometer diameter of the focal spot of the microscope, and when collecting light with an over-focus truncated ellipsoidal reflector, the diameter can be as large as hundreds of microns.
  • Scanning near-field optical microscope-Raman spectrometer with a thickness of several tens to hundreds of nanometers, according to which the number of excited Raman hot spots and the number of excited sample molecules has only one metal tip (only one hot spot, in pursuit of high spatial resolution) will be 3-4 orders of magnitude higher, Raman light's excitation efficiency and reception efficiency Compared with the above Raman spectrometer, the rate is expected to be two orders of magnitude higher. Therefore, the detection of Raman scattered light using the RSNE sample cell of the present invention can reach an ultra-high level of sensitivity.
  • FIG. 1 is a schematic diagram of a Raman scattering near-field enhancement (RSNE) sample cell that uses evanescent light for both excitation and reception according to the present invention
  • RSNE Raman scattering near-field enhancement
  • FIG. 2 is one of the preferred embodiments of the Raman scattering near field enhanced sample cell according to the present invention
  • FIG. 3 is the second of the preferred embodiments of the Raman scattering near field enhanced sample cell according to the present invention
  • FIG. 4 is according to the present invention
  • FIG. 5 is a drawing of a paper by Norihiko Hayazawa and others in the prior art
  • Figure 6 is a drawing of a paper by M. Futamata and others in the prior art.
  • the sample cell of the present invention is composed of two upper and lower substrates whose surfaces are substantially parallel.
  • the substrate is made of a transparent material with a refractive index greater than that of the sample and is plated with a thin, approximately It is a thin silver or gold film 2 with a thickness of about 3-5 nanometers for enhancing the loss of light field strength.
  • the silver or gold film on the lower substrate is provided with nano-scale silver or gold particles 4, and the particle size and its difference do not exceed The optimized control value given by numerical simulation.
  • the very large particles are used to support the control of the sample cell spacing and are controlled to a small number and uniform distribution to ensure that the most uniformly distributed silver or gold particles exist on the interface of the sample cell.
  • the controlled spacing of a few nanometers leaves room for the extreme value of the electric field to enhance the so-called "hot spots". .
  • the upper and lower interfaces of the sample cell clamp the liquid sample 5.
  • the diameter of the sample cell is selected in millimeters or sub-millimeters.
  • the upper and lower interface substrates of the sample cell require ultra-high-precision planar optical polishing.
  • the P-polarized total internal reflection fine laser beam 1 of the excitation sample is incident on the lower substrate silver or gold film through the aperture of the light-blocking layer, and the incident angle exceeds the critical angle of total internal reflection, and is then led out by another aperture of the light-blocking layer to improve Signal-to-noise ratio of Raman scattered light.
  • a large-aperture oil immersion objective to introduce a laser beam with an incident angle exceeding the critical angle of total internal reflection.
  • the total internal reflection laser beam generates plasmon and evanescent waves on the silver or gold film of the lower substrate.
  • the schematic diagram of the evanescent light is shown in reference numeral 3 in the right illustration, where the amplitude of the electric field (abscissa) and the longitudinal distance (ordinate) of the lower interface are approximately exponentially attenuated.
  • the evanescent field will generate so-called "hot spots” with enhanced electric field extremes in the vicinity of the particles.
  • the electric field gradient will also increase.
  • the Raman scattering of 5 molecules in the liquid sample at the "hot spot” is extremely enhanced. This enhanced Raman scattering caused by the evanescent field is called near-field enhancement.
  • the Raman scattering induced by the "hot spot” stimulates the molecules of the sample to exhibit a dipole form.
  • Emission 6 the emission of Raman scattering of the molecule to the upper and lower directions of the sample cell is evanescent light
  • the inset 7 on the left in Figure 1 is a schematic diagram of the exponential attenuation of the emanating light emitted from the Raman scattering in the two directions.
  • the designed sample cell should be very thin, and the Raman scattering evanescent light is converted into forbidden Hght 8 in the substrate, which is transmissive light It has a large aperture angle and an approximately hollow core cone form. Receive the forbidden light with two large aperture angles near the hollow conical shape, and introduce it into the Raman spectrometer with the light collecting element to obtain the near-field enhanced Raman spectrum of the sample.
  • FIGS 2, 3 and 4 respectively show three preferred embodiments of the sample cell according to the present invention for receiving forbidden light in two directions, up and down.
  • the same reference numerals as in FIG. 1 will not be repeated.
  • the near-field excitation and reception according to the present invention employs a lost-light Raman scattering near-field enhancement (RSNE) sample cell composed of two over-focus truncated ellipsoidal mirrors 9 and 10.
  • the spheres are also transparent solids with a higher refractive index than the sample, such as optical glass, and they are plated with two parallel interfaces that pass through the focal point and are coated with a very thin silver or gold film to form a sample cell.
  • RSNE Raman scattering near-field enhancement
  • the Raman scattering forbidden light 11 and 12 with a large aperture angle are emitted near the focal point, and the internal reflection through the metal-plated reflective layer on the outer wall of the ellipsoid converges near the other focal point of the ellipsoid, and is output as a small aperture angle beam.
  • Multi-mode fiber 13 is coupled at this focal point.
  • the two output fibers coupled to the upper and lower over-focus truncated ellipsoids are combined with the Raman spectrometer inlet 14 after being bundled.
  • One of the ellipsoids has a small hole incident on the side, and the total reflection beam is drawn out through a small hole in a symmetrical place.
  • FIG. 3 shows an RSNE sample cell composed of a hemispherical evanescent mirror 15 and an off-focus truncated hemispherical mirror 10 (or with a large-aperture oil immersion objective 19 in FIG. 4).
  • the refractive index of the focal truncated ellipsoid 10 is also greater than the refractive index of the sample.
  • the RSNE sample cell is composed of the interface between the two and the outer surface is plated with a metal reflective layer, one of which (15 or 10) is on the side. (2) Two small holes for introducing and exporting a total internal reflection P-polarized fine laser beam 1 for exciting a sample.
  • P-polarized fine laser beam 1 for exciting a sample.
  • a hole is opened in the side of the off-focus truncated ellipsoid 10.
  • the hemispherical mirror 15 converts the evanescent light that is sampled downward by Raman scattering into forbidden light 12 and returns after reflection in the hemisphere, and then converts it into the evanescent light 16 that is upward in the sample pool and upwards that are reflected by the hemisphere.
  • Both the lost light 16 and the lost light in the original direction are collected by the over-focus truncated whole ellipsoid 10 in the form of forbidden light, namely 17, 11 and collected near the other focus of the ellipsoid, and then passed through the multimode fiber or lens optics.
  • the system is coupled into a Raman spectrometer.
  • FIG. 4 is a schematic structural diagram of an RSNE sample cell composed of an over-focus truncated hemispherical 18 reflector and a large-aperture oil immersion objective 19 cover sheet.
