WO2004034103A3 - Micromirror systems - Google Patents

Micromirror systems Download PDF

Info

Publication number
WO2004034103A3
WO2004034103A3 PCT/US2003/032348 US0332348W WO2004034103A3 WO 2004034103 A3 WO2004034103 A3 WO 2004034103A3 US 0332348 W US0332348 W US 0332348W WO 2004034103 A3 WO2004034103 A3 WO 2004034103A3
Authority
WO
WIPO (PCT)
Prior art keywords
devices
superstructure
features described
micromirror
micromirror devices
Prior art date
Application number
PCT/US2003/032348
Other languages
French (fr)
Other versions
WO2004034103A2 (en
Inventor
Christopher M Aubuchon
Original Assignee
Exajoule Llc
Christopher M Aubuchon
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/269,763 external-priority patent/US6825968B2/en
Priority claimed from US10/269,478 external-priority patent/US6798560B2/en
Priority claimed from US10/269,796 external-priority patent/US6870659B2/en
Application filed by Exajoule Llc, Christopher M Aubuchon filed Critical Exajoule Llc
Priority to EP03774800A priority Critical patent/EP1588202A4/en
Priority to AU2003282611A priority patent/AU2003282611A1/en
Priority to CA002502298A priority patent/CA2502298A1/en
Priority to JP2004543736A priority patent/JP2006502449A/en
Publication of WO2004034103A2 publication Critical patent/WO2004034103A2/en
Publication of WO2004034103A3 publication Critical patent/WO2004034103A3/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Abstract

Micromirror devices, especially for use in digital projection are disclosed. Other applications are contemplated as well. The devices employ a superstructure that includes a mirror supported over a hinge set above a substructure. Various improvements to the superstructure over known micromirror devices are provided. The features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein, possibly offering cost savings, lower power consumption, and higher resolution.
PCT/US2003/032348 2002-10-11 2003-10-10 Micromirror systems WO2004034103A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP03774800A EP1588202A4 (en) 2002-10-11 2003-10-10 Micromirror systems
AU2003282611A AU2003282611A1 (en) 2002-10-11 2003-10-10 Micromirror systems
CA002502298A CA2502298A1 (en) 2002-10-11 2003-10-10 Micromirror systems
JP2004543736A JP2006502449A (en) 2002-10-11 2003-10-10 Micromirror system

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US10/269,796 2002-10-11
US10/269,763 US6825968B2 (en) 2002-10-11 2002-10-11 Micromirror systems with electrodes configured for sequential mirror attraction
US10/269,478 2002-10-11
US10/269,478 US6798560B2 (en) 2002-10-11 2002-10-11 Micromirror systems with open support structures
US10/269,763 2002-10-11
US10/269,796 US6870659B2 (en) 2002-10-11 2002-10-11 Micromirror systems with side-supported mirrors and concealed flexure members

Publications (2)

Publication Number Publication Date
WO2004034103A2 WO2004034103A2 (en) 2004-04-22
WO2004034103A3 true WO2004034103A3 (en) 2005-08-11

Family

ID=32096819

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/032348 WO2004034103A2 (en) 2002-10-11 2003-10-10 Micromirror systems

Country Status (5)

Country Link
EP (1) EP1588202A4 (en)
JP (1) JP2006502449A (en)
AU (1) AU2003282611A1 (en)
CA (1) CA2502298A1 (en)
WO (1) WO2004034103A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4492952B2 (en) * 2004-12-03 2010-06-30 株式会社リコー Optical deflection apparatus, optical deflection array, optical system, image projection display apparatus, and image forming apparatus
US7391554B2 (en) * 2006-08-25 2008-06-24 Spatial Photonics, Inc. High fill-ratio mirror-based spatial light modulator
WO2008127238A1 (en) * 2007-04-12 2008-10-23 Thomson Licensing Biaxial mirror color selecting micro mirror imager
JP6519284B2 (en) * 2015-04-01 2019-05-29 セイコーエプソン株式会社 Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6633426B2 (en) * 2001-05-10 2003-10-14 Analog Devices, Inc. Optical-electrical MEMS devices and method
US6666561B1 (en) * 2002-10-28 2003-12-23 Hewlett-Packard Development Company, L.P. Continuously variable analog micro-mirror device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0784196A (en) * 1993-09-13 1995-03-31 Canon Inc Optical deflector and display device using the same
US6028689A (en) * 1997-01-24 2000-02-22 The United States Of America As Represented By The Secretary Of The Air Force Multi-motion micromirror
DE19712201A1 (en) * 1997-03-24 1998-10-01 Bodenseewerk Geraetetech Micro-mechanical mirror arrangement with grid of individually disengageable mirror components
JP2001311900A (en) * 2000-04-27 2001-11-09 Ricoh Co Ltd Optical scanner
US6487001B2 (en) * 2000-12-13 2002-11-26 Agere Systems Inc. Article comprising wedge-shaped electrodes

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6633426B2 (en) * 2001-05-10 2003-10-14 Analog Devices, Inc. Optical-electrical MEMS devices and method
US6666561B1 (en) * 2002-10-28 2003-12-23 Hewlett-Packard Development Company, L.P. Continuously variable analog micro-mirror device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1588202A4 *

Also Published As

Publication number Publication date
EP1588202A2 (en) 2005-10-26
WO2004034103A2 (en) 2004-04-22
CA2502298A1 (en) 2004-04-22
EP1588202A4 (en) 2007-10-10
JP2006502449A (en) 2006-01-19
AU2003282611A1 (en) 2004-05-04

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