WO2002006152B1 - System and method for constraining totally released microcomponents - Google Patents

System and method for constraining totally released microcomponents

Info

Publication number
WO2002006152B1
WO2002006152B1 PCT/US2001/021899 US0121899W WO0206152B1 WO 2002006152 B1 WO2002006152 B1 WO 2002006152B1 US 0121899 W US0121899 W US 0121899W WO 0206152 B1 WO0206152 B1 WO 0206152B1
Authority
WO
WIPO (PCT)
Prior art keywords
microcomponent
constraining
base
released
substrate
Prior art date
Application number
PCT/US2001/021899
Other languages
French (fr)
Other versions
WO2002006152A3 (en
WO2002006152A2 (en
Inventor
Matthew D Ellis
Eric G Parker
George D Skidmore
Original Assignee
Zyvex Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zyvex Corp filed Critical Zyvex Corp
Priority to KR10-2003-7000550A priority Critical patent/KR100539137B1/en
Priority to AU2001271984A priority patent/AU2001271984A1/en
Priority to DE60124423T priority patent/DE60124423T2/en
Priority to JP2002512060A priority patent/JP2004504172A/en
Priority to EP01951048A priority patent/EP1345843B1/en
Publication of WO2002006152A2 publication Critical patent/WO2002006152A2/en
Publication of WO2002006152A3 publication Critical patent/WO2002006152A3/en
Publication of WO2002006152B1 publication Critical patent/WO2002006152B1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/053—Translation according to an axis perpendicular to the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/055—Translation in a plane parallel to the substrate, i.e. enabling movement along any direction in the plane

Abstract

A system and method are disclosed which constrain a microcomponent that is totally released from a substrate for handling of such totally released microcomponent. A preferred embodiment provides constraining members that work to constrain a microcomponent to a substrate as such microcomponent is totally released from such substrate. Accordingly, such constraining members may aid in preserving the microcomponent with its substrate during the release of such microcomponent from its substrate during fabrication. Additionally, a preferred embodiment provides constraining members that are suitable for constraining a totally released microcomponent to a base for post-fabrication handling of the microcomponent. To further aid in post-fabrication handling of totally released microcomponents, a preferred embodiment may be implemented as a 'pallet' having one or more microcomponents constrained thereto. Moreover, constraining members of a preferred embodiment enable the totally released microcomponent to be removed from such constraints when desired, but prevents the totally released microcomponent from inadvertently escaping such constraints.

Claims

36
AMENDED CLAIMS
[received by the International Bureau on 26 February 2002 (26.02.02); original claims 41 and 49 amended; original claim 48 cancelled; remaining claims unchanged (2 pages)]
41. A system comprising: at least one microcomponent that is released from a substrate; and means for constraining said microcomponent to abase, wherein said constraining means is moveable.
42. The system of claim 41 wherein said means for constraining includes at least one vertical constraining means arranged to restrict vertical movement of said at least one microcomponent relative to said base.
43. The system of claim 41 wherein said means for constraining includes at least one horizontal constraining means arranged to restrict lateral movement of said at least one microcomponent relative to said base.
44. The system of claim 43 wherein said at least one horizontal constraining means restricts lateral translational movement of said at least one microcomponent relative to said base.
45. The system of claim 43 wherein said at least one horizontal constraining means restricts lateral rotational movement of said at least one microcomponent relative to said base.
46. The system of claim 41 wherein said constraining means is arranged to constrain said at least one microcomponent during release of said at least one microcomponent from said substrate.
47. The system of claim 46 wherein said constraining means is arranged to constrain said at least one microcomponent during exposure of said at least one microcomponent to a releasing agent to totally release said microcomponent from said substrate.
48. Please delete claim 48 without prejudice. 37
49. The system of claim 41 wherein said constraining means can be moved to unconstrain said at least one totally released microcomponent from said base.
50. The system of claim 41 wherein said means for constraining is arranged to constrain said at least one released microcomponent to a predefined area.
51. The system of claim 41 wherein said base is a substrate.
52. The system of claim 41 wherein said base is another microcomponent.
53. The system of claim 41 wherein said base is a pallet.
54. The system of claim 41 wherein said means for constraining is arranged to permit an acceptable degree of movement of said at least one released microcomponent relative to said base.
55. The system of claim 54 wherein said means for constraining is arranged to permit said at least one released microcomponent to move approximately 1 μm vertically relative to said base.
56. The system of claim 54 wherein said means for constraining is arranged to permit said at least one released microcomponent to move approximately 1 μ laterally relative to said base.
PCT/US2001/021899 2000-07-14 2001-07-12 System and method for constraining totally released microcomponents WO2002006152A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR10-2003-7000550A KR100539137B1 (en) 2000-07-14 2001-07-12 System and method for constraining totally released microcomponents
AU2001271984A AU2001271984A1 (en) 2000-07-14 2001-07-12 System and method for constraining totally released microcomponents
DE60124423T DE60124423T2 (en) 2000-07-14 2001-07-12 DEVICE AND METHOD FOR FIXING FULLY EXTENDED MICROBUILTS
JP2002512060A JP2004504172A (en) 2000-07-14 2001-07-12 System and method for restraining completely separated microcomponents
EP01951048A EP1345843B1 (en) 2000-07-14 2001-07-12 System and method for constraining totally released microcomponents

