WO2003090985A8 - Device and method for transferring a pattern to a substrate - Google Patents

Device and method for transferring a pattern to a substrate

Info

Publication number
WO2003090985A8
WO2003090985A8 PCT/SE2003/000640 SE0300640W WO03090985A8 WO 2003090985 A8 WO2003090985 A8 WO 2003090985A8 SE 0300640 W SE0300640 W SE 0300640W WO 03090985 A8 WO03090985 A8 WO 03090985A8
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
pattern
stamping
patterned
transferring
Prior art date
Application number
PCT/SE2003/000640
Other languages
French (fr)
Other versions
WO2003090985A1 (en
Inventor
Lennart Olsson
Original Assignee
Obducat Ab
Lennart Olsson
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from SE0201239A external-priority patent/SE524563C2/en
Application filed by Obducat Ab, Lennart Olsson filed Critical Obducat Ab
Priority to AT03723553T priority Critical patent/ATE439969T1/en
Priority to EP03723553A priority patent/EP1497102B1/en
Priority to AU2003230483A priority patent/AU2003230483A1/en
Priority to US10/512,265 priority patent/US20050172848A1/en
Priority to DE60328879T priority patent/DE60328879D1/en
Publication of WO2003090985A1 publication Critical patent/WO2003090985A1/en
Publication of WO2003090985A8 publication Critical patent/WO2003090985A8/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/0046—Surface micromachining, i.e. structuring layers on the substrate using stamping, e.g. imprinting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

Abstract

A device (4) for transferring patterns, especially micro- or nanostructures, to at least two faces of a substrate (26) comprises a first stamping plate (6) having a patterned area provided thereon for forming a first pattern on a first face of said substrate (26), a second stamping plate (8) having a patterned area provided thereon for forming a second pattern on a second face of said substrate (26), and a contacting means (28, 30) for contacting the respective patterned areas of the two stamping plates (6, 8) with the respective faces of said substrate (26). The first and the second stamping plates (6, 8) are aligned with each other and are secured to each other at respective holding areas (10, 12) of the stamping plates (6, 8) located at a distance from the patterned areas.
PCT/SE2003/000640 2002-04-24 2003-04-23 Device and method for transferring a pattern to a substrate WO2003090985A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
AT03723553T ATE439969T1 (en) 2002-04-24 2003-04-23 APPARATUS AND METHOD FOR TRANSFERRING A PATTERN TO A SUBSTRATE
EP03723553A EP1497102B1 (en) 2002-04-24 2003-04-23 Device and method for transferring a pattern to a substrate
AU2003230483A AU2003230483A1 (en) 2002-04-24 2003-04-23 Device and method for transferring a pattern to a substrate
US10/512,265 US20050172848A1 (en) 2002-04-24 2003-04-23 Device and method for transferring a pattern to a substrate
DE60328879T DE60328879D1 (en) 2002-04-24 2003-04-23 DEVICE AND METHOD FOR TRANSFERRING A PATTERN TO A SUBSTRATE

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US37482702P 2002-04-24 2002-04-24
SE0201239-1 2002-04-24
SE0201239A SE524563C2 (en) 2002-04-24 2002-04-24 Micro or nanostructures transferring device for lithography, has two stamping plates that are bendable towards each other while being secured to each other at respective holding areas
US60/374,827 2002-04-24

Publications (2)

Publication Number Publication Date
WO2003090985A1 WO2003090985A1 (en) 2003-11-06
WO2003090985A8 true WO2003090985A8 (en) 2004-04-22

Family

ID=29272465

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SE2003/000640 WO2003090985A1 (en) 2002-04-24 2003-04-23 Device and method for transferring a pattern to a substrate

Country Status (6)

