WO2002097402A2 - Analysis or disposal of surface adherents - Google Patents
Analysis or disposal of surface adherents Download PDFInfo
- Publication number
- WO2002097402A2 WO2002097402A2 PCT/GB2002/002478 GB0202478W WO02097402A2 WO 2002097402 A2 WO2002097402 A2 WO 2002097402A2 GB 0202478 W GB0202478 W GB 0202478W WO 02097402 A2 WO02097402 A2 WO 02097402A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substances
- jet
- analysis
- jets
- free
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N2001/028—Sampling from a surface, swabbing, vaporising
Definitions
- This invention relates to a method and apparatus for remote monitoring of surfaces to detect and characterise removable substances freely or loosely bound to surfaces.
- removable substances possess detectable properties significantly different from the surface on which they reside or to which they are adhered they may be detectable by absorption of incident radiation at specific wavelengths (which for water are in the infrared) even if existing in trace amounts. Similarly certain substances may be caused to fluoresce when irradiated by ultraviolet light and be detectable in small amounts. However such measurements are only applicable and specific to certain substances and cannot be generally applied to detect all adhered substances irrespective of their physical or chemical nature particularly if such substances are present only in trace quantities.
- a method for removing for disposal or detection and characterisation free or loosely adhered substances on a surface involving the steps of directing one or more free jets onto the surface to create respective wall jets flowing along the surface in order to entrain removable substances into the wall jet or jets and thereby transport them away from the surface by means of a flow configuration which moves away from the surface as a result of the interaction of opposing wall jet flow velocity components said substances being transported to a region away from the surface for disposal or detection and characterisation this latter involving one of a number of possible sensors appropriate to the liberated substances nature.
- the Wis jet performs a totally different function to that involved in temperature measurement in the that interaction with the surface along which wall jets flow prior to flowing away as a Wis jet are mechanical rather than thermal.
- This process involves viscous drag forces and high levels of turbulence characteristic of all developed jet configurations both of which contribute to the removal and transportation of substances from the surface.
- apparatus comprising a free jet generating facility for producing and directing one or more free jets onto a surface to form corresponding wall jets on the surface in order to liberate free or loosely adhered substances from the surface by viscous drag forces associated with the wall jets inner boundary layers and thereby transport said liberated substances entrained into a wall jet or jets to a region away from the surface by means of a jet flow configuration moving away from the surface as a result of interaction of opposing wall jet flow components said region possessing means for either collection and disposal of entrained substances or detection and characterisation using appropriate sensors.
- the facility for detecting and characterising liberated substances is located away from the surface and supplied with air borne sustances transported by the Wis jet from the surface.
- Substances to be monitored may exist in the solid, liquid, gas or vapour phase whilst under analysis but prior to liberation from the surface the substances may exist in the solid phase possibly dispersed continuously over the surface or in descrete areas. Alternatively they may exist in the liquid phase again dispersed over extended areas or locally in smaller descrete areas. In some cases mixed solid and liquid phases may exist. Substances may also exist in a gaseous or vapour phase and remain in that condition until detected and analysed.
- the monitoring system consists of two parts:- 1) a jet removal and transportation facility and:- 2) a detection and analysis facility for characterising substances transported from the surface.
- the detection and analysis facility may exist within a cell to which a proportion of the liberated substances is transported. Substances to be detected may be collected within the cell to be detected and analysed either in real time or subsequently. It is essential that facilities exist to preserve the free flow of air or gas through the cell otherwise Wis jet flow would be inhibited. Instead of collection of detected substances these may pass freely through the analysis cell and be detected in motion without accumulation.
- liberated substances For application involving removal of unwanted substances from surfaces for cleaning or decontamination purposes detection and analysis facilities are generally unnecessary - unless the liberated substances are of particular interest - and in this case liberated substances may be transported to a remote disposal facility possibly aided by a low pressure or vacuum system.
