WO2002063596A3 - Multiplexed analog control system for electrostatic actuator array - Google Patents

Multiplexed analog control system for electrostatic actuator array Download PDF

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Publication number
WO2002063596A3
WO2002063596A3 PCT/US2002/003420 US0203420W WO02063596A3 WO 2002063596 A3 WO2002063596 A3 WO 2002063596A3 US 0203420 W US0203420 W US 0203420W WO 02063596 A3 WO02063596 A3 WO 02063596A3
Authority
WO
WIPO (PCT)
Prior art keywords
control system
capacitor
analog control
multiplexed analog
electrostatic actuator
Prior art date
Application number
PCT/US2002/003420
Other languages
French (fr)
Other versions
WO2002063596A2 (en
Inventor
Steven L Garverick
Jun Guo
Narayanan Rajan
Original Assignee
Movaz Networks Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Movaz Networks Inc filed Critical Movaz Networks Inc
Priority to AU2002236971A priority Critical patent/AU2002236971A1/en
Publication of WO2002063596A2 publication Critical patent/WO2002063596A2/en
Publication of WO2002063596A3 publication Critical patent/WO2002063596A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3586—Control or adjustment details, e.g. calibrating

Abstract

A multiplexed analog control system for an micro electromechanical systems (MEMS) array (10) of electrostatic sctuators, such as tiltable mirrors (12) in an optical switch. Each sctuator includes a variable gap capacitor (58, 78) formed as part of the movable mechanical element. A hold capacitor (94) is connected to each actuator capacitor, and a selectable high-voltage inverter (96) connects tehm to provide a bipolar drive signal of 50% duty cycle. A single power digital controlled current source (92) is connected to all the drive circuits (62) to provide a high-power correction signal. Address decoders (80, 82) enable a selected one of the drive circuits to add or subtract the correction from the hold capacitor.
PCT/US2002/003420 2001-02-07 2002-02-06 Multiplexed analog control system for electrostatic actuator array WO2002063596A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002236971A AU2002236971A1 (en) 2001-02-07 2002-02-06 Multiplexed analog control system for electrostatic actuator array

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US26728801P 2001-02-07 2001-02-07
US60/267,288 2001-02-07
US09/949,436 2001-09-07
US09/949,436 US6788981B2 (en) 2001-02-07 2001-09-07 Multiplexed analog control system for electrostatic actuator array

Publications (2)

Publication Number Publication Date
WO2002063596A2 WO2002063596A2 (en) 2002-08-15
WO2002063596A3 true WO2002063596A3 (en) 2002-11-07

Family

ID=26952345

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/003420 WO2002063596A2 (en) 2001-02-07 2002-02-06 Multiplexed analog control system for electrostatic actuator array

Country Status (3)

Country Link
US (1) US6788981B2 (en)
AU (1) AU2002236971A1 (en)
WO (1) WO2002063596A2 (en)

