WO2002000325A3 - Filter sheet and process for purifying photoresist composition employing the filter sheet - Google Patents

Filter sheet and process for purifying photoresist composition employing the filter sheet Download PDF

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Publication number
WO2002000325A3
WO2002000325A3 PCT/US2001/041007 US0141007W WO0200325A3 WO 2002000325 A3 WO2002000325 A3 WO 2002000325A3 US 0141007 W US0141007 W US 0141007W WO 0200325 A3 WO0200325 A3 WO 0200325A3
Authority
WO
WIPO (PCT)
Prior art keywords
filter sheet
purifying
photoresist composition
particulate
composition employing
Prior art date
Application number
PCT/US2001/041007
Other languages
French (fr)
Other versions
WO2002000325A2 (en
Inventor
Kenneth C Hou
Eugene A Ostreicher
Richard D Sale
Original Assignee
Cuno Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cuno Inc filed Critical Cuno Inc
Priority to AU2001270324A priority Critical patent/AU2001270324A1/en
Publication of WO2002000325A2 publication Critical patent/WO2002000325A2/en
Publication of WO2002000325A3 publication Critical patent/WO2002000325A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/28—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties
    • B01J20/28014—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties characterised by their form
    • B01J20/28033—Membrane, sheet, cloth, pad, lamellar or mat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/28—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties
    • B01J20/28014—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties characterised by their form
    • B01J20/28028—Particles immobilised within fibres or filaments
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/28—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties
    • B01J20/28014—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties characterised by their form
    • B01J20/2803—Sorbents comprising a binder, e.g. for forming aggregated, agglomerated or granulated products
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J39/00—Cation exchange; Use of material as cation exchangers; Treatment of material for improving the cation exchange properties
    • B01J39/08—Use of material as cation exchangers; Treatment of material for improving the cation exchange properties
    • B01J39/16—Organic material
    • B01J39/18—Macromolecular compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J47/00—Ion-exchange processes in general; Apparatus therefor
    • B01J47/018—Granulation; Incorporation of ion-exchangers in a matrix; Mixing with inert materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J47/00—Ion-exchange processes in general; Apparatus therefor
    • B01J47/12—Ion-exchange processes in general; Apparatus therefor characterised by the use of ion-exchange material in the form of ribbons, filaments, fibres or sheets, e.g. membranes
    • B01J47/133—Precoat filters

Abstract

A filter sheet is provided which comprises a self-supporting fibrous matrix having immobilized therein particulate filter aid and particulate ion exchange resin, wherein said particulate filter aid and particulate ion exchange resin are distributed substantially uniformly throughout a cross-section of said matrix. A process for removing inonic impurities from a photoresist solution is also provided which comprises passing the photoresist solution through said filter sheet to remove ionic impurities therefrom.
PCT/US2001/041007 2000-06-26 2001-06-15 Filter sheet and process for purifying photoresist composition employing the filter sheet WO2002000325A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001270324A AU2001270324A1 (en) 2000-06-26 2001-06-15 Filter sheet and process for purifying photoresist composition employing the filter sheet

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/603,596 US6576139B1 (en) 1996-07-30 2000-06-26 Process for purifying photoresist composition employing a filter sheet
US09/603,596 2000-06-26

Publications (2)

Publication Number Publication Date
WO2002000325A2 WO2002000325A2 (en) 2002-01-03
WO2002000325A3 true WO2002000325A3 (en) 2002-06-20

Family

ID=24416116

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/041007 WO2002000325A2 (en) 2000-06-26 2001-06-15 Filter sheet and process for purifying photoresist composition employing the filter sheet

Country Status (3)

