WO2004034103A3 - Micromirror systems - Google Patents
Micromirror systems Download PDFInfo
- Publication number
- WO2004034103A3 WO2004034103A3 PCT/US2003/032348 US0332348W WO2004034103A3 WO 2004034103 A3 WO2004034103 A3 WO 2004034103A3 US 0332348 W US0332348 W US 0332348W WO 2004034103 A3 WO2004034103 A3 WO 2004034103A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- devices
- superstructure
- features described
- micromirror
- micromirror devices
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03774800A EP1588202A4 (en) | 2002-10-11 | 2003-10-10 | Micromirror systems |
AU2003282611A AU2003282611A1 (en) | 2002-10-11 | 2003-10-10 | Micromirror systems |
CA002502298A CA2502298A1 (en) | 2002-10-11 | 2003-10-10 | Micromirror systems |
JP2004543736A JP2006502449A (en) | 2002-10-11 | 2003-10-10 | Micromirror system |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/269,796 | 2002-10-11 | ||
US10/269,763 US6825968B2 (en) | 2002-10-11 | 2002-10-11 | Micromirror systems with electrodes configured for sequential mirror attraction |
US10/269,478 | 2002-10-11 | ||
US10/269,478 US6798560B2 (en) | 2002-10-11 | 2002-10-11 | Micromirror systems with open support structures |
US10/269,763 | 2002-10-11 | ||
US10/269,796 US6870659B2 (en) | 2002-10-11 | 2002-10-11 | Micromirror systems with side-supported mirrors and concealed flexure members |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2004034103A2 WO2004034103A2 (en) | 2004-04-22 |
WO2004034103A3 true WO2004034103A3 (en) | 2005-08-11 |
Family
ID=32096819
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2003/032348 WO2004034103A2 (en) | 2002-10-11 | 2003-10-10 | Micromirror systems |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1588202A4 (en) |
JP (1) | JP2006502449A (en) |
AU (1) | AU2003282611A1 (en) |
CA (1) | CA2502298A1 (en) |
WO (1) | WO2004034103A2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4492952B2 (en) * | 2004-12-03 | 2010-06-30 | 株式会社リコー | Optical deflection apparatus, optical deflection array, optical system, image projection display apparatus, and image forming apparatus |
US7391554B2 (en) * | 2006-08-25 | 2008-06-24 | Spatial Photonics, Inc. | High fill-ratio mirror-based spatial light modulator |
WO2008127238A1 (en) * | 2007-04-12 | 2008-10-23 | Thomson Licensing | Biaxial mirror color selecting micro mirror imager |
JP6519284B2 (en) * | 2015-04-01 | 2019-05-29 | セイコーエプソン株式会社 | Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6633426B2 (en) * | 2001-05-10 | 2003-10-14 | Analog Devices, Inc. | Optical-electrical MEMS devices and method |
US6666561B1 (en) * | 2002-10-28 | 2003-12-23 | Hewlett-Packard Development Company, L.P. | Continuously variable analog micro-mirror device |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0784196A (en) * | 1993-09-13 | 1995-03-31 | Canon Inc | Optical deflector and display device using the same |
US6028689A (en) * | 1997-01-24 | 2000-02-22 | The United States Of America As Represented By The Secretary Of The Air Force | Multi-motion micromirror |
DE19712201A1 (en) * | 1997-03-24 | 1998-10-01 | Bodenseewerk Geraetetech | Micro-mechanical mirror arrangement with grid of individually disengageable mirror components |
JP2001311900A (en) * | 2000-04-27 | 2001-11-09 | Ricoh Co Ltd | Optical scanner |
US6487001B2 (en) * | 2000-12-13 | 2002-11-26 | Agere Systems Inc. | Article comprising wedge-shaped electrodes |
-
2003
- 2003-10-10 JP JP2004543736A patent/JP2006502449A/en active Pending
- 2003-10-10 AU AU2003282611A patent/AU2003282611A1/en not_active Abandoned
- 2003-10-10 WO PCT/US2003/032348 patent/WO2004034103A2/en active Application Filing
- 2003-10-10 CA CA002502298A patent/CA2502298A1/en not_active Abandoned
- 2003-10-10 EP EP03774800A patent/EP1588202A4/en not_active Withdrawn
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6633426B2 (en) * | 2001-05-10 | 2003-10-14 | Analog Devices, Inc. | Optical-electrical MEMS devices and method |
US6666561B1 (en) * | 2002-10-28 | 2003-12-23 | Hewlett-Packard Development Company, L.P. | Continuously variable analog micro-mirror device |
Non-Patent Citations (1)
Title |
---|
See also references of EP1588202A4 * |
Also Published As
Publication number | Publication date |
---|---|
EP1588202A2 (en) | 2005-10-26 |
WO2004034103A2 (en) | 2004-04-22 |
CA2502298A1 (en) | 2004-04-22 |
EP1588202A4 (en) | 2007-10-10 |
JP2006502449A (en) | 2006-01-19 |
AU2003282611A1 (en) | 2004-05-04 |
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