WO2002036849A1

WO2002036849A1 - Work table with a table top

Info

Publication number: WO2002036849A1
Application number: PCT/EP2001/012600
Authority: WO
Inventors: Klaus HÜGLER
Original assignee: Asys Automatic Systems Gmbh & Co. Kg
Priority date: 2000-10-31
Filing date: 2001-10-31
Publication date: 2002-05-10
Also published as: DE10054045A1; DE10054045B4

Abstract

The invention relates to a work table (1) with a table top (4) provided in the form of a film-like covering (5) that delimits a table space (6), inside of which a drive part (7) is located. An actuatable working device (3) located on the opposite side of the film can be displaced on the table surface by said drive part.

Description

Work table with a table top

The invention relates to a work table with a table top, and this in relation to working conditions in which an implement is movable to the table top and can or must be able to work with this implement under conditions that create an atmospheric separation between the working environment of the implement and the associated one Make the drive appear expedient, be it because of the aggressiveness of the media with which the implement comes into contact, but which would damage the drive, or because of the contamination of this environment with harmful substances, bacteria or the like, which require isolated treatment , be it for reasons that require isolation of the working environment from the drive, in order to avoid as far as possible the formation of contamination in the working environment, for example by abrasion in the drive, and / or the entry of contaminants into the working environment from the surroundings exclude as best as possible or be it to realize different pressures, in particular also vacuum levels in the work environment and in the drive area. Other possible reasons include e.g. the implementation of an explosion-proof drive connection.

This is achieved with a work table according to claim 1, which has a film-like cover as a table top, which delimits a table-side space from the work environment atmospherically isolating, and this in connection with an implement that is supported lying in the work environment against a drive part that Working tool is located in relation to the film in the cavity and the contact-free with the

BESTATIGUNGSKOPIE Tool is drive-coupled, the film-like cover with respect to the tool has essentially no supporting function, but merely forms a pressure-hard intermediate layer, via which the tool is supported against the drive part and is thus carried by the drive part.

As a drive part in the context of the invention, a slide or carriage which is movable parallel to the table top, and thus for the film-like cover, is expediently used, which is preferably guided in a linearly displaceable manner and can be rotated with its guide about an axis which is upright with respect to the table top, so that the linear guide and the The linear guide can be rotated when the linear guide extends over the clear width of the space covered by the film, the entire table surface can be traversed, and this at least in two positions of the drive part and the working device coupled to them, each offset by 180 °. In principle, it is also possible within the scope of the invention to carry out the coupling between the implement and the drive part in such a way that the implement can be rotated relative to the drive part, so that a wide variety of work can be carried out in relation to the implement with its respective functional design.

In the simplest embodiment, the drive part can be moved along a rail guide, which in turn can be rotated about an upright axis, a tool in the form of a carriage being provided as a counterpart to the drive part, which has a transport or conveying function, the carriage being provided, for example, with a boom can be docked to these work and / or storage and / or loading stations when the work table is assigned to a central distribution station.

Conditions of this type are present, for example, in the processing or production of wafers and / or semiconductors and / or other disk-shaped substrates, in some cases there is a requirement to work in a high vacuum or even in an ultra high vacuum. These conditions can also be mastered with advantage using a work table according to the invention, regardless of the fact that, for a work environment in which an ultra-high vacuum prevails and has to be maintained, there are usually also elevated working temperatures of up to the order of 200 °, for example to avoid condensation.

In working conditions with ultra-high vacuum as the working environment, it proves to be expedient if there is a vacuum, in particular a high vacuum, in the table space receiving the drive, so that the given pressure drop with respect to the table top designed as a film-like cover only results in small specific loads and low deformation forces, which film-like cover is therefore only deformed to a very small extent, so that the coupling between the working device and the drive part is not impaired and the displaceability and rotatability of the working device in relation to the film-like cover is not impaired.

The connection to the corresponding vacuum pumps is expediently carried out in such a way that the lower vacuum, for example the high vacuum, is initially built up both in the work environment and in the table space, and that an ultra-high vacuum is only subsequently generated in the work environment. In order to rule out extreme loads that could lead to the destruction of the film-like cover, the associated vacuum connections are expediently switched in such a way that the build-up of an ultra-high vacuum is bound to the previous build-up of a high vacuum or, conversely, the connection for the ultra-high vacuum is also interrupted if the high vacuum fails , In addition to preventing damage, this also results in practical, short evacuation times for the workflow when building up the ultra-high vacuum, since this is already formed from the high vacuum. In an embodiment of the invention, it proves to be expedient to design the table chamber as a bowl-shaped annular chamber, in the edge region of which the film-like cover is to be fastened. This proves to be particularly useful in connection with foil-like, thin-walled steel sheets, in particular stainless steel foil sheets, the attachment preferably being able to be carried out via a separate fastening ring, to which the sheet is welded and which in turn, when attached to the edge of the shell by axial tension, the sheet is like an eardrum tense.

Expediently, the table chamber designed as a shell-shaped annular chamber has a dimensionally stable, in particular rigid bottom, or also correspondingly offset surfaces, so that for a guide assigned to the drive part, in particular a rail guide, axial support is also provided in the peripheral region of the table chamber by means of a corresponding drive, for example via corresponding ones Rollers are possible so that the rail guidance is relieved of static loads and free overhangs that tend to vibrate are avoided.

