WO2003023368A8 - Signal processing method for in-situ, scanned-beam particle monitoring - Google Patents

Signal processing method for in-situ, scanned-beam particle monitoring

Info

Publication number
WO2003023368A8
WO2003023368A8 PCT/US2002/028698 US0228698W WO03023368A8 WO 2003023368 A8 WO2003023368 A8 WO 2003023368A8 US 0228698 W US0228698 W US 0228698W WO 03023368 A8 WO03023368 A8 WO 03023368A8
Authority
WO
WIPO (PCT)
Prior art keywords
particle
pulse
scanned
situ
signal processing
Prior art date
Application number
PCT/US2002/028698
Other languages
French (fr)
Other versions
WO2003023368A1 (en
Inventor
Michel P Bonin
Aaron Stibbich
Donald J Holve
Original Assignee
Inficon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to EP02798193A priority Critical patent/EP1432972A1/en
Application filed by Inficon Inc filed Critical Inficon Inc
Priority to KR1020047003298A priority patent/KR100934057B1/en
Priority to JP2003527394A priority patent/JP4090433B2/en
Publication of WO2003023368A1 publication Critical patent/WO2003023368A1/en
Publication of WO2003023368A8 publication Critical patent/WO2003023368A8/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
    • G01N15/0211—Investigating a scatter or diffraction pattern
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
    • G01N15/0211—Investigating a scatter or diffraction pattern
    • G01N2015/0216—Investigating a scatter or diffraction pattern from fluctuations of diffraction pattern

Abstract

A novel method for analyzing the pulse train resulting from a scanned beam particle monitor is described. The method enhances signal-to-noise ratio and significantly reduces particle false alarm rate. Performed in the time domain, the method filters noise pulses that do not occur at the scanner frequency. The analysis further identifies particle-pulse-envelopes (PPE's) by performing a forward-looking and backward-looking autocorrelation. Gaussian fits are subsequently applied to identified particle-pulse envelopes, to determine particle characteristics, such as size and speed.
PCT/US2002/028698 2001-09-07 2002-09-09 Signal processing method for in-situ, scanned-beam particle monitoring WO2003023368A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP02798193A EP1432972A1 (en) 2001-09-07 2002-09-06 Signal processing method for in-situ, scanned-beam particle monitoring
KR1020047003298A KR100934057B1 (en) 2001-09-07 2002-09-09 Signal processing method for co-located scanning line particle monitoring
JP2003527394A JP4090433B2 (en) 2001-09-07 2002-09-09 Signal processing method for particle monitoring of in-situ scanning beam

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US31807301P 2001-09-07 2001-09-07
US60/318,073 2001-09-07

Publications (2)

Publication Number Publication Date
WO2003023368A1 WO2003023368A1 (en) 2003-03-20
WO2003023368A8 true WO2003023368A8 (en) 2004-07-01

Family

ID=23236516

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/028698 WO2003023368A1 (en) 2001-09-07 2002-09-09 Signal processing method for in-situ, scanned-beam particle monitoring

Country Status (5)

