WO2002010831A3 - Differential interferometric scanning near-field confocal microscopy - Google Patents

Differential interferometric scanning near-field confocal microscopy Download PDF

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Publication number
WO2002010831A3
WO2002010831A3 PCT/US2001/041444 US0141444W WO0210831A3 WO 2002010831 A3 WO2002010831 A3 WO 2002010831A3 US 0141444 W US0141444 W US 0141444W WO 0210831 A3 WO0210831 A3 WO 0210831A3
Authority
WO
WIPO (PCT)
Prior art keywords
array
measurement
aperture
reference beam
return
Prior art date
Application number
PCT/US2001/041444
Other languages
French (fr)
Other versions
WO2002010831A2 (en
Inventor
Henry Allen Hill
Original Assignee
Zetetic Inst
Henry Allen Hill
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zetetic Inst, Henry Allen Hill filed Critical Zetetic Inst
Priority to AU2001281361A priority Critical patent/AU2001281361A1/en
Priority to EP01959844A priority patent/EP1303778A2/en
Priority to JP2002515501A priority patent/JP2004505313A/en
Priority to MX2013000002A priority patent/MX2013000002A/en
Publication of WO2002010831A2 publication Critical patent/WO2002010831A2/en
Publication of WO2002010831A3 publication Critical patent/WO2002010831A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
    • G11B7/005—Reproducing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1387—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector using the near-field effect
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0056—Optical details of the image generation based on optical coherence, e.g. phase-contrast arrangements, interference arrangements
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/2407—Tracks or pits; Shape, structure or physical properties thereof
    • G11B7/24085—Pits
    • G11B7/24088—Pits for storing more than two values, i.e. multi-valued recording for data or prepits

Abstract

An interferometric optical microscopy system for imaging an object, the system including: a measurement beam mask array having an array of aperture pairs positioned to receive radiation emitted from the object in response to a measurement beam, radiation emerging from the array of aperture pairs defining a measurement return beam; a reference beam source array positioned to receive a reference beam, the reference beam source array comprising an array of elements each configured to radiate a portion of the reference beam, the radiated reference beam portions defining a reference return beam; and imaging optics positioned to direct the measurement and reference return beams to the photo-detector and configured to produce overlapping conjugate images of the array of reference elements and the array of apertures pairs, wherein the conjugate image for each aperture pair overlaps with the conjugate image of a corresponding reference element, wherein the imaging optics include a pinhole array positioned in the conjugate image plane, the pinhole array having an array of pinholes each aligned with a corresponding aperture pair image, and wherein the measurement and reference beams are derived from a common source.
PCT/US2001/041444 2000-07-27 2001-07-27 Differential interferometric scanning near-field confocal microscopy WO2002010831A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
AU2001281361A AU2001281361A1 (en) 2000-07-27 2001-07-27 Differential interferometric scanning near-field confocal microscopy
EP01959844A EP1303778A2 (en) 2000-07-27 2001-07-27 Differential interferometric scanning near-field confocal microscopy
JP2002515501A JP2004505313A (en) 2000-07-27 2001-07-27 Differential interference scanning near-field confocal microscopy
MX2013000002A MX2013000002A (en) 2001-07-27 2001-07-27 Differential interferometric scanning near-field confocal microscopy.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US22129500P 2000-07-27 2000-07-27
US0/221,295 2000-07-27

Publications (2)

Publication Number Publication Date
WO2002010831A2 WO2002010831A2 (en) 2002-02-07
WO2002010831A3 true WO2002010831A3 (en) 2002-10-31

Family

ID=22827205

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/041444 WO2002010831A2 (en) 2000-07-27 2001-07-27 Differential interferometric scanning near-field confocal microscopy

Country Status (5)

Country Link
US (1) US6775009B2 (en)
EP (1) EP1303778A2 (en)
JP (1) JP2004505313A (en)
AU (1) AU2001281361A1 (en)
WO (1) WO2002010831A2 (en)

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CN109187719A (en) * 2018-11-13 2019-01-11 北京理工大学 Postposition is divided pupil confocal laser LIBS spectrum-mass spectrum micro imaging method and device
CN109270047A (en) * 2018-11-13 2019-01-25 北京理工大学 Femtosecond laser machined parameters confocal Raman spectra in-situ monitoring method and device

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CN109187719A (en) * 2018-11-13 2019-01-11 北京理工大学 Postposition is divided pupil confocal laser LIBS spectrum-mass spectrum micro imaging method and device
CN109270047A (en) * 2018-11-13 2019-01-25 北京理工大学 Femtosecond laser machined parameters confocal Raman spectra in-situ monitoring method and device

Also Published As

Publication number Publication date
US20020033953A1 (en) 2002-03-21
AU2001281361A1 (en) 2002-02-13
EP1303778A2 (en) 2003-04-23
US6775009B2 (en) 2004-08-10
WO2002010831A2 (en) 2002-02-07
JP2004505313A (en) 2004-02-19

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