WO2003079434A3 - Semiconductor device having a wire bond pad and method therefor - Google Patents

Semiconductor device having a wire bond pad and method therefor Download PDF

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Publication number
WO2003079434A3
WO2003079434A3 PCT/US2003/007783 US0307783W WO03079434A3 WO 2003079434 A3 WO2003079434 A3 WO 2003079434A3 US 0307783 W US0307783 W US 0307783W WO 03079434 A3 WO03079434 A3 WO 03079434A3
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WO
WIPO (PCT)
Prior art keywords
bond pad
wire bond
metal layer
final metal
semiconductor device
Prior art date
Application number
PCT/US2003/007783
Other languages
French (fr)
Other versions
WO2003079434A2 (en
Inventor
Susan H Downey
James W Miller
Geoffrey B Hall
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Priority to AU2003218146A priority Critical patent/AU2003218146A1/en
Priority to JP2003577330A priority patent/JP4308671B2/en
Priority to KR1020047014382A priority patent/KR100979080B1/en
Priority to EP03714137.1A priority patent/EP1483789B1/en
Publication of WO2003079434A2 publication Critical patent/WO2003079434A2/en
Publication of WO2003079434A3 publication Critical patent/WO2003079434A3/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01047Silver [Ag]
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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01058Cerium [Ce]
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    • H01ELECTRIC ELEMENTS
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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01061Promethium [Pm]
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    • H01ELECTRIC ELEMENTS
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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01073Tantalum [Ta]
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    • H01ELECTRIC ELEMENTS
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    • H01L2924/01074Tungsten [W]
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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
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    • H01L2924/049Nitrides composed of metals from groups of the periodic table
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    • H01L2924/04941TiN
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    • HELECTRICITY
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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/049Nitrides composed of metals from groups of the periodic table
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    • H01L2924/05042Si3N4
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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits

Abstract

An integrated circuit (50) has a wire bond pad (53). The wire bond pad (53) is formed on a passivation layer (18) over active circuitry (26) and/or electrical interconnect layers (24) of the integrated circuit (50). The wire bond pad (53) is connected to a plurality of final metal layer portions (51, 52). The plurality of final metal layer portions (51, 52) are formed in a final interconnect layer of the interconnect layers (24). In one embodiment, the bond pad (53) is formed from aluminum and the final metal layer pads are formed from copper. The wire bond pad (53) allows routing of conductors in a final metal layer (28) directly underlying the bond pad (53), thus allowing the surface area of the semiconductor die to be reduced.
PCT/US2003/007783 2002-03-13 2003-03-12 Semiconductor device having a wire bond pad and method therefor WO2003079434A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
AU2003218146A AU2003218146A1 (en) 2002-03-13 2003-03-12 Semiconductor device having a wire bond pad and method therefor
JP2003577330A JP4308671B2 (en) 2002-03-13 2003-03-12 Semiconductor device having wire bond pad and manufacturing method thereof
KR1020047014382A KR100979080B1 (en) 2002-03-13 2003-03-12 Semiconductor device having a wire bond pad and method therefor
EP03714137.1A EP1483789B1 (en) 2002-03-13 2003-03-12 Semiconductor device having a wire bond pad and method therefor

Applications Claiming Priority (2)

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US10/097,059 2002-03-13
US10/097,059 US6614091B1 (en) 2002-03-13 2002-03-13 Semiconductor device having a wire bond pad and method therefor

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WO2003079434A2 WO2003079434A2 (en) 2003-09-25
WO2003079434A3 true WO2003079434A3 (en) 2004-03-11