Country Link
US (1) US6906799B2 (en)
EP (1) EP1432972A1 (en)
JP (2) JP4090433B2 (en)
KR (1) KR100934057B1 (en)
WO (1) WO2003023368A1 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2464029A1 (en) * 2004-04-08 2005-10-08 Valery Telfort Non-invasive ventilation monitor
GB0519323D0 (en) * 2005-09-22 2005-11-02 Bann John R Scattering centre detector assembly and method
US7417733B2 (en) * 2006-02-08 2008-08-26 Lam Research Corporation Chamber particle detection system
US7804594B2 (en) * 2006-12-29 2010-09-28 Abbott Laboratories, Inc. Method and apparatus for rapidly counting and identifying biological particles in a flow stream
US8159670B2 (en) 2007-11-05 2012-04-17 Abbott Laboratories Method and apparatus for rapidly counting and identifying biological particles in a flow stream
KR100968352B1 (en) * 2008-01-31 2010-07-08 정철우 Underwater lighting controller
US9066680B1 (en) 2009-10-15 2015-06-30 Masimo Corporation System for determining confidence in respiratory rate measurements
US9724016B1 (en) 2009-10-16 2017-08-08 Masimo Corp. Respiration processor
DE112010004682T5 (en) 2009-12-04 2013-03-28 Masimo Corporation Calibration for multi-level physiological monitors
JP5913787B2 (en) * 2010-02-26 2016-04-27 株式会社堀場製作所 Particle size distribution measuring device
US9307928B1 (en) 2010-03-30 2016-04-12 Masimo Corporation Plethysmographic respiration processor
US10441181B1 (en) 2013-03-13 2019-10-15 Masimo Corporation Acoustic pulse and respiration monitoring system
US10151682B2 (en) * 2015-07-14 2018-12-11 Teilch Llc Airborne particle measuring device
EP3279635B1 (en) 2016-08-04 2022-06-01 Malvern Panalytical Limited Method, processor and machine-readable, non-transient storage medium for characterising particles suspended in a fluid dispersant
JP6742435B2 (en) * 2016-12-08 2020-08-19 東京エレクトロン株式会社 Signal processing method and program
US20210005436A1 (en) * 2019-07-01 2021-01-07 Applied Materials, Inc. Real-time detection of particulate matter during deposition chamber manufacturing

