WO2004036164A3 - System and a method of measuring an optical path difference in a sensing interferometer - Google Patents

System and a method of measuring an optical path difference in a sensing interferometer Download PDF

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Publication number
WO2004036164A3
WO2004036164A3 PCT/CA2003/001547 CA0301547W WO2004036164A3 WO 2004036164 A3 WO2004036164 A3 WO 2004036164A3 CA 0301547 W CA0301547 W CA 0301547W WO 2004036164 A3 WO2004036164 A3 WO 2004036164A3
Authority
WO
WIPO (PCT)
Prior art keywords
optical path
sensing interferometer
path difference
measuring
light
Prior art date
Application number
PCT/CA2003/001547
Other languages
French (fr)
Other versions
WO2004036164A2 (en
Inventor
Neste Richard Van
Claude Belleville
Daniel Pronovost
Alain Proulx
Original Assignee
Fiso Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fiso Technologies Inc filed Critical Fiso Technologies Inc
Priority to AU2003273694A priority Critical patent/AU2003273694A1/en
Priority to CA002499021A priority patent/CA2499021C/en
Publication of WO2004036164A2 publication Critical patent/WO2004036164A2/en
Publication of WO2004036164A3 publication Critical patent/WO2004036164A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02012—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal intensity variation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02023—Indirect probing of object, e.g. via influence on cavity or fibre
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Abstract

An apparatus and a method of measuring an optical path difference in a sensing interferometer. Light from a source is directed in the sensing interferometer. The light reflected from the sensing interferometer is splitted into first and second beams respectively directed into two reference interferometers having optical path differences greater than the coherence length of the source and such that the optical signals are in quadrature. The intensities of the light transmitted by the reference interferometers and recombined light reflected from the reference interferometers are detected for measuring the optical path difference in the sensing interferometer. Additional light sources allow for correction of internal perturbations and absolute measurement of the optical path difference in the sensing interferometer.
PCT/CA2003/001547 2002-10-16 2003-10-07 System and a method of measuring an optical path difference in a sensing interferometer WO2004036164A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2003273694A AU2003273694A1 (en) 2002-10-16 2003-10-07 System and a method of measuring an optical path difference in a sensing interferometer
CA002499021A CA2499021C (en) 2002-10-16 2003-10-07 System and method of measuring an optical path difference in a sensing interferometer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/270,647 US6842254B2 (en) 2002-10-16 2002-10-16 System and method for measuring an optical path difference in a sensing interferometer
US10/270,647 2002-10-16

Publications (2)

Publication Number Publication Date
WO2004036164A2 WO2004036164A2 (en) 2004-04-29
WO2004036164A3 true WO2004036164A3 (en) 2004-07-01

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CA2003/001547 WO2004036164A2 (en) 2002-10-16 2003-10-07 System and a method of measuring an optical path difference in a sensing interferometer

Country Status (4)

Country Link
US (1) US6842254B2 (en)
AU (1) AU2003273694A1 (en)
CA (1) CA2499021C (en)
WO (1) WO2004036164A2 (en)

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Publication number Publication date
US20040075841A1 (en) 2004-04-22
AU2003273694A8 (en) 2004-05-04
CA2499021A1 (en) 2004-04-29
US6842254B2 (en) 2005-01-11
AU2003273694A1 (en) 2004-05-04
WO2004036164A2 (en) 2004-04-29
CA2499021C (en) 2007-05-01

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