The use according to the invention of a rail guide which is rotatable with respect to an axis of rotation perpendicular to the film-like cover proves to be expedient for the drive part, the shell-like configuration of the annular chamber with a solid base also providing the possibility of a stable radial bearing of the rail guide, it proving to be expedient to design the rail guide with a corresponding, central drive shaft penetrating the floor.

Coaxial to this drive shaft is preferably a drive shaft belonging to the drive part which can be moved along the rail guide, via which the drive designed as a belt drive for the drive part runs, the belt drive being formed by a belt, for example in the form of a perforated or toothed belt, which is in a positive connection to the drive shaft. Mentrieb is formed, with the drive structure m the drive part is connected, which is movable along the rail guide.

The combination of the drive for the implement in the table space closed off via the film-like cover according to the invention, in combination with the contactless drive connection between the drive part and the implement provided according to the invention, makes it particularly expedient for use in work fields which, based on the working conditions, establish a strict atmospheric separation between the Make the work environment and the drive necessary, whereby according to the invention the given combination of the drive in the work table also gives the possibility of designing the work table, and thus also the implement, in a height-adjustable manner, the atmospheric separating connection of the work table, which is altogether height-adjustable in the work environment, for example to a work environment at least partially delimiting working chamber is possible in a simple manner, the working table and working chamber in the area of their hubvers position of the table mutually shifting overlap areas are connected via a bellows connection.

In the context of the invention, the rail guide can preferably be designed as a bush guide with bushes running on guide tubes, one part of which is connected to the drive shaft carrying the rail guide and the other part carries the drive part, the non-contact drive connection between the drive part and implement preferably being via a magnetic Coupling is realized. This can work according to the invention with permanent magnets and / or electromagnets, in particular also provide for the combined use of such magnets, it being expedient to carry out a corresponding alignment of the implement with respect to the working part via the arrangement of electromagnets with assignment of the magnet coil to the drive part, and so on secure positioning achieved by the permanent magnets, regardless of one Energization of the magnetic coils. The electromagnets preferably form a polarized magnet system, so that a return to the target position can be achieved via sensor-detected deviations from a target position with detection of the deviation according to direction and size by changing the current fuse and current strength.

The cable routing required for the power supply is expediently carried out via the drive shaft carrying the rail guide, and the connection to the drive part is expediently carried out via a cable drag connection known per se.

In the solution according to the invention, the film-like cover functionally forms only a partition wall, but not a supporting wall, and the drive part and implement are supported against one another via corresponding supports, the film forming a pressure-resistant or pressure-resistant intermediate layer. Support balls, which can be designed as steel balls, ceramic balls or the like and which, in a preferred solution, are coaxial with respect to their apexes, have proven to be suitable for the support. In order to minimize friction losses and to ensure that the balls roll off easily on the film-like cover, they are mounted with as little friction as possible, whereby, if the given working environment permits, provision may be made for an air bearing, with the air flow additionally supporting the film can contribute. Another possibility is to support the balls via a ball carpet in the respective bearing pan, the bearing pan allowing the balls of the ball carpet to circulate, so that there is only rolling friction.

Further details and features of the invention emerge from the claims. Furthermore, the invention is explained in more detail below with the aid of exemplary embodiments. Show it: 1 shows a schematic representation of a work table according to the invention in an indicated working environment, in a highly schematic sectional representation to explain the functional principle,

2 is a rail guide used in connection with a work table according to the invention, which carries the drive part,

3 shows the working device assigned to the drive part of the rail guide and can be driven via this, the side of the working device facing the table top being shown,

Fig. 4 is an enlarged view of the detail

IV in FIG. 3 with a permanent magnetic counterpart assigned to a magnetic coil on the drive part,

5 shows a section according to V in FIG. 3, showing a stop roller and a support ball,

6 shows an enlarged detail according to VI in FIG. 3, showing the round magnet used in the position censoring for the implement,

7 the rail guide carrying the drive part in a view from below,

Fig. 8 is a side view of the rail guide according to

7 with the working device opposite the drive part,

Fig. 9 in an enlarged detail between

Drive part and working device provided, contactless power supply in a schematic, separate representation,

10 a magnet coil assigned to the drive part in association with the permanent magnet on the implement side as a counterpart, the magnet coil and permanent magnet forming a polarized magnet system in the coupling position of the drive part and the implement corresponding positioning, 11 in a schematic representation, and without representation of the film-like cover, a central distribution station with a work table arranged in it or associated with it,

Fig. 12 is a plan view of a rail guide

Work table with the implement designed as a transport trolley and the cantilever carried by the implement, the cantilever being designed, for example, as a carrier for a disk-shaped substrate,

13 shows an exemplary embodiment of a central distribution station with a work table arranged therein, only a partial area being shown with regard to the essentially symmetrical design,

Fig. 14 is an enlarged view of the central, the

Area of the work table comprising drive shafts in a schematic sectional illustration,

15 the support of the implement against the drive part via support balls in an enlarged detail view,

16 and 17 are schematic representations of a support according to FIG. 15 with different types of bearings of the support balls, and

18 is an enlarged detail according to XVIII in

Fig. 13, in the sealing and cooling in the drive shaft area of the work table are illustrated enlarged.