  • the over-focus truncated hemispherical reflector 18 and the hemispherical reflection in FIG. 2 Mirror 15 is similar.
  • the incident light angle is kept smaller as the incident angle is smaller than the critical angle. Therefore, the form of transmittable light has been passed through the sample after secondary reflection in the focal truncated semi-ellipsoid 18.
  • the light can be transmitted through the sample cell and then received by the large-aperture oil immersion objective 19.
  • the cover lens of the oil immersion objective lens 19 and the off-focus truncated semi-ellipsoid 18 both have a refractive index greater than that of the sample and are plated with a thin silver or gold film 2.
  • the upward Raman scattering evanescent light is converted to forbidden light by the cover sheet.
  • the large numerical aperture oil immersion objective lens 19 is coupled to the Raman spectrometer 14, and all Raman scattered light is reflected by the mirror 20 and coupled to the Raman spectrometer 11.
  • the excitation laser beam 1 is introduced through an objective lens or a small hole plated with a metal reflective layer on the side of the truncated hemi-spheroid.
  • At least one of the above-mentioned light-collecting elements may be an over-focus truncated parabolic object reflection.
  • the Raman samples in a 4 ⁇ solid angle can be collected in all directions toward the two substrates of the sample cell. Scattered light.
  • the above-focus truncated hemispherical reflector or hemispherical reflector is used to collect the Raman scattered light emitted in the direction of one substrate of the sample cell and reflect the collected light connected to the other substrate through the sample cell. Component collection. If the gain is allowed to be affected to some extent, a mirror made by thickening the silver or gold film of the substrate may be used instead, which is also used for reflecting Raman scattering. Light is collected through a sample cell by a light collecting element connected to another substrate.
  • sample cell of the present invention can also be used to analyze solid samples.
  • a nano-scale powder or film is used for the sample.
  • the Raman enhancement factor can be improved, and the sensitivity of Raman analysis can be greatly improved. Under the condition that the calibration of the Raman spectrum of some important diseases has been obtained, a drop of finger is used for blood The ideal of diagnosing early major illnesses is possible.
  • On-line Raman testing and molecular trace analysis technology in many fields such as physicochemical, biological, medical, geological, and materials will provide a new method for catalyzing reactions.

Abstract

A supersensitive Raman scattering near-field enhanced sample cell includes two parallel substrates, both of which are transparent and have an index of refraction greater than that of the sample. The substrates' inner surface is plated by silver or gold film with the thickness of several nanometers in which silver or gold colloidal solids in the size of nanometer or nano-structures are arranged. The two boundary surfaces of said cell, between which are filled with the sample, can be clamped to a space with the distance of several ten to several hundred nanometers, to permit the laser exciting beam, having an incident angle exceeding the critical angle thereof, to produce evanescent wave, which in turn excites the sample and make it exit Raman scattering in the main form of evanescent wave. The application also relates to a Raman scattering near-field enhanced method.

Description

喇曼散射近场增强方法和样品池 技术领域  Raman scattering near field enhancement method and sample cell
本发明涉及光谱分析测试仪器领域, 尤其涉及一种超灵敏的、 激励 和接收均用隐失光的喇曼散射近场增强 (RSNE) 方法和样品池。  The present invention relates to the field of spectrum analysis and testing instruments, and in particular, to a super-sensitive Raman scattering near-field enhancement (RSNE) method and a sample cell for which excitation and reception are both performed using evanescent light.
背景技术  Background technique
在光谱分析技术中, 分子喇曼散射由于其散射截面太小 (约 10'29cm2),因此应用受到很大局限;而荧光分析截面比较大(约 l(T10 cm 2), 已有较大应用范围, 如基因芯片可用荧光分子探针标记, 病毒诊断用时 间分辨免疫荧光标记, 这些均已有成熟的方法和仪器, 但仍存在着不足 和缺点: (一) 分析过程复杂, 需要时间太长, 一般用天计算, (二) 需 要样品量太大, 如血样一般均需毫升计。 能否以一滴指血的量 (如仅一 微升)、 以分计的时间, 完成一些重要疾病、 如各种癌症、 爱滋病或其他 重要传染病等的诊断是需待解决的问题。 ' In the spectral analysis technology, molecular Raman scattering has a very limited application because its scattering cross section is too small (approximately 10 '29 cm 2 ); while the fluorescence analysis cross section is relatively large (approximately 1 (T 10 cm 2 ), there are already Large application areas, such as gene chip can be labeled with fluorescent molecular probes, and time-resolved immunofluorescent labeling for virus diagnosis. These methods have mature methods and instruments, but there are still shortcomings and disadvantages: (1) The analysis process is complex and requires The time is too long, and it is usually calculated in days. (2) The sample size is too large, such as blood samples, which are usually measured in milliliter. Can one finger refer to the amount of blood (such as only one microliter) and the time in minutes to complete some The diagnosis of important diseases such as various cancers, AIDS or other important infectious diseases is an issue that needs to be addressed. '
超灵敏的喇曼散射近场增强分析技术将有可能实现这种理想。 该方 法优点: (一) 喇曼特征谱很窄, 因此其测量动态范围比特征谱很宽的荧 光超过千倍, 因此荧光检测不得不用很多检测池的芯片方法补救, 一种 荧光标记样品需用一个芯片单元, 从而血样用量需足够大。 喇曼检测只 用一滴血就有可能检测多种特征谱, 不必使用芯片方法; (二) 只要诊断 靶分子 (与病毒等有关) 的喇曼特征谱能检测到, 通过计算机中的数据 库比较, 立即可输出诊断结果, 在已知特征谱峰位条件下一般杂质成分 不太容易干扰靶分子诊断; (三) 喇曼特征谱由分子震动态特征决定, 不 需做任何标记, 荧光或免疫标记还存在能否标记上等问题。  The ultra-sensitive Raman scattering near-field enhanced analysis technology will likely achieve this ideal. The advantages of this method are as follows: (1) The Raman characteristic spectrum is very narrow, so its measurement dynamic range is more than a thousand times the fluorescence with a broader characteristic spectrum. Therefore, the fluorescence detection has to be remedied by the chip method of many detection cells. A fluorescent label sample needs to be used. One chip unit, so the blood sample needs to be large enough. Raman detection can detect multiple signatures with only one drop of blood, without using a chip method; (2) As long as the Raman signatures of the diagnostic target molecule (related to the virus, etc.) can be detected, it can be compared through a database in the computer. The diagnostic results can be output immediately, and the general impurity components are less likely to interfere with the diagnosis of target molecules under the conditions of known peak positions of the characteristic spectrum; (3) The Raman characteristic spectrum is determined by the dynamic characteristics of molecular earthquakes, without any labeling, fluorescence or immune labeling There is also the question of whether they can be marked superior.
