WO2003003062A3 - Apparatus and method to distort an optical beam to avoid ionization at an intermediate focus - Google Patents

Apparatus and method to distort an optical beam to avoid ionization at an intermediate focus Download PDF

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Publication number
WO2003003062A3
WO2003003062A3 PCT/US2002/020511 US0220511W WO03003062A3 WO 2003003062 A3 WO2003003062 A3 WO 2003003062A3 US 0220511 W US0220511 W US 0220511W WO 03003062 A3 WO03003062 A3 WO 03003062A3
Authority
WO
WIPO (PCT)
Prior art keywords
optical beam
wavefront distortion
distort
intermediate focus
intermediate image
Prior art date
Application number
PCT/US2002/020511
Other languages
French (fr)
Other versions
WO2003003062A2 (en
Inventor
David A Ansley
Chungte W Chen
Robert W Byren
Original Assignee
Raytheon Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Raytheon Co filed Critical Raytheon Co
Priority to EP02746745A priority Critical patent/EP1399774B1/en
Priority to DE60209733T priority patent/DE60209733T2/en
Priority to IL15471402A priority patent/IL154714A0/en
Publication of WO2003003062A2 publication Critical patent/WO2003003062A2/en
Priority to IL154714A priority patent/IL154714A/en
Publication of WO2003003062A3 publication Critical patent/WO2003003062A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration

Abstract

An optical system (50) has a light source (52) of an optical beam (54), and a wavefront distortion generator (56) that introduces a known wavefront distortion into at least one wavelength component of the optical beam (54) prior to the formation of an intermediate image. A focusing device (58) receives the optical beam (54), produces the intermediate image of the optical beam (54), and outputs the optical beam (54). A wavefront distortion corrector (60), after the formation of the intermediate image, introduces a wavefront distortion correction into each component of the optical beam (54) into which the known wavefront distortion was introduced by the wavefront distortion generator (56). The wavefront distortion correction is the reverse of the known wavefront distortion introduced into the optical beam (54) by the wavefront distortion generator (56).
PCT/US2002/020511 2001-06-28 2002-06-27 Apparatus and method to distort an optical beam to avoid ionization at an intermediate focus WO2003003062A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP02746745A EP1399774B1 (en) 2001-06-28 2002-06-27 Apparatus and method to distort an optical beam to avoid ionization at an intermediate focus
DE60209733T DE60209733T2 (en) 2001-06-28 2002-06-27 DEVICE AND METHOD FOR OBSTRUCTING AN OPTICAL LIGHT BEAM TO AVOID IONIZATION IN AN INTERMEDIATE FOCUS
IL15471402A IL154714A0 (en) 2001-06-28 2002-06-27 Apparatus and method to distort an optical beam to avoid ionization at an intermediate focus
IL154714A IL154714A (en) 2001-06-28 2003-03-03 Apparatus and method to distort an optical beam to avoid ionization at an intermediate focus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/893,922 2001-06-28
US09/893,922 US6707603B2 (en) 2001-06-28 2001-06-28 Apparatus and method to distort an optical beam to avoid ionization at an intermediate focus

Publications (2)

Publication Number Publication Date
WO2003003062A2 WO2003003062A2 (en) 2003-01-09
WO2003003062A3 true WO2003003062A3 (en) 2003-06-19

Family

ID=25402345

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/020511 WO2003003062A2 (en) 2001-06-28 2002-06-27 Apparatus and method to distort an optical beam to avoid ionization at an intermediate focus

Country Status (5)