- Numerous sensor methods are available to detect and characterise the physical, chemical or biological nature of liberated substances as well as their relative abundance. Such sensors may exist within the detection and analysis cell or in a position to which physical or chemical data can be communicated from the analysis cell i.e. via optical fibres, radio, hard wire or other communication links.
- Various radiation types may be deployed for analysis of liberated substances including microwave, infrared, optical, ultraviolet, x rays and ultrasonics in order to stimulate or excite the substance under test its properties being deduced with appropriate detectors from the response to those exciters. For example particle size distribution may be deduced from optical scattering characteristics using narrow or broad band optical radiators.
- chemical or biological species or properties may be deduced from fluorescent radiation generated with incident ultraviolet radiation possibly with the aid of chemical labels or from absorption by irradiated substances of specific radiation wavelengths.
- fluorescent radiation generated with incident ultraviolet radiation possibly with the aid of chemical labels or from absorption by irradiated substances of specific radiation wavelengths.
- the presence of water on a surface may be deduced from infrared absorption bands by water vapour liberated from the surface. In circumstances where liberated substances are collected for analysis contacting chemical or microbiological analytical methods may prove appropriate.
- the removal and transportation of substances from a surface may be made localised or extended according to the requirements and highly spatially specific if extremely small surf ce areas are to be interrogated.
- the Wis jet method is by nature highly specific to the surface, can employ free jet pressures ranging from low to very high exceeding several atmospheres to remove solid substances which may be tightly bound to the surface - without the need for mechanical brushes necessary for vacuum cleaners - and can also provide highly localised removal of substances.
- the Wis jet flow condition can be used solely for cleaning purposes with an analysis facility absent since substantially higher pressures can be generated than is possible with vacuum systems and by suitable configuration of the Wis jet the flow can be confined and entrained substances fed into a collection chamber for disposal.
- a suitable free jet configuration for this and indeed analytical purposes discussed above would be an annular jet directed onto the surface with or without a surrounding guard ring to reduce leakage outside the annulus.
- the Wis jet would be axi-sy etric with the stirrounding annular free jet and may pass with its entrained substances to a collection region for disposal (for cleaning purposes) or for substance characterisation as appropriate.
- the Wis jet may be fed into a vacuum system or pipe work leading to a remote dispersal or analysis facility.
- free jets discussed so far have been cylindrical or annular alternative jet configurations and combinations including slot jets may be deployed according to the application.
- Fig.l. shows a schematic diagram of a section through the axes of two cylindrical parallel free jets directed normally towards a surface forming a Wis jet moving away from the surface.
- Fig.2. shows a schematic representation of flow velocity vectors within a section through a Wis jet on the line A- A in Fig.l
- Fig.3. shows a schematic section of Wis jet formed from two free jets inclined to the surface normal.
- Fig.4. shows a schematic representation of an axi-sym etric Wis jet formed from an annular free jet.
- Fig.5. shows a section through a conical annular free jet producing an axial Wis jet.
- FIG.l this figure shows a section through the axes of two parallel cylindrical free jets 1 directed onto a surface 2 each forming respective axi-symmetric wall jets 3. If unimpeded each wall jet would flow radially away from the corresponding free jet axes along the surface with its boundary layer thickness and level of outer turbulence increasing with radial distance. In Fig.l. however each wall jet has opposing flow velocity components which interact on approach resulting in a flow away from the surface producing a so-called Wis jet 4.
- Fig.2 shows a Wis jet flow configuration 4 in a section on the line A-A in Fig.l.
- the Wis jet 4 extends in opposite -. x+ve and x-ve - directions from the peak flow velocity vector 5 which is normal to the surface for identical free jets.
- This extended, non axi- symmetric Wis jet flow configuration possesses velocity vectors 6 diminishing in magnitude and becoming progressively more inclined to the surface normal with increasing x+ve or x- ve displacement.