但是, 关键是能否设计出超高灵敏的喇曼散射近场增强分析系统。 过去三十年以来发现, 在银、 金、 铜等贵金属粗糙表面或这种金属纳米 粒子胶体表面吸附有靶分子条件下, 用共焦显微喇曼谱仪可获得很强的 特征喇曼谱信号。 利用喇曼谱可诊断样品分子振动特征信息, 它是超微 量化学 (分子) 分析的一种新技术。 过去由于常规喇曼信号很微弱, 应 用极其有限 (仅适用极少数喇曼散射截面很大, 即喇曼散射活性很强的 物质)。 几年前, 用扫描近场光学显微镜与近代喇曼谱仪组合, 在表面增 强喇曼散射 (SERS)试验中进一步发现了 "热点 (hot spots) ", 即光诱导共 振激发 Ag 或 Au 颗粒之间光激励电磁场极度增强的 "等离子激元 ( Plasmon) "局域, 在 "热点"可比入射光电磁场高数千倍, 因而其喇曼 信号增强比常 喇曼信号可超过 10 倍, 此值称为喇曼增强因子, 有人 通过试验估算曾达到 1014。至今, 这种很复杂的增强机理学界公认还没有 完全搞清楚, 并存在巨大开拓潜力。 However, the key is to design an ultra-sensitive Raman scattering near-field enhancement analysis system. Over the past thirty years, it has been found that under the condition that the target molecules are adsorbed on the rough surface of noble metal such as silver, gold, copper, or the colloidal surface of this metal nanoparticle, a strong characteristic Raman spectrum signal can be obtained by using a confocal microscope Raman spectrometer. Raman spectroscopy can be used to diagnose the molecular vibration characteristics of samples. It is a new technique for ultra-micro chemical (molecular) analysis. In the past, because the conventional Raman signal was weak, it should be The use is extremely limited (only a very small number of Raman scattering cross-sections, that is, substances with strong Raman scattering activity). A few years ago, the combination of scanning near-field optical microscopy and modern Raman spectrometers was used to further discover "hot spots" in surface-enhanced Raman scattering (SERS) tests, that is, light-induced resonance excites Ag or Au particles. The local area of "Plasmon" with extremely enhanced light-excitation electromagnetic field in the "hot spot" can be thousands of times higher than the incident photoelectric magnetic field, so its Raman signal enhancement can be more than 10 times than the constant Raman signal. This value is called It is a Raman enhancement factor, and it has been experimentally estimated that it has reached 10 14 . To date, it is generally acknowledged that this very complex augmented mechanics community has not fully figured it out, and there is great potential for development.
常规喇曼谱仪和与共焦显微镜结合的显微喇曼谱仪在国外均有成熟 的商品, 与近场光学显微镜结合的近场喇曼谱仪也有不少试验研究结果, 但近场喇曼技术与仪器远未成熟与达到商品化程度。  Conventional Raman spectrometers and micro-Raman spectrometers combined with confocal microscopes have mature products abroad. Near-field Raman spectrometers combined with near-field optical microscopes also have many experimental research results, but near-field Raman Technology and instruments are far from mature and commercialized.
Norihiko Hayazawa 等人在 Chemical Physics Letters 335 (2001 ) 369-374—文中曾提出利用金属尖端增强近场喇曼散射(Near-field Raman scattering enhanced by a metallized tip) , 如图 5所示, 通过 N.A.: 1.4显微 物镜在 1 <N.A.<1.4数值孔径内的空心锥型光束激励样品喇曼谱, 而接收 信号 (Signal ) 设在在 N.A.<1 之内; 但是, 金属尖增强发射喇曼光在金 属尖的轴向 (N.A.<1之内)主要是近场隐失光, 而在 N.A.<1之内只能接 收可传输的远场光, 发射与接收关系不匹配, 因此效率很低。  Norihiko Hayazawa et al. In Chemical Physics Letters 335 (2001) 369-374—proposed the use of a metal tip to enhance near-field Raman scattering (Near-field Raman scattering enhanced by a metallized tip), as shown in Figure 5, through NA: 1.4 The hollow cone-shaped beam of the microscope objective lens with a numerical aperture of 1 <NA <1.4 excites the Raman spectrum of the sample, and the received signal (Signal) is set within NA <1; however, the metal tip enhances the emission Raman light at the metal The sharp axial direction (within NA <1) is mainly the near-field loss of light, while within NA <1, only the far-field light that can be transmitted can be received, and the relationship between the emission and the reception is not matched, so the efficiency is very low.
M. Futamata等人同样在 Chemical Physics Letters 341 (2001) 425-430 一文中提出一种系统, 利用 ATR ( attenuated total reflection) 激励样品产 生隐失光, 如图 6, 该系统虽然激励和接收均用隐失光, 但由于使用光纤 尖 (Probe ) 接收喇曼隐失光, 光纤尖接收隐失光的立体角很小, 仅有向 上发射的一小部分、 向下的和向其它方位立体角中发射的喇曼光均未接 收到, 因此接收效率也很低。  M. Futamata et al. Also proposed a system in Chemical Physics Letters 341 (2001) 425-430, which uses ATR (attenuated total reflection) to stimulate samples to produce evanescent light, as shown in Figure 6, although the system uses both excitation and reception Lost light, but because the fiber tip (Probe) is used to receive the lost light, the solid angle at which the fiber tip receives the lost light is very small, only a small part of the upward emission, the downward and the other azimuth solid angles The transmitted Raman light is not received, so the reception efficiency is also low.
发明内容  Summary of the Invention
反射式显微喇曼谱仪均由可传输光 (远场光) 激励和接收可传输的 喇曼散射光 (远场光), 是一种激励和接收效率均较低的远场光激励远场 光接收的喇曼谱仪, 将液态样品放在银或金粗糙表面、 或放入银或金胶 体颗粒, 可存在一定程度表面增强喇曼散射效应(SERS )。 如果在显微喇 曼谱仪上设计激励和接收均用隐失光的喇曼散射近场增强 (RSNE) 样品 池, 即既用高效的近场隐失光激励又用高效的近场隐失光接收, 将可获 得更有效的喇曼增强和更大的喇曼增强因子。 Reflective micro Raman spectrometers are excited by and transmittable light (far-field light). They are a type of far-field light with low excitation and reception efficiency. Field light receiving Raman spectrometer, put liquid sample on silver or gold rough surface, or put silver or gold glue For bulk particles, there can be a degree of surface-enhanced Raman scattering (SERS). If a Raman Scattering Near Field Enhancement (RSNE) sample cell is designed to use excitation and reception on the micro Raman spectrometer, both efficient near-field evanescent light excitation and efficient near-field evacuation are used. With light reception, a more effective Raman enhancement and a larger Raman enhancement factor will be obtained.
本发明的目的即是为了运用近场光学与喇曼近场增强新概念和新进 展发明一种超高灵敏的激励和接收均用隐失光的喇曼散射近场增强样品 池, 克服以上现有技术部分中存在的缺陷, 提高喇曼散射增强因子。  The purpose of the present invention is to use the near-field optics and Raman near-field enhancement new concepts and new developments to invent an ultra-highly sensitive excitation and reception Raman scattering near-field enhanced sample cell with hidden light, which overcomes the above problems. There are deficiencies in the technical part that increase the Raman scattering enhancement factor.
