WO2003102696A3 - A method for photolithography using multiple illuminations and a single fine feature mask - Google Patents

A method for photolithography using multiple illuminations and a single fine feature mask Download PDF

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Publication number
WO2003102696A3
WO2003102696A3 PCT/US2003/016862 US0316862W WO03102696A3 WO 2003102696 A3 WO2003102696 A3 WO 2003102696A3 US 0316862 W US0316862 W US 0316862W WO 03102696 A3 WO03102696 A3 WO 03102696A3
Authority
WO
WIPO (PCT)
Prior art keywords
photolithography
fine feature
feature mask
single fine
substrate
Prior art date
Application number
PCT/US2003/016862
Other languages
French (fr)
Other versions
WO2003102696A2 (en
Inventor
Michael Fritze
Brian M Tyrell
Original Assignee
Massachusetts Inst Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Massachusetts Inst Technology filed Critical Massachusetts Inst Technology
Priority to AU2003240931A priority Critical patent/AU2003240931A1/en
Publication of WO2003102696A2 publication Critical patent/WO2003102696A2/en
Publication of WO2003102696A3 publication Critical patent/WO2003102696A3/en

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
    • G03B27/46—Projection printing apparatus, e.g. enlarger, copying camera for automatic sequential copying of different originals, e.g. enlargers, roll film printers
    • G03B27/48—Projection printing apparatus, e.g. enlarger, copying camera for automatic sequential copying of different originals, e.g. enlargers, roll film printers with original in the form of a film strip moving continuously and compensation for consequent image movement
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G03F7/70466—Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature

Abstract

A method forms a feature pattern on a substrate by exposing the substrate (726 of Figure 17), using a mask (722 of Figure 17) having a pattern of features (832 of Figure 17) thereon, with illumination having a first set of settings (23 of Figure 17). The substrate is exposed a second time, using the same mask having the pattern of features thereon, with illumination having a second set of settings (723 of Figure 17). The mask having the pattern of features thereon remains stationary between the two illumination exposures of the substrate.
PCT/US2003/016862 2002-05-29 2003-05-29 A method for photolithography using multiple illuminations and a single fine feature mask WO2003102696A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003240931A AU2003240931A1 (en) 2002-05-29 2003-05-29 A method for photolithography using multiple illuminations and a single fine feature mask

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US38397202P 2002-05-29 2002-05-29
US60/383,972 2002-05-29

Publications (2)

Publication Number Publication Date
WO2003102696A2 WO2003102696A2 (en) 2003-12-11
WO2003102696A3 true WO2003102696A3 (en) 2004-04-15

Family

ID=29711963

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/016862 WO2003102696A2 (en) 2002-05-29 2003-05-29 A method for photolithography using multiple illuminations and a single fine feature mask

Country Status (3)

Country Link
US (2) US6934007B2 (en)
AU (1) AU2003240931A1 (en)
WO (1) WO2003102696A2 (en)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7246342B2 (en) * 2002-07-26 2007-07-17 Asml Masktools B.V. Orientation dependent shielding for use with dipole illumination techniques
US7180576B2 (en) * 2003-02-11 2007-02-20 Asml Netherlands B.V. Exposure with intensity balancing to mimic complex illuminator shape
EP1467252A1 (en) * 2003-04-07 2004-10-13 ASML Netherlands B.V. Device manufacturing method and mask set for use in the method
US20050008942A1 (en) * 2003-07-08 2005-01-13 Yung-Feng Cheng [photomask with internal assistant pattern forenhancing resolution of multi-dimension pattern]
US7253885B2 (en) * 2003-12-05 2007-08-07 Canon Kabushiki Kaisha Wavelength selecting method, position detecting method and apparatus, exposure method and apparatus, and device manufacturing method
US7172840B2 (en) * 2003-12-05 2007-02-06 Sandisk Corporation Photomask features with interior nonprinting window using alternating phase shifting
US6960775B1 (en) * 2004-04-13 2005-11-01 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufactured thereby
TWI334962B (en) * 2005-04-12 2010-12-21 Asml Masktools Bv A method, program product and apparatus for performing double exposure lithography
TWI299429B (en) * 2005-10-06 2008-08-01 Promos Technologies Inc Method of exposure
US20070148558A1 (en) * 2005-12-27 2007-06-28 Shahzad Akbar Double metal collimated photo masks, diffraction gratings, optics system, and method related thereto
KR100721205B1 (en) * 2006-04-21 2007-05-23 주식회사 하이닉스반도체 Pattern decomposition and optical proximity effect correction method for double exposure
JP2008071838A (en) * 2006-09-12 2008-03-27 Nec Electronics Corp Method for manufacturing semiconductor device
US20080085471A1 (en) * 2006-10-10 2008-04-10 Anderson Brent A Photolithographic method using multiple photoexposure apparatus
US7794921B2 (en) * 2006-12-30 2010-09-14 Sandisk Corporation Imaging post structures using x and y dipole optics and a single mask
DE102007033243A1 (en) * 2007-07-12 2009-01-15 Carl Zeiss Sms Gmbh Method and device for analyzing a group of photolithography masks
KR101057186B1 (en) * 2008-04-25 2011-08-16 주식회사 하이닉스반도체 A phase inversion mask for a double patterning technique and a wafer exposure method using the same.
US8221635B2 (en) * 2009-03-03 2012-07-17 Raytheon Company Process for multiple platings and fine etch accuracy on the same printed wiring board
US8153522B2 (en) 2010-03-02 2012-04-10 Micron Technology, Inc. Patterning mask and method of formation of mask using step double patterning
US8512938B2 (en) 2010-06-14 2013-08-20 Micron Technology, Inc. Methods of forming a pattern in a material and methods of forming openings in a material to be patterned
US8495528B2 (en) 2010-09-27 2013-07-23 International Business Machines Corporation Method for generating a plurality of optimized wavefronts for a multiple exposure lithographic process
FR2972293A1 (en) * 2011-03-04 2012-09-07 St Microelectronics Crolles 2 METHOD FOR MANUFACTURING AN INTEGRATED CIRCUIT ON THE FORMATION OF LINES AND SLICES
CN102736422B (en) * 2011-03-31 2015-07-22 上海微电子装备有限公司 Proximity field exposure device and method
US8656319B2 (en) * 2012-02-08 2014-02-18 Taiwan Semiconductor Manufacturing Company, Ltd. Optical proximity correction convergence control
US8871596B2 (en) 2012-07-23 2014-10-28 International Business Machines Corporation Method of multiple patterning to form semiconductor devices
US8927198B2 (en) 2013-01-15 2015-01-06 International Business Machines Corporation Method to print contact holes at high resolution
US8993217B1 (en) 2013-04-04 2015-03-31 Western Digital (Fremont), Llc Double exposure technique for high resolution disk imaging