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EP (1) EP1483789B1 (en)
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AU (1) AU2003218146A1 (en)
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Families Citing this family (91)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1275341C (en) 1996-08-08 2006-09-13 日立化成工业株式会社 Negative-pole producing method for lithium secondary cell
US7381642B2 (en) 2004-09-23 2008-06-03 Megica Corporation Top layers of metal for integrated circuits
US8021976B2 (en) 2002-10-15 2011-09-20 Megica Corporation Method of wire bonding over active area of a semiconductor circuit
US6965165B2 (en) * 1998-12-21 2005-11-15 Mou-Shiung Lin Top layers of metal for high performance IC's
US6936531B2 (en) * 1998-12-21 2005-08-30 Megic Corporation Process of fabricating a chip structure
US6495442B1 (en) * 2000-10-18 2002-12-17 Magic Corporation Post passivation interconnection schemes on top of the IC chips
US7405149B1 (en) * 1998-12-21 2008-07-29 Megica Corporation Post passivation method for semiconductor chip or wafer
US7271489B2 (en) 2003-10-15 2007-09-18 Megica Corporation Post passivation interconnection schemes on top of the IC chips
US7902679B2 (en) 2001-03-05 2011-03-08 Megica Corporation Structure and manufacturing method of a chip scale package with low fabrication cost, fine pitch and high reliability solder bump
US7932603B2 (en) 2001-12-13 2011-04-26 Megica Corporation Chip structure and process for forming the same
TW584950B (en) 2001-12-31 2004-04-21 Megic Corp Chip packaging structure and process thereof
US6673698B1 (en) 2002-01-19 2004-01-06 Megic Corporation Thin film semiconductor package utilizing a glass substrate with composite polymer/metal interconnect layers
TW544882B (en) 2001-12-31 2003-08-01 Megic Corp Chip package structure and process thereof
TW503496B (en) * 2001-12-31 2002-09-21 Megic Corp Chip packaging structure and manufacturing process of the same
US6777318B2 (en) * 2002-08-16 2004-08-17 Taiwan Semiconductor Manufacturing Company Aluminum/copper clad interconnect layer for VLSI applications
US6963138B2 (en) * 2003-02-03 2005-11-08 Lsi Logic Corporation Dielectric stack
JP4357862B2 (en) * 2003-04-09 2009-11-04 シャープ株式会社 Semiconductor device
US7566964B2 (en) * 2003-04-10 2009-07-28 Agere Systems Inc. Aluminum pad power bus and signal routing for integrated circuit devices utilizing copper technology interconnect structures
US7087927B1 (en) * 2003-07-22 2006-08-08 National Semiconductor Corporation Semiconductor die with an editing structure
US6937047B2 (en) 2003-08-05 2005-08-30 Freescale Semiconductor, Inc. Integrated circuit with test pad structure and method of testing
US7459790B2 (en) 2003-10-15 2008-12-02 Megica Corporation Post passivation interconnection schemes on top of the IC chips
JP2005175415A (en) * 2003-12-05 2005-06-30 Taiwan Semiconductor Manufacturing Co Ltd Integrated circuit device and its manufacturing method
US7394161B2 (en) * 2003-12-08 2008-07-01 Megica Corporation Chip structure with pads having bumps or wirebonded wires formed thereover or used to be tested thereto
US20050136664A1 (en) * 2003-12-22 2005-06-23 Taiwan Semiconductor Manufacturing Co. Novel process for improved hot carrier injection
US7629689B2 (en) * 2004-01-22 2009-12-08 Kawasaki Microelectronics, Inc. Semiconductor integrated circuit having connection pads over active elements
JP4242336B2 (en) * 2004-02-05 2009-03-25 パナソニック株式会社 Semiconductor device
US8022544B2 (en) 2004-07-09 2011-09-20 Megica Corporation Chip structure
US7465654B2 (en) * 2004-07-09 2008-12-16 Megica Corporation Structure of gold bumps and gold conductors on one IC die and methods of manufacturing the structures
US7452803B2 (en) * 2004-08-12 2008-11-18 Megica Corporation Method for fabricating chip structure
US7355282B2 (en) * 2004-09-09 2008-04-08 Megica Corporation Post passivation interconnection process and structures
US8008775B2 (en) * 2004-09-09 2011-08-30 Megica Corporation Post passivation interconnection structures
US7833896B2 (en) * 2004-09-23 2010-11-16 Taiwan Semiconductor Manufacturing Company, Ltd. Aluminum cap for reducing scratch and wire-bond bridging of bond pads
US7521805B2 (en) * 2004-10-12 2009-04-21 Megica Corp. Post passivation interconnection schemes on top of the IC chips
US7547969B2 (en) 2004-10-29 2009-06-16 Megica Corporation Semiconductor chip with passivation layer comprising metal interconnect and contact pads
CN100362657C (en) * 2004-12-22 2008-01-16 中芯国际集成电路制造(上海)有限公司 Inner connected bonding pads of semiconductor IC
US7241636B2 (en) 2005-01-11 2007-07-10 Freescale Semiconductor, Inc. Method and apparatus for providing structural support for interconnect pad while allowing signal conductance
US7247552B2 (en) * 2005-01-11 2007-07-24 Freescale Semiconductor, Inc. Integrated circuit having structural support for a flip-chip interconnect pad and method therefor
US7196428B2 (en) * 2005-02-15 2007-03-27 Taiwan Semiconductor Manufacturing Company, Ltd. Bond pad structure for integrated circuit chip
US20060244156A1 (en) * 2005-04-18 2006-11-02 Tao Cheng Bond pad structures and semiconductor devices using the same
JP4714502B2 (en) * 2005-04-26 2011-06-29 パナソニック株式会社 Solid-state imaging device
TWI330863B (en) 2005-05-18 2010-09-21 Megica Corp Semiconductor chip with coil element over passivation layer
CN1901161B (en) 2005-07-22 2010-10-27 米辑电子股份有限公司 Method for fabricating a circuitry component by continuous electroplating and circuitry component structure
US8319343B2 (en) * 2005-09-21 2012-11-27 Agere Systems Llc Routing under bond pad for the replacement of an interconnect layer
US7473999B2 (en) * 2005-09-23 2009-01-06 Megica Corporation Semiconductor chip and process for forming the same