根据本发明的一方面, 提出一种超高灵敏的激励和接收均用隐失光 的喇曼散射近场增强样品池, 该激励和接收均用隐失光的喇曼散射近场 增强样品池的特征在于, 包括二块表面平行的、 折射率大于样品折射率 的透明基板, 上述基板内表面镀有数纳米厚银或金膜, 在银或金膜之间 分布有纳米尺度的银或金胶体颗粒或纳米结构, 样品池的两个界面可夹 紧样品到数十至数百纳米间距, 以便允许入射角超过临界角的激励激光 束产生隐失光激励样品和发射以隐失光为主要形式的喇曼散射光, 该样 品池适用于液态样品、 纳米粉体样品和薄膜样品。  According to an aspect of the present invention, an ultra-high-sensitivity excitation and reception method is used to enhance the sample cell with evanescent light Raman scattering near field, and the excitation and reception are used to enhance the sample cell with evanescent light Raman scattering near field. It is characterized by comprising two transparent substrates with parallel surfaces and a refractive index greater than the refractive index of the sample, the inner surface of the substrate is plated with a few nanometers of thick silver or gold film, and nanoscale silver or gold colloids are distributed between the silver or gold films. Particles or nanostructures. The two interfaces of the sample cell can clamp the sample to a distance of tens to hundreds of nanometers in order to allow the excitation laser beam with an incident angle exceeding the critical angle to generate evanescent light. Exciting the sample and emitting the main form of evanescent light. Raman scattered light, this sample cell is suitable for liquid samples, nano powder samples and thin film samples.
该样品池还包括分别与所述基板相连接的一个集光元件, 样品喇曼 散射分别向两个基板方向发射的隐失光在集光元件内通过可传输的禁戒 光形式收集。 '  The sample cell also includes a light-collecting element connected to the substrate, and the evanescent light emitted by the sample Raman scattering toward the two substrates is collected in the light-collecting element in a transmittable forbidden light form. '
上述集光元件中的至少有一个是过焦点截顶整椭球体反射镜或大孔 径油浸物镜, 以便使进入其内部由样品喇曼散射隐失光转换来的禁戒光 聚焦后收集耦合进入喇曼谱仪。  At least one of the above-mentioned light-collecting elements is an over-focus truncated ellipsoidal reflector or a large-aperture oil-immersed objective lens, so as to focus the forbidden light that is converted by the sample's Raman scattering and evanescent light into the interior and collect and couple it into the light. Man spectrometer.
上述集光元件中至少有一个是过焦点截顶抛物体反射镜 (取代上述 过焦点截顶整椭球反射镜) 或后焦距为无穷的大孔径油浸物镜 (取代常 规后焦距大孔径油浸物镜), 用于使进入其内部由样品喇曼散射隐失光转 换来的禁戒光以平行光束耦合进入喇曼谱仪。  At least one of the above-mentioned light collecting elements is an over-focus truncated parabolic reflector (replaces the above-over-focus truncated ellipsoidal mirror) or a large-aperture oil immersion objective with infinite back focal length (replaces the conventional back-focus large-aperture oil immersion objective) Objective lens) is used to make the forbidden light converted into the interior of the sample by the Raman scattering and evanescent light coupled into the Raman spectrometer in a parallel beam.
上述集光元件中的一个是过焦点截顶半椭球体反射镜或半球体反射 镜或由所述基板的银或金膜加厚改成的反射镜, 用于收集向样品池其中 一个基板方向发射的喇曼散射光经其反射后通过样品池由另一基板相连 接的集光元件收集。 One of the above-mentioned light collecting elements is an over-focus truncated hemispherical reflector or a hemispherical reflector or a reflector thickened and modified by the silver or gold film of the substrate, and is used to collect toward one of the substrates of the sample cell. The emitted Raman scattered light is reflected by the sample cell and connected by another substrate Connected to the light collecting element.
上述集光元件中的一个集光元件的侧面反射层上设有小孔用于引入 入射角超过临界角的细激光束, 或通过大数值孔径油浸物镜引入入射角 超过临界角的激光束。  One of the above-mentioned light-collecting elements is provided with a small hole in the side reflection layer for introducing a fine laser beam with an incident angle exceeding a critical angle, or a large numerical aperture oil immersion objective lens is used to introduce a laser beam with an incident angle exceeding the critical angle.
根据本发明的另一方面, 提供了一种喇曼散射激励和接收均用隐失 光的喇曼散射近场增强方法, 包括如下步骤,  According to another aspect of the present invention, there is provided a Raman scattering near-field enhancement method in which both Raman scattering excitation and reception use evanescent light, including the following steps.
提供二块表面平行的、 折射率大于样品折射率的透明基板构成样品 池, 上述基板内表面镀数纳米厚银或金薄膜, 在银或金膜之间分布有纳 米尺度的银或金胶体颗粒或结构;  Two transparent substrates with parallel surfaces and a refractive index greater than the refractive index of the sample are provided to form a sample cell. The inner surface of the substrate is plated with a few nanometers of silver or gold thin film, and nanoscale silver or gold colloid particles are distributed between the silver or gold films. Or structure
样品池两个界面之间放入液体样品或纳米粉体样品或薄膜样品, 将 样品夹紧到数十至数百纳米间距。  A liquid sample or a nano powder sample or a thin film sample is placed between the two interfaces of the sample cell, and the sample is clamped to a distance of tens to hundreds of nanometers.
其中, 为各基板提供一个与该基板相连接的集光元件, 该集光元件 外壁镀有金属反射层并且在其中一个集光元件的侧面反射层上设有小孔 引入细激光束或在大孔径油浸物镜中引入激光束, 所引入的激光束的入 射角超过临界角以便在样品池中产生隐失光激励样品。  Wherein, each substrate is provided with a light collecting element connected to the substrate, the outer wall of the light collecting element is plated with a metal reflective layer and a small hole is introduced in the side reflective layer of one of the light collecting elements to introduce a thin laser beam or A laser beam is introduced into the aperture oil immersion objective lens, and the incident angle of the introduced laser beam exceeds a critical angle in order to generate a hidden light excitation sample in the sample cell.
其中, 上述集光元件中的一个是过焦点截顶半椭球体反射镜或半球 体反射镜或由所述基板的银或金膜加厚改成的反射镜, 将样品池其中一 个基板方向的喇曼散射光通过反射至样品池另一基板方向的集光元件中 收集。  Wherein, one of the above-mentioned light collecting elements is an over-focus truncated hemispherical reflector or a hemispherical reflector or a reflector thickened and changed by the silver or gold film of the substrate, and the direction of one of the substrates of the sample cell is Raman scattered light is collected by a light collecting element that is reflected to the other substrate direction of the sample cell.
