WO2002056062A3 - Catoptric and catadioptric imaging systems - Google Patents

Catoptric and catadioptric imaging systems Download PDF

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Publication number
WO2002056062A3
WO2002056062A3 PCT/US2001/050313 US0150313W WO02056062A3 WO 2002056062 A3 WO2002056062 A3 WO 2002056062A3 US 0150313 W US0150313 W US 0150313W WO 02056062 A3 WO02056062 A3 WO 02056062A3
Authority
WO
WIPO (PCT)
Prior art keywords
rays
beam splitter
catoptric
imaging systems
catadioptric imaging
Prior art date
Application number
PCT/US2001/050313
Other languages
French (fr)
Other versions
WO2002056062A9 (en
WO2002056062A2 (en
Inventor
Henry A Hill
Original Assignee
Zetetic Inst
Henry A Hill
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zetetic Inst, Henry A Hill filed Critical Zetetic Inst
Priority to KR10-2003-7008500A priority Critical patent/KR20040032816A/en
Priority to JP2002556261A priority patent/JP4195292B2/en
Priority to AU2002249855A priority patent/AU2002249855A1/en
Priority to EP01998099A priority patent/EP1344101A4/en
Publication of WO2002056062A2 publication Critical patent/WO2002056062A2/en
Publication of WO2002056062A3 publication Critical patent/WO2002056062A3/en
Publication of WO2002056062A9 publication Critical patent/WO2002056062A9/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0856—Catadioptric systems comprising a refractive element with a reflective surface, the reflection taking place inside the element, e.g. Mangin mirrors
    • G02B17/086—Catadioptric systems comprising a refractive element with a reflective surface, the reflection taking place inside the element, e.g. Mangin mirrors wherein the system is made of a single block of optical material, e.g. solid catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/008—Systems specially adapted to form image relays or chained systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/144—Beam splitting or combining systems operating by reflection only using partially transparent surfaces without spectral selectivity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/145—Beam splitting or combining systems operating by reflection only having sequential partially reflecting surfaces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B30/00—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
    • G02B30/50—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images the image being built up from image elements distributed over a 3D volume, e.g. voxels
    • G02B30/56—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images the image being built up from image elements distributed over a 3D volume, e.g. voxels by projecting aerial or floating images
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N7/00—Television systems
    • H04N7/24—Systems for the transmission of television signals using pulse code modulation
    • H04N7/52—Systems for transmission of a pulse code modulated video signal with one or more other pulse code modulated signals, e.g. an audio signal or a synchronizing signal
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/04—Synchronising
    • H04N5/08—Separation of synchronising signals from picture signals
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/44—Receiver circuitry for the reception of television signals according to analogue transmission standards
    • H04N5/46—Receiver circuitry for the reception of television signals according to analogue transmission standards for receiving on more than one standard at will
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/63—Generation or supply of power specially adapted for television receivers

Abstract

The invention features an imaging system (500) for imaging an object point (560) to an image point (562). The system includes: a beam splitter (550) positioned to receive light rays from the object point (560) and separate each ray into a transmitted portion and a reflected portion, the transmitted portions defining a first set of rays and the reflected portions defining a second set of rays; and a reflecting surface (532, 542) positioned to receive one of the sets of rays from the beam splitter and focus that set of rays towards the image point (562) via the beam splitter. Interferometric techniques may be applied to increase the light throughput of the system.
PCT/US2001/050313 2000-12-21 2001-12-20 Catoptric and catadioptric imaging systems WO2002056062A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR10-2003-7008500A KR20040032816A (en) 2000-12-21 2001-12-20 Catoptric and catadioptric imaging systems
JP2002556261A JP4195292B2 (en) 2000-12-21 2001-12-20 Imaging system using catadioptric system and catadioptric system
AU2002249855A AU2002249855A1 (en) 2000-12-21 2001-12-20 Catoptric and catadioptric imaging systems
EP01998099A EP1344101A4 (en) 2000-12-21 2001-12-20 Catoptric and catadioptric imaging systems

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US25783300P 2000-12-21 2000-12-21
US60/257,833 2000-12-21

Publications (3)

Publication Number Publication Date
WO2002056062A2 WO2002056062A2 (en) 2002-07-18
WO2002056062A3 true WO2002056062A3 (en) 2003-02-13
WO2002056062A9 WO2002056062A9 (en) 2003-04-24

Family

ID=22977947

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/050313 WO2002056062A2 (en) 2000-12-21 2001-12-20 Catoptric and catadioptric imaging systems

Country Status (7)

Country Link
US (1) US6552852B2 (en)
EP (1) EP1344101A4 (en)
JP (1) JP4195292B2 (en)
KR (1) KR20040032816A (en)
CN (1) CN100439964C (en)
AU (1) AU2002249855A1 (en)
WO (1) WO2002056062A2 (en)

