WO2003012828A3 - Systems and methods for measuring properties of conductive layers - Google Patents
Systems and methods for measuring properties of conductive layers Download PDFInfo
- Publication number
- WO2003012828A3 WO2003012828A3 PCT/US2002/028954 US0228954W WO03012828A3 WO 2003012828 A3 WO2003012828 A3 WO 2003012828A3 US 0228954 W US0228954 W US 0228954W WO 03012828 A3 WO03012828 A3 WO 03012828A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- conductive layer
- systems
- contact surface
- methods
- conductive layers
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/14—Measuring resistance by measuring current or voltage obtained from a reference source
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
A pin (10) configured to be disposed within a probe (110) is provided. The probe (110) may be configured to measure a property of a conductive layer. The pin (10) may include a contact surface (12) which may be substantially planar. The pin (10) may also include a first portion (14) extending from the contact surface (12). A cross-sectional area of the first portion, in a direction substantially parallel to the contact surface, may be substantially equal to a surface area of the contact surface (12) across a length of the first portion (14). A system (108) configured to measure a property of a conductive layer is also provided. The system (108) may include a mounting device (112) and at least two probes (110) coupled to the mounting device (112). The probes may be configured to measure the property of a conductive layer. In addition, the mounting device (112) may be configured such that one of the probes (110) may contact the conductive layer during measurement.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US28267601P | 2001-04-09 | 2001-04-09 | |
US60/282,676 | 2001-04-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2003012828A2 WO2003012828A2 (en) | 2003-02-13 |
WO2003012828A3 true WO2003012828A3 (en) | 2003-04-24 |
Family
ID=23082619
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2002/028954 WO2003012828A2 (en) | 2001-04-09 | 2002-04-09 | Systems and methods for measuring properties of conductive layers |
Country Status (2)
Country | Link |
---|---|
US (1) | US6815959B2 (en) |
WO (1) | WO2003012828A2 (en) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9063191B2 (en) * | 2012-02-24 | 2015-06-23 | Power Probe, Inc. | Electrical test device and method |
US7033873B1 (en) * | 2002-09-18 | 2006-04-25 | Advanced Micro Devices, Inc. | Methods of controlling gate electrode doping, and systems for accomplishing same |
TWI229191B (en) * | 2003-03-10 | 2005-03-11 | Inventec Corp | Automatic test method |
US20050253602A1 (en) * | 2004-04-28 | 2005-11-17 | Cram Daniel P | Resilient contact probe apparatus, methods of using and making, and resilient contact probes |
US7511510B2 (en) * | 2005-11-30 | 2009-03-31 | International Business Machines Corporation | Nanoscale fault isolation and measurement system |
US20070256937A1 (en) * | 2006-05-04 | 2007-11-08 | International Business Machines Corporation | Apparatus and method for electrochemical processing of thin films on resistive substrates |
TW200842318A (en) * | 2007-04-24 | 2008-11-01 | Nanya Technology Corp | Method for measuring thin film thickness |
US8350583B2 (en) * | 2009-08-12 | 2013-01-08 | International Business Machines Corporation | Probe-able voltage contrast test structures |
US8399266B2 (en) | 2011-01-25 | 2013-03-19 | International Business Machines Corporation | Test structure for detection of gap in conductive layer of multilayer gate stack |
US9780007B2 (en) | 2012-01-04 | 2017-10-03 | Globalfoundries Inc. | LCR test circuit structure for detecting metal gate defect conditions |
US9030219B2 (en) * | 2012-03-01 | 2015-05-12 | Kla-Tencor Corporation | Variable pressure four-point coated probe pin device and method |
US9435826B2 (en) | 2012-05-08 | 2016-09-06 | Kla-Tencor Corporation | Variable spacing four-point probe pin device and method |
KR20130141245A (en) * | 2012-06-15 | 2013-12-26 | 삼성전기주식회사 | Pin for substrate testing |
JP6266209B2 (en) * | 2012-12-25 | 2018-01-24 | 株式会社エンプラス | Electrical contact and socket for electrical parts |
JP6983093B2 (en) * | 2018-03-27 | 2021-12-17 | 日東電工株式会社 | Resistance measuring device, film manufacturing device and method for manufacturing conductive film |
JP7019536B2 (en) * | 2018-08-31 | 2022-02-15 | 三菱電機株式会社 | Semiconductor device evaluation device and semiconductor device evaluation method |
US11860189B2 (en) | 2019-12-12 | 2024-01-02 | Innova Electronics Corporation | Rotational electrical probe |
SE2251043A1 (en) * | 2022-09-08 | 2024-03-09 | Silex Microsystems Ab | Microstructure inspection device and system and use of the same |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4989154A (en) * | 1987-07-13 | 1991-01-29 | Mitsubishi Petrochemical Company Ltd. | Method of measuring resistivity, and apparatus therefor |
US5214389A (en) * | 1992-01-06 | 1993-05-25 | Motorola, Inc. | Multi-dimensional high-resolution probe for semiconductor measurements including piezoelectric transducer arrangement for controlling probe position |
US5578504A (en) * | 1993-07-16 | 1996-11-26 | Shin-Etsu Handotai Co., Ltd. | Method for determination of resistivity of N-type silicon epitaxial layer |