US7952206B2 (en) * 2005-09-27 2011-05-31 Agere Systems Inc. Solder bump structure for flip chip semiconductor devices and method of manufacture therefore
US7397121B2 (en) 2005-10-28 2008-07-08 Megica Corporation Semiconductor chip with post-passivation scheme formed over passivation layer
US7741716B1 (en) * 2005-11-08 2010-06-22 Altera Corporation Integrated circuit bond pad structures
US8552560B2 (en) * 2005-11-18 2013-10-08 Lsi Corporation Alternate pad structures/passivation inegration schemes to reduce or eliminate IMC cracking in post wire bonded dies during Cu/Low-K BEOL processing
TWI339419B (en) * 2005-12-05 2011-03-21 Megica Corp Semiconductor chip
JP4663510B2 (en) * 2005-12-21 2011-04-06 パナソニック株式会社 Semiconductor device
US20070176292A1 (en) * 2006-01-27 2007-08-02 Taiwan Semiconductor Manufacturing Co., Ltd. Bonding pad structure
US8836146B2 (en) * 2006-03-02 2014-09-16 Qualcomm Incorporated Chip package and method for fabricating the same
US7592710B2 (en) * 2006-03-03 2009-09-22 Taiwan Semiconductor Manufacturing Company, Ltd. Bond pad structure for wire bonding
US7808117B2 (en) * 2006-05-16 2010-10-05 Freescale Semiconductor, Inc. Integrated circuit having pads and input/output (I/O) cells
US8420520B2 (en) * 2006-05-18 2013-04-16 Megica Corporation Non-cyanide gold electroplating for fine-line gold traces and gold pads
US8022552B2 (en) 2006-06-27 2011-09-20 Megica Corporation Integrated circuit and method for fabricating the same
US8421227B2 (en) * 2006-06-28 2013-04-16 Megica Corporation Semiconductor chip structure
TWI370515B (en) * 2006-09-29 2012-08-11 Megica Corp Circuit component
US7524731B2 (en) * 2006-09-29 2009-04-28 Freescale Semiconductor, Inc. Process of forming an electronic device including an inductor
US7397127B2 (en) * 2006-10-06 2008-07-08 Taiwan Semiconductor Manufacturing Co., Ltd. Bonding and probing pad structures
US8193636B2 (en) 2007-03-13 2012-06-05 Megica Corporation Chip assembly with interconnection by metal bump
US7847404B1 (en) * 2007-03-29 2010-12-07 Integrated Device Technology, Inc. Circuit board assembly and packaged integrated circuit device with power and ground channels
US7566648B2 (en) * 2007-04-22 2009-07-28 Freescale Semiconductor Inc. Method of making solder pad
US8030775B2 (en) 2007-08-27 2011-10-04 Megica Corporation Wirebond over post passivation thick metal
US7888257B2 (en) * 2007-10-10 2011-02-15 Agere Systems Inc. Integrated circuit package including wire bonds
US8183698B2 (en) * 2007-10-31 2012-05-22 Agere Systems Inc. Bond pad support structure for semiconductor device
US8274146B2 (en) * 2008-05-30 2012-09-25 Freescale Semiconductor, Inc. High frequency interconnect pad structure
US20100013109A1 (en) * 2008-07-21 2010-01-21 Taiwan Semiconductor Manufacturing Co., Ltd. Fine pitch bond pad structure
US8581423B2 (en) 2008-11-17 2013-11-12 Taiwan Semiconductor Manufacturing Company, Ltd. Double solid metal pad with reduced area
JP5486376B2 (en) 2010-03-31 2014-05-07 ルネサスエレクトロニクス株式会社 Semiconductor device
JP5253455B2 (en) * 2010-06-01 2013-07-31 三菱電機株式会社 Power semiconductor device
US8896124B2 (en) 2011-04-04 2014-11-25 Nxp B.V. Via network structures and method therefor
CN102760726B (en) * 2011-04-27 2015-04-01 中芯国际集成电路制造(上海)有限公司 Semiconductor detection structure, as well as forming method and detection method thereof
US8994181B2 (en) * 2011-08-18 2015-03-31 Taiwan Semiconductor Manufacturing Company, Ltd. Bond pad structure to reduce bond pad corrosion
CN102364681B (en) * 2011-10-25 2016-09-14 上海华虹宏力半导体制造有限公司 Pad, there is the SOI device of pad
US20130320522A1 (en) * 2012-05-30 2013-12-05 Taiwan Semiconductor Manufacturing Company, Ltd. Re-distribution Layer Via Structure and Method of Making Same
TWI566361B (en) * 2012-06-06 2017-01-11 聯華電子股份有限公司 Integrated circuit structure, back side illumination image sensor and integrated circuit process thereof
US20130328151A1 (en) * 2012-06-07 2013-12-12 Ching-Hung Kao Integrated circuit structure, back side illumination image sensor and integrated circuit process thereof
US9536833B2 (en) 2013-02-01 2017-01-03 Mediatek Inc. Semiconductor device allowing metal layer routing formed directly under metal pad
CN103972215B (en) * 2013-02-01 2017-10-27 联发科技股份有限公司 Semiconductor device
US9455226B2 (en) 2013-02-01 2016-09-27 Mediatek Inc. Semiconductor device allowing metal layer routing formed directly under metal pad
JP2016028409A (en) * 2014-07-09 2016-02-25 住友電気工業株式会社 Electronic device
US10170419B2 (en) 2016-06-22 2019-01-01 International Business Machines Corporation Biconvex low resistance metal wire
TWI634633B (en) * 2016-09-14 2018-09-01 世界先進積體電路股份有限公司 Bonding pad structure and method for manufacturing the same
US9929114B1 (en) 2016-11-02 2018-03-27 Vanguard International Semiconductor Corporation Bonding pad structure having island portions and method for manufacturing the same
US10313157B2 (en) * 2017-04-25 2019-06-04 Realtek Semiconductor Corp. Apparatus and method for multiplexing multi-lane multi-mode data transport
US11119962B2 (en) 2017-04-25 2021-09-14 Realtek Semiconductor Corp. Apparatus and method for multiplexing data transport by switching different data protocols through a common bond pad
US10529664B2 (en) * 2018-05-21 2020-01-07 Advanced Semiconductor Engineering, Inc. Electronic device and method of manufacturing the same
WO2020098623A1 (en) * 2018-11-12 2020-05-22 Changxin Memory Technologies, Inc. Semiconductor device, pad structure and fabrication method thereof
US20220285724A1 (en) 2019-08-09 2022-09-08 Idemitsu Kosan Co., Ltd. Method for producing solid electrolyte
KR20210098582A (en) 2020-01-31 2021-08-11 삼성전자주식회사 Semiconductor devices