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/616,500 2000-07-14
US09/616,500 US6677225B1 (en) 2000-07-14 2000-07-14 System and method for constraining totally released microcomponents

Publications (3)

Publication Number Publication Date
WO2002006152A2 WO2002006152A2 (en) 2002-01-24
WO2002006152A3 WO2002006152A3 (en) 2002-07-11
WO2002006152B1 true WO2002006152B1 (en) 2002-08-08

Family

ID=24469729

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/021899 WO2002006152A2 (en) 2000-07-14 2001-07-12 System and method for constraining totally released microcomponents

Country Status (8)

Country Link
US (1) US6677225B1 (en)
EP (1) EP1345843B1 (en)
JP (1) JP2004504172A (en)
KR (1) KR100539137B1 (en)
CN (1) CN1241826C (en)
AT (1) ATE344784T1 (en)
DE (1) DE60124423T2 (en)
WO (1) WO2002006152A2 (en)

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US9024417B2 (en) 2007-03-20 2015-05-05 Nuvotronics, Llc Integrated electronic components and methods of formation thereof
US9306255B1 (en) 2013-03-15 2016-04-05 Nuvotronics, Inc. Microstructure including microstructural waveguide elements and/or IC chips that are mechanically interconnected to each other
US9306254B1 (en) 2013-03-15 2016-04-05 Nuvotronics, Inc. Substrate-free mechanical interconnection of electronic sub-systems using a spring configuration
US9312589B2 (en) 2003-03-04 2016-04-12 Nuvotronics, Inc. Coaxial waveguide microstructure having center and outer conductors configured in a rectangular cross-section
US9325044B2 (en) 2013-01-26 2016-04-26 Nuvotronics, Inc. Multi-layer digital elliptic filter and method

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US9312589B2 (en) 2003-03-04 2016-04-12 Nuvotronics, Inc. Coaxial waveguide microstructure having center and outer conductors configured in a rectangular cross-section
US9000863B2 (en) 2007-03-20 2015-04-07 Nuvotronics, Llc. Coaxial transmission line microstructure with a portion of increased transverse dimension and method of formation thereof
US9024417B2 (en) 2007-03-20 2015-05-05 Nuvotronics, Llc Integrated electronic components and methods of formation thereof
US8866300B1 (en) 2011-06-05 2014-10-21 Nuvotronics, Llc Devices and methods for solder flow control in three-dimensional microstructures
US9325044B2 (en) 2013-01-26 2016-04-26 Nuvotronics, Inc. Multi-layer digital elliptic filter and method
US9306255B1 (en) 2013-03-15 2016-04-05 Nuvotronics, Inc. Microstructure including microstructural waveguide elements and/or IC chips that are mechanically interconnected to each other
US9306254B1 (en) 2013-03-15 2016-04-05 Nuvotronics, Inc. Substrate-free mechanical interconnection of electronic sub-systems using a spring configuration

Also Published As

Publication number Publication date
DE60124423T2 (en) 2007-10-04
EP1345843A2 (en) 2003-09-24
KR20030067657A (en) 2003-08-14
ATE344784T1 (en) 2006-11-15
WO2002006152A3 (en) 2002-07-11
KR100539137B1 (en) 2005-12-26
JP2004504172A (en) 2004-02-12
EP1345843B1 (en) 2006-11-08
DE60124423D1 (en) 2006-12-21
CN1241826C (en) 2006-02-15
WO2002006152A2 (en) 2002-01-24
CN1441749A (en) 2003-09-10
US6677225B1 (en) 2004-01-13

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