Fig. 1 illustrates the basic structure of a work table 1, which receives the drive 2 for a contactlessly driven implement 3, which is symbolically designed here as a carriage or carriage and which can be moved on the table top 4. The table top 4 is designed as a film-like cover 5 of a table space 6, the one Part of the drive 2 accommodates, with the working device 3 lying above the table top 4 being assigned a drive part 7 lying below the table top 4, via which the working device 3 can be driven in a contact-free manner and which, by means of the pressure-rigid film forming the table top 4, acts as a cover 5 for the working device 3 carries / The drive part 7 is assigned a rail guide 8, along which the drive part 7 is displaceable and which can be rotated about an axis of rotation 9 perpendicular to the table top 4.

In the view shown, the rail guide 8 forms a T with the shaft 10 of the rail guide concentric with the axis of rotation 9, the shaft 10 being connected to a rotary drive 11, which is formed here by an electric motor concentric with the shaft 10. The shaft 10 is enclosed by a coaxially mounted shaft 12, which serves to drive the drive part 7 along the rail guide 8, which is not shown in FIG. 1, the drive connection of the shaft 12 opposite the rail guide 8 to a separate rotary drive, not shown, being preferred is not shown here in the form of an electric motor. The shafts 10 and 12 pass through the foot part 13 of the table foot and are connected with their rotary drives to a lifting mechanism 14 in the exemplary embodiment by means of a boom 15, whereby the working table 1 as a whole can be adjusted in height in its working environment 16 via the lifting mechanism 14, this schematically in the exemplary embodiment is indicated as a section of a chamber or the like, which has walls, such as a wall 17 surrounding the work table 1 in the region of its foot part 13, to which the lifting mechanism 14 is fastened, as a result of which the said height adjustability of the work table 1 in the working environment forming, for example, a working chamber 16 is given.

The working environment 16 is atmospherically separated from the table space 6 by the film-like cover 5 of the table 1, so that the working environment 16 can have completely different atmospheric conditions than in the table space 6, working environment 16 in the area of the wall enclosing the foot part 13 against the foot part 13 is also separated atmospherically by means of a bellows connection 18, and wherein seals 19 and 20 located in the area of the foot part 13 can also be used to complete the shaft bushings to the table space 6, so that in the table space 6 from the atmospheric conditions in the working environment 16, as well as from the atmosphere, separate atmospheric conditions can be established or exist.

In connection with the contactless drive for the working device 3, the work table 1 according to the invention can accordingly be used under working conditions in which explosion protection requirements exist, as well as under working conditions in which aggressive media or the like require a corresponding separation of the drives. This also gives the possibility of also meeting the special requirements which are placed on devices operating in high vacuum, and in particular in ultra-high vacuum. For example, in a working environment 16 in which an ultra-high vacuum is built up, it is possible to work in the table space 6 with a high vacuum, the gradation of the vacuum from the ultra-high vacuum with pressures up to the order of 10 ¹¹ bar to the high vacuum with pressures in the order of magnitude of about 10 ^"7 bar also results in only comparatively low specific loads with respect to the film-like cover 5, so that even with very thin film-like covers 5 the flat, flat structure is retained, which with regard to the contact-free drive between the drive part 7 and the implement 3, particularly when the contactless drive 7 is designed as a magnetic drive.

As foil-like covers 5, for example, foil-like thin stainless steel sheets are suitable, such covers 5 also being expedient with regard to other boundary conditions in aggressive atmospheres or in working conditions which require elevated temperatures. For example, also work with an ultra-high vacuum to prevent condensation, or for other reasons, surface temperatures of up to 200 ° of the wall areas delimiting the ultra-high vacuum.

In the exemplary embodiment, the drive part 7 is assigned a rail guide 8, which in turn can be rotated with respect to the axis of rotation 9 and which is assigned additional drives in the end regions for support, which are designated by 21 and are formed by rollers. Such support is expedient , in order to ensure the necessary stability and to avoid undesirable vibrations, even with larger table tops 4 over the full length of the rail guide 8, and also to avoid undesirable vibrations, especially since, depending on the working use of the work table 1, high rotational and feed speeds are also sought.

Work tables of the aforementioned type can thus also be used as central distribution stations, as central transport modules for work centers constructed in a cluster construction for the production of microsystems and components on planar substrates, in particular wafers, wherein the working devices 3 can be designed with corresponding supports 35 for the planar substrates.

Deviating from the exemplary embodiment shown, it is also possible within the scope of the invention to support and guide the drive part 7 in some other way, for example via a support designed analogously to a handling device, handling devices of this type being fundamentally known and used, for example, as conveyors in central distribution stations, so for example according to DE 198 31 032 AI.

The rail guide 8 provided in the exemplary embodiment, however, results in a particularly simple construction and also advantageously enables the respective energy supply to the drive part 7, as well as a simple construction of the drive for the slide guide 8. In addition, their storage, as indicated at 22, relative to the work table 1 in the area of the running surfaces for the drives 21, that is to say close to the slide guide, is also advantageously possible, so that the slide guide 8 is aligned and supported directly opposite the work table 1 is and in turn can serve as a centering for the associated drives and shafts.