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59181041A (en) * 1983-03-31 1984-10-15 Toshiba Corp Semiconductor integrated circuit device
JPS6074658A (en) * 1983-09-30 1985-04-26 Toshiba Corp Semiconductor ic device
EP0291014A2 (en) * 1987-05-15 1988-11-17 Kabushiki Kaisha Toshiba Semiconductor device in which wiring layer is formed below bonding pad
EP1069615A2 (en) * 1999-07-13 2001-01-17 Shinko Electric Industries Co. Ltd. Semiconductor device
US6239494B1 (en) * 1999-04-21 2001-05-29 Advanced Micro Devices, Inc. Wire bonding CU interconnects
US20010045670A1 (en) * 2000-05-29 2001-11-29 Matsushita Electric Industrial Co., Ltd. Semiconductor device
US20020005582A1 (en) * 1998-08-11 2002-01-17 Takeshi Nogami Pad structure for copper interconnection and its formation

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5554940A (en) 1994-07-05 1996-09-10 Motorola, Inc. Bumped semiconductor device and method for probing the same
US5514892A (en) 1994-09-30 1996-05-07 Motorola, Inc. Electrostatic discharge protection device
US5506499A (en) 1995-06-05 1996-04-09 Neomagic Corp. Multiple probing of an auxilary test pad which allows for reliable bonding to a primary bonding pad
US6144100A (en) 1997-06-05 2000-11-07 Texas Instruments Incorporated Integrated circuit with bonding layer over active circuitry
US6124198A (en) * 1998-04-22 2000-09-26 Cvc, Inc. Ultra high-speed chip interconnect using free-space dielectrics
US6232662B1 (en) 1998-07-14 2001-05-15 Texas Instruments Incorporated System and method for bonding over active integrated circuits
KR100269540B1 (en) * 1998-08-28 2000-10-16 윤종용 Method for manufacturing chip scale packages at wafer level
US6495442B1 (en) * 2000-10-18 2002-12-17 Magic Corporation Post passivation interconnection schemes on top of the IC chips
US6383916B1 (en) * 1998-12-21 2002-05-07 M. S. Lin Top layers of metal for high performance IC's
JP3727818B2 (en) * 1999-03-19 2005-12-21 株式会社東芝 Wiring structure of semiconductor device and method for forming the same
JP4037561B2 (en) * 1999-06-28 2008-01-23 株式会社東芝 Manufacturing method of semiconductor device
US6291331B1 (en) * 1999-10-04 2001-09-18 Taiwan Semiconductor Manufacturing Company Re-deposition high compressive stress PECVD oxide film after IMD CMP process to solve more than 5 metal stack via process IMD crack issue
US6303459B1 (en) 1999-11-15 2001-10-16 Taiwan Semiconductor Manufacturing Company Integration process for Al pad
GB2364170B (en) 1999-12-16 2002-06-12 Lucent Technologies Inc Dual damascene bond pad structure for lowering stress and allowing circuitry under pads and a process to form the same
US6841862B2 (en) * 2000-06-30 2005-01-11 Nec Corporation Semiconductor package board using a metal base
US6372661B1 (en) * 2000-07-14 2002-04-16 Taiwan Semiconductor Manufacturing Company Method to improve the crack resistance of CVD low-k dielectric constant material
US6399997B1 (en) * 2000-08-01 2002-06-04 Megic Corporation High performance system-on-chip using post passivation process and glass substrates
JP3977578B2 (en) * 2000-09-14 2007-09-19 株式会社東芝 Semiconductor device and manufacturing method
US6710425B2 (en) * 2001-04-26 2004-03-23 Zeevo, Inc. Structure to increase density of MIM capacitors between adjacent metal layers in an integrated circuit