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5539568A (en) * 1994-06-16 1996-07-23 Texas Instruments Incorporated Method of exposing a light sensitive material
EP0997781A1 (en) * 1998-10-27 2000-05-03 Canon Kabushiki Kaisha Exposure method
EP1091252A2 (en) * 1999-09-29 2001-04-11 Asm Lithography B.V. Lithographic method and apparatus
US6296987B1 (en) * 1999-10-20 2001-10-02 United Microelectronics Corp. Method for forming different patterns using one mask
US20020036762A1 (en) * 1997-01-27 2002-03-28 Nikon Corporation Projection exposure method and apparatus
US20020045136A1 (en) * 2000-09-13 2002-04-18 Michael Fritze Method of design and fabrication of integrated circuits using regular arrays and gratings

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5636316A (en) * 1990-12-05 1997-06-03 Hitachi, Ltd. Picture signal digital processing unit
US5415835A (en) 1992-09-16 1995-05-16 University Of New Mexico Method for fine-line interferometric lithography
US5595843A (en) * 1995-03-30 1997-01-21 Intel Corporation Layout methodology, mask set, and patterning method for phase-shifting lithography
US5766829A (en) 1995-05-30 1998-06-16 Micron Technology, Inc. Method of phase shift lithography
US5680588A (en) * 1995-06-06 1997-10-21 International Business Machines Corporation Method and system for optimizing illumination in an optical photolithography projection imaging system
US5815247A (en) 1995-09-21 1998-09-29 Siemens Aktiengesellschaft Avoidance of pattern shortening by using off axis illumination with dipole and polarizing apertures
FR2742047B1 (en) * 1995-12-06 1998-01-16 Oreal KERATINIC FIBER DYEING COMPOSITIONS CONTAINING N-SUBSTITUTED DERIVATIVES OF 4-HYDROXY INDOLINE, NEW DERIVATIVES, THEIR SYNTHESIS METHOD, THEIR USE FOR DYEING, AND THE DYEING METHOD
US5959325A (en) 1997-08-21 1999-09-28 International Business Machines Corporation Method for forming cornered images on a substrate and photomask formed thereby
US6534242B2 (en) * 1997-11-06 2003-03-18 Canon Kabushiki Kaisha Multiple exposure device formation
US6930754B1 (en) * 1998-06-30 2005-08-16 Canon Kabushiki Kaisha Multiple exposure method
US6287732B1 (en) 1999-07-19 2001-09-11 Marc David Levenson Generic phase shift masks
JP3631094B2 (en) * 2000-03-30 2005-03-23 キヤノン株式会社 Projection exposure apparatus and device manufacturing method
US6563566B2 (en) 2001-01-29 2003-05-13 International Business Machines Corporation System and method for printing semiconductor patterns using an optimized illumination and reticle
US6553562B2 (en) 2001-05-04 2003-04-22 Asml Masktools B.V. Method and apparatus for generating masks utilized in conjunction with dipole illumination techniques
US6875545B2 (en) * 2001-11-28 2005-04-05 Asml Masktools B.V. Method of removing assist features utilized to improve process latitude
US6839126B2 (en) * 2002-01-03 2005-01-04 United Microelectronics Corp. Photolithography process with multiple exposures
JP3938694B2 (en) * 2002-01-17 2007-06-27 Ｎｅｃエレクトロニクス株式会社 Pattern formation method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5539568A (en) * 1994-06-16 1996-07-23 Texas Instruments Incorporated Method of exposing a light sensitive material
US20020036762A1 (en) * 1997-01-27 2002-03-28 Nikon Corporation Projection exposure method and apparatus
EP0997781A1 (en) * 1998-10-27 2000-05-03 Canon Kabushiki Kaisha Exposure method
EP1091252A2 (en) * 1999-09-29 2001-04-11 Asm Lithography B.V. Lithographic method and apparatus
US6296987B1 (en) * 1999-10-20 2001-10-02 United Microelectronics Corp. Method for forming different patterns using one mask
US20020045136A1 (en) * 2000-09-13 2002-04-18 Michael Fritze Method of design and fabrication of integrated circuits using regular arrays and gratings

Also Published As

Publication number Publication date
US7583360B2 (en) 2009-09-01
AU2003240931A8 (en) 2003-12-19
US20030223050A1 (en) 2003-12-04
US6934007B2 (en) 2005-08-23
AU2003240931A1 (en) 2003-12-19
WO2003102696A2 (en) 2003-12-11
US20050221231A1 (en) 2005-10-06

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