Family Cites Families (85)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4473296A (en) 1978-05-03 1984-09-25 Ppm, Inc. System and method and apparatus for a continuous aerosol monitor (CAM) using electro-optical weighing for general aerosols
US4260258A (en) 1978-08-14 1981-04-07 Pacific Scientific Company Compact, rugged sensor for optical measurement of the size of particles suspended in a fluid
JPS60100035A (en) 1983-11-04 1985-06-03 Kyoto Daiichi Kagaku:Kk Measuring method and apparatus using scattered light
US4571079A (en) 1983-12-29 1986-02-18 Particle Measuring Systems, Inc. Aerosol sampling device and method with improved sample flow characteristics
US4636075A (en) 1984-08-22 1987-01-13 Particle Measuring Systems, Inc. Particle measurement utilizing orthogonally polarized components of a laser beam
US4728190A (en) 1985-10-15 1988-03-01 Particle Measuring Systems, Inc. Device and method for optically detecting particles in a fluid
JPS62100642A (en) * 1985-10-28 1987-05-11 Canon Inc Particle analyzer
USRE33213E (en) 1985-12-10 1990-05-08 High Yield Technology Light scattering particle detector for wafer processing equipment
US4739177A (en) 1985-12-11 1988-04-19 High Yield Technology Light scattering particle detector for wafer processing equipment
US4798465B2 (en) 1986-04-14 1994-08-30 Particle Measuring Syst Particle size detection device having high sensitivity in high molecular scattering environment
US4783599A (en) 1987-02-10 1988-11-08 High Yield Technology Particle detector for flowing liquids with the ability to distinguish bubbles via photodiodes disposed 180° apart
US4906094A (en) 1987-04-23 1990-03-06 Sumitomo Chemical Co. Ltd. Fine particle measuring method and system and a flow cell for use in the system
US4804853A (en) 1987-04-23 1989-02-14 High Yield Technology Compact particle flux monitor
US4812664A (en) 1987-11-12 1989-03-14 High Yield Technology Apparatus for scanning a flat surface to detect defects
US4887213A (en) * 1987-07-31 1989-12-12 The Titan Corporation System for, and methods of, providing for a determination of the movement of an airborne vehicle in the atmosphere
US4792199A (en) 1987-10-27 1988-12-20 High Yield Technology System for detection of extremely small particles in a low pressure environment
US4827144A (en) * 1987-11-30 1989-05-02 Fuji Electric Co., Ltd. Particle detecting device with particle scanning
US4825094A (en) 1988-02-04 1989-04-25 High Yield Technology Real time particle fallout monitor with tubular structure
US5061070A (en) 1988-04-22 1991-10-29 International Business Machines Corporation Particulate inspection of fluids using interferometric light measurements
US4885473A (en) 1988-04-29 1989-12-05 Shofner Engineering Associates, Inc. Method and apparatus for detecting particles in a fluid using a scanning beam
US4896048A (en) 1988-05-27 1990-01-23 High Yield Technology Scattering-type particle detection device for use in high temperature process chambers
US4917496A (en) 1988-07-11 1990-04-17 Pacific Scientific Company Particle size measuring instrument with direct scattered light detection
EP0361770A3 (en) 1988-09-30 1991-03-20 Kowa Company Ltd. Particle measuring method and apparatus
US4894529A (en) 1988-11-03 1990-01-16 High Yield Technology, Inc. Real-time particle counter for liquids with nebulizer and dryer
US4920275A (en) 1988-12-30 1990-04-24 Canon Kabushiki Kaisha Particle measuring device with elliptically-shaped scanning beam
US4984889A (en) 1989-03-10 1991-01-15 Pacific Scientific Company Particle size measuring system with coincidence detection
CA1324894C (en) 1989-03-31 1993-12-07 Maritime Scientific Services Ltd. Method and apparatus for the identification of particles
US5083500A (en) * 1989-04-10 1992-01-28 Superior Environmental Services, Inc. Radon treatment system and method
US5033851A (en) 1989-05-30 1991-07-23 Pacific Scientific Company Light scattering method and apparatus for detecting particles in liquid sample
US5011286A (en) 1989-08-03 1991-04-30 Met One, Inc. Multisensor particle counter utilizing a single energy source
US5229839A (en) 1989-10-06 1993-07-20 National Aerospace Laboratory Of Science & Technology Agency Method and apparatus for measuring the size of a single fine particle and the size distribution of fine particles
US5061065A (en) 1989-10-20 1991-10-29 Pacific Scientific Company Particle contamination detection in fluids through the external section of a laser
US5092675A (en) 1989-11-14 1992-03-03 Pacific Scientific Company Vacuum line particle detector with slab laser
US5085500A (en) 1989-11-28 1992-02-04 Tsi Incorporated Non-imaging laser particle counter
US5153675A (en) * 1990-02-22 1992-10-06 Nicolet Instrument Corporation Modular optical system for Fourier transform infrared spectrometer
US5055698A (en) 1990-04-03 1991-10-08 High Yield Technology, Inc. Real-time particle sensor for disk drives
JP2899359B2 (en) 1990-05-08 1999-06-02 興和株式会社 Method and apparatus for measuring particles in fluid
US5083865A (en) 1990-05-11 1992-01-28 Applied Materials, Inc. Particle monitor system and method
JP2899360B2 (en) 1990-05-21 1999-06-02 興和株式会社 Method and apparatus for measuring particles in fluid
GB9014015D0 (en) 1990-06-23 1990-08-15 Dennis Peter N J Improvements in or relating to smoke detectors
US5037202A (en) 1990-07-02 1991-08-06 International Business Machines Corporation Measurement of size and refractive index of particles using the complex forward-scattered electromagnetic field
