WO2002039099A3 - Measurement of surface defects - Google Patents
Measurement of surface defects Download PDFInfo
- Publication number
- WO2002039099A3 WO2002039099A3 PCT/EP2001/013042 EP0113042W WO0239099A3 WO 2002039099 A3 WO2002039099 A3 WO 2002039099A3 EP 0113042 W EP0113042 W EP 0113042W WO 0239099 A3 WO0239099 A3 WO 0239099A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- lines
- inspection
- light source
- measurement
- interference pattern
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002541373A JP2004513364A (en) | 2000-11-13 | 2001-11-08 | Measurement of surface defects |
EP01993826A EP1336094A2 (en) | 2000-11-13 | 2001-11-08 | Measurement of surface defects |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP00203979.0 | 2000-11-13 | ||
EP00203979 | 2000-11-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2002039099A2 WO2002039099A2 (en) | 2002-05-16 |
WO2002039099A3 true WO2002039099A3 (en) | 2003-02-13 |
Family
ID=8172263
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2001/013042 WO2002039099A2 (en) | 2000-11-13 | 2001-11-08 | Measurement of surface defects |
Country Status (4)
Country | Link |
---|---|
US (1) | US20020191179A1 (en) |
EP (1) | EP1336094A2 (en) |
JP (1) | JP2004513364A (en) |
WO (1) | WO2002039099A2 (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6597446B2 (en) * | 2001-03-22 | 2003-07-22 | Sentec Corporation | Holographic scatterometer for detection and analysis of wafer surface deposits |
TWI280128B (en) | 2002-05-22 | 2007-05-01 | Smithkline Beecham Corp | 3'-[(2Z)-[1-(3,4- dimethylphenyl)-1,5-dihydro-3-methyl-5-oxo-4H-pyrazol-4-ylidene]hydrazino]-2'-hydroxy-[1,1'-biphenyl]-3-carboxylic acid bis-(monoethanolamine) |
WO2006014152A1 (en) * | 2004-07-01 | 2006-02-09 | Midwest Research Institute | Optic probe for semiconductor characterization |
FR2927175B1 (en) * | 2008-02-05 | 2011-02-18 | Altatech Semiconductor | DEVICE FOR INSPECTING SEMICONDUCTOR WAFERS |
CN103018258B (en) * | 2011-09-23 | 2015-11-25 | 深圳中科飞测科技有限公司 | Wafer detection method and wafer detecting apparatus |
FR3026485B1 (en) | 2014-09-29 | 2016-09-23 | Altatech Semiconductor | METHOD AND SYSTEM FOR INSPECTING PLATELETS FOR ELECTRONICS, OPTICS OR OPTOELECTRONICS |
FR3026484B1 (en) | 2014-09-29 | 2018-06-15 | Altatech Semiconductor | METHOD AND SYSTEM FOR INSPECTING TRANSPARENT PLATES FOR ELECTRONICS, OPTICS OR OPTOELECTRONICS |
FR3049710B1 (en) | 2016-03-31 | 2020-06-19 | Unity Semiconductor | LASER DOPPLER EFFECT INSPECTION METHOD AND SYSTEM FOR MICROELECTRONICS OR OPTICS |
FR3076618B1 (en) * | 2018-01-05 | 2023-11-24 | Unity Semiconductor | METHOD AND SYSTEM FOR OPTICAL INSPECTION OF A SUBSTRATE |
EP4202423A1 (en) | 2021-12-23 | 2023-06-28 | Unity Semiconductor | A method and system for discriminating defects present on a frontside from defects present on a backside of a transparent substrate |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5343290A (en) * | 1992-06-11 | 1994-08-30 | International Business Machines Corporation | Surface particle detection using heterodyne interferometer |
US5502001A (en) * | 1990-12-19 | 1996-03-26 | Hitachi, Ltd. | Method of forming light beam and method of fabricating semiconductor integrated circuits |
WO1997034124A1 (en) * | 1996-03-14 | 1997-09-18 | Phase Metrics, Inc. | Optical surface detection for magnetic disks |
US5698069A (en) * | 1995-09-10 | 1997-12-16 | Nikon Precision Inc. | Technique for detecting particles on a wafer support surface |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4030830A (en) * | 1976-01-05 | 1977-06-21 | Atlantic Research Corporation | Process and apparatus for sensing defects on a smooth surface |
US4334779A (en) * | 1980-08-04 | 1982-06-15 | Canadian Patents & Dev. Limited | Non-contact optical apparatus for measuring the length or speed of a relatively moving surface |
US4794265A (en) * | 1987-05-08 | 1988-12-27 | Qc Optics, Inc. | Surface pit detection system and method |
JP2711140B2 (en) * | 1989-06-08 | 1998-02-10 | 三菱電機株式会社 | Fine particle measuring device |
JPH0427848A (en) * | 1990-05-23 | 1992-01-30 | Hitachi Electron Eng Co Ltd | Sample scanning system of foreign matter inspection apparatus |
US5486919A (en) * | 1992-04-27 | 1996-01-23 | Canon Kabushiki Kaisha | Inspection method and apparatus for inspecting a particle, if any, on a substrate having a pattern |
-
2001
- 2001-11-08 EP EP01993826A patent/EP1336094A2/en not_active Withdrawn
- 2001-11-08 WO PCT/EP2001/013042 patent/WO2002039099A2/en not_active Application Discontinuation
- 2001-11-08 JP JP2002541373A patent/JP2004513364A/en active Pending
- 2001-11-08 US US10/169,819 patent/US20020191179A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5502001A (en) * | 1990-12-19 | 1996-03-26 | Hitachi, Ltd. | Method of forming light beam and method of fabricating semiconductor integrated circuits |
US5343290A (en) * | 1992-06-11 | 1994-08-30 | International Business Machines Corporation | Surface particle detection using heterodyne interferometer |
US5698069A (en) * | 1995-09-10 | 1997-12-16 | Nikon Precision Inc. | Technique for detecting particles on a wafer support surface |
WO1997034124A1 (en) * | 1996-03-14 | 1997-09-18 | Phase Metrics, Inc. | Optical surface detection for magnetic disks |
Also Published As
Publication number | Publication date |
---|---|
WO2002039099A2 (en) | 2002-05-16 |
JP2004513364A (en) | 2004-04-30 |
EP1336094A2 (en) | 2003-08-20 |
US20020191179A1 (en) | 2002-12-19 |
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