其中, 样品池的两个集光元件中至少有一个集光元件是过焦点截顶 整椭球体反射镜或过焦点截顶抛物体反射镜或大孔径油浸物镜, 用于向 样品池两个基板方向全方位收集 4 IT立体角内样品喇曼散射光,耦合进入 喇曼谱仪。  Among them, at least one of the two light collecting elements of the sample cell is an over-focus truncated ellipsoidal mirror or an over-focus truncated parabolic object mirror or a large-aperture oil immersion objective, and is used to The Raman scattered light of the sample in the 4 IT solid angle is collected in all directions from the substrate and coupled into the Raman spectrometer.
根据本发明激励样品的有效容积, 在用特大数值孔径油浸物镜集光时, 为显微镜焦斑数微米直径、 在用过焦点截顶整椭球体反射镜集光时可大到 数百微米直径, 厚度为数十至百纳米, 据此估计激励喇曼热点数和激励样 品分子数比仅有一个金属尖 (只有一个热点, 追求高空间分辨) 的扫描近 场光学显微镜一喇曼谱仪将高 3— 4个数量级, 喇曼光的激励效率和接收效 率与上述喇曼谱仪比较有望高出 2个数量级, 因此, 用本发明 RSNE样品 池检测喇曼散射光将可达到超高灵敏的水平。 According to the effective volume of the excitation sample of the present invention, when collecting light with a very large numerical aperture oil immersion objective lens, it is a micrometer diameter of the focal spot of the microscope, and when collecting light with an over-focus truncated ellipsoidal reflector, the diameter can be as large as hundreds of microns. Scanning near-field optical microscope-Raman spectrometer with a thickness of several tens to hundreds of nanometers, according to which the number of excited Raman hot spots and the number of excited sample molecules has only one metal tip (only one hot spot, in pursuit of high spatial resolution) will be 3-4 orders of magnitude higher, Raman light's excitation efficiency and reception efficiency Compared with the above Raman spectrometer, the rate is expected to be two orders of magnitude higher. Therefore, the detection of Raman scattered light using the RSNE sample cell of the present invention can reach an ultra-high level of sensitivity.
附图说明  BRIEF DESCRIPTION OF THE DRAWINGS
图 1 为根据本发明的激励和接收均采用隐失光的喇曼散射近场增强 ( RSNE) 样品池的示意图;  FIG. 1 is a schematic diagram of a Raman scattering near-field enhancement (RSNE) sample cell that uses evanescent light for both excitation and reception according to the present invention;
图 2为根据本发明的喇曼散射近场增强样品池的优选实施例之一; 图 3为根据本发明的喇曼散射近场增强样品池的优选实施例之二; 图 4为根据本发明的喇曼散射近场增强样品池的优选实施例之三; 图 5 为现有技术中 Norihiko Hayazawa等论文附图;  FIG. 2 is one of the preferred embodiments of the Raman scattering near field enhanced sample cell according to the present invention; FIG. 3 is the second of the preferred embodiments of the Raman scattering near field enhanced sample cell according to the present invention; FIG. 4 is according to the present invention The third preferred embodiment of the Raman scattering near-field enhanced sample cell; FIG. 5 is a drawing of a paper by Norihiko Hayazawa and others in the prior art;
图 6为现有技术中 M. Futamata等论文附图。  Figure 6 is a drawing of a paper by M. Futamata and others in the prior art.
具体实施方式  detailed description
本发明的样品池如图 1所示由两块表面基本平行的上、 下基板组成, 该基板由折射率大于样品折射率的透明材料制成并镀有很薄的、 在本实 施例中约为 3-5纳米左右厚的银或金薄膜 2, 用于增强隐失光场强, 其中 下基板银或金薄膜上设有纳米尺度的银或金颗粒 4,颗粒尺度及其差值不 超过用数值模拟给出的优化控制值, 极大颗粒用来支承控制样品池的间 距并被控制成很少量数量且均匀分布, 以保证极大多数分布均匀的银或 金颗粒与样品池上界面存在数纳米的控制间距, 留出产生电场极值增强 所谓 "热点"所需空间。.  As shown in FIG. 1, the sample cell of the present invention is composed of two upper and lower substrates whose surfaces are substantially parallel. The substrate is made of a transparent material with a refractive index greater than that of the sample and is plated with a thin, approximately It is a thin silver or gold film 2 with a thickness of about 3-5 nanometers for enhancing the loss of light field strength. The silver or gold film on the lower substrate is provided with nano-scale silver or gold particles 4, and the particle size and its difference do not exceed The optimized control value given by numerical simulation. The very large particles are used to support the control of the sample cell spacing and are controlled to a small number and uniform distribution to ensure that the most uniformly distributed silver or gold particles exist on the interface of the sample cell. The controlled spacing of a few nanometers leaves room for the extreme value of the electric field to enhance the so-called "hot spots". .
样品池上界面与下界面夹紧液态样品 5, .样品池的直径根据需要选定 毫米或亚毫米, 样品池上、 下界面基板需要超高精度平面光学抛光。  The upper and lower interfaces of the sample cell clamp the liquid sample 5. The diameter of the sample cell is selected in millimeters or sub-millimeters. The upper and lower interface substrates of the sample cell require ultra-high-precision planar optical polishing.
激励样品的 P偏振全内反射细激光束 1通过隔光层小孔入射到下基 板银或金膜, 其入射角超过全内反射临界角, 随后由另一隔光层小孔导 出, 以提高喇曼散射光的信噪比。 当然也可以利用大孔径油浸物镜中引 入入射角超过全内反射临界角的激光束。  The P-polarized total internal reflection fine laser beam 1 of the excitation sample is incident on the lower substrate silver or gold film through the aperture of the light-blocking layer, and the incident angle exceeds the critical angle of total internal reflection, and is then led out by another aperture of the light-blocking layer to improve Signal-to-noise ratio of Raman scattered light. Of course, it is also possible to use a large-aperture oil immersion objective to introduce a laser beam with an incident angle exceeding the critical angle of total internal reflection.