Country Link
US (1) US20050172848A1 (en)
EP (1) EP1497102B1 (en)
AT (1) ATE439969T1 (en)
AU (1) AU2003230483A1 (en)
DE (1) DE60328879D1 (en)
WO (1) WO2003090985A1 (en)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080164638A1 (en) * 2006-11-28 2008-07-10 Wei Zhang Method and apparatus for rapid imprint lithography
US7686606B2 (en) 2004-01-20 2010-03-30 Wd Media, Inc. Imprint embossing alignment system
US7320584B1 (en) 2004-07-07 2008-01-22 Komag, Inc. Die set having sealed compliant member
US20060027036A1 (en) * 2004-08-05 2006-02-09 Biggs Todd L Methods and apparatuses for imprinting substrates
US7410591B2 (en) * 2004-12-16 2008-08-12 Asml Holding N.V. Method and system for making a nano-plate for imprint lithography
US7409759B2 (en) * 2004-12-16 2008-08-12 Asml Holding N.V. Method for making a computer hard drive platen using a nano-plate
US7363854B2 (en) 2004-12-16 2008-04-29 Asml Holding N.V. System and method for patterning both sides of a substrate utilizing imprint lithography
US7399422B2 (en) * 2005-11-29 2008-07-15 Asml Holding N.V. System and method for forming nanodisks used in imprint lithography and nanodisk and memory disk formed thereby
US7331283B2 (en) * 2004-12-16 2008-02-19 Asml Holding N.V. Method and apparatus for imprint pattern replication
KR100729427B1 (en) * 2005-03-07 2007-06-15 주식회사 디엠에스 Apparatus for making etching area on substrate
US7281920B2 (en) 2005-03-28 2007-10-16 Komag, Inc. Die set utilizing compliant gasket
US7670530B2 (en) * 2006-01-20 2010-03-02 Molecular Imprints, Inc. Patterning substrates employing multiple chucks
MY144847A (en) * 2005-12-08 2011-11-30 Molecular Imprints Inc Method and system for double-sided patterning of substrates
US7695667B2 (en) * 2006-03-01 2010-04-13 Hitachi Global Storage Technologies Netherlands B.V. Method and apparatus for separating a stamper from a patterned substrate
US8377361B2 (en) * 2006-11-28 2013-02-19 Wei Zhang Imprint lithography with improved substrate/mold separation
TW200846278A (en) * 2007-05-24 2008-12-01 Contrel Technology Co Ltd Method for producing viscous micro-structure
KR101289337B1 (en) * 2007-08-29 2013-07-29 시게이트 테크놀로지 엘엘씨 Imprint lithography systm for dual side imprinting
TW200932502A (en) * 2008-01-18 2009-08-01 Univ Nat Taiwan An improved embossing apparatus
JP5164589B2 (en) * 2008-01-30 2013-03-21 株式会社日立ハイテクノロジーズ Imprint device
US9330685B1 (en) 2009-11-06 2016-05-03 WD Media, LLC Press system for nano-imprinting of recording media with a two step pressing method
US8496466B1 (en) 2009-11-06 2013-07-30 WD Media, LLC Press system with interleaved embossing foil holders for nano-imprinting of recording media
US8402638B1 (en) 2009-11-06 2013-03-26 Wd Media, Inc. Press system with embossing foil free to expand for nano-imprinting of recording media
US8747092B2 (en) 2010-01-22 2014-06-10 Nanonex Corporation Fast nanoimprinting apparatus using deformale mold
WO2013077386A1 (en) * 2011-11-25 2013-05-30 Ｓｃｉｖａｘ株式会社 Imprinting device and imprinting method
EP2815868B1 (en) * 2012-02-14 2017-03-29 Scivax Corporation Imprint device and imprint method
JP6291687B2 (en) * 2012-08-27 2018-03-14 Ｓｃｉｖａｘ株式会社 Imprint apparatus and imprint method
US10108086B2 (en) 2013-03-15 2018-10-23 Nanonex Corporation System and methods of mold/substrate separation for imprint lithography
US10105883B2 (en) 2013-03-15 2018-10-23 Nanonex Corporation Imprint lithography system and method for manufacturing
CN114101381A (en) * 2021-11-10 2022-03-01 罗春燕 Equipment for stamping patterns on decorative iron sheet

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2430057A1 (en) * 1978-06-29 1980-01-25 Thomson Csf DEVICE FOR PRESSING FLEXIBLE DISCS AND PRESSING METHOD USING SUCH A DEVICE
DE3932039A1 (en) * 1989-09-26 1991-04-11 Werner & Pfleiderer RUBBER SPRAY PRESS
US5425977A (en) * 1993-08-16 1995-06-20 Monsanto Company Rough-surfaced interlayer
US5772905A (en) * 1995-11-15 1998-06-30 Regents Of The University Of Minnesota Nanoimprint lithography
US5778774A (en) * 1996-12-18 1998-07-14 Framatome Connectors Usa Inc. Articulating embossing die
SE515607C2 (en) * 1999-12-10 2001-09-10 Obducat Ab Device and method for fabrication of structures
SE515962C2 (en) * 2000-03-15 2001-11-05 Obducat Ab Device for transferring patterns to objects

Also Published As

Publication number Publication date
EP1497102A1 (en) 2005-01-19
WO2003090985A1 (en) 2003-11-06
AU2003230483A8 (en) 2003-11-10
DE60328879D1 (en) 2009-10-01
ATE439969T1 (en) 2009-09-15
AU2003230483A1 (en) 2003-11-10
US20050172848A1 (en) 2005-08-11
EP1497102B1 (en) 2009-08-19

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