WO2003021338A2 - Blazed grating light valve - Google Patents
Blazed grating light valve Download PDFInfo
- Publication number
- WO2003021338A2 WO2003021338A2 PCT/US2002/023854 US0223854W WO03021338A2 WO 2003021338 A2 WO2003021338 A2 WO 2003021338A2 US 0223854 W US0223854 W US 0223854W WO 03021338 A2 WO03021338 A2 WO 03021338A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- elongated elements
- elongated
- elements
- light modulator
- diffraction
- Prior art date
Links
- 239000000758 substrate Substances 0.000 claims abstract description 44
- 238000000034 method Methods 0.000 claims description 21
- 239000012858 resilient material Substances 0.000 claims description 21
- 238000005530 etching Methods 0.000 claims description 16
- 238000000151 deposition Methods 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- BLIQUJLAJXRXSG-UHFFFAOYSA-N 1-benzyl-3-(trifluoromethyl)pyrrolidin-1-ium-3-carboxylate Chemical compound C1C(C(=O)O)(C(F)(F)F)CCN1CC1=CC=CC=C1 BLIQUJLAJXRXSG-UHFFFAOYSA-N 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 4
- 241000269627 Amphiuma means Species 0.000 claims 2
- 235000012239 silicon dioxide Nutrition 0.000 claims 2
- 239000000377 silicon dioxide Substances 0.000 claims 2
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 4
- 230000002441 reversible effect Effects 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
Definitions
- the preferred blazed grating light valve 20 includes a substrate 22, elongated elements 24, first posts 26 (one shown), and second posts 28 (one shown).
- the substrate 22 includes a first conductor 30.
- the elongated elements 24 each preferably include a first surface 32 and a second surface 34, both of which are reflective.
- the first and second surfaces, 32 and 34 form a blaze profile 36 for each of the elongated elements 24.
- One of the first posts 26 and one of the second posts 28 couple each of the elongated elements 24 to the substrate 22.
- Each of the elongated elements 24 are also preferably coupled to the substrate 22 at first and second ends (not shown) of the elongated element 24.
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02756707A EP1417528A4 (en) | 2001-08-15 | 2002-07-26 | Blazed grating light valve |
JP2003525363A JP4339113B2 (en) | 2001-08-15 | 2002-07-26 | Brazed grating light valve |
AU2002322697A AU2002322697A1 (en) | 2001-08-15 | 2002-07-26 | Blazed grating light valve |
KR10-2004-7002127A KR20040032908A (en) | 2001-08-15 | 2002-07-26 | Blazed grating light valve |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/930,838 US6829092B2 (en) | 2001-08-15 | 2001-08-15 | Blazed grating light valve |
US09/930,838 | 2001-08-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2003021338A2 true WO2003021338A2 (en) | 2003-03-13 |
WO2003021338A3 WO2003021338A3 (en) | 2003-07-03 |
Family
ID=25459853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2002/023854 WO2003021338A2 (en) | 2001-08-15 | 2002-07-26 | Blazed grating light valve |
Country Status (7)
Country | Link |
---|---|
US (2) | US6829092B2 (en) |
EP (1) | EP1417528A4 (en) |
JP (1) | JP4339113B2 (en) |
KR (1) | KR20040032908A (en) |
CN (1) | CN100378495C (en) |
AU (1) | AU2002322697A1 (en) |
WO (1) | WO2003021338A2 (en) |
Cited By (2)
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JP2006119601A (en) * | 2004-09-24 | 2006-05-11 | Canon Inc | Light modulator and optical apparatus using the same |
US7286292B2 (en) | 2002-12-30 | 2007-10-23 | Sinvent As | Configurable diffractive optical element |
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WO2003060597A2 (en) * | 2001-12-21 | 2003-07-24 | Polychromix Corporation | Method and apparatus providing reduced polarization-dependent loss |
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DE102005018604A1 (en) | 2004-04-29 | 2005-11-24 | Samsung Electro-Mechanics Co., Ltd., Suwon | Open hole-based diffractive light modulator used in e.g. optical memory, has upper micromirror comprising open holes at center, such that it reflects/diffracts incident light based on height difference between upper and lower micromirrors |
KR100722616B1 (en) * | 2004-04-29 | 2007-05-28 | 삼성전기주식회사 | Hybrid spatial optical modulator |
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JP4649914B2 (en) * | 2004-08-31 | 2011-03-16 | ソニー株式会社 | Microelectromechanical element, optical microelectromechanical element, light modulation element, manufacturing method thereof, and laser display |
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US7360893B2 (en) * | 2004-08-31 | 2008-04-22 | 20/10 Perfect Vision Optische Geraete Gmbh | Systems and methods for shaping wavefronts in polychromatic light using phase shifting elements |
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JP4345625B2 (en) * | 2004-09-22 | 2009-10-14 | 株式会社島津製作所 | Diffraction grating |
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JP5100146B2 (en) * | 2006-02-28 | 2012-12-19 | キヤノン株式会社 | Optical element and optical element manufacturing method |
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WO2008108768A1 (en) * | 2007-03-06 | 2008-09-12 | Jeremy Branson | Apparatus for electronically controlled holograms |
CN101295123B (en) * | 2007-04-25 | 2012-07-25 | 中国科学院光电研究院 | Display system based on blazed grating photomodulator |
US7894122B2 (en) * | 2008-02-08 | 2011-02-22 | Meritt Reynolds | Frequency-shifting micro-mechanical optical modulator |
NO333724B1 (en) * | 2009-08-14 | 2013-09-02 | Sintef | A micromechanical series with optically reflective surfaces |
US8182896B2 (en) * | 2009-10-05 | 2012-05-22 | Dri-Design, Llc | Method and apparatus for making optical tiles |
WO2011106554A2 (en) * | 2010-02-24 | 2011-09-01 | The Regents Of The University Of California | High contrast grating based saturable absorber for mode-locked lasers and its applications in passively mode-locked vertical-cavity surface-emitting lasers |
US9967546B2 (en) | 2013-10-29 | 2018-05-08 | Vefxi Corporation | Method and apparatus for converting 2D-images and videos to 3D for consumer, commercial and professional applications |
US20150116458A1 (en) | 2013-10-30 | 2015-04-30 | Barkatech Consulting, LLC | Method and apparatus for generating enhanced 3d-effects for real-time and offline appplications |
US10158847B2 (en) | 2014-06-19 | 2018-12-18 | Vefxi Corporation | Real—time stereo 3D and autostereoscopic 3D video and image editing |
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US9933546B2 (en) * | 2015-09-24 | 2018-04-03 | Baker Hughes, A Ge Company, Llc | Displacement measurements using a multi-cavity sensor |
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Also Published As
Publication number | Publication date |
---|---|
US20030223116A1 (en) | 2003-12-04 |
WO2003021338A3 (en) | 2003-07-03 |
JP4339113B2 (en) | 2009-10-07 |
KR20040032908A (en) | 2004-04-17 |
US20030035215A1 (en) | 2003-02-20 |
EP1417528A2 (en) | 2004-05-12 |
US6896822B2 (en) | 2005-05-24 |
CN1639609A (en) | 2005-07-13 |
AU2002322697A1 (en) | 2003-03-18 |
CN100378495C (en) | 2008-04-02 |
EP1417528A4 (en) | 2005-08-03 |
JP2005521073A (en) | 2005-07-14 |
US6829092B2 (en) | 2004-12-07 |
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