Country Link
US (1) US6707603B2 (en)
EP (1) EP1399774B1 (en)
DE (1) DE60209733T2 (en)
IL (2) IL154714A0 (en)
WO (1) WO2003003062A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7158215B2 (en) * 2003-06-30 2007-01-02 Asml Holding N.V. Large field of view protection optical system with aberration correctability for flat panel displays
US9242311B2 (en) 2012-07-11 2016-01-26 Raytheon Company Use of sulfur hexafluoride gas to prevent laser induced air breakdown
US9766422B1 (en) 2013-12-20 2017-09-19 Ball Aerospace & Technologies Corp. Optical membrane heating and temperature control method and apparatus
US9535258B1 (en) * 2013-12-30 2017-01-03 Ball Aerospace & Technologies Corp. Method and apparatus for correcting chromatic aberrations in a telescope
US9709793B1 (en) 2013-12-31 2017-07-18 Ball Aerospace & Technologies Corp. Deployable structure

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4976520A (en) * 1988-09-09 1990-12-11 Grumman Aerospace Corporation Common path multichannel optical processor
US5420436A (en) * 1992-11-27 1995-05-30 Hitachi, Ltd. Methods for measuring optical system, and method and apparatus for exposure using said measuring method
EP0672901A1 (en) * 1994-01-24 1995-09-20 Display Ispection Systems, Inc. Differential phase contrast inspection system
US5946143A (en) * 1998-05-05 1999-08-31 Raytheon Company Dynamic aberration correction of conformal/aspheric domes and windows for missile and airborne fire control applications
US6229649B1 (en) * 1994-10-04 2001-05-08 The United States Of America As Represented By The Secretary Of The Air Force Pseudo deconvolution method of recovering a distorted optical image

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5151722A (en) * 1990-11-05 1992-09-29 The Johns Hopkins University Video display on spectacle-like frame
US5113284A (en) * 1991-02-07 1992-05-12 Talandic Research Corporation Phased array optical telescope
US5257133A (en) * 1991-09-11 1993-10-26 Hughes Aircraft Company Re-imaging optical system employing refractive and diffractive optical elements
US5406412A (en) * 1993-06-17 1995-04-11 Visidyne, Inc. High-resolution synthetic aperture adaptive optics system
IL113789A (en) * 1994-05-23 1999-01-26 Hughes Aircraft Co Off-axis three-mirror anastigmat having corrector mirror
US20020118457A1 (en) * 2000-12-22 2002-08-29 Dowski Edward Raymond Wavefront coded imaging systems
US6771417B1 (en) * 1997-08-01 2004-08-03 Carl Zeiss Jena Gmbh Applications of adaptive optics in microscopy

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4976520A (en) * 1988-09-09 1990-12-11 Grumman Aerospace Corporation Common path multichannel optical processor
US5420436A (en) * 1992-11-27 1995-05-30 Hitachi, Ltd. Methods for measuring optical system, and method and apparatus for exposure using said measuring method
EP0672901A1 (en) * 1994-01-24 1995-09-20 Display Ispection Systems, Inc. Differential phase contrast inspection system
US6229649B1 (en) * 1994-10-04 2001-05-08 The United States Of America As Represented By The Secretary Of The Air Force Pseudo deconvolution method of recovering a distorted optical image
US5946143A (en) * 1998-05-05 1999-08-31 Raytheon Company Dynamic aberration correction of conformal/aspheric domes and windows for missile and airborne fire control applications

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JONG TAE KIM ET AL: "IMPROVED FOUR-MIRROR OPTICAL SYSTEM FOR DEEP-ULTRAVIOLET SUBMICROMETER LITHOGRAPHY", OPTICAL ENGINEERING, SOC. OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS. BELLINGHAM, US, vol. 32, no. 3, 1 March 1993 (1993-03-01), pages 536 - 541, XP000356207, ISSN: 0091-3286 *

Also Published As

Publication number Publication date
WO2003003062A2 (en) 2003-01-09
EP1399774B1 (en) 2006-03-08
DE60209733T2 (en) 2006-11-16
EP1399774A2 (en) 2004-03-24
IL154714A0 (en) 2003-10-31
IL154714A (en) 2006-12-31
US6707603B2 (en) 2004-03-16
DE60209733D1 (en) 2006-05-04
US20030002177A1 (en) 2003-01-02

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