·· 该全内反射激光束在下基板银或金薄膜上产生等离子激元(plasmon) 和隐失光 (evanescent wave )。 隐失光的示意图见右插图中的附图标记 3 , 其中电场振幅 (横坐标) 与下界面纵向距离 (纵坐标) 呈近似指数衰减。 该隐失场在与纳米尺度银或金颗粒相互作用下, 在颗粒附近将产生电场 极值增强的所谓 "热点", 伴随 "热点"电场的增强, 其电场梯度也增强, 这二者将诱导在 "热点"上的液态样品 5 分子喇曼散射极度增强, 这种 由隐失场引起的喇曼散射增强称近场增强, 在 "热点" 诱导激发样品分 子发射喇曼散射呈现偶极子形式发射 6,该分子喇曼散射向样品池上下两 个方向的发射为隐失光, 图 1 中左边插图 7为向上和向下二个方向发射 喇曼散射隐失光呈现指数衰减的示意图。 ·· The total internal reflection laser beam generates plasmon and evanescent waves on the silver or gold film of the lower substrate. The schematic diagram of the evanescent light is shown in reference numeral 3 in the right illustration, where the amplitude of the electric field (abscissa) and the longitudinal distance (ordinate) of the lower interface are approximately exponentially attenuated. Under the interaction of nano-scale silver or gold particles, the evanescent field will generate so-called "hot spots" with enhanced electric field extremes in the vicinity of the particles. With the enhancement of the "hot spot" electric field, the electric field gradient will also increase. The Raman scattering of 5 molecules in the liquid sample at the "hot spot" is extremely enhanced. This enhanced Raman scattering caused by the evanescent field is called near-field enhancement. The Raman scattering induced by the "hot spot" stimulates the molecules of the sample to exhibit a dipole form. Emission 6, the emission of Raman scattering of the molecule to the upper and lower directions of the sample cell is evanescent light, and the inset 7 on the left in Figure 1 is a schematic diagram of the exponential attenuation of the emanating light emitted from the Raman scattering in the two directions.
根据本发明, 由于隐失光将随距离呈指数衰减, 因此设计的样品池 要很薄, 喇曼散射隐失光在基板中转换为禁戒光 (forbidden Hght) 8, 该 禁戒光是可传输光, 有大孔径角与近似空芯圆锥形式。 接收上下两个大 孔径角近似空心圆锥形的禁戒光, 用集光元件将其引入喇曼谱仪即可获 得样品的近场增强喇曼谱。  According to the present invention, since the evanescent light will decay exponentially with distance, the designed sample cell should be very thin, and the Raman scattering evanescent light is converted into forbidden Hght 8 in the substrate, which is transmissive light It has a large aperture angle and an approximately hollow core cone form. Receive the forbidden light with two large aperture angles near the hollow conical shape, and introduce it into the Raman spectrometer with the light collecting element to obtain the near-field enhanced Raman spectrum of the sample.
图 2、 3和 4分别示出根据本发明样品池的三个接收上下二个方向的 禁戒光的优选实施例。 其中与图 1中相同的附图标记将不再赘述。  Figures 2, 3 and 4 respectively show three preferred embodiments of the sample cell according to the present invention for receiving forbidden light in two directions, up and down. The same reference numerals as in FIG. 1 will not be repeated.
如图 2 所示, 根据本发明的近场激励和接收均采用隐失光的喇曼散 射近场增强 (RSNE) 样品池由二个过焦点截顶椭球反射镜 9、 10构成, 该椭球体同样为折射率高于样品折射率的透明固体, 如光学玻璃, 将它们 镀有很薄银或金膜的两个通过焦点的平行界面组合成样品池。 大孔径角输 出的喇曼散射禁戒光 11、 12在焦点附近发射、 通过椭球体外壁的镀金属 反射层的内反射, 会聚在椭球体的另一焦点附近, 以小孔径角光束形式 输出, 在该焦点处耦合多模光纤 13, 将耦合在上下二个过焦点截顶整椭 球体上两根输出光纤合束后与喇曼谱仪入口 14耦合, P偏振激励全内反 射细激光束 1 从其中一个椭球体侧面开小孔入射, 全反射光束在对称地 方开小孔引出。  As shown in FIG. 2, the near-field excitation and reception according to the present invention employs a lost-light Raman scattering near-field enhancement (RSNE) sample cell composed of two over-focus truncated ellipsoidal mirrors 9 and 10. The spheres are also transparent solids with a higher refractive index than the sample, such as optical glass, and they are plated with two parallel interfaces that pass through the focal point and are coated with a very thin silver or gold film to form a sample cell. The Raman scattering forbidden light 11 and 12 with a large aperture angle are emitted near the focal point, and the internal reflection through the metal-plated reflective layer on the outer wall of the ellipsoid converges near the other focal point of the ellipsoid, and is output as a small aperture angle beam. Multi-mode fiber 13 is coupled at this focal point. The two output fibers coupled to the upper and lower over-focus truncated ellipsoids are combined with the Raman spectrometer inlet 14 after being bundled. One of the ellipsoids has a small hole incident on the side, and the total reflection beam is drawn out through a small hole in a symmetrical place.
3 示出由半球体隐失光反射镜 15与过焦点截顶半椭球反射镜 10 (或与大孔径油浸物镜图 4中 19) 组成的 RSNE样品池, 其中该半球体 15与过焦点截顶椭球体 10的折射率同样均大于样品折射率, 由两者界面 组成 RSNE样品池, 外表面镀金属反射层, 其中之一 (15或 10 ) 的侧面 幵二个小孔, 用于引入和导出激励样品用的全内反射 P偏振细激光束 1, 在图 3中是在过焦点截顶椭球体 10中侧面开孔。 半球体反射镜 15将样 品喇曼散射向下的隐失光转换为禁戒光 12, 经过半球体内反射后返回, 又转换为在样品池中向上的隐失光 16,经半球体反射的向上隐失光 16与 原向上的隐失光一起均由过焦点截顶整椭球体 10以禁戒光即 17、 11的形 式收集, 会集在椭球体另一焦点附近, 再通过多模光纤或透镜光学系统 耦合进入喇曼谱仪。 FIG. 3 shows an RSNE sample cell composed of a hemispherical evanescent mirror 15 and an off-focus truncated hemispherical mirror 10 (or with a large-aperture oil immersion objective 19 in FIG. 4). The refractive index of the focal truncated ellipsoid 10 is also greater than the refractive index of the sample. The RSNE sample cell is composed of the interface between the two and the outer surface is plated with a metal reflective layer, one of which (15 or 10) is on the side. (2) Two small holes for introducing and exporting a total internal reflection P-polarized fine laser beam 1 for exciting a sample. In FIG. 3, a hole is opened in the side of the off-focus truncated ellipsoid 10. The hemispherical mirror 15 converts the evanescent light that is sampled downward by Raman scattering into forbidden light 12 and returns after reflection in the hemisphere, and then converts it into the evanescent light 16 that is upward in the sample pool and upwards that are reflected by the hemisphere. Both the lost light 16 and the lost light in the original direction are collected by the over-focus truncated whole ellipsoid 10 in the form of forbidden light, namely 17, 11 and collected near the other focus of the ellipsoid, and then passed through the multimode fiber or lens optics. The system is coupled into a Raman spectrometer.
