WO2002097402A3 - Analysis or disposal of surface adherents - Google Patents

Analysis or disposal of surface adherents Download PDF

Info

Publication number
WO2002097402A3
WO2002097402A3 PCT/GB2002/002478 GB0202478W WO02097402A3 WO 2002097402 A3 WO2002097402 A3 WO 2002097402A3 GB 0202478 W GB0202478 W GB 0202478W WO 02097402 A3 WO02097402 A3 WO 02097402A3
Authority
WO
WIPO (PCT)
Prior art keywords
substances
flow
transported
gas
chamber
Prior art date
Application number
PCT/GB2002/002478
Other languages
French (fr)
Other versions
WO2002097402A2 (en
Inventor
Ian Robert Fothergill
Original Assignee
Ian Robert Fothergill
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ian Robert Fothergill filed Critical Ian Robert Fothergill
Priority to AU2002256826A priority Critical patent/AU2002256826A1/en
Priority to GB0329065A priority patent/GB2392083B/en
Publication of WO2002097402A2 publication Critical patent/WO2002097402A2/en
Publication of WO2002097402A3 publication Critical patent/WO2002097402A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04—Cleaning by suction, with or without auxiliary action
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N2001/028—Sampling from a surface, swabbing, vaporising

Abstract

A non-contacting method for detecting and analysing substances adhered to a surface involves a pressure chamber (9) supplied continuously with a clean gas through an inlet port (14). The gas escapes from the chamber through an annular orifice (10) thereby producing an annular jet (8) which when directed onto a surface (2) will flow along it with flow velocity components (16) directed radially inwards entraining removable substances from the surface (2). Opposing radial flow components (16) will on approach be forced away from the surface creating an axis-symmetric flow (17) enabling entrained substances to be transported from the surface (2) to a region within an exhaust port (18) isolated from higher pressure surrounding gas where transported substances may be detected and analysed prior to exhausting through an outlet pipe (19).
PCT/GB2002/002478 2001-05-31 2002-05-27 Analysis or disposal of surface adherents WO2002097402A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2002256826A AU2002256826A1 (en) 2001-05-31 2002-05-27 Analysis or disposal of surface adherents
GB0329065A GB2392083B (en) 2001-05-31 2002-05-27 Analysis or disposal of surface adherents

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0113175A GB2376873A (en) 2001-05-31 2001-05-31 Analysis or disposal of surface adherents
GB0113175.4 2001-05-31

Publications (2)

Publication Number Publication Date
WO2002097402A2 WO2002097402A2 (en) 2002-12-05
WO2002097402A3 true WO2002097402A3 (en) 2003-01-16

Family

ID=9915595

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2002/002478 WO2002097402A2 (en) 2001-05-31 2002-05-27 Analysis or disposal of surface adherents

Country Status (3)

Country Link
AU (1) AU2002256826A1 (en)
GB (2) GB2376873A (en)
WO (1) WO2002097402A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9256136B2 (en) 2010-04-22 2016-02-09 Asml Netherlands B.V. Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supply

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AUPS212502A0 (en) * 2002-05-07 2002-06-06 Sustainable Technologies International Pty Ltd Method and device for local treatment of substrates with fluids
SG135052A1 (en) 2002-11-12 2007-09-28 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
JP4085941B2 (en) 2003-09-17 2008-05-14 株式会社日立製作所 Analysis equipment
FR2933012B1 (en) * 2008-06-26 2011-11-25 Commissariat Energie Atomique METHOD AND DEVICE FOR PARTICULAR DECONTAMINATION OF SURFACE BY IMPROVED EXTRACTION

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224171A (en) * 1985-07-25 1987-02-02 Toshiba Corp Contaminated-specimen preparing
EP0395194A2 (en) * 1989-04-24 1990-10-31 Thermedics, Inc. Vapor sampling probe
DE4242215C1 (en) * 1992-12-15 1994-05-11 Fraunhofer Ges Forschung Road surface condition measuring system - uses gas and gas/liquid jets operated sequentially during measuring cycle of electrical, optical or radiometric sensor
GB2291403A (en) * 1994-07-21 1996-01-24 North West Water Group Plc Sampling water pipe debris
EP0896213A2 (en) * 1997-08-07 1999-02-10 Scintrex Limited Apparatus for effective collection of explosive and narcotic samples
US5911259A (en) * 1995-05-15 1999-06-15 Reynolds Wheels International Ltd. Equipment for the removal of paint from wheel hubs
WO2000016064A1 (en) * 1998-09-11 2000-03-23 Femtometrics, Inc. Pulsed air sampler

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0224034A1 (en) * 1985-10-29 1987-06-03 Präzisions-Werkzeuge AG Method and arrangement for preventing floating particles from descending, and a heat treatment station in a continuous inner liner installation

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224171A (en) * 1985-07-25 1987-02-02 Toshiba Corp Contaminated-specimen preparing
EP0395194A2 (en) * 1989-04-24 1990-10-31 Thermedics, Inc. Vapor sampling probe
DE4242215C1 (en) * 1992-12-15 1994-05-11 Fraunhofer Ges Forschung Road surface condition measuring system - uses gas and gas/liquid jets operated sequentially during measuring cycle of electrical, optical or radiometric sensor
GB2291403A (en) * 1994-07-21 1996-01-24 North West Water Group Plc Sampling water pipe debris
US5911259A (en) * 1995-05-15 1999-06-15 Reynolds Wheels International Ltd. Equipment for the removal of paint from wheel hubs
EP0896213A2 (en) * 1997-08-07 1999-02-10 Scintrex Limited Apparatus for effective collection of explosive and narcotic samples
WO2000016064A1 (en) * 1998-09-11 2000-03-23 Femtometrics, Inc. Pulsed air sampler

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
FOTHERGILL I R: "NON-CONTACT TEMPERATURE MEASUREMENT USING FORCED AIR CONVECTION", INSTITUTE OF PHYSICS CONFERENCE SERIES, IOP PUBLISHING,, GB, no. 26, 9 April 1975 (1975-04-09), pages 409 - 414, XP008008053, ISSN: 0951-3248 *
PATENT ABSTRACTS OF JAPAN vol. 011, no. 201 (P - 590) 30 June 1987 (1987-06-30) *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9256136B2 (en) 2010-04-22 2016-02-09 Asml Netherlands B.V. Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supply

Also Published As

Publication number Publication date
WO2002097402A2 (en) 2002-12-05
GB2392083A (en) 2004-02-25
GB0329065D0 (en) 2004-01-14
GB0113175D0 (en) 2001-07-25
GB2376873A (en) 2002-12-31
GB2392083B (en) 2005-01-12
AU2002256826A1 (en) 2002-12-09

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