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US6750589B2 (en) * 2002-01-24 2004-06-15 Honeywell International Inc. Method and circuit for the control of large arrays of electrostatic actuators
US6750655B2 (en) * 2002-02-21 2004-06-15 Pts Corporation Methods for affirming switched status of MEMS-based devices
US6706619B2 (en) 2002-03-16 2004-03-16 Memx, Inc. Method for tiling unit cells
JP2004037791A (en) * 2002-07-03 2004-02-05 Olympus Corp Electrostatic drive type mirror arrangement
US7095494B2 (en) * 2002-08-29 2006-08-22 Texas Instruments Incorporated Method and apparatus for measuring temporal response characteristics of digital mirror devices
US20030091270A1 (en) * 2002-09-23 2003-05-15 Abbott Eric C. Closed-loop control of MEMS mirrors for optical communications
SE0300240D0 (en) 2003-01-31 2003-01-31 Micronic Laser Systems Ab SLM addressing method
US6940285B2 (en) * 2003-06-19 2005-09-06 International Business Machines Corporation Method and apparatus for testing a micro electromechanical device
JP4489393B2 (en) * 2003-08-21 2010-06-23 オリンパス株式会社 Semiconductor device
US7656573B2 (en) 2004-02-28 2010-02-02 Hewlett-Packard Development Company, L.P. Method and apparatus for controlling a gap between conductors in an electro-mechanical device
CN1305014C (en) * 2004-08-16 2007-03-14 黄珏华 Electronic display device composed of address display unit
JP4366384B2 (en) * 2006-08-28 2009-11-18 富士通株式会社 Wavelength selective switch module
US7769255B2 (en) * 2006-11-07 2010-08-03 Olympus Corporation High port count instantiated wavelength selective switch
US7873246B2 (en) * 2006-11-07 2011-01-18 Olympus Corporation Beam steering element and associated methods for manifold fiberoptic switches and monitoring
US8179581B1 (en) 2007-03-28 2012-05-15 University Of South Florida Electrostatically-addressed MEMS array system and method of use
US7605466B2 (en) * 2007-10-15 2009-10-20 General Electric Company Sealed wafer packaging of microelectromechanical systems
US7915696B2 (en) * 2007-10-24 2011-03-29 General Electric Company Electrical connection through a substrate to a microelectromechanical device
US7826697B2 (en) * 2008-08-19 2010-11-02 Olympus Corporation System and method for asymmetrical fiber spacing for wavelength selective switches
US9641103B2 (en) * 2014-12-30 2017-05-02 Mems Drive, Inc. MEMS driver
CN111240233B (en) * 2019-04-11 2020-10-27 岳阳县辉通物联网科技有限公司 Adaptive device control method

Citations (4)

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US5170283A (en) * 1991-07-24 1992-12-08 Northrop Corporation Silicon spatial light modulator
US5521746A (en) * 1993-02-22 1996-05-28 Engle; Craig D. Poppet valve modulator
US5760755A (en) * 1995-08-16 1998-06-02 Engle; Craig D. Electrostatic light valve system configurations
WO2001061400A2 (en) * 2000-02-17 2001-08-23 Xros, Inc., Nortel Networks Two-dimensional micro-mirror array enhancements

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US5061049A (en) * 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US5418546A (en) * 1991-08-20 1995-05-23 Mitsubishi Denki Kabushiki Kaisha Visual display system and exposure control apparatus
US5285407A (en) * 1991-12-31 1994-02-08 Texas Instruments Incorporated Memory circuit for spatial light modulator
US5467146A (en) * 1994-03-31 1995-11-14 Texas Instruments Incorporated Illumination control unit for display system with spatial light modulator
US5670977A (en) * 1995-02-16 1997-09-23 Texas Instruments Incorporated Spatial light modulator having single bit-line dual-latch memory cells
JP3519853B2 (en) * 1996-02-28 2004-04-19 富士写真フイルム株式会社 Micromirror image forming apparatus and management method thereof
US5959747A (en) * 1996-09-11 1999-09-28 California Institute Of Technology Compact architecture for holographic systems
US6097859A (en) * 1998-02-12 2000-08-01 The Regents Of The University Of California Multi-wavelength cross-connect optical switch
US6037719A (en) * 1998-04-09 2000-03-14 Hughes Electronics Corporation Matrix-addressed display having micromachined electromechanical switches
US6191883B1 (en) * 1998-12-30 2001-02-20 Texas Instruments Incorporated Five transistor SRAM cell for small micromirror elements
US6529311B1 (en) * 1999-10-28 2003-03-04 The Trustees Of Boston University MEMS-based spatial-light modulator with integrated electronics
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Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5170283A (en) * 1991-07-24 1992-12-08 Northrop Corporation Silicon spatial light modulator
US5521746A (en) * 1993-02-22 1996-05-28 Engle; Craig D. Poppet valve modulator
US5760755A (en) * 1995-08-16 1998-06-02 Engle; Craig D. Electrostatic light valve system configurations
WO2001061400A2 (en) * 2000-02-17 2001-08-23 Xros, Inc., Nortel Networks Two-dimensional micro-mirror array enhancements

Also Published As

Publication number Publication date
US20020106144A1 (en) 2002-08-08
AU2002236971A1 (en) 2002-08-19
WO2002063596A2 (en) 2002-08-15
US6788981B2 (en) 2004-09-07

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