图 4为过焦点截顶半椭球体 18反射镜与大孔径油浸物镜 19盖片组 成的 RSNE样品池结构示意图, 在此过焦点截顶半椭球体反射镜 18与图 2中的半球体反射镜 15类似, 可将向下的喇曼散射隐失光转换为禁戒光 之后, 由于入射角小于临界角因此一直保留可传输光的形式经过焦点截 顶半椭球体 18内二次反射后通过样品池, 由于入射角已小于临界角因此 一直保留可传输光的形式通过样品池, 然后由大孔径油浸物镜 19接收。 油浸物镜 19的盖片与过焦点截顶半椭球体 18,折射率均大于样品折射率 并都镀有很薄的银或金薄膜 2。向上的喇曼散射隐失光通过盖片转换为禁 戒光, 大数值孔径油浸物镜 19与喇曼谱仪 14耦合, 全部喇曼散射光经 反射镜 20反射后与喇曼谱仪 11耦合。同样,激励激光束 1通过物镜或过 焦点截顶半椭球体侧面镀金属反射层的小孔引入。  FIG. 4 is a schematic structural diagram of an RSNE sample cell composed of an over-focus truncated hemispherical 18 reflector and a large-aperture oil immersion objective 19 cover sheet. Here, the over-focus truncated hemispherical reflector 18 and the hemispherical reflection in FIG. 2 Mirror 15 is similar. After the downward Raman scattering evanescent light is converted into forbidden light, the incident light angle is kept smaller as the incident angle is smaller than the critical angle. Therefore, the form of transmittable light has been passed through the sample after secondary reflection in the focal truncated semi-ellipsoid 18. Since the angle of incidence is smaller than the critical angle, the light can be transmitted through the sample cell and then received by the large-aperture oil immersion objective 19. The cover lens of the oil immersion objective lens 19 and the off-focus truncated semi-ellipsoid 18 both have a refractive index greater than that of the sample and are plated with a thin silver or gold film 2. The upward Raman scattering evanescent light is converted to forbidden light by the cover sheet. The large numerical aperture oil immersion objective lens 19 is coupled to the Raman spectrometer 14, and all Raman scattered light is reflected by the mirror 20 and coupled to the Raman spectrometer 11. Similarly, the excitation laser beam 1 is introduced through an objective lens or a small hole plated with a metal reflective layer on the side of the truncated hemi-spheroid.
可以想象, 上述集光元件中至少一个可以是过焦点截顶抛物体反射. 镜或后焦距为无穷的大孔径油浸物镜, 使进入其内部由样品喇曼散射隐 失光转换来的禁戒光以平行光柬耦合进入喇曼谱仪。  It is conceivable that at least one of the above-mentioned light-collecting elements may be an over-focus truncated parabolic object reflection. A mirror or a large-aperture oil-immersed objective lens with an infinite back focal length, so that the forbidden light converted into the interior by the sample Raman scattering and evanescent light is entered Coupling into a Raman spectrometer with parallel light beams.
集光元件为过焦点截顶整椭球体反射镜或过焦点截顶抛物体反射镜 或大孔径油浸物镜时,均可向样品池两个基板方向全方位收集 4 π立体角 内样品喇曼散射光。  When the light-collecting element is an over-focus truncated ellipsoidal reflector or an over-focus truncated parabolic reflector or a large-aperture oil-immersed objective, the Raman samples in a 4 π solid angle can be collected in all directions toward the two substrates of the sample cell. Scattered light.
而且, 上述过焦点截顶半椭球体反射镜或半球体反射镜, 用于收集 向样品池其中一个基板方向发射的喇曼散射光经其反射后通过样品池由 另一基板相连接的集光元件收集。 如果允许增益受到一定影响, 可替代 地选用由所述基板银或金膜加厚改成的反射镜, 同样用于反射喇曼散射 光、 使其通过样品池由另一基板相连接的集光元件收集。 In addition, the above-focus truncated hemispherical reflector or hemispherical reflector is used to collect the Raman scattered light emitted in the direction of one substrate of the sample cell and reflect the collected light connected to the other substrate through the sample cell. Component collection. If the gain is allowed to be affected to some extent, a mirror made by thickening the silver or gold film of the substrate may be used instead, which is also used for reflecting Raman scattering. Light is collected through a sample cell by a light collecting element connected to another substrate.
当然, 本发明的样品池还可以用来分析固态样品, 在此情况下的样 品用纳米尺度的粉体或薄膜。  Of course, the sample cell of the present invention can also be used to analyze solid samples. In this case, a nano-scale powder or film is used for the sample.
利用本发明喇曼散射近场增强(RSNE)样品池可提高喇曼增强因子, 大幅度提高喇曼分析的灵敏度, 在一些重要疾病喇曼谱的定标已经取得 的条件下, 用一滴指血诊断早期重大疾病理想有可能实现。 为催化反应 在线喇曼测试和物化、 生物、 医学、 地质、 材料等许多领域的分子痕量 分析技术将提供一种崭新的手段。  By using the Raman scattering near field enhancement (RSNE) sample cell of the present invention, the Raman enhancement factor can be improved, and the sensitivity of Raman analysis can be greatly improved. Under the condition that the calibration of the Raman spectrum of some important diseases has been obtained, a drop of finger is used for blood The ideal of diagnosing early major illnesses is possible. On-line Raman testing and molecular trace analysis technology in many fields such as physicochemical, biological, medical, geological, and materials will provide a new method for catalyzing reactions.

Claims

权 利 要 求 Rights request
1 . 一种超高灵敏的激励和接收均用隐失光的喇曼散射近场增强样品 池, 其特征在于, 包括二块表面平行的、 折射率大于样品折射率的透明 基板, 上述基板内表面镀有数纳米厚银或金膜, 在银或金膜之间分布有 纳米尺度的银或金胶体颗粒或纳米结构, 样品池的两个界面可夹紧样品 到数十至数百纳米间距, 以便允许入射角超过临界角的激励激光束产生 隐失光激励样品和发射以隐失光为主要形式的喇曼散射光。 What is claimed is: 1. An ultra-high sensitivity near-field enhanced sample cell using stray light Raman scattering for excitation and reception, comprising two transparent substrates with parallel surfaces and a refractive index greater than the refractive index of the sample. The surface is coated with a few nanometers of thick silver or gold film, and nanoscale silver or gold colloidal particles or nanostructures are distributed between the silver or gold films. The two interfaces of the sample cell can clamp the sample to a distance of tens to hundreds of nanometers. In order to allow the excitation laser beam with an incident angle exceeding the critical angle to generate evanescent light to excite the sample and emit Raman scattered light with evanescent light as the main form.
2. 如权利要求 1所述的喇曼散射近场增强样品池, 其特征在于, 还 包括分别与所述基板相连接的一个集光元件, 样品喇曼散射分别向两个 基板方向发射的隐失光在集光元件内通过可传输的禁戒光形式收集。  2. The Raman scattering near-field enhanced sample cell according to claim 1, further comprising a light collecting element connected to each of the substrates, and the sample Raman scattering is emitted in the direction of two substrates. Lost light is collected in a light-collecting element in the form of a transmissive forbidden light.