- Analysis of substances hberated from the surface 2 and transported by means of the Wis jet away from the surface may be carried out in a sample chamber or cell - not shown in Fig.l - supplied from the Wis jet.
- This chamber may possess a sensor system appropriate to the substance under test which may be physically or chemically based.
- the sensor type may employ optical scattering using a high intensity light source irradiating the sample volume with information relating to the concentration and size distribution of hberated particles being deduced from the detection and analysis of scattered radiation.
- Other non-optical radiation types including ultrasonics may also be used for air borne particle detection and sizing measurement.
- jets 7 may be inclined to the surface 2 normal see Fig.3. This will improve efficiencies for Hberation and transportation of surface substances to be sensed remotely in a sample chamber. Analysis of data generated in the sample chamber using the appropriate sensor may be carried out locally within the chamber itself or may be transmitted to a remote signal processing unit using for example optical fibres, hard wire or radio communication links.
- the Wis jet 4 flow configuration discussed so far was derived from two cylindrical free jets directed either normally to the surface 2 or inclined to the surface normal to improve Wis jet 4 flow rates and surface 2 substance Hberation and transportation efficiencies.
- An alternative free jet, wall jet and Wis jet flow configuration which may possess some improvements in operational efficiency and convenience, involves the generation of a single annular free jet 8 Fig.4 using a cylindrical chamber 9 with an annular slot or aperture 10 in the base 11.
- the roof 12 of the chamber 9 has an inlet port 13 coupled to which is a side port 14 to provide pressurised clean air or other environmentally compatible gas from a remote supply - not shown.
- Pressurised clean air or gas is forced into the chamber 9 through port 13 possibly involving baffles or the like to ensure even pressure distribution within the chamber 12 in order to produce uniform mean annular flow rates.
- the pressurised air or gas escapes from the chamber 9 - which in fact operates as a pressure chamber - through the annular aperture 10 forming an annular jet 8 directed towards the surface 2 under test.
- the aperture 10 may possess appropriate funnelling or a streamlined geometry to reduce eddy formation and thereby enhance flow rates.
- the annular free jet 8 On reaching the target surface 2 the annular free jet 8 will form an axi-symmetric waH jet with radial velocity components 15 flowing unproductively outwards and components 16 productively inwards to form an axi- symmetric Wis jet 17 moving normally away from the surface towards the chamber 9 base 11.
- Axial with the base is a cyHndrical exhaust port 18 this port 18 being isolated from the chamber 9 and providing a free exhaust route for the Wis jet by means of an outlet pipe 19.
- a sample region forming the sample chamber and containing sensors - not shown - to detect Hberated substances from the surface 2.
- Physical data from a sensor system may be processed locaHy with processed data being transmitted to a remote site for observation or recording or the primary data from sensors may be communicated to a remote signal-processing unit (not shown) for analysis and recording.
- the aperture 10 in the pressure chamber 9 may be configured to produce a conical annular free jet configuration 20 Fig.5 to improve efficiencies in Hberating and transporting substances by means of the Wis jet 17 through the sample chamber accommodated in the port 18.
- Wis jets formed from two cyHndrical free jets or a single annular free jet. It will be understood that other jet configurations are equany appHcable including slot jets and the most appropriate jet configuration will depend upon the geometry of the target surface and the area to be tested i.e. whether this is extensive or highly locaHsed.
- the pressure chamber 9 Fig.4 may possess different aperture geometries in the base 11 which may be deployed through valves according to requirements. Further for tightly bound surface substances it may be necessary to generate higher free jet flow rates to Hberate the substances or a proportion of them and in such cases appropriate structural integrity requirements will be necessary to provide safe operation.
- Wis jet and its associated waU jet and free jet flow configurations may be used in place of mechanical swabs frequently used for removing surface substances for remote analysis.
- the benefit of the Wis jet method results from the avoidance of physical contact with the surface under test.