An isolated representation of the elements which are particularly important in the drive 2 for the implement 3 for understanding the invention is shown primarily in FIGS. 2 to 10, with the rail guide 8 carrying the drive part 7 being shown in perspective in FIG. 2. The rail guide 8 has a central connection to the shaft 10, illustrated by corresponding fastening bores 23 and the central feed-through bore 24 for an electrical supply line, which is denoted by 25 and which is connected to a trailing cable 26 which lies between one along the Rail guide 8 extending storage rail 27 and extending along the rail guide 8 drive part 7 extends.

The rail guide 8 has to the Langsmittelach.se, which is designated 28, laterally offset and parallel guide rails 29, which run as guide tubes between headers 30, only one of which is visible, and between which a middle support body 31 runs in which the mounting holes 23 are provided. Elongated guide sleeves 32 are guided on the guide rails 29 and end in the area of the drive part 7 and carry it. In relation to the length of the guide rails 9, the length of the guide sleeves 32 is coordinated in such a way that there is a free travel area which is dimensioned such that the drive part 7 can be moved at least from its end position shown to a central central position, so that in connection with the rotatability of the rail guide 8 about the axis of rotation 9, the entire table surface of the work table 1 can be driven on. The working device 3 is assigned to the drive part 7, the contact-free coupling in this regard being produced on a magnetic basis within the scope of the exemplary embodiment.

The drive part 7, which is carried over the guide sleeves 32 and which can be magnetically coupled to the implement 3 in a contactless manner, essentially has the shape of a rectangular slide in the exemplary embodiment, which is provided with a rectangular base plate 33. The magnets are arranged along the edges of this base plate 33, via which the coupling with corresponding magnets takes place on the implement 3, which also has a rectangular base plate, which is designated by 34 and which forms the base of a carriage or carriage, in which in FIG 3 shown embodiment, the base plate 34 on its side opposite the magnets is the carrier of a paddle-like gripper or a support 35, on which a disk-shaped substrate or the like can be deposited, in particular for transport purposes, but possibly also for work purposes of the implement 3 is positioned accordingly.

In the context of the exemplary embodiment, the magnetic coupling takes place via permanent magnets 36 or 37 arranged in rows along the edges of the base plate 33 or 34, which are so next to one another with respect to the respective base plate 33 or 34, that is to say with respect to the drive part 7 and the implement 3 are arranged in the respective line so that magnets 36 and 37 lying next to one another, with their poles of the same name, adjoin one another in the line passage direction. The polarity of the magnets 36, which are assigned to the base plate 33 of the drive part 7, is, based on the respective line direction, opposite to the polarity of the magnets 37, which are arranged on the base plate 34 of the implement 3, so that when coupled and lying one above the other aligned magnets 36, 37 with their poles of the same name overlap each other. Along the circumference of the base plate ^"33 and 34 located and designed as permanent magnets in magnet row form juxtaposed with respect to the base plate 33 designated with 36 and with respect to the base plate 34 with the 37th

In order to achieve a corresponding alignment to the overlap position in the event of any mutual displacements of the implement 3 relative to the drive part 7, in addition to the permanent magnets 36 and 37, the drive part 7 are assigned magnetic coils 38, which interact with permanent magnets 39 on the implement 3 when energized as actuators a magnet coil 38 with a permanent magnet 39 forms a polarized magnet system and these magnets 38, 39 are shown schematically in their overlap position in an enlarged detail according to FIG. 10.

In relation to the exemplary embodiment, which shows a preferred embodiment according to the invention, the magnet coils 38 with the associated permanent magnets 39 are each arranged in the center of the row between the permanent magnets 36 and 37 arranged in a row along the edges of the base plates 33 and 34, respectively, and thus lie on the axes an axis cross, one axis of which lies in an upright plane with the longitudinal central axis 28 of the rail guide 8. The axes of the axis cross, on the axes of which the magnet coils 38 and the permanent magnets 39 lie, have an intersection which lies in the center of the respective base plate 33 or 34.

FIGS. 4 and 10 illustrate that the permanent magnets 39 each have a magnetic core 40 which is delimited laterally, that is to say opposite in the respective row direction by pole shoes 41 and 42, FIG. 10 showing that when the drive part 7 and Tool 3 against each other these pole pieces 41 and 42 lie between the legs 43 to 45 of a yoke 46 of the magnetic coil 38, the legs 43 to 45 running parallel to one another and to the pole pieces 41 and 42, each of which relates to the space between an outer Yoke legs 43 or 45 and the middle yoke leg 44 of the yoke 46, which is E-shaped in cross section, are aligned, the middle yoke leg 44 being enclosed by the coil 47.

While the pole pieces 41 and 42 in a predetermined manner form a north or a south pole ^", the polarity of the magnet coil 38 is reversible in dependence on the current direction, so that depending on the current direction and current the driving power can be set up with respect to a via in any roofing or displacement of the implement 3 relative to the drive part 7, these can be aligned with one another.

