WO2004054010A3 - Low temperature process for passivation applications - Google Patents
Low temperature process for passivation applications Download PDFInfo
- Publication number
- WO2004054010A3 WO2004054010A3 PCT/US2003/039385 US0339385W WO2004054010A3 WO 2004054010 A3 WO2004054010 A3 WO 2004054010A3 US 0339385 W US0339385 W US 0339385W WO 2004054010 A3 WO2004054010 A3 WO 2004054010A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- cathode
- low temperature
- temperature process
- organic
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02142—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing silicon and at least one metal element, e.g. metal silicate based insulators or metal silicon oxynitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
Abstract
An organic electroluminescent device comprising an anode layer on a substrate, an organic layer on the anode layer, and a cathode layer on the organic layer. In one embodiment, the cathode layer is subjected to H2 plasma prior to deposition of a protective layer over the cathode. In another embodiment, the organic electroluminescent device is encapsulated with an inner encapsulation layer on the cathode layer, and an outer encapsulation layer on the inner encapsulation layer. The inner layer is optimized for adhesion to the cathode layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004558687A JP2006510170A (en) | 2002-12-11 | 2003-12-10 | Low temperature process for passivation applications |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/317,774 | 2002-12-11 | ||
US10/317,774 US7086918B2 (en) | 2002-12-11 | 2002-12-11 | Low temperature process for passivation applications |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2004054010A2 WO2004054010A2 (en) | 2004-06-24 |
WO2004054010A3 true WO2004054010A3 (en) | 2004-11-18 |
Family
ID=32506214
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2003/039385 WO2004054010A2 (en) | 2002-12-11 | 2003-12-10 | Low temperature process for passivation applications |
Country Status (6)
Country | Link |
---|---|
US (1) | US7086918B2 (en) |
JP (1) | JP2006510170A (en) |
KR (1) | KR20050084075A (en) |
CN (2) | CN1717817A (en) |
TW (1) | TW200421927A (en) |
WO (1) | WO2004054010A2 (en) |
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- 2002-12-11 US US10/317,774 patent/US7086918B2/en not_active Expired - Fee Related
-
2003
- 2003-12-10 CN CNA2003801044933A patent/CN1717817A/en active Pending
- 2003-12-10 JP JP2004558687A patent/JP2006510170A/en active Pending
- 2003-12-10 CN CNA2008101339915A patent/CN101350396A/en active Pending
- 2003-12-10 WO PCT/US2003/039385 patent/WO2004054010A2/en active Application Filing
- 2003-12-10 KR KR1020057009864A patent/KR20050084075A/en not_active Application Discontinuation
- 2003-12-11 TW TW092135093A patent/TW200421927A/en unknown
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Also Published As
Publication number | Publication date |
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JP2006510170A (en) | 2006-03-23 |
US20040113542A1 (en) | 2004-06-17 |
CN101350396A (en) | 2009-01-21 |
WO2004054010A2 (en) | 2004-06-24 |
US7086918B2 (en) | 2006-08-08 |
TW200421927A (en) | 2004-10-16 |
KR20050084075A (en) | 2005-08-26 |
CN1717817A (en) | 2006-01-04 |
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