- mechanical brushes generally employed in commerciaHy available vacuum cleaners to Hberate debris for removal by a vacuum system may be replaced by a Wis jet and associated jets system thereby avoiding mechanical contact with a surface or membrane and enabling deHcate or fragile surfaces to be cleaned without damage or disturbance.
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2002256826A AU2002256826A1 (en) | 2001-05-31 | 2002-05-27 | Analysis or disposal of surface adherents |
GB0329065A GB2392083B (en) | 2001-05-31 | 2002-05-27 | Analysis or disposal of surface adherents |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0113175A GB2376873A (en) | 2001-05-31 | 2001-05-31 | Analysis or disposal of surface adherents |
GB0113175.4 | 2001-05-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2002097402A2 true WO2002097402A2 (en) | 2002-12-05 |
WO2002097402A3 WO2002097402A3 (en) | 2003-01-16 |
Family
ID=9915595
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/GB2002/002478 WO2002097402A2 (en) | 2001-05-31 | 2002-05-27 | Analysis or disposal of surface adherents |
Country Status (3)
Country | Link |
---|---|
AU (1) | AU2002256826A1 (en) |
GB (2) | GB2376873A (en) |
WO (1) | WO2002097402A2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003095115A1 (en) * | 2002-05-07 | 2003-11-20 | Sustainable Technologies International Pty Ltd | Method and device for local treatment of substrates |
FR2933012A1 (en) * | 2008-06-26 | 2010-01-01 | Commissariat Energie Atomique | METHOD AND DEVICE FOR PARTICULAR DECONTAMINATION OF SURFACE BY IMPROVED EXTRACTION |
US7982850B2 (en) | 2002-11-12 | 2011-07-19 | Asml Netherlands B.V. | Immersion lithographic apparatus and device manufacturing method with gas supply |
US9846372B2 (en) | 2010-04-22 | 2017-12-19 | Asml Netherlands B.V. | Fluid handling structure, lithographic apparatus and device manufacturing method |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4085941B2 (en) | 2003-09-17 | 2008-05-14 | 株式会社日立製作所 | Analysis equipment |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0395194A2 (en) * | 1989-04-24 | 1990-10-31 | Thermedics, Inc. | Vapor sampling probe |
DE4242215C1 (en) * | 1992-12-15 | 1994-05-11 | Fraunhofer Ges Forschung | Road surface condition measuring system - uses gas and gas/liquid jets operated sequentially during measuring cycle of electrical, optical or radiometric sensor |
GB2291403A (en) * | 1994-07-21 | 1996-01-24 | North West Water Group Plc | Sampling water pipe debris |
EP0896213A2 (en) * | 1997-08-07 | 1999-02-10 | Scintrex Limited | Apparatus for effective collection of explosive and narcotic samples |
US5911259A (en) * | 1995-05-15 | 1999-06-15 | Reynolds Wheels International Ltd. | Equipment for the removal of paint from wheel hubs |
WO2000016064A1 (en) * | 1998-09-11 | 2000-03-23 | Femtometrics, Inc. | Pulsed air sampler |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6224171A (en) * | 1985-07-25 | 1987-02-02 | Toshiba Corp | Contaminated-specimen preparing |
EP0224034A1 (en) * | 1985-10-29 | 1987-06-03 | Präzisions-Werkzeuge AG | Method and arrangement for preventing floating particles from descending, and a heat treatment station in a continuous inner liner installation |
-
2001
- 2001-05-31 GB GB0113175A patent/GB2376873A/en not_active Withdrawn
-
2002
- 2002-05-27 AU AU2002256826A patent/AU2002256826A1/en not_active Abandoned
- 2002-05-27 WO PCT/GB2002/002478 patent/WO2002097402A2/en not_active Application Discontinuation