The exemplary embodiment according to FIGS. 2 and 3 further illustrates the possibility according to the invention of ensuring, in spite of the contactless drive connection between drive part 7 and implement 3, a power supply for consumers assigned to implement 3, if desired, and also without contact. For this purpose, a transmission device 48 is used, which in the manner of a transformer comprises a primary part 49 and a secondary part 50, the primary part 49 being assigned to the drive part 7 and the secondary part 50 to the implement 3, and the primary part and secondary part each comprising a coil 51 and 52, which is assigned a core 53 or 54, which merges into lateral arms 55 or 56, which end in lateral cantilever shoes 57 and 58. The shoes 57 and 58 are arranged opposite one another to the respective spool 51 and 52 and, with respect to a cover 5 in a film-like configuration, as is indicated schematically in FIG. 9, are in contact-free relationship with respect to the film cover 5 in between, so that there are large transfer areas.

The positioning of the implement 3 relative to the drive part 7 guided and aligned via the rail guide is monitored by a sensor arrangement 60 (FIG. 8), which preferably includes a drive part 7, in particular as a Hall sensor trained sensor 61, to which a round magnet 62 (FIG. 6) is assigned as a position sensor on the part of the working device 3, the respective positional deviation in terms of size and direction being detected via such a sensor arrangement 60 and implemented accordingly by means of a corresponding regulation with respect to the magnet coils 38 that these are energized in a manner that leads to an alignment of the working device 3 correcting the respective deviation, wherein the direction of the respective actuating forces can be influenced via the respective current direction and the magnitude of the respective actuating force can be influenced via the current intensity.

In order to be able to detect this again easily and quickly via the magnetic coupling, even in cases in which the implement 3 has left its position predetermined by the coupling to the drive part 7, it proves expedient to have the implement 3 at least in two to assign laterally projecting stop rollers 63 to a side edge of the same assigned corner areas, via which the implement 3, for example when striking against the peripheral wall of the table space 6 (Fig. 1) is intercepted, so that by appropriate positioning of the drive part 7 to the implement 3 in the intercepted position, the implement 3 can be transferred back to the drive part 7 in a magnetically coupled position. In a departure from the exemplary embodiment, stop rollers 63 can of course also be assigned to all corner points of the implement 3.

7 and 8 illustrate an expedient embodiment of the drive, via which the drive part 7 can be moved along the rail guide 8. The relevant drive 64 is assigned to the underside of the rail guide 8 and is preferably located on the underside of the support body 31, the support body 31 containing the corresponding bearing points for deflection wheels 66 and tensioning rollers 67 provided at the end, the latter cooperating with the drive wheel 68, which is not shown in FIG in a more detailed manner via the hollow shaft 12 according to FIG. 1 is driven and is preferably carried over this. The drive wheel 68 is indicated schematically in FIG. 1. In order to ensure exact positioning via the belt drive in the form of the belt drive 65, the associated belt is preferably designed as a perforated belt, the holes of which, in a manner not shown, engage with corresponding spike-like extensions of the drive wheel 68, the belt drive 65 being parallel to a drive strand 69 runs to the rail guide 8 and is coupled to the drive part 7, as indicated at 70 in FIG. 7. The drive section of the belt drive 65 is designated 71 and is guided on the side remote from the drive section 69 via the drive wheel 68, a large wrap angle being ensured by the drive section 71 being tensioned against the drive wheel 68 via the tensioning rollers 67, the tensioning rollers 67 lie on both sides of the drive wheel 68 in the longitudinal direction of the rail guide 8, and preferably at about the level of its axis of rotation, corresponding to the axis of rotation 9 in FIG. 1.

The inventive design of the table top 4 as a film-like cover 5 of the table space 6 assumes that the cover 5 essentially only forms a pressure-resistant intermediate layer, by means of which the implement 3 is supported with respect to the drive part 7, without the film-like cover 5 itself essentially has a supporting function. For this purpose, in the exemplary embodiment, the corner points of the drive part 7 or its base plate 33 and the implement 3 or its base plate 34 are assigned to one another in overlapping supports, which are designated as a whole by 72. These supports are shown in FIGS. 15 to 16 in various representations which are exemplary of the invention, FIG. 15 showing such a support 72 against the cover 5 located therebetween via two support balls 73, 74, the apex of which lies opposite one another, in particular axially opposite each other are supported against each other via the cover 5 in between, and the support ball 73 for the implement 3, and the support ball 74 for the attachment drive part 7, which are each only indicated, is assigned. The support balls 73 and 74 are mounted with low friction with regard to the lowest possible forces required for contactless displacement of the implement 3, with FIGS. 16 and 17 illustrating two possible configurations in the diagram.

16 shows an air bearing for the support balls 73, 74, which is formed by the spherical receptacles 75, 76 being assigned to the support balls 73 and 74, in such a way that air inlets 77, 78 between support balls 73 and 74 and an air cushion is formed in each case. In a departure from the one shown, the dome-shaped receptacles 75, 76 can also be extended in an apron-like manner against the cover 5, so that there are only small exit gaps between the aprons and the cover 5 which have been drawn down into the area of the cover 5 the effect of the formation of a certain air cushion.

In the embodiment according to FIG. 17, the support balls 73, 74 are each mounted on ball rugs 79 and 80, the ball rugs enabling ball circulation in a manner not shown, so that there is a full-surface ball guide with largely only rolling support of the support balls 73 and 74 against the balls of the respective carpet 79 or 80 results.