Country Link
US (2) US6576139B1 (en)
AU (1) AU2001270324A1 (en)
WO (1) WO2002000325A2 (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10345362A1 (en) * 2003-09-25 2005-04-28 Kodak Polychrome Graphics Gmbh Method for preventing coating defects
US20060102554A1 (en) * 2004-11-12 2006-05-18 Munirathna Padmanaban Process for producing film forming resins for photoresist compositions
US20060131240A1 (en) * 2004-12-16 2006-06-22 Romano Andrew R Process for treating solvents
US20060191854A1 (en) * 2005-02-27 2006-08-31 Rohm And Haas Electronic Materials Llc Filtration systems and methods
JP4861767B2 (en) 2005-07-26 2012-01-25 富士フイルム株式会社 Positive resist composition and pattern forming method using the same
US7560142B1 (en) * 2005-09-08 2009-07-14 Graver Technologies Llc Fibers with bound metal oxides and method thereof
US20070248913A1 (en) * 2006-04-24 2007-10-25 Rahman M Dalil Process for producing film forming resins for photoresist compositions
US20130068693A1 (en) * 2010-06-08 2013-03-21 3M Innovative Properties Company Solid phase extraction media
CN101869826B (en) * 2010-06-13 2012-11-14 北京欧凯纳斯科技有限公司 High-polymer compound chelated with heavy metal elements as well as preparation method and application thereof
TWI434725B (en) * 2011-03-08 2014-04-21 Asia Union Electronical Chemical Corp Method for purifying fluoride etching solution by using hydroxide compound and ion exchange resin absorption
KR20140014217A (en) 2011-03-10 2014-02-05 쓰리엠 이노베이티브 프로퍼티즈 컴파니 Filtration media
DK3027562T3 (en) * 2013-08-02 2018-06-25 Regenesis Bioremediation Products COLLOIDAL AGENTS FOR GROUNDWATER STORAGE CLEANING
US10512957B2 (en) 2013-08-02 2019-12-24 Regenesis Bioremediation Products Colloidal agents for aquifer and metals remediation
JP2017119234A (en) * 2015-12-28 2017-07-06 ダウ グローバル テクノロジーズ エルエルシー Process for refining hydrophilic organic solvent
KR101707443B1 (en) * 2016-05-26 2017-02-16 충남대학교산학협력단 Composite fiber filter for degasing and elemination of dilute hamful gas
US10478876B2 (en) 2016-06-13 2019-11-19 Regenesis Bioremediation Products Method of increasing hydrophobicity of native water-bearing zones
WO2018209136A1 (en) 2017-05-10 2018-11-15 Regenesis Bioremediation Products Metal-based membranes for vapor intrusion mitigation
US11820897B2 (en) 2017-05-12 2023-11-21 Regenesis Bioremediation Products Vapor mitigation barriers
US11253895B2 (en) 2018-01-03 2022-02-22 Regenesis Bioremediation Products Methods for remediating contaminated soil and groundwater using solid-phase organic materials
EP3749666A1 (en) 2018-02-08 2020-12-16 Yissum Research Development Company of the Hebrew University of Jerusalem Ltd. Heteroaryl compounds, pharmaceutical compositions thereof, and their therapeutic use
US11278943B2 (en) 2018-08-01 2022-03-22 Regenesis Bioremediation Products Compositions and methods for removing chlorinated hydrocarbons
JP2022535850A (en) 2019-06-03 2022-08-10 バイオセリックス， インコーポレイテッド Non-hygroscopic crystalline salts of pyrazole compounds, and pharmaceutical compositions and uses thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998004348A1 (en) * 1996-07-30 1998-02-05 Cuno Incorporated Filter sheet and process for purifying photoresist composition employing the filter sheet

