WO2003075062A3 - Optical switch with 3d waveguides - Google Patents

Optical switch with 3d waveguides Download PDF

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Publication number
WO2003075062A3
WO2003075062A3 PCT/US2003/006658 US0306658W WO03075062A3 WO 2003075062 A3 WO2003075062 A3 WO 2003075062A3 US 0306658 W US0306658 W US 0306658W WO 03075062 A3 WO03075062 A3 WO 03075062A3
Authority
WO
WIPO (PCT)
Prior art keywords
waveguides
optical
signals
internal reflection
coupled
Prior art date
Application number
PCT/US2003/006658
Other languages
French (fr)
Other versions
WO2003075062A2 (en
WO2003075062A8 (en
Inventor
Roger L Frick
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Priority to JP2003573467A priority Critical patent/JP2005519323A/en
Priority to DE10392348T priority patent/DE10392348T5/en
Priority to AU2003220012A priority patent/AU2003220012A1/en
Publication of WO2003075062A2 publication Critical patent/WO2003075062A2/en
Publication of WO2003075062A3 publication Critical patent/WO2003075062A3/en
Publication of WO2003075062A8 publication Critical patent/WO2003075062A8/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3534—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being diffractive, i.e. a grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
    • G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3576—Temperature or heat actuation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3578—Piezoelectric force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate

Abstract

An optical switch for routing optical signals between optical fibers is shown. Signals are guided internally in an optically transparent substrate (206) by buried waveguides that are directly coupled to the optical fibers. These waveguides form a 3-dimensional optical routing structure internal to the substrate. Signals are coupled between adjacent waveguides by total internal reflection (TIR) at the internal reflection region (213). A moveable diffraction grating (208) is coupled to these optical signals at points of total internal reflection via evanescent coupling. This coupling causes a change in direction of the optical signal (202) and routes the signal to the desired waveguide (210). Known techniques can be used to form the waveguides (204, 210, 214) by writing them with a pulsed laser. Local heating causes a permanent increase in refractive index that forms a single mode waveguide structure. The resulting device has low losses and can be formed by low cost MEMs processes.
PCT/US2003/006658 2002-03-01 2003-03-03 Optical switch with 3d waveguides WO2003075062A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2003573467A JP2005519323A (en) 2002-03-01 2003-03-03 Optical switch having a three-dimensional light guide plate
DE10392348T DE10392348T5 (en) 2002-03-01 2003-03-03 Optical switch with 3D waveguides
AU2003220012A AU2003220012A1 (en) 2002-03-01 2003-03-03 Optical switch with 3d waveguides

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US36094602P 2002-03-01 2002-03-01
US60/360,946 2002-03-01

Publications (3)

Publication Number Publication Date
WO2003075062A2 WO2003075062A2 (en) 2003-09-12
WO2003075062A3 true WO2003075062A3 (en) 2003-11-06
WO2003075062A8 WO2003075062A8 (en) 2003-12-24

Family

ID=27789047

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/006658 WO2003075062A2 (en) 2002-03-01 2003-03-03 Optical switch with 3d waveguides

Country Status (6)

Country Link
US (1) US6987901B2 (en)
JP (1) JP2005519323A (en)
CN (1) CN1316271C (en)
AU (1) AU2003220012A1 (en)
DE (1) DE10392348T5 (en)
WO (1) WO2003075062A2 (en)

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US8515223B2 (en) * 2010-07-30 2013-08-20 Hewlett-Packard Development Company. L.P. Lens
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US9476981B2 (en) 2013-01-08 2016-10-25 Massachusetts Institute Of Technology Optical phased arrays
US9018108B2 (en) 2013-01-25 2015-04-28 Applied Materials, Inc. Low shrinkage dielectric films
JP7133552B2 (en) * 2016-12-16 2022-09-08 ザ・チャールズ・スターク・ドレイパ・ラボラトリー・インコーポレイテッド Integrated MEMS switches for selectively coupling light into and out of waveguides
ES2694656A1 (en) * 2017-06-22 2018-12-26 BSH Electrodomésticos España S.A. Component of domestic appliance. (Machine-translation by Google Translate, not legally binding)
KR20240034872A (en) 2018-06-19 2024-03-14 더 리전트 오브 더 유니버시티 오브 캘리포니아 Beam-steering system based on a mems-actuated vertical-coupler array

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QIUDAN X ET AL: "Contra-directional coupling between stacked waveguides using grating couplers", OPTICS COMMUNICATIONS, NORTH-HOLLAND PUBLISHING CO. AMSTERDAM, NL, vol. 144, no. 4-6, 15 December 1997 (1997-12-15), pages 180 - 182, XP004098863, ISSN: 0030-4018 *

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CN1650210A (en) 2005-08-03
WO2003075062A2 (en) 2003-09-12
US6987901B2 (en) 2006-01-17
JP2005519323A (en) 2005-06-30
CN1316271C (en) 2007-05-16
AU2003220012A8 (en) 2003-09-16
DE10392348T5 (en) 2005-03-03
US20030223681A1 (en) 2003-12-04
WO2003075062A8 (en) 2003-12-24

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