JPH0810188B2 (en) 1990-08-03 1996-01-31 株式会社日立製作所 Particulate matter analyzer and analysis method, ultrapure water production apparatus, semiconductor production apparatus, high-purity gas production apparatus
DE9012816U1 (en) 1990-09-07 1990-11-08 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De
US5132548A (en) 1990-09-14 1992-07-21 High Yield Technology High sensitivity, large detection area particle sensor for vacuum applications
US5266798A (en) 1990-09-14 1993-11-30 High Yield Technology High sensitivity, large detection area particle sensor for vacuum applications
DE69129260T2 (en) 1990-11-03 1998-11-19 Horiba Ltd Device for measuring the particle size distribution
US5282151A (en) 1991-02-28 1994-01-25 Particle Measuring Systems, Inc. Submicron diameter particle detection utilizing high density array
US5146098A (en) 1991-04-05 1992-09-08 Vlsi Technology, Inc. Ion beam contamination sensor
US5256886A (en) 1991-04-30 1993-10-26 E. I. Du Pont De Nemours And Company Apparatus for optically detecting contamination in particles of low optical-loss material
JP3102925B2 (en) * 1991-09-20 2000-10-23 シスメックス株式会社 Particle analyzer
US5548395A (en) 1991-09-20 1996-08-20 Toa Medical Electronics Co., Ltd. Particle analyzer
US5262841A (en) 1991-10-16 1993-11-16 Tsi Incorporated Vacuum particle detector
US5271264A (en) 1991-11-27 1993-12-21 Applied Materials, Inc. Method of in-situ particle monitoring in vacuum systems
USH1183H (en) 1991-12-19 1993-05-04 Laser scanner method for determining number and size of particles
US5192870A (en) 1992-01-14 1993-03-09 International Business Machines Corporation Optical submicron aerosol particle detector
US5247188A (en) 1992-01-23 1993-09-21 High Yield Technology Concentrator funnel for vacuum line particle monitors
US5235625A (en) 1992-01-27 1993-08-10 High Yield Technology Method for synchronizing particle counters to external events
JPH05209822A (en) 1992-01-30 1993-08-20 Hitachi Ltd Particle counter
US5212580A (en) 1992-02-12 1993-05-18 High Yield Technology Low cost stage for raster scanning of semiconductor wafers
US5255089A (en) 1992-03-26 1993-10-19 International Business Machines Corporation Portable particle detector assembly
JP2722362B2 (en) 1992-03-27 1998-03-04 三井金属鉱業株式会社 Method and apparatus for measuring particle or defect size information
JP3318397B2 (en) 1992-08-27 2002-08-26 興和株式会社 Particle measurement device
JP2720340B2 (en) 1992-10-11 1998-03-04 株式会社堀場製作所 Laser diffraction particle size distribution measurement method
US5360980A (en) 1993-02-26 1994-11-01 High Yield Technology Structure and method for providing a gas purge for a vacuum particle sensor installed in a corrosive or coating environment
US5456102A (en) 1993-03-19 1995-10-10 Moorehead; Jack Method and apparatus for particle counting and counter calibration
US5481357A (en) 1994-03-03 1996-01-02 International Business Machines Corporation Apparatus and method for high-efficiency, in-situ particle detection
US5347138A (en) 1993-04-01 1994-09-13 High Yield Technology In situ real time particle monitor for a sputter coater chamber
JPH0749303A (en) 1993-04-01 1995-02-21 High Yield Technol Inc Particle sensor and particle detecting method
US5637881A (en) 1993-04-01 1997-06-10 High Yield Technology, Inc. Method to detect non-spherical particles using orthogonally polarized light
US5459569A (en) 1993-04-21 1995-10-17 Particle Measuring Systems, Inc. Nonintrusive modular particle detecting device
US5436465A (en) 1993-05-13 1995-07-25 High Yield Technology, Inc. Modular particle monitor for vacuum process equipment
US5406830A (en) 1993-05-14 1995-04-18 High Yield Technology Particle monitor for loadlock soft pump lines
US5424558A (en) 1993-05-17 1995-06-13 High Yield Technology, Inc. Apparatus and a method for dynamically tuning a particle sensor in response to varying process conditions
US5463460A (en) 1993-07-08 1995-10-31 Applied Materials, Inc. Particle monitoring sensor
US5438420A (en) 1993-08-09 1995-08-01 Vickers, Incorporated Monitoring of fluid contamination level wherein the light energy is focused on the fluid passage means
JP2529661B2 (en) 1993-08-20 1996-08-28 アネルバ株式会社 Particle detector
US5534706A (en) 1994-03-07 1996-07-09 High Yield Technology, Inc. Particle monitor for throttled pumping systems
US6072187A (en) 1994-07-06 2000-06-06 Fisher Pierce Co. Apparatus and method for reducing stray laser light in particle sensors using a narrow band filter
US5751422A (en) 1996-02-26 1998-05-12 Particle Measuring Systems, Inc. In-situ particle detection utilizing optical coupling
JP2982720B2 (en) 1996-04-26 1999-11-29 日本電気株式会社 Particle monitor device and dust-free process device equipped with the same
US5671046A (en) 1996-07-01 1997-09-23 Particle Measuring Systems, Inc. Device and method for optically detecting particles in a free liquid stream
US5943130A (en) 1996-10-21 1999-08-24 Insitec, Inc. In situ sensor for near wafer particle monitoring in semiconductor device manufacturing equipment
US6034769A (en) 1997-06-27 2000-03-07 Yufa; Aleksandr L. Method and device for counting and measuring particles
US5939727A (en) 1997-12-22 1999-08-17 Caterpillar Inc. Contamination sensor
US6125789A (en) 1998-01-30 2000-10-03 Applied Materials, Inc. Increasing the sensitivity of an in-situ particle monitor