Family Cites Families (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1044537A (en) 1973-05-09 1978-12-19 Amf Incorporated Filter medium and process
US4321288A (en) 1973-05-09 1982-03-23 Amf Incorporated Process of making an improved filter media
US4309247A (en) 1976-03-15 1982-01-05 Amf Incorporated Filter and method of making same
US4859340A (en) 1976-03-15 1989-08-22 Cuno, Incorporated Filter sheet
US4366068A (en) 1976-03-15 1982-12-28 Amf Incorporated Filter and method of making same
US4211563A (en) * 1978-02-13 1980-07-08 Rca Corporation Aqueous photoresist of casein and N-methylol acrylamide
US4187120A (en) * 1978-05-30 1980-02-05 Ecodyne Corporation Method for purification of polyhydric alcohols
US4193876A (en) 1978-09-27 1980-03-18 Amf Incorporated Means for suppressing edge leakage in filter presses
CA1148872A (en) 1979-04-06 1983-06-28 Eugene A. Ostreicher Filter with inorganic cationic colloidal silica
US4256509A (en) * 1979-05-14 1981-03-17 A. E. Staley Manufacturing Company Physical modification of the viscosity characteristics of starchy flours
US4617128A (en) 1979-09-10 1986-10-14 Amf Inc. Particulate filter aid, filter bed and process
US4645567A (en) 1980-02-04 1987-02-24 Cuno, Inc. Filter media and method of making same
US4288462A (en) 1980-02-04 1981-09-08 Amf Incorporated Method for removing cationic contaminants from beverages
US4299910A (en) * 1980-11-24 1981-11-10 Rca Corporation Water-based photoresists using stilbene compounds as crosslinking agents
US4347208A (en) 1981-04-13 1982-08-31 Amf Incorporated Method of making filter cell having sealed periphery
US4361486A (en) 1981-04-28 1982-11-30 Amf Incorporated Filter media, method for oxidizing and removing soluble iron, method for removing and inactivating microorganisms, and particulate filter aid
US4488969A (en) 1982-02-09 1984-12-18 Amf Incorporated Fibrous media containing millimicron-sized particulates
US4511473A (en) 1982-02-09 1985-04-16 Amf Incorporated Fibrous media containing millimicron-sized particulates
US4596660A (en) 1982-07-23 1986-06-24 Amf Inc. Fibrous media containing millimicron-sized particulates
US4578150A (en) 1982-07-23 1986-03-25 Amf Inc. Fibrous media containing millimicron-sized particulates
US4915839A (en) 1984-03-15 1990-04-10 Cuno, Incorporated Process for surface modifying a microporous membrane
US4606824A (en) 1984-10-26 1986-08-19 Chaokang Chu Modified cellulose separation matrix
US4607188A (en) * 1985-04-03 1986-08-19 North American Philips Consumer Electronics Corp. Monochrome cathode ray tube for use as a color reference
US4783262A (en) 1987-03-30 1988-11-08 Cuno Incorporated Separator for cell type filter element
US5055192A (en) 1988-02-03 1991-10-08 Cuno Incorporated Cell-type filter cartridge retaining ring
US4881313A (en) 1988-02-03 1989-11-21 Cuno, Incorporated Method of forming a cell filter with an exposed surface
US5085780A (en) 1989-04-07 1992-02-04 Cuno, Incorporated Use of cationic charge modified filter media
US5085784A (en) 1989-04-07 1992-02-04 Cuno, Incorporated Use of cationic charge modified filter media
US5045210A (en) 1989-04-11 1991-09-03 Cuno, Incorporated Heavy metal removal process
US5173469A (en) * 1989-11-09 1992-12-22 Huels Aktiengesellschaft Silver catalyst suitable for oxidation of ethylene and process for the production of the catalyst
US5446125A (en) 1991-04-01 1995-08-29 Ocg Microelectronic Materials, Inc. Method for removing metal impurities from resist components
US5378802A (en) 1991-09-03 1995-01-03 Ocg Microelectronic Materials, Inc. Method for removing impurities from resist components and novolak resins
US5328758A (en) 1991-10-11 1994-07-12 Minnesota Mining And Manufacturing Company Particle-loaded nonwoven fibrous article for separations and purifications
JPH0768297B2 (en) 1991-11-28 1995-07-26 丸善石油化学株式会社 Method for purifying vinylphenol polymer for photoresist
JPH0768296B2 (en) 1991-11-28 1995-07-26 丸善石油化学株式会社 Method for removing metal from vinylphenol polymer
US5192446A (en) 1992-01-24 1993-03-09 The Graver Company Cation exchange resins having an enhanced capacity for iron oxides
US5362417A (en) 1992-07-09 1994-11-08 Xerox Corporation Method of preparing a stable colloid of submicron particles
US5346624A (en) 1993-01-11 1994-09-13 The Graver Company Method and apparatus for treatment of aqueous solutions
US5376278A (en) 1993-07-01 1994-12-27 The Graver Company Filter and a method for separating charged particles from a liquid stream
US5571657A (en) * 1993-09-30 1996-11-05 Shipley Company, Inc. Modified cation exhange process
US5350714A (en) 1993-11-08 1994-09-27 Shipley Company Inc. Point-of-use purification
US5525315A (en) 1993-12-07 1996-06-11 Shipley Company, L.L.C. Process for removing heavy metal ions with a chelating cation exchange resin
TW353158B (en) * 1994-03-09 1999-02-21 Nat Starch Chem Invest Aqueous photoresist composition, method for preparing the same and circuit board comprising thereof
US5500127A (en) 1994-03-14 1996-03-19 Rohm And Haas Company Purification process
US5521052A (en) 1994-12-30 1996-05-28 Hoechst Celanese Corporation Metal ion reduction in novolak resin using an ion exchange catalyst in a polar solvent and photoresists compositions therefrom
US5962183A (en) * 1995-11-27 1999-10-05 Clariant Finance (Bvi) Limited Metal ion reduction in photoresist compositions by chelating ion exchange resin
US5928477A (en) * 1998-01-07 1999-07-27 Inland Technologies Inc. Method and apparatus for removing water from an aqueous fluid mixture

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998004348A1 (en) * 1996-07-30 1998-02-05 Cuno Incorporated Filter sheet and process for purifying photoresist composition employing the filter sheet

Also Published As

Publication number Publication date
AU2001270324A1 (en) 2002-01-08
US20030047507A1 (en) 2003-03-13
WO2002000325A2 (en) 2002-01-03
US6733677B2 (en) 2004-05-11
US6576139B1 (en) 2003-06-10

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