WO2003011755A1 - Production of carbon nanotubes - Google Patents
Production of carbon nanotubes Download PDFInfo
- Publication number
- WO2003011755A1 WO2003011755A1 PCT/GB2002/003438 GB0203438W WO03011755A1 WO 2003011755 A1 WO2003011755 A1 WO 2003011755A1 GB 0203438 W GB0203438 W GB 0203438W WO 03011755 A1 WO03011755 A1 WO 03011755A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- plasma
- carbon
- chamber
- catalyst
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/162—Preparation characterised by catalysts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02749069A EP1414744A1 (en) | 2001-07-27 | 2002-07-26 | Production of carbon nanotubes |
KR1020047001223A KR100951013B1 (en) | 2001-07-27 | 2002-07-26 | Production of carbon nanotubes |
US10/484,894 US8715790B2 (en) | 2001-07-27 | 2002-07-26 | Production of carbon nanotubes |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0118276.5A GB0118276D0 (en) | 2001-07-27 | 2001-07-27 | Ropes of CVD grown carbon nanotubes |
GBGB0118279.9A GB0118279D0 (en) | 2001-07-27 | 2001-07-27 | Low temperature growth of catalyic carbon nanotubes |
GB0118276.5 | 2001-07-27 | ||
GB0118341.7 | 2001-07-27 | ||
GBGB0118341.7A GB0118341D0 (en) | 2001-07-27 | 2001-07-27 | Production of carbon nanotubes |
GB0118279.9 | 2001-07-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2003011755A1 true WO2003011755A1 (en) | 2003-02-13 |
WO2003011755B1 WO2003011755B1 (en) | 2003-04-03 |
Family
ID=27256233
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/GB2002/003438 WO2003011755A1 (en) | 2001-07-27 | 2002-07-26 | Production of carbon nanotubes |
Country Status (6)
Country | Link |
---|---|
US (1) | US8715790B2 (en) |
EP (1) | EP1414744A1 (en) |
KR (1) | KR100951013B1 (en) |
CN (1) | CN1325372C (en) |
TW (1) | TWI299320B (en) |
WO (1) | WO2003011755A1 (en) |
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WO2009004346A1 (en) * | 2007-07-03 | 2009-01-08 | Meggitt Aerospace Limited | Carbon-carbon composite |
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US8715790B2 (en) | 2001-07-27 | 2014-05-06 | University Of Surrey | Production of carbon nanotubes |
US9059178B2 (en) | 2010-04-30 | 2015-06-16 | Tokyo Electron Limited | Method for forming carbon nanotubes and carbon nanotube film forming apparatus |
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US20220097086A1 (en) * | 2019-01-17 | 2022-03-31 | Vsparticle Holding B.V. | Switching device, deposition device comprising the switching device, method for switching a fluid flow, and method for depositing particles onto a substrate |
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KR100951013B1 (en) | 2010-04-02 |
EP1414744A1 (en) | 2004-05-06 |
CN1545486A (en) | 2004-11-10 |
TWI299320B (en) | 2008-08-01 |
US8715790B2 (en) | 2014-05-06 |
CN1325372C (en) | 2007-07-11 |
US20040253167A1 (en) | 2004-12-16 |
KR20040043167A (en) | 2004-05-22 |
WO2003011755B1 (en) | 2003-04-03 |
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