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59181041A (en) * 1983-03-31 1984-10-15 Toshiba Corp Semiconductor integrated circuit device
JPS6074658A (en) * 1983-09-30 1985-04-26 Toshiba Corp Semiconductor ic device
EP0291014A2 (en) * 1987-05-15 1988-11-17 Kabushiki Kaisha Toshiba Semiconductor device in which wiring layer is formed below bonding pad
US20020005582A1 (en) * 1998-08-11 2002-01-17 Takeshi Nogami Pad structure for copper interconnection and its formation
US6239494B1 (en) * 1999-04-21 2001-05-29 Advanced Micro Devices, Inc. Wire bonding CU interconnects
EP1069615A2 (en) * 1999-07-13 2001-01-17 Shinko Electric Industries Co. Ltd. Semiconductor device
US20010045670A1 (en) * 2000-05-29 2001-11-29 Matsushita Electric Industrial Co., Ltd. Semiconductor device

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 009, no. 039 (E - 297) 19 February 1985 (1985-02-19) *
PATENT ABSTRACTS OF JAPAN vol. 009, no. 212 (E - 339) 29 August 1985 (1985-08-29) *

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US6614091B1 (en) 2003-09-02
AU2003218146A8 (en) 2003-09-29
KR20040088584A (en) 2004-10-16
EP1483789B1 (en) 2016-11-16
CN100461397C (en) 2009-02-11
JP4308671B2 (en) 2009-08-05
WO2003079434A2 (en) 2003-09-25
TW200305267A (en) 2003-10-16
CN1639865A (en) 2005-07-13
AU2003218146A1 (en) 2003-09-29
JP2005520342A (en) 2005-07-07
US20040036174A1 (en) 2004-02-26
US20030173637A1 (en) 2003-09-18
KR100979080B1 (en) 2010-08-31
US6846717B2 (en) 2005-01-25
TWI261906B (en) 2006-09-11
EP1483789A2 (en) 2004-12-08

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