- 2002-05-27 GB GB0329065A patent/GB2392083B/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0395194A2 (en) * | 1989-04-24 | 1990-10-31 | Thermedics, Inc. | Vapor sampling probe |
DE4242215C1 (en) * | 1992-12-15 | 1994-05-11 | Fraunhofer Ges Forschung | Road surface condition measuring system - uses gas and gas/liquid jets operated sequentially during measuring cycle of electrical, optical or radiometric sensor |
GB2291403A (en) * | 1994-07-21 | 1996-01-24 | North West Water Group Plc | Sampling water pipe debris |
US5911259A (en) * | 1995-05-15 | 1999-06-15 | Reynolds Wheels International Ltd. | Equipment for the removal of paint from wheel hubs |
EP0896213A2 (en) * | 1997-08-07 | 1999-02-10 | Scintrex Limited | Apparatus for effective collection of explosive and narcotic samples |
WO2000016064A1 (en) * | 1998-09-11 | 2000-03-23 | Femtometrics, Inc. | Pulsed air sampler |
Non-Patent Citations (2)
Title |
---|
FOTHERGILL I R: "NON-CONTACT TEMPERATURE MEASUREMENT USING FORCED AIR CONVECTION" INSTITUTE OF PHYSICS CONFERENCE SERIES, IOP PUBLISHING,, GB, no. 26, 9 April 1975 (1975-04-09), pages 409-414, XP008008053 ISSN: 0951-3248 cited in the application * |
PATENT ABSTRACTS OF JAPAN vol. 011, no. 201 (P-590), 30 June 1987 (1987-06-30) & JP 62 024171 A (TOSHIBA CORP), 2 February 1987 (1987-02-02) * |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1507604A1 (en) * | 2002-05-07 | 2005-02-23 | Dyesol Ltd | Method and device for local treatment of substrates |
EP1507604A4 (en) * | 2002-05-07 | 2007-07-04 | Dyesol Ltd | Method and device for local treatment of substrates |
WO2003095115A1 (en) * | 2002-05-07 | 2003-11-20 | Sustainable Technologies International Pty Ltd | Method and device for local treatment of substrates |
US10222706B2 (en) | 2002-11-12 | 2019-03-05 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US10620545B2 (en) | 2002-11-12 | 2020-04-14 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7982850B2 (en) | 2002-11-12 | 2011-07-19 | Asml Netherlands B.V. | Immersion lithographic apparatus and device manufacturing method with gas supply |
US8797503B2 (en) | 2002-11-12 | 2014-08-05 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure |
US9091940B2 (en) | 2002-11-12 | 2015-07-28 | Asml Netherlands B.V. | Lithographic apparatus and method involving a fluid inlet and a fluid outlet |
FR2933012A1 (en) * | 2008-06-26 | 2010-01-01 | Commissariat Energie Atomique | METHOD AND DEVICE FOR PARTICULAR DECONTAMINATION OF SURFACE BY IMPROVED EXTRACTION |
WO2010003812A1 (en) * | 2008-06-26 | 2010-01-14 | Commissariat A L'energie Atomique | Method and device for the improved particulate decontamination of a surface by extraction |
US10209624B2 (en) | 2010-04-22 | 2019-02-19 | Asml Netherlands B.V. | Fluid handling structure, lithographic apparatus and device manufacturing method |
US9846372B2 (en) | 2010-04-22 | 2017-12-19 | Asml Netherlands B.V. | Fluid handling structure, lithographic apparatus and device manufacturing method |
US10620544B2 (en) | 2010-04-22 | 2020-04-14 | Asml Netherlands B.V. | Fluid handling structure, lithographic apparatus and device manufacturing method |
Also Published As
Publication number | Publication date |
---|---|
GB2376873A (en) | 2002-12-31 |
AU2002256826A1 (en) | 2002-12-09 |
GB2392083B (en) | 2005-01-12 |
GB0113175D0 (en) | 2001-07-25 |
GB2392083A (en) | 2004-02-25 |
WO2002097402A3 (en) | 2003-01-16 |
GB0329065D0 (en) | 2004-01-14 |
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