11 to 13 illustrate, in part only in a basic representation, the assignment of the work table 1 according to FIG. 1 to a chamber, which is designed, for example, as a central distributor station to which work modules, storage modules and / or loading stations are docked in a manner not shown, the chamber designated by 81 accommodating the work table 1 in a manner not shown in FIG. 11, on the table top 4 of which a carriage or sled-shaped element is provided as the implement 3, which, in analogy to FIG. 3, has a paddle-like support 35 for disk-shaped substrates 82 or The like carries, which in connection with the longitudinally displaceability of the drive part 7 along the rail guide 8 and the rotatability of the rail guide 8 about the axis of rotation 9 (FIG. 1) via the connection openings 83 assigned to the chamber from the central distribution station formed by the chamber 81 Work modules, memory modules and / or loading stations can be transferred.

An isolated illustration of the rail guide 8 with the implement 3, the support 35 carried by the implement 3 and the disc-shaped substrate 82 carried by the implement 3 is shown for further clarification in FIG. 12, reference being made to the preceding description for the explanation thereof and the reference symbols used there.

FIG. 13 shows the working chamber 81 shown in perspective and in simplified form in the schematic in FIG. 11 in a partially schematic sectional illustration, reference being made to the explanations for the previous figures with regard to the reference symbols used.

FIG. 13 additionally illustrates the fastening of the film-like cover 5 by means of a clamping ring 84 which is placed on the end face on the upper edge 85 of the table shell delimiting the table space 6 and here the cover 5 by means of a radially inner annular bead 86 projecting in the direction of the cover 5 of the edge 85 spans. The connection of the cover 5 with a clamping ring 84 facilitates the rim-side mounting of the cover 5, and the tensioning via the clamping ring 84 in connection with the annular bead 86 facilitates a uniform flat clamping of the cover 5, so that it can form a flat table surface, the Use of a sheet-like thin stainless steel sheet is advisable.

The illustration according to FIG. 13 in particular illustrates that the solution according to the invention is particularly suitable for applications in which in the chamber 81, and given if atmospheric conditions also prevail in the docked stations, against which the drive area assigned to the work table 1 must be hermetically sealed off. Furthermore, such a configuration is also expedient in cases in which particularly high negative pressures prevail in the working chamber 81, and possibly also in the adjacent stations and modules. If, for example, an ultra-high vacuum is built up in the working chamber 81, it is expedient, and possibly even absolutely necessary, with regard to the minimization of the volume in which it has to be built up and maintained, the atmosphere of the drive part for a working device 3 separate. This separation is achieved by the design of the work table 1 according to the invention, as is schematically explained with reference to FIG. 1 and as it is shown again in a more detailed configuration in FIG. 13, reference being made to FIG. 1 in this regard.

In order to be able to work with thin-walled table covers 5, even in the case of extreme negative pressures, despite the intended atmospheric separation, FIG. 13 additionally illustrates a connection 87 of the table room 6, via which a high vacuum in the table room 6 is made possible, for example. Starting from an ultra-high vacuum in the chamber 81, when building a high vacuum in the table space 6 on the film-like cover, only comparatively small surface loads result, so that it can be kept thin and thereby enables the contact-free coupling of the working device 3 to the drive part 7, the film-like Cover 5 with respect to the material used for this purpose can preferably also be configured such that it conducts magnetically well in the coupling direction between implement 3 and drive part 7. Because of the small wall thickness of the film, there is also a blocking effect in the direction of the covering plane due to the magnetic saturation that occurs, so that comparatively high driving forces can be transmitted to the implement 3. Not shown in FIG. 13 is the connection to the vacuum source required for the build-up of the ultra-high vacuum in the working chamber 81, whereby it has proven expedient in this respect to first connect the table space 6 and the work chamber 81 to the vacuum source required for the build-up of the high vacuum and ^ Building on this to further evacuate the work chamber 81 until the ultra-high vacuum is reached.

With regard to working with ultra-high vacuum, but also for other reasons, relatively high temperatures, for example in the range of approximately 200 °, may prove to be expedient for the working chamber 81 and the walls delimiting it. The associated temperature load for the table 1 and the drives located in the table 1 can be significantly reduced by the atmospheric delimitation of the table space 6, it being additionally expedient to design the transitions from the walls of the table to the drive parts provided therein that there is as little heat input as possible into the table space 6, for which purpose it may be expedient, for example, to provide the smallest possible contact surfaces with the drive parts or, in these contact zones, for example to provide ceramic seals or the parts of the drive which come into contact with heated surfaces, if possible, build up from poorly heat-conducting materials, such as ceramic.

With regard to a low heat input, it proves to be appropriate, for example in the area of the table base, which is in an atmospheric connection on the outside with the chamber 81 and thus possibly also heated, to realize a corresponding cooling, which in the exemplary embodiment is spiral, in the transition between the table base and shaft 12 comprises lying cooling channels 88, via which cooling medium supplied via the annular gap 89 between shaft 10 and shaft 12, in particular cooling gas to the atmosphere or the surrounding area and one Cooler is returned. 14 and 18 illustrate the corresponding flow profile in particular.

The table space 6 in the area of the passage of the shafts 10 and 12 is sealed against this surrounding area 90, for example against the atmosphere, this sealing in the area of the shaft passages through the table base preferably being made via shaft sealing rings 91, with each shaft passage according to the invention in the direction two shaft sealing rings 92 and 93 are assigned to the shaft extension at a distance from one another, which can be connected to a coolant circuit, in particular the aforementioned cooling circuit, with regard to their interior space between the legs, the central shaft 10 carrying the rail guide 8 being designed according to the invention as a hollow shaft can, which can also be used for the transport of coolant.