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US6403124B1 (en) * 1997-04-16 2002-06-11 Sigma-Tau Industrie Farmaceutiche Riunite S.P.A. Storage and maintenance of blood products including red blood cells and platelets
US6707026B2 (en) * 2000-08-04 2004-03-16 Minolta Co., Ltd. Solid immersion mirror and reproducing apparatus
US7084983B2 (en) * 2003-01-27 2006-08-01 Zetetic Institute Interferometric confocal microscopy incorporating a pinhole array beam-splitter
KR20050098268A (en) * 2003-01-27 2005-10-11 제테틱 인스티튜트 Leak guided-wave modes used in interferometric confocal microscopy to measure properties of trenches
EP1588120A4 (en) 2003-01-27 2006-12-20 Zetetic Inst Interferometric confocal microscopy incorporating a pihnole array beam-splitter
US7164480B2 (en) * 2003-02-04 2007-01-16 Zetetic Institute Compensation for effects of mismatch in indices of refraction at a substrate-medium interface in non-confocal, confocal, and interferometric confocal microscopy
US7263259B2 (en) * 2003-02-07 2007-08-28 Zetetic Institute Multiple-source arrays fed by guided-wave structures and resonant guided-wave structure cavities
US6717736B1 (en) * 2003-02-13 2004-04-06 Zetetic Institute Catoptric and catadioptric imaging systems
WO2004072695A2 (en) * 2003-02-13 2004-08-26 Zetetic Institute Transverse differential interferometric confocal microscopy
WO2004074881A2 (en) * 2003-02-19 2004-09-02 Zetetic Institute Method and apparatus for dark field interferometric confocal microscopy
US7133139B2 (en) * 2003-02-19 2006-11-07 Zetetic Institute Longitudinal differential interferometric confocal microscopy
KR20050119672A (en) * 2003-04-01 2005-12-21 제테틱 인스티튜트 Apparatus and method for joint measurement of fields of scattered/reflected or transmitted orthogonally polarized beams by an object in interferometry
EP1609019A2 (en) 2003-04-01 2005-12-28 Zetetic Institute Method for constructing a catadioptric lens system
EP1608933A4 (en) * 2003-04-03 2007-03-21 Zetetic Inst Apparatus and method for measurement of fields of backscattered and forward scattered/reflected beams by an object in interferometry
US7324209B2 (en) * 2003-07-07 2008-01-29 Zetetic Institute Apparatus and method for ellipsometric measurements with high spatial resolution
WO2005008334A2 (en) 2003-07-07 2005-01-27 Zetetic Institute Apparatus and method for high speed scan for detection and measurement of properties of sub-wavelength defects and artifacts in semiconductor and mask metrology
US7355722B2 (en) * 2003-09-10 2008-04-08 Zetetic Institute Catoptric and catadioptric imaging systems with adaptive catoptric surfaces
US20050111007A1 (en) * 2003-09-26 2005-05-26 Zetetic Institute Catoptric and catadioptric imaging system with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces
US7312877B2 (en) * 2003-10-01 2007-12-25 Zetetic Institute Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopy
TW200538703A (en) 2004-05-06 2005-12-01 Zetetic Inst Apparatus and methods for measurement of critical dimensions of features and detection of defects in UV, VUV, and EUV lithography masks
US7298496B2 (en) * 2004-05-21 2007-11-20 Zetetic Institute Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry
US7161680B2 (en) * 2004-08-16 2007-01-09 Zetetic Institute Apparatus and method for joint and time delayed measurements of components of conjugated quadratures of fields of reflected/scattered and transmitted/scattered beams by an object in interferometry
WO2006023612A2 (en) * 2004-08-19 2006-03-02 Zetetic Institute Sub-nanometer overlay, critical dimension, and lithography tool projection optic metrology systems based on measurement of exposure induced changes in photoresist on wafers
US7145663B2 (en) * 2004-09-20 2006-12-05 Zetetic Institute Catoptric imaging systems comprising pellicle and/or aperture-array beam-splitters and non-adaptive and/or adaptive catoptric surfaces
DE102005023480B4 (en) * 2005-03-24 2009-02-26 *Acri.Tec AG Gesellschaft für ophthalmologische Produkte intraocular lens
DE602006002604D1 (en) * 2005-04-22 2008-10-16 Koninkl Philips Electronics Nv LENS WITH VARIABLE FOCUS
CN106501926A (en) * 2017-01-09 2017-03-15 邯郸美的制冷设备有限公司 Virtual image display apparatus and household electrical appliance
IT201700122280A1 (en) * 2017-10-27 2019-04-27 3D I V E S R L Light field volumetric device for displaying fluctuating and stereoscopic 3D image streams 5 and relative method

Citations (2)

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Publication number Priority date Publication date Assignee Title
US3628027A (en) * 1969-12-17 1971-12-14 Sulzer Ag Beam deflecting and focusing means for photoelectric monitoring, counting or control apparatus
US5241423A (en) * 1990-07-11 1993-08-31 International Business Machines Corporation High resolution reduction catadioptric relay lens

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JPS50123295A (en) 1974-03-15 1975-09-27
US4226501A (en) 1978-10-12 1980-10-07 The Perkin-Elmer Corporation Four mirror unobscurred anastigmatic telescope with all spherical surfaces
US5402267A (en) * 1991-02-08 1995-03-28 Carl-Zeiss-Stiftung Catadioptric reduction objective
JPH0669614A (en) * 1992-08-18 1994-03-11 Cmk Corp Data indicating manufacturing date of printed wiring board
PT101696A (en) * 1995-05-04 1996-12-31 Joaquim Antonio Abrantes Cande PROJECT OBJECTIVE MADE OF MIRRORS CORRECTED
JPH1138323A (en) * 1997-07-16 1999-02-12 Nikon Corp Catoptric system and exposure device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3628027A (en) * 1969-12-17 1971-12-14 Sulzer Ag Beam deflecting and focusing means for photoelectric monitoring, counting or control apparatus
US5241423A (en) * 1990-07-11 1993-08-31 International Business Machines Corporation High resolution reduction catadioptric relay lens

Also Published As

Publication number Publication date
KR20040032816A (en) 2004-04-17
JP2005506556A (en) 2005-03-03
AU2002249855A1 (en) 2002-07-24
EP1344101A4 (en) 2006-05-03
CN100439964C (en) 2008-12-03
US20020131179A1 (en) 2002-09-19
CN1489718A (en) 2004-04-14
WO2002056062A9 (en) 2003-04-24
EP1344101A2 (en) 2003-09-17
US6552852B2 (en) 2003-04-22
JP4195292B2 (en) 2008-12-10
WO2002056062A2 (en) 2002-07-18

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