WO2002059704A3 - Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool - Google Patents

Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool Download PDF

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Publication number
WO2002059704A3
WO2002059704A3 PCT/US2002/002378 US0202378W WO02059704A3 WO 2002059704 A3 WO2002059704 A3 WO 2002059704A3 US 0202378 W US0202378 W US 0202378W WO 02059704 A3 WO02059704 A3 WO 02059704A3
Authority
WO
WIPO (PCT)
Prior art keywords
wafer processing
wafer
schedules
tool
semiconductor wafer
Prior art date
Application number
PCT/US2002/002378
Other languages
French (fr)
Other versions
WO2002059704A2 (en
Inventor
Dusan B Jevtic
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/771,254 external-priority patent/US6725114B1/en
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of WO2002059704A2 publication Critical patent/WO2002059704A2/en
Publication of WO2002059704A3 publication Critical patent/WO2002059704A3/en

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A method and apparatus for producing schedules for a wafer in a multichamber semiconductor wafer processing tool comprising the steps of providing a trace defining a series of chambers that are visited by a wafer as the wafer is processed by the tool; initializing a sequence generator with a vertex defining initial wafer positioning within the tool; generating all successor vertices to produce a series of vectors interconnecting the vertices that, when taken together produce a cycle that represents a schedule. All the possible schedules are analyzed to determine a schedule that produces the highest throughput of all the schedules.
PCT/US2002/002378 2001-01-26 2002-01-28 Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool WO2002059704A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/771,254 US6725114B1 (en) 1997-06-09 2001-01-26 Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool
US09/771,254 2001-01-26

Publications (2)

Publication Number Publication Date
WO2002059704A2 WO2002059704A2 (en) 2002-08-01
WO2002059704A3 true WO2002059704A3 (en) 2003-05-08

Family

ID=25091218

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/002378 WO2002059704A2 (en) 2001-01-26 2002-01-28 Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool

Country Status (2)

Country Link
TW (1) TW526530B (en)
WO (1) WO2002059704A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1826645A1 (en) * 2006-02-25 2007-08-29 MTU Aero Engines GmbH Method for generating process chains
TWI426459B (en) * 2007-10-26 2014-02-11 Hon Hai Prec Ind Co Ltd System and method for judging inputting and outputting operations of a mold automatically

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5444632A (en) * 1994-04-28 1995-08-22 Texas Instruments Incorporated Apparatus and method for controlling and scheduling processing machines
US6074443A (en) * 1996-10-21 2000-06-13 Applied Materials, Inc. Method and apparatus for scheduling wafer processing within a multiple chamber semiconductor wafer processing tool having a multiple blade robot
EP1058172A2 (en) * 1999-06-01 2000-12-06 Applied Materials, Inc. Semiconductor processing techniques
WO2000079355A1 (en) * 1999-06-22 2000-12-28 Brooks Automation, Inc. Run-to-run controller for use in microelectronic fabrication

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5444632A (en) * 1994-04-28 1995-08-22 Texas Instruments Incorporated Apparatus and method for controlling and scheduling processing machines
US6074443A (en) * 1996-10-21 2000-06-13 Applied Materials, Inc. Method and apparatus for scheduling wafer processing within a multiple chamber semiconductor wafer processing tool having a multiple blade robot
EP1058172A2 (en) * 1999-06-01 2000-12-06 Applied Materials, Inc. Semiconductor processing techniques
WO2000079355A1 (en) * 1999-06-22 2000-12-28 Brooks Automation, Inc. Run-to-run controller for use in microelectronic fabrication

Also Published As

Publication number Publication date
WO2002059704A2 (en) 2002-08-01
TW526530B (en) 2003-04-01

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