When the shaft 10 is designed as a hollow shaft, it is also expedient according to the invention to assign the power supply to the rail guide 8 of the shaft 10, if necessary to use the shaft 10 itself as a conductor at least over part of its length, and the connection to the supply line 25 (FIG. 2) , which is assigned to the rail guide 8, to be assigned to a plug-like upper end of the hollow shaft 10.

The lifting mobility of the work table 1, and thus also of the working device 3, which is designed as a carriage or slide, with the support 35 also offers the possibility of assigning a carousel in the chamber 81 above the table 1, in a known manner Carrier disc-shaped substrates or the like, which are removed by a combined lifting and translational movement of the support 35 from the carousel and forwarded accordingly, or are also stored in the carousel. Instead of the contact-free drive for the magnetic-based implement, which is preferred according to the invention and described in detail, it is also possible, with correspondingly thin-walled foils, to use 5 local deformations of the foil to act on supports which are assigned to the carriage-shaped or sledge-shaped implement and are directed against the foil, in order to move the implement relative to the film in the desired manner, the local deformations of the film being able to be generated as defined wave movements, for example via spherical counter-support elements.

Claims

claims

1. Work table (1) with a table top (4), a movable with respect to the table top (4), contact-free driven implement (3) and with a drive for the implement

(3) which has a drive part (7) which is arranged in a space (6) of the work table (1) which is atmospherically insulated from the surroundings of the work table (1) and which has a film-like cover (5) as the table top (4), which is a pressure-hard intermediate layer between mutually corresponding and opposite supports (72) of the implement (3) and the drive part (7).

2. Work table according to claim 1, so that the drive part (7) is designed as a carriage or carriage that can be moved parallel to the plane of the table top (4).

3. Work table according to claim 1 or 2, so that the drive part (7) is guided in a linearly displaceable manner.

4. Work table according to claim 2 or 3, so that the drive part (7) is rotatably guided in relation to an axis (9) perpendicular to the table top (4).

5. Working table according to claim 3 or 4, characterized in that a rail guide (8) is provided for the drive part (7) which can be rotated about an axis of rotation (9) perpendicular to the table top (4).

6. Work table according to one of the preceding claims, d a d u r c h g e k e n z e i c h n e t that the space delimited by the film-like cover (5)

(6) of the work table (1) is designed as a bowl-shaped annular chamber, in the edge region of which the film-like cover (5) is fastened.

7. Work table according to claim 6, so that the space (6) of the work table (1), which is designed as an annular chamber, has a rigid floor opposite the film-like cover (5).

8. Work table according to claim 7, so that the drive part (7) is assigned to the drive part (7) and in particular is designed as a rail guide (8)

(7) radially offset from its axis of rotation (9) has a carriage (21) supported against the floor of the room (6).

9. Work table according to claim 8, d a d u r c h g e k e n n z e i c h n e t that the drive (21) through the end to the rail guide

(8) lying rollers, in particular also vertically spaced apart from the rail guide (8), the axes extend in the longitudinal direction of the rail guide (8).

10. Work table according to one of the preceding claims, since you rchgek characterized in that between the rail guide (8) and the bottom of the space (6) of the rail guide (8) assigned to the linear displacement of the drive part (7) provided drive (64) ,

11. Work table according to claim 10, so that the drive (64) is formed by a linear drive, in particular an electric linear drive.

12. Work table according to claim 10, so that the drive (64) is formed by a belt drive.

13. Work table according to claim 12, so that the belt drive is designed as a belt drive (65) with a drive run (69) connected continuously to the drive part (7) over the length of the rail guide (8).

14. Work table according to claim 13, so that the belt drive as belt drive (65) has a drive strand (71) that is positively engaged with a central drive wheel (68).

15. Work table according to claim 14, so that the central drive wheel (68) is coaxial with the axis of rotation (9) of the rail guide.

16. Work table according to claim 14 or 15, so that the drive strand (71) is placed against a peripheral region of the drive wheel (68) via tensioning rollers (67) lying laterally to the drive wheel (68).

17. Working table according to claim 16, characterized in that the tensioning rollers (67) run the drive run (71) along the rail guide (8) over the peripheral zone of the drive wheel (68) remote from the drive run (69).

18. Work table according to one of claims 13 to 17, so that the belt drive (65) has a perforated belt which interacts with the drive wheel (68) designed as a sprocket.

19. Working table according to one of the preceding claims, that the drive shaft (12) for the drive wheel (68) of the belt drive (65) and the drive shaft (10) for the rotatable rail guide (8) lie coaxially.

20. Work table according to claim 19, so that the drive shaft (10) for the rotatable rail guide (8) carries the rotary bearing for the drive wheel (68).

21. Work table according to one of claims 18 to 20, so that the drive shaft (12) for the drive wheel (68) of the belt drive (65) encloses the drive shaft (10) for the rotatable rail guide (8).

22. Work table according to one of the preceding claims, that the contactless drive of the working device (3) by the drive part (7) is designed as a magnetic drive.