US6023171A (en) * | 1997-08-13 | 2000-02-08 | International Business Machines Corporation | Dual-contact probe tip for flying probe tester |
US6323667B1 (en) * | 1996-12-27 | 2001-11-27 | Nhk Spring Co., Ltd. | Contact probe unit |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3783375A (en) * | 1973-02-21 | 1974-01-01 | Westinghouse Electric Corp | Means for calibrating a four-probe resistivity measuring device |
US3992073A (en) * | 1975-11-24 | 1976-11-16 | Technical Wire Products, Inc. | Multi-conductor probe |
ZA812893B (en) * | 1980-05-12 | 1982-05-26 | Ncr Co | Integrated circuit package having a plurality of pins for providing external electrical connections |
US4423373A (en) * | 1981-03-16 | 1983-12-27 | Lecroy Research Systems Corporation | Test probe |
US4590422A (en) * | 1981-07-30 | 1986-05-20 | Pacific Western Systems, Inc. | Automatic wafer prober having a probe scrub routine |
US5225771A (en) * | 1988-05-16 | 1993-07-06 | Dri Technology Corp. | Making and testing an integrated circuit using high density probe points |
GB9418183D0 (en) * | 1994-09-09 | 1994-10-26 | Chan Tsing Y A | Non-destructive method for determination of polar molecules on rigid and semi-rigid substrates |
DE19538792C2 (en) * | 1995-10-18 | 2000-08-03 | Ibm | Contact probe arrangement for electrically connecting a test device to the circular connection surfaces of a test object |
JP2000206146A (en) * | 1999-01-19 | 2000-07-28 | Mitsubishi Electric Corp | Probe needle |
US6366103B1 (en) * | 1999-07-06 | 2002-04-02 | David Cheng | Multiple test probe system |
-
2002
- 2002-04-09 US US10/119,377 patent/US6815959B2/en not_active Expired - Lifetime
- 2002-04-09 WO PCT/US2002/028954 patent/WO2003012828A2/en not_active Application Discontinuation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4989154A (en) * | 1987-07-13 | 1991-01-29 | Mitsubishi Petrochemical Company Ltd. | Method of measuring resistivity, and apparatus therefor |
US5214389A (en) * | 1992-01-06 | 1993-05-25 | Motorola, Inc. | Multi-dimensional high-resolution probe for semiconductor measurements including piezoelectric transducer arrangement for controlling probe position |
US5578504A (en) * | 1993-07-16 | 1996-11-26 | Shin-Etsu Handotai Co., Ltd. | Method for determination of resistivity of N-type silicon epitaxial layer |
US6323667B1 (en) * | 1996-12-27 | 2001-11-27 | Nhk Spring Co., Ltd. | Contact probe unit |
US6023171A (en) * | 1997-08-13 | 2000-02-08 | International Business Machines Corporation | Dual-contact probe tip for flying probe tester |
Also Published As
Publication number | Publication date |
---|---|
US20030060092A1 (en) | 2003-03-27 |
US6815959B2 (en) | 2004-11-09 |
WO2003012828A2 (en) | 2003-02-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2003012828A3 (en) | Systems and methods for measuring properties of conductive layers | |
AU2442899A (en) | Fingerprint sensor | |
WO2003100445A3 (en) | Probe for testing a device under test | |
WO2002013232A3 (en) | Measurement of critical dimensions using x-rays | |
WO2005036096A3 (en) | Measuring vector components of an electric field | |
AU2001280869A1 (en) | Test systems for wireless-communications devices | |
AU1933700A (en) | Probe card for probing wafers with raised contact elements | |
NO20033391L (en) | NMR fluid characterization device for use with electrical cable formation test instruments | |
EP1380481A3 (en) | Sensor arrangement | |
EP1408327A3 (en) | Apertured probes for localized measurements of a material's complex permittivity and fabrication method | |
EP1114994A3 (en) | Thermally conductive sensor | |
ATE384306T1 (en) | SENSOR UNIT, ESPECIALLY FOR FINGERPRINT SENSORS | |
AU2117101A (en) | Non-invasive electrical measurement of semiconductor wafers | |
US20100141291A1 (en) | Device including a contact detector | |
EP0849586A3 (en) | Detection of substances on surfaces and electrodes therefor | |
DE69937013D1 (en) | Device for measuring the wavelength dispersion and device for measuring polarization dispersion | |
JP2003168707A5 (en) | ||
FR2774471B1 (en) | DETECTION ELEMENT FOR AN ELECTROCHEMICAL MEASUREMENT SENSOR | |
FR2784606B1 (en) | ACCESSORY FOR MEASUREMENT OR DOSAGE, IN PARTICULAR ELECTROCHEMICAL MEASUREMENT SENSOR | |
DE69839646D1 (en) | INES MEASURING INSTRUMENTS FOR COORDINATE AND SURFACE MEASUREMENTS | |
WO2007063029A3 (en) | Nanoscale fault isolation and measurement system | |
SG135044A1 (en) | Colorimetric test device with reduced error | |
AU2002365465A1 (en) | Measuring probe device and measurement method | |
DE69814351D1 (en) | DEVICE FOR DETERMINING THE PROPERTIES OF AN ELECTRICALLY CONDUCTIVE OBJECT | |
DE59812331D1 (en) | INTERFEROMETRICAL MEASURING DEVICE FOR FORMING MEASUREMENT ON ROUGH SURFACES |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A2 Kind code of ref document: A2 Designated state(s): JP |
|
AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR Kind code of ref document: A2 Designated state(s): AT BE CH CY DE DK ES FI FR GB IE IT LU MC NL PT SE TR |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
122 | Ep: pct application non-entry in european phase | ||
NENP | Non-entry into the national phase |
Ref country code: JP |
|
WWW | Wipo information: withdrawn in national office |
Country of ref document: JP |