3 . 如权利要求 2所述的喇曼散射近场增强样品池, 其特征在于, 上 述集光元件中的至少有一个是过焦点截顶整椭球体反射镜或大孔径油浸 物镜, 以便使进入其内部由样品喇曼散射隐失光转换来的禁戒光聚焦后 收集耦合进入喇曼谱仪。  3. The Raman scattering near field enhanced sample cell according to claim 2, characterized in that at least one of the light collecting elements is an over-focus truncated ellipsoidal reflector or a large-aperture oil-immersed objective lens, so that After entering the interior, the forbidden light converted by the sample Raman scattering and evanescent light is focused and collected and coupled into the Raman spectrometer.
4. 如权利要求 2所述的喇曼散射近场增强样品池, 其特征在于, 上 述集光元件中至少有一个是过焦点截顶抛物体反射镜或后焦距为无穷的 大孔径油浸物镜, 用于使进入其内部由样品喇曼散射隐失光转换来的禁 戒光以平行光束耦合进入喇曼谱仪。  4. The Raman scattering near-field enhanced sample cell according to claim 2, wherein at least one of the light collecting elements is an over-focus truncated parabolic reflector or a large-aperture oil-immersed objective lens with an infinite back focal length It is used to make the forbidden light converted into the interior of the sample by the Raman scattering and evanescent light coupled into the Raman spectrometer as parallel beams.
5. 如权利要求 2所述的喇曼散射近场增强样品池, 其特征在于, 上 述集光元件中的一个是过焦点截顶半椭球体反射镜或半球体反射镜或由 所述基板银或金膜加厚改成的反射镜, 用于收集向样品池其中一个基板 方向发射的喇曼散射光经其反射后通过样品池由另一基板相连接的集光 元件收集。  5. The Raman scattering near-field enhanced sample cell according to claim 2, wherein one of the light-collecting elements is an off-focus truncated hemispherical mirror or a hemispherical mirror, or the substrate silver Or a thickened gold mirror is used to collect the Raman scattered light emitted toward one of the substrates of the sample cell, and after it is reflected, it is collected by the light collecting element connected to the other substrate through the sample cell.
6. 如权利要求 2所述的喇曼散射近场增强样品池, 其特征在于, 上 述集光元件中的一个集光元件的侧面反射层上设有小孔引入入射角超过 临界角的细激光束, 或通过大数值孔径油浸物镜引入入射角超过临界角 的激光束。 6. The Raman scattering near-field enhanced sample cell according to claim 2, wherein a small reflective hole is provided on a side reflection layer of one of the light-collecting elements to introduce a fine laser having an incident angle exceeding a critical angle. Beam, or a laser beam with an incident angle exceeding a critical angle introduced by a large numerical aperture oil immersion objective.
7. —种喇曼散射激励和接收均用隐失光的喇曼散射近场增强方法, 包括如下步骤, 7. A Raman scattering near-field enhancement method in which both Raman scattering excitation and reception use evanescent light, including the following steps,
提供二块表面平行的、 折射率大于样品折射率的透明基板构成样品 池, 上述基板内表面镀数纳米厚银或.金薄膜, 在银或金膜之间分布有纳 米尺度的银或金胶体颗粒或结构;  Two transparent substrates with parallel surfaces and a refractive index greater than the refractive index of the sample are provided to form a sample cell. The inner surface of the substrate is plated with a few nanometers of thick silver or gold film, and nanoscale silver or gold colloids are distributed between the silver or gold films. Particles or structure
样品池两个界面之间放入液体样品或纳米粉体样品或薄膜样品, 将 样品夹紧到数十至数百纳米间距。  A liquid sample or a nano powder sample or a thin film sample is placed between the two interfaces of the sample cell, and the sample is clamped to a distance of tens to hundreds of nanometers.
8. 如权利要求 7所述的喇曼散射激励和接收均用隐失光的喇曼散射 近场增强方法, 其中, 为各基板提供一个与该基板相连接的集光元件, 该集光元件外壁镀有金属反射层 ·, 并且在其中一个集光元件的侧面反射 层上设有小孔引入细激光束或在大孔径油浸物镜中引入激光束, 所引入 的激光束的入射角超过临界角以便在样品池中产生隐失光激励样品。  8. The Raman scattering near-field enhancement method for both Raman scattering excitation and reception according to claim 7, wherein each substrate is provided with a light collecting element connected to the substrate, and the light collecting element The outer wall is plated with a metal reflective layer, and a small hole is introduced in the side reflective layer of one of the light collecting elements to introduce a fine laser beam or a laser beam into a large-aperture oil immersion objective lens. The incident angle of the introduced laser beam exceeds a threshold Angle in order to create a stray light excitation sample in the sample cell.
9. 如权利要求 8所述的喇曼散射激励和接收均用隐失光的喇曼散射 近场增强方法, 其中, 上述集光元件中的一个是过焦点截顶半椭球体反 射镜或半球体反射镜或由所述基板的银或金膜加厚改成的反射镜, 将样 品池其中一个基板方向的喇曼散射光通过反射至样品池另一基板方向的 集光元件中收集。  9. The Raman scattering near-field enhancement method using both stray light for excitation and reception of Raman scattering according to claim 8, wherein one of the light collecting elements is an off-focus truncated hemispherical reflector or a hemisphere A body reflector or a reflector made by thickening the silver or gold film of the substrate, collects Raman scattered light in the direction of one substrate of the sample cell through a light collecting element that is reflected to the direction of the other substrate of the sample cell.
10. 如权利要求 8 所述的一种喇曼散射激励和接收均用隐失光的喇 曼散射近场增强方法, 其中, 样品池的两个集光元件中至少有一个集光 元件是过焦点截顶整椭球体反射镜或过焦点截顶抛物体反射镜或大孔径 油浸物镜,用于向样品池两个基板方向全方位收集 4 π立体角内样品喇曼 散射光, 耦合进入喇曼谱仪。  10. The Raman scattering near-field enhancement method using both stray light for excitation and reception of Raman scattering according to claim 8, wherein at least one of the two light collecting elements of the sample cell is a light collecting element. Focus truncated ellipsoidal reflector or over-focus truncated parabolic reflector or large-aperture oil-immersed objective, used to collect the Raman scattered light of the sample within 4 π solid angle in all directions towards the two substrates of the sample cell, and coupled into Ra Man spectrometer.
PCT/CN2003/001072 2002-12-16 2003-12-16 A raman scattering near-field enhanced method and sample cell WO2004055503A1 (en)

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CN102967593B (en) * 2012-11-28 2016-06-01 南通大学 The method of optical waveguide enhancement mechanism and Raman spectrometer
CN103149191B (en) * 2013-01-30 2015-01-14 厦门大学 Multichannel nano particle automatic infliction device for Raman spectrum
CN104792746B (en) * 2014-12-09 2018-06-26 中国科学院微电子研究所 A kind of detection method being imaged using surface phasmon scattering to nano-substance
CN104792735B (en) * 2014-12-09 2018-01-23 中国科学院微电子研究所 A kind of method and apparatus that image checking virus is scattered using surface phasmon

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