Also Published As

Publication number Publication date
KR20040047806A (en) 2004-06-05
WO2003023368A1 (en) 2003-03-20
JP4090433B2 (en) 2008-05-28
JP2005502875A (en) 2005-01-27
JP2008122395A (en) 2008-05-29
US20030076494A1 (en) 2003-04-24
EP1432972A1 (en) 2004-06-30
KR100934057B1 (en) 2009-12-24
US6906799B2 (en) 2005-06-14

Similar Documents

Publication Publication Date Title
WO2003023368A8 (en) Signal processing method for in-situ, scanned-beam particle monitoring
US4129276A (en) Technique for the detection of flat wheels on railroad cars by acoustical measuring means
EP1067400A3 (en) Method and apparatus for adaptive wall filtering in spectral doppler ultrasound imaging
EP1852823A3 (en) Signal processing method and apparatus and recording medium
CA2166239A1 (en) Speech Presence Detector and Method Therefor
WO2004006222A3 (en) Method and apparatus for classifying sound signals
CA2450945A1 (en) System and method for the detection and removal of radio frequency noise artifact from biopotential signals
WO2002073601B1 (en) Method and device for determining the quality of a speech signal
DE60103008D1 (en) METHOD AND DEVICE FOR ECHO REDUCTION
CA2133071A1 (en) Method and apparatus for encoding/decoding of background sounds
CA2424276A1 (en) Method and apparatus for signal integrity verification
DE60203543T2 (en) Method for detecting the quantization of spectra
JP4339433B2 (en) Data recovery apparatus and method for bar code scanner
US4949318A (en) Hydroacoustic sonar equipment
EP1548707A3 (en) Noise eliminating apparatus and receiver
Flanagan et al. Robust distributed detection using low power acoustic sensors
WO2003009738A3 (en) Method and apparatus for bone diagnosis
EP1063808A3 (en) Method and device of generation of one reference event from a frame of information
EP1225456A3 (en) System and method for the monitoring of a space surrounded by walls
WO2005050889A3 (en) Method and apparatus for packet detection processing
WO2001081948A3 (en) Low noise to signal evaluation
US4646572A (en) Method for non-destructive testing with guided waves
JPH07100136A (en) Ultrasonography and ultrasonograph for bone
JP2639353B2 (en) Acoustic signal detection device
RU96117159A (en) METHOD FOR DETECTING PULSE RADIO SIGNALS ON THE BACKGROUND OF NARROWBAND INTERFERENCE

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): JP

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): DE GB

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2003527394

Country of ref document: JP

Ref document number: 1020047003298

Country of ref document: KR

WWE Wipo information: entry into national phase

Ref document number: 2002798193

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 2002798193

Country of ref document: EP

CFP Corrected version of a pamphlet front page
CR1 Correction of entry in section i

Free format text: IN PCT GAZETTE 12/2003 UNDER (22) REPLACE "06 SEPTEMBER 2002 (06.09.2002)" BY "09 SEPTEMBER 2002 (09.09.2002)"