23. Work table according to claim 22, characterized in that the magnetic drive is designed as an electromagnetic drive.

24. Work table according to claim 22, so that the magnetic drive is designed as a permanent magnetic drive.

25. The work table according to claim 22, so that the magnetic drive is designed as a mixed electromagnetic and permanent magnetic drive.

26. Work table according to one of claims 22 to 25, characterized in that the magnets (36, 37) on the implement (3) and drive part (7) on the mutually facing and adjacent to the film-like cover (5) lying in opposite and opposite surfaces overlapping areas of the implement (3) and drive part (7) are arranged.

27. Work table according to claim 26, so that the magnets (36, 37) are arranged along the circumference of the implement (3) and / or drive part (7).

28. Work table according to claim 27, characterized in that the magnets (36, 37) are arranged in rows, in particular along straight edges of the implement (3) and / or drive part (7), on the implement (3) and / or drive part (7) are.

29. Work table according to claim 27 or 28, so that the tool (3) and drive part (7) have at least essentially a corresponding rectangular shape and carry the magnets (36, 37) along their edges.

30. Working table according to one of claims 22 to 29, characterized in that, based on the coupling position of the implement (3) and the drive part (7), magnets (36, 37) on the implement (3) and drive part (7) which correspond to one another and with their poles of the same name are opposite one another.

31. Work table according to one of claims 22 to 30, so that the successive magnets (36, 37) with their poles of the same name lie adjacent to one another on the working device (3) and drive part (7) in the circumferential direction.

32. Work table according to one of claims 22 to 31, that the magnets (36, 37) are formed by permanent magnets.

33. Work table according to one of claims 22 to 32, characterized in that based on the direction of displacement of the drive part (7) along the slide guide (8) and / or transversely to each other diametrically opposite in the region of the edges of the drive part (7) opposite each other at least in each case an electromagnet (38) is arranged.

34. Work table according to claim 33, so that the electromagnets (38) are assigned to the axes of an axis cross of the drive part (7), one axis of which extends in the longitudinal direction of the slide guide (8).

35. Work table according to claim 33 or 34, so that the electromagnets (38) each lie between permanent magnets (36) adjoining on both sides.

36. Working table according to one of the preceding claims, characterized in that an inductive power supply is provided between the drive part (7) and the implement (3).

37. Work table according to claim 36, so that the drive part (7) is provided with a transformer coil (primary coil 49).

38. Work table according to claim 37, so that the transformer coil (primary coil 49) is arranged in the center area of the drive part (7).

39. Work table according to one of the preceding claims, that the work device (3) is assigned at least one stop roller (63) on the circumferential side with an axis that is upright, in particular vertical, to the direction of displacement.

40. Work table according to claim 39, so that at angular, in particular rectangular contour of the working device (3) at least one edge of the same transverse stop rollers (63) associated with the direction of displacement are assigned to the angular, in particular rectangular, contour.

41. Working table according to one of the preceding claims, that the coupling position of the drive part (7) and the working device (3) is monitored by sensors.

42. Work table according to claim 41, so that the drive part (7) is assigned a sensor (61) aligned with a reference point on the working device (3).

43. work table according to claim 42, characterized in that the sensor (61) is designed as a Hall sensor.

44. Work table according to claim 42 or 43, so that the reference point is formed by a permanent magnet, in particular a round magnet (62).

45. Working table according to one of claims 41 to 44, so that the sensor (61) is arranged in relation to the direction of displacement of the drive part along the rail guide (8) in the region of the longitudinal center plane (28) lying in the longitudinal direction of the rail.

46. Work table according to one of the preceding claims, that the supports (72) between the drive part (7) and the implement (3) are formed by mutually opposite, rolling support elements (support balls 73, 74).

47. Work table according to claim 46, so that the rolling support elements are formed by support balls (73, 74).

48. Work table according to claim 46 or 47, so that the support elements, in particular support balls (73, 74), are assigned to the drive part (7) in the periphery thereof.

49. Working table according to one of claims 46 to 48, so that the supporting elements, in particular supporting balls (73, 74) on the working device (3) are assigned to the periphery thereof.

50. Working table according to one of claims 46 to 49, since you rchgek characterized that the angular contour, in particular rectangular contour of the drive part (7) and / or implement (3), the support elements, in particular support balls (73, 74) are provided in the corner region of the drive part (7) and / or implement (3).

51. Work table according to one of claims 46 to 50, so that the support balls (73, 74) provided as support elements are air-supported.

52. Work table according to claim 51, so that the support balls (73, 74) are mounted in a ball carpet (79, 80).

53. Work table according to one of claims 46 to 52, characterized in that the support elements, in particular support balls (73, 74) which are assigned to the drive part (7) and to the implement (3) on the one hand, with their support points in the same direction towards each other are arranged radially inside or radially outside to each other.

54. Work table according to one of the preceding claims, so that the film-like cover (5) is magnetically conductive transversely to its plane of extent.

55. Work table according to claim 54, so that the film-like cover (5) has a preferred magnetic guide direction transverse to its direction of extension.

56. Working table according to one of the preceding claims, characterized in that the film-like cover (5) is designed as a metallic film, in particular a stainless steel film.

57. Work table according to one of the preceding claims, characterized in that the drive shaft ^v (10) for the rail guide (8) is designed as a hollow shaft and receives the power supply for the drive part.